Ultrasonic Motors Catalog

Ultrasonic Motors
for Fast and Precise Positioning
Latest Catalogs:
www.pi.ws
www.Ultrasonic-Motor.com
piezo nano positioning | w w w. p i . w s
Ultrasonic Motor Applications
Nanotechnology, Nanofabrication, Microscopy/Imaging

NanoAutomation® Fast sample positioning
Precision positioning of components XY-stages
(linear and rotation) Long range scanning
Precision actuation
Microgrippers Biotechnology, Life Science
Manipulators Microdosing
Dispensing
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice.
Semiconductor Technology Nano/microliter pumps

Long-range placement and positioning Fast positioning
Bio-handling
Medical Design, Medical Technology

Screening
Fast positioning
Cat120E Inspirations2009 08/10.18 / VOR /USM01-11
Cell penetration, microdosing

Handling
Non-magnetic actuators
www.ultrasonic-motor.com
Ultrasonic Motor Principle
PILine® Ultrasonic Piezomotors
PI Ultrasonic piezomotors are accelerations to 10 g and veloc-
based on a novel, patented ities to 500 mm/s.
ultrasonic drive developed by Ultrasonic motors cannot pro-
PI. At the heart of the system is vide the unlimited resolution of
a rectangular monolithic piezo- linear piezo actuators and flex-
ceramic plate (the stator), seg- ure-guided piezo positioning
mented on one side by two stages. These motors transfer
electrodes. Depending on the motion through friction, which
desired direction of motion, the is why their repeatability is lim-
left or right electrode of the ited to about 50 nm. Much
piezoceramic plate is excited to higher resolution and holding
produce high-frequency eigen- forces can be achieved with
mode oscillations at tens to PiezoWalk® piezomotors / dri-
hundreds of kilohertz. An alu- ves. Variety of PILine ® ultrasonic piezomotors,
mina friction tip (pusher) translation stages and motion controllers.
attached to the plate moves PILine® Levels of Integration
along an inclined linear path at PILine® ultrasonic drive prod-
the eigenmode frequency. ucts are offered in three differ-
Through its contact with the ent levels of integration. The
friction bar , it provides micro- drive electronics and controller
impulses that drive the moving can be chosen accordingly.
part of the mechanics (slider , P-661 and P-664 OEM motors
turntable, etc.) forward or back- require the greatest amount
wards. With each oscillatory of care at the customer’s site.
cycle, the mechanics executes Motor and friction bar – the
a step of a few nanometers; the length depends on the travel
macroscopic result is smooth range – have to be integrated
motion with a virtually unlimit- into a mechanical setup.

ed travel range. The driving Operation requires preload
force is taken from the energy of the motor against the fric-
PILine® levels of integration: OEM motor, RodDrive, linear positioning stage.
in the longitudinal oscillation tion bar , guiding and, if
component. The transverse necessary, the servo-loop.
component serves to increase / RodDrives can replace Linear positioning stages
decrease the pressure of the classical drive elements like represent the highest level of
friction tip against the friction rotary motor / leadscrew manufacturer integration.
bar. The transverse oscillation assemblies, or magnetic The piezomotor is integrated

energy determines the maxi- linear drives integrated into completely in a high-quality
mum frictional force and hence a micropositioner or hand- mechanical setup inlcuding
the holding and driving force of ling device. Integration if necessary the servo-loop
the motor . State-of-the-art requires guiding and – if with direct-metrology linear
ultrasonic motors can produce necessary – the servo-loop. encoders.
PILine® ultrasonic motors are based on a simple construc-

tion allowing for the design of low-cost drive units and extremely com-
pact, high-speed micro-positioning stages smaller than a matchbox.
Ultrasonic Motor Principle
Features and Advantages
of PILine ® Ultrasonic
Piezomotors
Compact Size: the direct-
drive principle allows the de-
sign of ultra-compact trans-
lation stages. The M-662, for
example, provides 20 mm
travel in a 28 x 28 x 8 mm
package.
Low inertia, high accelera-
tion, speed and resolution:
PILine® drives achieve veloci-
ties to 500 mm/s and accele-
rations to 10 g. They are also
very stiff, a prerequisite for
their fast step-and-settle
times – on the order of a few
Principle .design of a PILine ® ultrasonic piezomotor-driven translation stage.
milliseconds – and provide
resolution to 0.05 µm. The
lack of a leadscrew means
no lubricant flow or material steady-state heat dissipa-
relaxation to cause submi- tion.
cron creep. There is also no Vacuum Compatibility: Vacu-
rotational inertia to limit um compatible versions of
acceleration and decelera- PILine® drives are available.
tion. Negligible EMI: PILine ® dri-
Excellent Power -to-Weight ves do not create magnetic
Ratio: PILine® drives are opti- fields nor are they influenced
mized for high performance by them, a decisive advanta-
in a minimum package. No ge in many applications.
comparable drive can offer Custom Solutions / Flexibili-
the same combination of ty for OEMs: PILine ® drives
acceleration, speed and pre- are available in open-loop
cision. and closed-loop translation
Safe: The minimum inertia of stages and as OEM compo-
the moving platform toget- nents. PI develops and ma-
her with the “slip clutch” nufactures all piezo ceramic
effect of the friction drive components in-house. This

