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DOCUMENT TITLE
REVISION HISTORY
1.0 Purpose
The purpose of the acid super cleaning process is to clean metallic as well as organic contamination off the
wafer surface to meet the stringent cleanliness specification of CMOS and LED applications.
2.0 Safety
2.1 H2SO4 H2O2 and HCL are all very toxic and corrosive chemicals. Any direct skin or eye exposure
must be avoided.
2.2 These acids will burn the skin and eye tissues.
2.3 Always wear Personal Protective devices - safety goggles, respiratory mask, apron and long sleeve
chemical safety gloves when preparing the solutions.
2.4 Report any accidents to your supervisor, immediately!
2.5 If exposed to any of the chemicals used in the cleaning process, rinse the contaminated area with cold
water for a minimum of 15 minutes.
2.6 In the event of exposure, call immediately for help, and if required, seek immediate medical attention.
3.2.3 Tank cleaning will be done manually by Operator/Tech by fill in DIW and
circulate the DIW for 10 min before drain the DIW out
4.6 Perform 3.2.2 to drain out all DI water before any filter or pump changed.
4.7 After filter changed, perform 2X DI flushing by repeating items 4.3 – 4.5
before new chemical preparation.
1 2 3 4 5 6 7 8 9 10 11 12 13 14
How pH is Measured
Wait a minute or two after you add an acid or a base to a solution. This will allow the reaction (ions being either
donated [acid] or accepted [base]) to complete before you measure.
Swirl or mix a solution well before measuring. This will help ensure that the solution is uniform.
Make sure to only use paper/sticks that have not been previously wetted.
Wait for the color to stop changing (1-2 minutes maximum) before matching the paper/stick to the color key. Do
not wait more than 5 minutes after the color has stabilized or it may start to fade and affect the accuracy of your
reading.
Figure 1. pH indicator sticks are dipped into a solution then matched against a color key to determine the solution's
approximate pH
Attachment 2.0 :
WET BENCH PH CHECK FORM
CHECK BY : DATE :
VERIFYED BY : DATE :
Note :- If the PH reading is out of spec please inform to line Supervisor and change back the chemical. If the DIW PH is out
of spec drain the DIW and top-up new DIW.
Attachment 3.0 :
WD4 - MACHINE CLEANING AND CHEMICAL CHANGE Check List
DATE SHIFT TIME DOWN TIME START UP
DRAIN CHEMICAL AND DID MACHINE CLEANING
1 Make sure all wafer completed unload.
Select to manual mode
2 Off heater power for tank # 1, # 3 and #5.
3 Drain HCL & H202 Chemical ( tank #1)
Flushing inside tank with DI Water ( Open valve )
Close drain valve and do manual cleaning ( 3 cycle )
4 Drain H2SO4 & H2O2 Chemical ( Tank # 3 )
Flushing inside tank with DI Water ( Open valve )
Close drain valve and do manual cleaning ( 3 cycle )
5 Clean loader side & unloaded side
Wipe or vacuum any dust or rubbish at loader / unloaded area.
6 Cleaning all machine cover and robot movement side
Top up New Chemical in tank # 1,3
* ex : Please use PPE completely during handling / make up chemical.
1 Fill up half level DI Water inside tank.
Top up H2O2 & HCL by manually in tank # 1( H2O2 - 3 litres & HCL 6 Litres and DIW 46 litres
Fill up Di Water until over flow level. Make Sure overflowing and proper circulation.
2 Top up H2O2 & H2SO4 Chemical ( tank # 3)
Top up H2O2 & H2SO4 by manually in tank # 1 ( H2O2 - 5 Litres & H2SO4 - 50 Litres )
Didn't fill up Di Water inside tank. Make sure proper circulation.
3 Drain DI Water - QDR tank ( tank # 2,4 )
Do manual cleaning - clear any dust or rubbish inside tank.
