Work Instruction

WD1 HCL CLEANING

Document number : RST WI POL-024 Rev : 4 Page 1

Confidential – For Internal Use Only

*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
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 Work Instruction
WD1 HCL CLEANING
Document number : RST WI POL-024 Rev : 4 Page 2
ATTACHMENT 2.0 - Spin Dryer Machine Shiftily
Month : …………………Year :………. ………
Check List
ITEM

DATE /
DETAILS SETTING / CONDITION 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
SHIFT

a: Phase 1: Rinse DAY

1 Spin Dryer
Time /Speed : 40s/600rpm NIGHT

Phase 2: Dry 1 DAY

b:
Time /Speed : 360s/2400rpm NIGHT

Phase 3: Dry 2 DAY

c:
Time /Speed : 80s/1100rpm NIGHT

Phase 1: Rinse DAY

d:
Time /Speed : 40s/600rpm NIGHT

Phase 2: Dry 1 DAY

e:
Time /Speed : 360s/2400rpm NIGHT

Phase 3: Dry 2 DAY

f:
Time /Speed : 80s/1100rpm NIGHT
a: Ok or Not DAY
2 N2 Supply
NIGHT
a: Ok or Not DAY
3 DIW supply
NIGHT
a: no any abnormality: DAY
4 overall machine area
( Leak,Smell, Vibration,sound ) NIGHT

DAY
Time :
NIGHT

DAY
Check By ( Operator ID # )
NIGHT

DAY
Acknowledged By ( Supervisor ID # )
NIGHT
1 7 13

2 8 14
Any mc issue
/ Remarks

3 9 15

4 10

5 11

6 12

NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

Confidential – For Internal Use Only

*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp
 Work Instruction
WD1 HCL CLEANING
Document number : RST WI POL-024 Rev : 4 Page 3
ATTACHMENT 2.0 - Spin Dryer Machine Shiftily Month : …………………Year :………. ………
Check List
ITEM

DATE /
DETAILS SETTING / CONDITION 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31
SHIFT

a: Phase 1: Rinse DAY

1 Spin Dryer
Time /Speed : 40s/600rpm NIGHT

Phase 2: Dry 1 DAY

b:
Time /Speed : 360s/2400rpm NIGHT

Phase 3: Dry 2 DAY

c:
Time /Speed : 80s/1100rpm NIGHT

Phase 1: Rinse DAY

d:
Time /Speed : 40s/600rpm NIGHT

Phase 2: Dry 1 DAY

e:
Time /Speed : 360s/2400rpm NIGHT

Phase 3: Dry 2 DAY

f:
Time /Speed : 80s/1100rpm NIGHT
a: Ok or Not DAY
2 N2 Supply
NIGHT
a: Ok or Not DAY
3 DIW supply
NIGHT
a: no any abnormality: DAY
4 overall machine area
( Leak,Smell, Vibration,sound ) NIGHT

DAY
Time :
NIGHT

DAY
Check By ( Operator ID # )
NIGHT

DAY
Acknowledged By ( Supervisor ID # )
NIGHT
16 22 28

17 23 29
Any mc issue
/ Remarks

18 24 30

19 25 31

20 26

21 27

NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

Confidential – For Internal Use Only

*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp
 Work Instruction
WD1 HCL CLEANING
Document number : RST WI POL-024 Rev : 4 Page 4

Confidential – For Internal Use Only

*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp
 Work Instruction
WD1 HCL CLEANING
Document number : RST WI POL-024 Rev : 4 Page 5

Confidential – For Internal Use Only

*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp
 Work Instruction
WD1 HCL CLEANING
Document number : RST WI POL-024 Rev : 4 Page 6

ATTACHMENT 5.0 – WD1 Machine Check List

DATE
ITEM

DETAILS SETTING / CONDITION / 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

SHIFT
DAY
Time :
NIGHT
DAY
1 Process Beaker Condition / Content No Abnormality
NIGHT
No Abnormality ( sounds, leak..etc); DAY
2 Pump Condition
Functionality NIGHT
DAY
a: Tank #7, #9 recycle pump
NIGHT
DAY
c: Tank #4, #6, #8, #10 QDR DI suply pump
NIGHT
DAY
3 Robotic Arm No Abnormality( jerking…etc); Functionaly
NIGHT
DAY
4 Exhaust Functionaly
NIGHT
Tank #3 and #5 ( DAY
5 Ultrasonic
Ultrasonic 2.5 ~ 4 A ) NIGHT
6 Recipe Setting
Process time : DAY
a 1: 600.0s
Tank #3, #5, #7, #9 NIGHT
Process time : 20s ( shower)/160s DAY
a 2:
Tank #4, #6, #8, #10 ( bubble) NIGHT
Temperature : DAY
b: 40 °C ± 5 °c
Tank #7 #9 NIGHT
DAY
Tank #3 VALTRON / DI 20.0 ltrs / 80.0 ltrs
NIGHT
DAY
Tank #5 CLAIR / DI 5.0 ltrs / 95.0 ltrs
NIGHT
Chemical Mix By Liters

DAY
c: Tank #7 HCL / DI 5.0 ltrs / 55.0 ltrs
NIGHT
DAY
Tank #9 HCL / DI 5.0 ltrs / 55.0 ltrs
NIGHT
Tank #1, #2, #4, #6, #8, #10. DI DAY
Full Level ( DI )
WATER NIGHT
No Abnormality; (leak, smell,vibration,sound DAY
9 Overall Machine Area
) NIGHT
DAY
Check By ( Operator ID # )
NIGHT
DAY
Acknowledged By ( Supervisor ID # )
NIGHT
1 7 13
2 8 14
Any mc issue

3 9 15
/ Remarks

4 10
5 11
6 12
NOTE : Please inform supervisor immediately for any abnormality or out -of-spec items

Confidential – For Internal Use Only

*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp
 Work Instruction
WD1 HCL CLEANING
Document number : RST WI POL-024 Rev : 4 Page 7

Confidential – For Internal Use Only

*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp
 Work Instruction
WD1 HCL CLEANING
Document number : RST WI POL-024 Rev : 4 Page 8

Confidential – For Internal Use Only

*Notice: This document is considered “UNCONTROLLED” when it exists in any printed form without the
official document control stamp