Settling behavior of a PILine ® M-663 linear stage, 100 µm step. A stable position to
within 0.1 µm can be reached in only 10 ms. provide better protection of gives us the flexibility to pro-
precision fixtures / devices vide custom motors (size,
than leadscrew-driven sta- force, environmental condi-
ges. Despite the high speeds tions) for OEM and research
and accelerations, there is a applications.
Custom high-force ultrasonic much lower risk of pinching Quality, Lifetime, Experien-
piezo motors can provide
fingers or other injuries than ce: Based on PI’s 30+ years of
forces to 50N.
with conventional drives. experience with piezo nano-
This means users may not positioning technology ,
need interlocks, light cur- PILine® drives offer exceptio-
tains or other measures to nal precision and reliability
keep them safe. with an MTBF of >20,000
Self-Locking Feature: PILine ® hours. Rotating components
drives create a braking force such as gears, shafts and
when not energized without moving cables that are prone
the position shift common to failure in conventional
with conventional mechani- motion systems, are not part
cal brakes. Other benefits of of the PILine ® design.
the self-locking are the elimi-
nation of servo dither and
Ultrasonic Motor Linear Actuator
Fast and Self-Locking with PILine® Piezomotors
Ordering Information
Self-locking Instead
of Quiescent Current M-272
PILine® Linear Actuator with Ultra-
PILine piezo motors are based
®
sonic Motor and Linear Encoder,
on a new, patented, ultrasonic 50 mm, 8 N
drive principle developed by PI.
The core piece of the system is
a piezoceramic plate, which is
excited with high-frequency ei- nerates the holding force when
genmode oscillations. A friction the drive is at rest.
tip attached to the plate moves The products described in this
along an inclined linear path at document are in part protected
the eigenmode frequency. by the following patents:
Through its contact with the US Pat. No. 6,765,335
friction bar, the moving part of German Patent No. 10154526
The M-272 ultrasonic linear drive
offers a travel range of 50 mm
the mechanics drives forward or
backwards. With each oscilla-
tory cycle, the mechanics
executes a step of a few nano-
쮿 Force Generation up to 8 N
meters; the macroscopic result
쮿 Self Locking at Rest is smooth motion with a virtu-
쮿 Velocity up to 200 mm/s ally unlimited travel range.
쮿 5 μm Encoder Resolution The ceramic plate is preloaded
쮿 Linear Guiding against the runner and thus ge-
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. 10/12/03.0 / VOR /USM01-11
PILine® piezoceramic ultrasonic PILine® motors are self-locking

drives offer an affordable alter- when at rest with zero heat ge-
native to motor-leadsrew com- neration, and doing away with
binations and electromagnetic the need for an additional motor
linear motors when small brake.
dimensions and/or high speed The novel M-272 closed-loop
are important. With velocities of linear drive combines motor,
up to 200 mm/s, these drives actuator, linear encoder, guiding
are fast, compact, and are rea- system and brake functionality
dily integrated. In addition, in a very compact package. Due
to the integrated guiding sys-
tem a payload can be easily at-
tached to the drive rod of the
M-272 drive. The drive can also
Application Examples function as a drop-in-replace-
ment for motor-leadscrew
쮿 Automation drives facilitating assembly and
reducing the number of compo-
쮿 Handling
nents significantly. Due to the
쮿 Micromanipulation integrated linear encoder, posi-
tioning can be done precisely
쮿 Metrology M-272 Dimensions in mm
and repeatably.
Watch Video at
http://www.youtube.com/watch?v=w9FOJemtqvQ
Cost-effective combination:
M-272 closed-loop linear pusher and C-867.OE controller card
Technical Data (Preliminary Data) Latest Specs: www.pi.ws

Model M-272 Tolerance
Active axes X
Motion and positioning
Travel range 50 mm
Integrated sensor Linearencoder
Sensor resolution 5 µm
Design resolution 5 µm typ.
Min. incremental motion 10 µm typ.
Backlash 5 µm typ.
Unidirectional repeatability 10 µm typ.
Velocity 200 mm/s max.
Mechanical properties
Guiding Ball bearings
Push/pull force 8N max.
Holding force 8N max.
Lateral force 5N max.
Drive properties
Motor type U-164 PILine® ultrasonic piezomotor
Current 800 mA
Reference switch Hall-effect
Miscellaneous
Operating temperature range -20 to +50 °C
Material Aluminum
Dimensions
Mass 0.5 kg ± 5%
Cable length 0.5 m ± 10 mm
Connector MDR, 14-pin
Recommended controller/driver: C-867.OE
* Power for the motor is supplied by the drive electronics, which requires 12 VDC.
** For drive electronics
Ultrasonic Motor OEM Controller
Affordable OEM Piezo Motor Controller with CAN Interface
C-867.OE
OEM Driver / Controller Card
for PILine® Ultrasonic Motors,
1 Channel
Ask about custom designs!
typical for ultrasonic piezomo-

tors, the controller has a num-
ber of advanced features,
including dynamic control
parameter adaption. By auto-
matically switching between
gainsets for dynamic and static
Controller C-867.OE for piezo linear drives operation an optimized settling
behavior within a couple of
10 milliseconds is achieved.
쮿 Optimized for all PILine® Ultrasonic Piezo Linear Motors The broadband encoder input
with Single or Double Drive (50 MHz) allows high-resolution
encoders to be used with the
쮿 PID Servo-Control with Dynamic Parameter Switching
outstandingly high accelera-
쮿 Integrated Piezo Motor Power Driver with Frequency Control tions and velocities that PILine®
쮿 CAN, RS-232, and Analog Interfaces (e.g. for Joystick) drives deliver.
쮿 Data Recorder
쮿 Powerful Macro Command Language, Highest Stability and
e.g. for Standalone Operation Reliability with Automatic
쮿 Extensive Software Support, LabVIEW, DLL, ... Frequency Control
The integrated piezomotor drive
electronics supports all types of
PILine® ultrasonic piezomotors