Fill up DI Water until over flow level. ( After cleaning or wipe machine tank cover )
Check Machine condition before start up machine
1 Check robot functionality and do homing before start running
2 On Heater tank # 1 and #3
3 On and check circulate pump functionality tank # 1, #3 & #5
Monitor heater temperature tank # 1 to reach 80 °C ± 5 °C respectively and 125 °C ±
4 5°C for tank 3
DATE /
DETAILS SETTING / CONDITION 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31
SHIFT
DAY
Time :
NIGHT
Process Beaker DAY
1 No Abnormality
Condition / Content NIGHT
No Abnormality (sounds, DAY
2 Pump Condition
leak..etc); Functionality NIGHT
DAY
a: Tank #1,#3 recycle pump
NIGHT
Tank #2, #4, QDR DI suply DAY
b:
pump NIGHT
No Abnormality DAY
3 Robotic Arm
(jerking…etc); Functionaly NIGHT
DAY
4 Exhaust Functionaly
NIGHT
Tank #5 DAY
5 Ultrasonic
( Ultrasonic 6 ~ 7 A ) NIGHT
6 Recipe Setting
DAY
Tank #1, #3, #5 600s
Process
time :
NIGHT
a:
30s ( shower)/ DAY
Tank #2, #4, #6
60s ( bubble) NIGHT
R-Plane = 80 ± 5˚C DAY
Temperature :
NIGHT
DAY
Tank #1 3.0 ltrs
NIGHT
DAY
c: Tank #1 46.0 ltrs,
NIGHT
DAY
Tank #3 H2SO4 50.0 ltrs
NIGHT
DAY
Tank #3 H2O2 5.0 ltrs
NIGHT
No Abnormality: (leak, DAY
7 Overall Machine Area
smell,vibration, sound ) NIGHT
DAY
Check By ( Operator ID # )
NIGHT
DAY
Acknowledged By ( Supervisor ID # )
NIGHT
1 7 13 19 25 31
Any mc issue
2 8 14 20 26
/ Remarks
3 9 15 21 27 3 8
4 10 16 22 28 4 9
5 11 17 23 29
6 12 18 24 30
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
E/
1 1 1 1 1 1 1 2 2 2 2 3 3
DETAILS SETTING / CONDITION 1 2 3 4 5 6 7 8 9 10 11 17 24 25 26 27 28 29
SHI 2 3 4 5 6 8 9 0 1 2 3 0 1
FT
a: Phase 1: Rinse DAY
1 Spin Dryer NIG
Time /Speed : 40s/600rpm HT
TOP Phase 2: Dry 1 DAY
b: NIG
Time /Speed : 360s/2400rpm HT
Phase 3: Dry 2 DAY
c: NIG
Time /Speed : 80s/1000rpm HT
Phase 1: Rinse DAY
a: NIG
BOT Time /Speed : 40s/600rpm HT
Phase 2: Dry 1 DAY
b: NIG
Time /Speed : 360s/2400rpm HT
Phase 3: Dry 2 DAY
c: NIG
Time /Speed : 80s/1000rpm HT
a: Ok or Not DAY
2 N2 Supply NIG
HT
a: Ok or Not DAY
3 DIW supply NIG
HT
a: no any abnormality: DAY
4 overall machine area NIG
( Leak,Smell, Vibration,sound ) HT
DAY
Time : NIG
HT
DAY
Check By ( Operator ID # ) NIG
HT
DAY
Acknowledged By ( Supervisor ID # ) NIG
HT
1 7 1 19 25 31
3
2 8 1 20 26
Any mc issue
4
/ Remarks
3 9 1 21 27
5
4 10 1 22 28
6
5 11 1 23 29
7
6 12 1 24 30
8
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items
Attachment 6.0 :
DISPLAY : Method of Chemical Carboys Handling and Storage
X
Chemical carboy should be faced-upwards at storage or when transfering on trolley
√
X
No stacking of chemical carboy at storage area
√
Opening the
machine doors
will affect
efficiency of the
machine exhaust
system
X
Chemical supply cabinet and all cleaning machine doors must be always closed properly
√
Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 3 Page 17
Attachment 7.0 :
DISPLAY :Method of Chemical Carboys Handling and Storage
Trolley Pass-Door
√
Chemical Carboy must be transported on trolley and send into
clean-room through trolley pass-door
Work Instruction
WD4 ACID SUPER CLEANING
Document number : RST WI POL-031 Rev : 7 Page 18
Attachment 8.0 :
DISPLAY: PERSONAL PROTECTIVE EQUIPMENT
a) When handling any chemical directly (during chemical supply change at supply cabinet; weekly
machine stages cleaning, chemical process beaker checking during operation/machine failure, filter
changed…etc) Respirator Mask; Acid-proof gloves, Apron
Long sleeve acid-proof Use Sperian 100800 NIOSH 3M 6004 NIOSH Cartridge
gloves, apron, respirator mask Cartridge when handling only for handling NH4OH
chemicals in CR10K chemical in CR10K
b) When entering CR10K, during cleaning operation Safety goggle, nitrile gloves
or
c) Make sure PPE are always in good condition. Inform area supervisor to replace any damaged PPE.
Instruction On Preparation of Acid Hydrochloric (HCL) and Hydrogen Peroxide (H2O2) at WD4 (Manual
Preparation)
Instruction On Preparation of Acid Sulfuric (H2SO4) and Hydrogen Peroxide (H2O2) at WD4 (Manual Preparation)