currently available.
Variations in the resonant
frequency of the motor caused
The C-867 OEM card is a cost- the servo controller / communi- by temperature or load changes
effective motion controller for cation hardware and the driver are automatically compensated
closed-loop positioning sys- electronics for the ultrasonic for by a frequency-control loop
tems equipped with PILine® piezo motors. which adjusts the operating
ultrasonic piezo motors. The For seamless integration in frequency of the driving vol-
controller card integrates both industrial automation environ- tage. This leads to higher stabi-
ments, the controller can be lity of the motor output force
operated via RS-232 and CAN and velocity and to higher posi-
interfaces. In addition, an ana- tion accuracy.
Application Examples
log (joystick) interface and
non-volatile macro command Software / Programming
쮿 Biotechnology
memory make stand-alone In addition to the user software
쮿 Microscopy operation possible. for setup, system optimization
and operation, comprehensive
쮿 Fiber positioning Highly Specialized PID LabVIEW and DLL libraries are
쮿 Automation Servo-Controller provided.
The C-867 is based on a highly The PIMikroMove user soft-
쮿 Photonics /
specialized DSP (Digital Signal ware provides the PI Tuning
integrated optics
Processor) that handles the PID Tool for optimizing system per-
쮿 Quality assurance testing servo-control algorithm as well formance. Graphic displays
as other system functions. Be- show the system's behaviour
쮿 Testing equipment
cause of the motion properties and facilitate parameter setting.
Cost-effective combination:
M-272 closed-loop linear pusher and C-867.OE controller card
Technical Data Latest Specs: www.pi.ws

Model C-867.OE
Function Controller and drive electronics for PILine® piezomotors / systems
Drive type PILine® motors, single and dual drives with P-661, P-664, U-161, U-164 and U-264
Channels 1
Motion and control
Servo characteristics Programmable PID V-ff filter, parameter changes on-the-fly
Trajectory profile modes Trapezoidal
Encoder input A / B differential signals, 50 MHz
Stall detection Servo off, triggered by programmable position error
Limit switches 2 TTL (programmable)
Reference switches 1 TTL (active high / low, programmable)
Electrical properties
Max. output power 15 W
Max. output voltage 200 Vpp
Interfaces and operation
Communication interfaces RS-232, CAN, input / output 32-pin (male) on rear panel (DIN 41612 / D)
Motor connector MDR14
Command set PI General Command Set (GCS)
User software PIMikroMove
Software drivers GCS-DLL, LabVIEW drivers
Supported functionality Start-up macro, macro, data recorder for recording parameters as motor input voltage,
velocity, position or position error
Miscellaneous
Operating voltage 24 VDC from external power supply (not included)
Current 150 mA + motor current (2 A max.)
Operating temperature range +5 °C to +40 °C
Mass 420 g
Dimensions 175 x 100 x 38 mm (connectors included)
Ultrasonic Motor Rotation Stage
Fast Positioning, Ultra-Low Profile
tions, and they are available
upon request as vacuum-com-
patible versions. M-660.55
PILine® Rotation Stage, Ø 108 mm,
360º, 34 µrad Resolution
Advantages of PILine®
Micropositioning Systems Ask about custom designs!
Positioning systems equipped

velocities of PILine® drives at
with ceramic ultrasonic drives
high resolutions.
of the PILine® series provide
several advantages over posi-
Optionally, the C-185 analog
tioners that apply classic drive
drive electronics (stand-alone
technology:
unit) (s. p. 1-36) is available for
use with third party servo con-
쮿 Smaller dimensions trollers. It accepts an analog
쮿 Higher holding force ±10 V signal to control the
when powered down; motor velocity. For optimum
no holding current performance, the driver must
The M-660 PILine® rotation stage allows high positioning speeds of
up to 2 full turns/sec. The 36 mm Ø clear aperture offers flexible usage 쮿 Increased acceleration be tuned together with the me-
of up to 5 g chanics and should be ordered
at the same time as the
쮿 Increased velocity of up to
motor / stage.
쮿 Unlimited Travel Range 500 mm/s or 720 °/s, resp.
쮿 Max. Velocity 720 °/s 쮿 No leadscrews, gears Patented Technology
쮿 Low Profile: Only 14 mm in Height or other mechanical
The products described in this
쮿 Self-Locking Ceramic Direct Drive: Energy Saving & components, no wear document are in part protected
High Position Stability or maintenance by the following patents:
쮿 Direct Metrology Linear Encoder, 34 µrad Resolution 쮿 No lubricants US Pat. No. 6,765,335
쮿 PILine® Direct Drive: Non-Magnetic and Vacuum-Compatible 쮿 Non-magnetic and German Patent No. 10154526
The newest release for data sheets is available for download at www.pi.ws. R1 10/04/07.0 / VOR /USM01-11
Working Principle vacuum-compatible

쮿 Compact Combinations with Linear Stages operating principle
Optimized Controller
and Drive Electronics
For optimum performance, the
highly specialized C-867 motion
controller (s. p. 4-116) is recom-
mended. This dedicated piezo
M-660 precision rotation stages motors that act on a ceramic motor controller also integrates
use PILine® ultrasonic piezo friction ring to drive the plat- the drive electronics which PI-
form. This direct drive principle Line® motors require to gener-
Applicatotion Examples allows for the compact design ate the ultrasonic oscillations
and low profile of the stage. An on the piezoceramic element.
쮿 Biotechnology integrated incremental encoder
쮿 Micromanipulation offers precision position control Furthermore, the controller has
with up to 34 µrad resolution. a number of special character-
쮿 Microscopy The integrated U-164 PILine® istics to address the require-
쮿 Quality assurance testing linear motors provide a maxi- ments of ultrasonic motors,
mum torque of 0.3 Nm, inde- such as continuous automatic
쮿 Metrology pendent from the direction of drive frequency adjustment,
쮿 Mass storage device motion, and a maximum veloc- dynamic parameter switching
testing ity of up to 720 °/sec. The maxi- for optimized high-speed mo-
mum load is 2 kg. tion and settling behavior. The
쮿 R&D broad-band encoder input
쮿 Photonics packaging M-660s can be built in different (50 MHz) supports the out-
sizes or with other specifica- standing high accelerations and
Watch Video at
http://www.youtube.com/watch?v=loAhRLFFPNk&NR=1
M-660.55, dimensions in mm
Technical Data
Latest Specs: www.pi.ws
Model M-660.55 Units Tolerance
Active axes Theta Z
Rotation range No limit °
Integrated sensor Incremental encoder
Design resolution 34 µrad typ.
Min. incremental motion 34 µrad typ.
Bidirectional repeatability 34 µrad
Max. velocity 720 °/s
Load capacity / axial force 20 N max.
Holding force 0.3 Nm max.
Max. torque cw/ccw (θ Z) 0.3 Nm max.
Drive properties
Motor type 2 x U-164 PILine®
ultrasonic piezo drive
Operating voltage 60 (RMS)* V
Electrical power 0.2 W nominal
Current consumption** 0.3 (2 max.) A
Reference switch optical
Miscellaneous
Material Al (black anodized)
Mass 0.4 kg ±5%
Cable length 1.3 m ±10 mm
Recommended controller / driver C-867 single-axis
controller / driver
* The operating voltage is supplied by the drive electronics
** For drive electronics
Ultrasonic Mini Linear Motor
Fast, Compact OEM Ultrasonic Linear Motor
force. Because the ceramic sta- Ordering Information
tor is pressed against the slid-
er, holding forces are generat- P-661.P01
PILine® Miniature Linear
ed when the motor ist powered Piezomotor, 2 N
down. The result is very high
Accessories:
position stability without the
heat dissipation common in P-661.B01
conventional linear motors. Friction Bar for P-661 PILine®
Miniature Linear Piezomotor,
15 mm
Accessories for Easy
Integration P-661.B02
Friction Bar for P-661 PILine®
PILine piezomotors require a
®
Miniature Linear Piezomotor,
special drive electronics to 25 mm
generate the ultrasonic oscilla- P-661.B05
tions for the piezoceramic ele- Friction Bar for P-661 PILine®
PILine® P-661 OEM piezo linear motor ment. The drive electronics is Miniature Linear Piezomotor,
available as OEM board, stand- 55 mm
alone device or integrated con- C-184.161
쮿 Patented Principle Features with High Forces in Small Space troller and therefore not Analog OEM Driver Board for
inclued in the delivery. PI offers PILine® P-661 Motors
쮿 Max. Velocity 500 mm/s
friction bars with different C-185.161
쮿 Acceleration to 5 g
lengths. Analog Stand-Alone Drive
쮿 Min. Incremental Motion to 0.05 µm Electronics with Power Supply for
쮿 Self-Locking to 1.5 N Long Lifetime
PILine® P-661 Motors
쮿 No Electro-Magnetic Fields PI has over 30 years experience

Controller for closed-loop operation
쮿 MTBF 20,000 h with piezo technology and
are available as C-867 s. p. 4-116.
쮿 Integrated Actuators & Positioning Systems Also Available nanopositioning. PILine® drives
offer high precision and relia-
bility, with over 20,000 hours
MTBF. This is because PILine®
PILine® Linear Motors – PILine® motors have a new, piezo linear motor drives have
Small, Fast, Highly Effective patented, ultrasonic drive de- no mechanical components
veloped by PI. The core piece such as shafts and gears which
Despite their small size, PILine®
of the system is a piezoceram- can cause failures in conven-
linear motors generate high
ic plate, which is excited to tional motors.
driving and holding forces.
produce high-frequency eigen-
mode oscillations. A friction tip
attached to the plate moves
along an inclined linear path at
the eigenmode frequency.
Through its contact with the
쮿 Biotechnology friction bar, the moving part of
the mechanics drives forward
쮿 R&D or backwards. With each oscil-
쮿 Semiconductor testing latory cycle, the mechanics
executes a step of a few nano-
쮿 Mass storage device meters; the macroscopic result
testing is smooth motion with a virtu-
쮿 Metrology ally unlimited travel range.
쮿 Micromanipulation High Speed and Acceleration

쮿 Microscopy PILine® piezomotor drives can
provide accelerations of up to
쮿 Photonics packaging 5 g and speeds of up to
쮿 Quality assurance testing 500 mm/s, together with high Dimensions of the P-661 in mm
resolution and high holding
Note
The products described in this
document are in part protected
by the following patents:
US Pat. No. 6,765,335
German Patent No. 10154526
0.3 µm steps performed by P-661 piezomotor

integrated in an M-662 translation stage

Model P-661.P01 Units Tolerance
Travel range No limit* mm
Minimum incremental motion, open-loop 0.05** µm typ.
Max. velocity 500 mm/s2
Stiffness when powered down 0.7 N/µm ±10 %
Holding force when powered down 1.5 N max.
Push / pull force 2 N max.
Preload on friction bar 9 N ±10 %
Drive properties
Resonant frequency 210 kHz typ.
Motor voltage range 120 (peak-peak) V
42 (RMS)
Operating voltage drive electronics 12 V
Electrical power drive electronics 5 W
Miscellaneous
Body material Al (black anodized)
Mass 0.01 kg ±5 %
Connector Open leads
Recommended controller/driver C-184.161 OEM board
C-185.161 in box
Dimensions 14 x 35 x 6 mm
MTBF >20,000 h
* The travel range of piezo linear motors is virtually unlimited and depends on the length of the friction bar, which is available separately.
** The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage. To reach the specs it is important to
follow the mounting guidelines of the OEM-motors.
Ultrasonic Linear Motor
Fast, Compact OEM Ultrasonic Linear Motor
stator is pressed against the
slider, holding forces are gene-
rated when the motor ist pow- U-164.01
PILine® Piezo Linear Motor, 4 N
ered down. The result is very
high position stability without Accessories:
the heat dissipation common P-664.B01
in conventional linear motors. Friction Bar for PILine® Miniature
Linear Piezomotor, 15 mm
Accessories for P-664.B02
Easy Integration Friction Bar for PILine® Miniature
The PILine® motors require a
special drive electronics to P-664.B05
generate the ultrasonic oscilla- Friction Bar for PILine® Miniature
tions for the piezoceramic ele-
OEM ultrasonic piezo linear motor ment. The drive electronics is C-184.164
U-164.01 Analog OEM Driver Board for
available as OEM board, stand-
PILine® Motors
alone device or integrated
inside a controller and there- C-185.164
쮿 Patented Principle Features with High Forces in Small Space
Analog Stand-Alone Drive
쮿 Easy Mounting fore not included in the deliv-
Electronics with Power Supply
ery. PI offers friction bars with
쮿 Max. Velocity 500 mm/s for PILine® Motors
different lengths.
쮿 Acceleration up to 5 g Controllers for closed-loop
쮿 Min. Incremental Motion to 0,05 µm operation are available as C-867
Long Lifetime (see p. 4-116).
쮿 Self Locking, Push-/Pull Forces to 4 N PI has over 30 years experi-

쮿 No Electro-Magnetic Fields ence with piezo technology
쮿 Integrated Actuators & Positioning Systems Also Available and nanopositioning. PILine®
drives offer high precision and
reliability. This is because Patent Information
PILine® piezo linear motor The products described in this
drives have no mechanical document are in part protected
The newest release for data sheets is available for download at www.pi.ws. R1 09/05.0 / VOR /USM01-11
components such as shafts by the following patents:

PILine® Linear Motors—Small, developed by PI. The core piece and gears which can cause fail- US Pat. No. 6,765,335
Fast, Highly Effective of the system is a piezoceramic ures in conventional motors. German Patent No. 10154526
Despite their small size, PILine® plate, which is excited with
linear motors generate high high-frequency eigenmode os-
driving and holding forces. cillations. A friction tip attached
PILine® piezo motors have a to the plate moves along an
new, patented, ultrasonic drive inclined linear path at the
eigenmode frequency. Through
its contact with the friction bar,
the moving part of the mechan-
쮿 Biotechnology ics drives forward or back-
wards. With each oscillatory
쮿 R&D cycle, the mechanics executes
쮿 Semiconductor testing a step of a few nanometers; the
macroscopic result is smooth
쮿 Mass storage device motion with a virtually unlimit-
testing ed travel range.
쮿 Metrology
High Speed and Acceleration
쮿 Micromanipulation
PILine® piezomotor drives can
쮿 Microscopy provide accelerations of up to
5 g and speeds of up to
쮿 Photonics packaging
500 mm/s, together with high
쮿 Quality assurance testing resolution and high holding
U-164.01, dimensions in mm
force. Because the ceramic
M-674K Ultrasonic Z Drive

Ceramic PILine® Motor and Linear Encoder for High Speed & Precision
High Speed to 100 mm/sec
High Push/Pull Force to 7 N
Extremely Slim Design, Matched with Standard
Multiwell Plates
Stackable
Integrated Linear Encoder for Highest Accuracy
Equipped with two
ultrasonic piezo-motors, Self Locking at Rest
the slim M-674KCPP
offers up to 7 N push
Non-Magnetic and Vacuum-Compatible Working Principle
and pull force. The 9
mm width is matched to
standard multiwell plate
Model Travel Push/pull force Velocity Resolution Dimensions
sizes, ideally suited to
automation tasks in M-674KCPP 50 mm 7N 100 mm/s 0.1 µm 120 x 40 x 9 mm
biotechnology Compact
PILine®
Positioner
M-664K Ultrasonic Z Array

High-Speed, Compact, Cost-Effective, Stackable PILine® Actuator
High Speed to 100 mm/sec
Slim Design, Matched with Standard Multiwell Plates
Travel range 50 mm
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18 / VOR /USM01-11
Stack of 8
M-664KCEP linear Cost-Effective Design
actuators, shown
with well plate. Stackable
The integrated Non-Magnetic and Vacuum-Compatible Working Principle
ceramic piezomo-
tor provides high Self Locking at Rest
speeds to 100
mm/sec. The low-
profile design with
only 9 mm width Model Travel Push/pull Max. closed-loop Resolution Dimensions
allows stacking for
force velocity
multi-channel dis-
pensing in bio- M-664KCEP 50 mm 5N 100 mm/s 0.5 µm 120 x 40 x 9 mm
automation tasks Compact
PILine®
Positioner
M-682K Non-Magnetic Ultrasonic Motor Stage

Low-Profile, High-Speed with Piezo Ceramic Motor
Integrated Non-Magnetic PILine® RodDrive
Travel Range 50 mm
Integrated Linear Encoders with 0.1 µm Resolution
Up to 6 N Force Generation
Closed-Loop Velocity up to 100 mm/s
Low Profile, Small Footprint
Model Travel Load capacity Max. push/ Dimensions

pull force
Custom non-magnetic M-682KNMS linear stage with
M-682KNMS 50 mm 50 N 6N 110 x 110 x 20 mm
integrated RodDrive linear motor
PILine®
Positioner
Ultrasonic Motor Pusher
Integrated Fast Ultrasonic Piezo Drives
Closed-Loop Operation:
Working Principle
Optimized for High Velocity
PILine RodDrive,
®
RodDrives employ a patented
shown with C-184 OEM and and Rapid Step/Settling
C-185 bench-top driver elec- ultrasonic drive developed by Together with a position sen-
tronics, provides 7 N pushing PI. The highly compact, inte- sor, RodDrives can be operat-
force and travel ranges of 50,
grated P-664 piezomotors can ed in closed-loop with the
100 and 150 mm
provide velocities of 450 mm/s, C-867.D64 (see p. 4-116) piezo
together with high resolution motor controller. This special-
and holding force. The maxi- ized servo-controller also inte-
mum travel is determined by grats the motor drive electron-
the length of the rod and ics and enables highly constant
is basically unlimited. Cus- speeds up to 350 mm/s with
tomized adaptations in terms very short settling times (tens
of operating and holding force of milliseconds). RodDrives
are feasible by varying type can also be operated with con-
and number of motors used. ventional servo-controllers. In
Because the integrated ceramic this case, the C-185 (see p. 1-36)
motors are preloaded against
(to be ordered separately) exter-
the rod, RodDrives resist
nal drive electronics is required
motion with an intrinsic hold-
which accepts a ±10 V analog
ing force when at rest. The
signal from the controller.
result is very high position sta-
Drive-Component for Integration into Micropositioning bility without the heat dissipa-
Note
Systems tion common with convention-
Travel Ranges to 150 mm al linear motors. Furthermore, The products described in this
there are no gears, leadscrews document are in part protected

Push/Pull Forces to 7 N
or other mechanical compo- by the following patents:
Min. Incremental Motion to 0.05 µm
US-Pat. No. 6,765,335
nents to contribute play or
Velocity to 450 mm/s German Patent No. 10154526
backlash.
Self-Locking at Rest
Variety of Drivers / Controllers
PILine® piezomotors require a
PILine® RodDrives repre- They consist of a rod which is drive electronics for exciting
sent a level of integration be- preloaded by piezo linear mo- the ultrasonic oscillations. The
tween PILine® OEM piezo linear tors from two sides. Depend- drive electronics is available as
motors such as P-664 (see ing on the way of integration, OEM board, stand-alone device
p. 1-28) and guided microposi- either the rod or the motor or integrated inside a closed-
tioning systems such as the block is coupled to the moving loop motion controller and
M-682 (see p. 4-32) series platform. therefore not included in the
stages. delivery.
RodDrives may replace classi- Advantages of PILine®
cal drive elements like rotary Micropositioning Systems
motor/leadscrew assemblies, The ultrasonic piezoceramic
or magnetic linear drives inte- drives used in PILine® micro-
grated into a micropositioner. positioners have a number
of advantages over classical
Application Examples drives:
System integration for Higher Accelerations, up to

micropositioning products 5g
Speeds up to 500 mm/s
Automation
Small Form Factor
Handling Self-Locking When Powered
Down
Micromanipulation No Shafts, Gears or Other
Biotechnology Rotating Parts
Non-Magnetic and Vacuum
Metrology Compatible Drive Principle
Ultrasonic Linear Piezo Motor Stage
s
along an inclined linear path at
the eigenmode frequency.
Through its contact with the M-661.370
PILine® Translation Stage, 18 mm,
friction bar, the moving part of Open-Loop
the mechanics drives forward
or backwards. With each oscil- M-662.470
latory cycle, the mechanics Open-Loop, XY Mountable
execute a step of a few
nanometers; the macroscopic Accessories:
result is smooth motion with a C-184.161

virtually unlimited travel range. Analog OEM Driver Board for
PILine® P-661 Motors
Advantages of PILine® C-185.161

Analog Stand-Alone Drive
Micropositioning Systems Electronics with Power Supply for
The ultrasonic piezoceramic PILine® P-661 Motors
drives used in PILine® micropo-
M-662 and M-661 Ultrasonic Motor stages are the smallest piezo-motor-driven trans-
sitioners have a number of
lation stages
advantages over classical motors. The driver controls the
drives: motor speed as a function of
an analog ±10 V signal. The
Smallest Translation Stages with Linear Motor Drive Higher Accelerations, driver is not included, as it is
Travel Ranges to 20 mm up to 5 g available in different versions,
Max. Velocity 500 mm/s Speeds up to 500 mm/s from the low-priced C-184.161
Acceleration to 5 g Small Form Factor OEM-board to the C-185.161
Incremental Motion to 50 nm Self-Locking When Powered bench-top unit. The stage and
Self Locking at Rest the driver electronics, however,
Down
XY-Combination Possible must be ordered together, so
No Shafts, Gears or Other that they can be tuned to one-
MTBF 20.000 h Rotating Parts another for optimum perform-
Vacuum Versions to 10-7 hPa Non-Magnetic and Vacuum- ance.
Compatible Drive Principle
Notes
M-661 and M-662 PILine® trans- are among the smallest motor-
Choice of Drive Electronics The products described in this
lation stages offer acceler- ized translation stages current-
ations to 5 g with millisecond ly on the market. Both models Special driver electronics are document are in part protected
response and velocities to are designed for open-loop required to create the ultrason- by the following patents:
500 mm/sec in an extremely operation (a similar closed- ic oscillations for PILine® piezo- US Pat. No. 6,765,335
compact package. Providing loop stage with linear encoder German Patent No. 10154526
travel ranges to 20 mm, they is available as model M-663.
The M-662, with its square
Application Examples footprint, is also suitable for
use in XY configurations. For
Biotechnology applications where the small-
est dimensions are essential,
Micromanipulation the P-652 micro stage is
Microscopy offered.
Quality assurance testing

Working Principle
Semiconductor testing PILine® piezo motors use a
Metrology new, patented, ultrasonic drive
developed by PI. A the heart of
Mass storage device the system is a piezo ceramic
testing plate, which is excited with
R&D high-frequency eigenmode
oscillations. A friction tip
Photonics packaging M-662 dimensions in mm
attached to the plate moves
50 nm steps created with a system incorporating an M-662.470
M-661 dimensions in mm open-loop piezo linear motor stage

Model M-661.370 M-662.470 Units Tolerance
Travel range 18 20 mm
Min. incremental motion 0.05* 0.05* µm typ.
Max. velocity 500 500 mm/s
Max. load 5 5 N
Max. push/pull force 1 1 N
Max. holding force 2 2 N
Drive properties
Motor type P-661 PILine® P-661 PILine®
ultrasonic piezomotor drive ultrasonic piezomotor drive
Operating voltage 120 (Peak-Peak)** 120 (Peak-Peak)** V
42 (RMS)** 42 (RMS)**
Electrical power 5*** 5*** W nominal
Current 400*** 400*** mA
Miscellaneous
Operating temperature range -20 to +50 -20 to +50 ˚C
Material AI (black anodized) AI (black anodized)
Dimensions 30 x 23 x 10 28 x 28 x 8
Mass 0.03 0.03 kg ±5 %
Cable length 1.5 1.5 m ±10 mm
Connector LEMO connector LEMO connector
Recommended controller/driver C-184.161 OEM board C-184.161 OEM board
C-185.161 Bench-top C-185.161 Bench-top (p. 1-36)
*The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage.
To obtain it, it is important to follow the mounting guidelines in the motor documentation.
**The stage supply power is drawn from the drive electronics, which runs on 12 VDC.
***For drive electronics.
Ultrasonic Motor Closed Loop Linear Piezo Motor Stage
Compact, Fast, with Ultrasonic Piezo Linear Drives, Direct Position Measurement
With each oscillatory cycle, the Ordering Information
mechanics executes a step of a
M-663.465
few nanometers; the macro-
scopic result is smooth motion Linear Encoder, 0.1 µm Resolution
with a virtually unlimited travel
M-663.Y65
range.
Linear Encoder, 0.1 µm Resolution,
Advantages of PILine® turned cable outlet, XY mountable
Micropositioning Systems M-663.46V
Ultrasonic Motor stage with integrated linear encoder
The ultrasonic piezoceramic PILine® Translation Stage, 19 mm,
Linear Encoder, 0.1 µm Resolution,
Vacuum Compatible to 10-6 hPa
sitioners have a number of ad-
vantages over classical drives: Accessories:
Higher Accelerations, C-867.161

up to 5 g Piezomotor Controller with Drive
Speeds up to 500 mm/s Electronics, 1 Channel, for PILine®
Systems with P-661 Motors
Small Form Factor
Self-Locking When Powered Driver for use with separate con-
troller:
Down
No Shafts, Gears or Other C-185.161
Rotating Parts Analog Stand-Alone Drive
Smallest Translation Stage with Closed-Loop Linear Motor Non-Magnetic and Vacuum- Electronics with Power Supply for
and Encoder PILine® P-661 Motors

Travel Range 19 mm
Max. Velocity 400 mm/s
Optimized Controller and
Acceleration up to 10 g
Drive Electronics
Direct Metrology Linear Encoder
PILine® motors require a spe- optimum performance the
0.1 µm Resolution
cial drive electronics to gener- driver must be tuned together
XY Combination Possible ate the ultrasonic oscillations with the mechanics and should
Vacuum-Compatible Versions Available for piezoceramic element. For be ordered at the same time as
optimum performance the the motor/stage.
highly specialized C-867 (see p.
4-116) motion controller is rec- Note
PILine M-663 microposition-
®
lation stage with piezomotor ommended. This sophisticated The products described in this
ing systems offer high veloci- drives currently on the market. controller also inte-grates the document are in part protected
ties of up to 400 mm/s and trav- Its square footprint makes it drive electronics. Furthermore, by the following patents:
el ranges of 19 mm in a com- suitable for use in compact XY the controller has a number of US Pat. No. 6,765,335
pact package. The M-663 is the configurations. special features, including German Patent No. 10154526
smallest closed-loop trans- dynamic parameter switching
for an optimized high-speed
Working Principle motion and settling behavior
PILine® motors have a new, to take into account the motion
Biotechnology patented, ultrasonic drive characteristics typical of
developed by PI. The core piezomotors. The broad-band
Micromanipulation piece of the system is a piezo- encoder input (50 MHz) sup-
Microscopy ceramic plate, which is excited ports the outstanding high
to produce high-frequency accelerations and velocities of
Quality assurance testing eigenmode oscillations. A fric- PILine® drives at high resolu-
tion tip attached to the plate tions.
Metrology
moves along an inclined linear Optionally, for use with third
Mass storage device path at the eigenmode fre- party servo controllers, the XY combination of two M-663s; CD for size comparison
testing quency. Through its contact C-185 analog drive electronics

with the friction bar, the mov- (stand-alone unit) is available.
R&D
ing part of the mechanics It controls the motor speed by
Photonics packaging drives forward or backwards. an analog ±10 V signal. For
A 1 mm step performed by an M-663 stage with 300 g load control- An M-663 with 100 g load settles to 0.1 µm accuracy in 10 ms after a
led by a C-867 controller/driver reaches the end position in less than 100 µm step, measured with C-867 controller/driver
40 ms

Model M-663.465 Units Tolerance
Active axes X
Travel range 19 mm
Integrated sensor Linear encoder
Sensor resolution 0.1 µm
Min. incremental motion 0.1 µm typ.
Bidirectional repatability ±0.3 µm typ.
Unidirectional repeatability 0.2 µm typ.
Pitch 300 µrad typ.
Yaw 300 µrad typ.
Max. velocity 400 mm/s
Reference switch repeatability 1 µm typ.
Max. load 5 N
Max. push/pull force 2 N
Max. holding force 2 N
Drive properties
Motor type P-661 PILine®
ultrasonic piezomotor
Motor voltage range 120 (peak-peak)* M-663
42 (RMS)* V dimensions in mm
Electrical power 5** W nominal

Current 400** mA
Reference switch Hall-effect
Miscellaneous
Mass 40 g ±5 %
Recommended controller/driver C-867.161 Single-axis
controller/driver (p. 4-116)
C-185.161 Drive electronics (p. 1-36)
*Power is supplied by the drive electronics which runs on 12 V DC
**For drive electronics
Ultrasonic Motor Linear Piezo Stage
Low-Profile High-Speed with Ultrasonic Piezo Linear Drives & Direct Position Measurement
Non-Magnetic and Vacuum- Ordering Information

M-664.164
PILine® Micro Positioning Stage
Optimized Controller and with P-664 Piezo Linear Motor,
25 mm, 4 N
Drive Electronics
PILine® motors require a spe-
cial drive electronics to gener-
ate the ultrasonic oscillations
for the piezoceramic element.
For optimum performance the
Optionally, for use with third
highly specialized C-867 mo-
party servo controllers, the
tion controller (see p. 4-116) is
C-185 analog drive electronics
recommended. This sophisti-
(stand-alone unit, see p. 1-36)
cated controller also integrates
is available. It controls the
the drive electronics. Further-
motor speed by an analog ±10
more, the controller has a num-
Fast and compact M-664 Ultrasonic Motor stage with linear encoder V signal. For optimum per-
ber of special features, includ-
formance this driver must be
ing dynamic parameter switch-
tuned together with the stage
ing for an optimized high-
and should be ordered at the
Travel Range 25 mm speed motion and settling
same time as the motor/stage.
Max. Velocity 400 mm/s behavior to take into account
Ultra-Low Profile, 15 mm the motion characteristics typi-
Notes
cal of piezomotors. The broad-
Direct Metrology Linear Encoder with 0.1 µm Resolution
band encoder input (50 MHz) The products described in this

High Guiding Accuracy with Crossed Roller Bearings

supports the outstanding high document are in part protected
Compact XY Combinations accelerations and velocities of by the following patents:
Piezo Linear Motor with 4 N Drive Force PILine® drives at high resolu- US Pat. No. 6,765,335
Self Locking at Rest tions. German Patent No. 10154526
M-664 micropositioning sys- improved guiding accuracy,

tems are low-profile, high- the M-664 uses two crossed
accuracy translation stages roller bearings mounted on
with linear encoders. The ground aluminum profiles. The
M-664 stage is next-larger in integrated P-664 PILine® linear
the series of piezomotor-driven motor can generate forces up
stages of which the M-663 (see to 4 N and maximum closed-
p. 4-28) is the smallest. For loop velocities to 400 mm/s
over a 25 mm travel range.
Application Examples Advantages of PILine®

Micropositioning Systems
Biotechnology The ultrasonic piezoceramic
Micromanipulation
sitioners have a number
Microscopy of advantages over classical
drives:
Quality assurance testing
Higher Accelerations,
Metrology up to 5 g
Speeds up to 500 mm/s
Mass storage device Small Form Factor
testing Self-Locking When Powered
R&D Down
No Shafts, Gears or Other
Photonics packaging Rotating Parts
M-664 dimensions in mm
Ultrasonic Motor stages: M-682, M-664 and M-663 (from left)

Model M-664.164 Tolerance
Active axes X
Travel range 25 mm
Bidirectional repeatability 0.2 µm typ.
Pitch ±50 µrad typ.
Yaw ±50 µrad typ.
Max. load 25 N
Max. push/pull force 4N
Max. holding force 3N
Drive properties
Motor type P-664 PILine® ultrasonic piezo drive
Operating voltage 168 V (peak-to-peak) *
60 V (RMS) *
Electrical power 10 W ** nominal
Current 800 mA **
Limit and reference switches Hall-effect
Miscellaneous
Mass 0.190 kg ±5 %
Recommended controller/driver C-867.164 single-axis controller/driver
C-185.164 drive electronics
*The stage supply power is drawn from the drive electronics, which runs on 12 V.
Ultrasonic Motor Translation Stage
Low-Profile & High-Speed with Ultrasonic Piezomotor, Direct Position Metrology
Advantages of PILine® Micro
Positioning Systems
M-683.2U4
PILine® ultrasonic ceramic PILine® High-Speed Linear Stage,
drives provide several advan- 50 mm, 6 N
tages over classical motors
and drivers: Accessories:
쮿 Higher Acclerations, up to 5 g
M-110.05
쮿 Speeds up to 500 mm/s Adapter bracket for vertical
쮿 Small Form Factor mount of M-110 stages on M-683
쮿 Self-Locking when Powered stages
Down
M-683.2U4 (50 mm) low-profile translation 쮿 No Shafts, Gears or Other
stage with integrated high-speed ultrasonic motors
Rotating Parts the mechanics and should be
쮿 No Lubricants ordered at the same time as
쮿 Non-Magnetic and Vacuum the motor/stage.
쮿 Max. Velocity 350 mm/s Compatible Operating
쮿 Low Profile: Only 21 mm Height Principle Patent Protection
쮿 Compact XY Combination Possible The products described in this
쮿 Up to 6 N Force Generation Optimized Controller and document are in part protected
쮿 Direct Metrology Linear Encoder, 0.1 µm Resolution Drive Electronics by the following patents:
For optimum performance the US Pat. No. 6,765,335
쮿 Travel Range 50 mm
highly specialized C-867 motion German Patent No. 10154526
쮿 Excellent Guiding Accuracy Through Crossed Roller Bearings
controller (see page 4-116) is
쮿 PILine®: Non-Magnetic and Vacuum-Compatible Working
recommended. This dedicated
Principle piezo motor controller also

쮿 Self Locking at Rest integrates the drive electronics
which PILine® motors require
to generate the ultrasonic
oscillations for the piezo-
M-683 precision microposi- ed on ground-aluminum pro- ceramic element.

tioning stages make use of files for better guiding accu-
PILine® ultrasonic piezo linear racy. Integrated U-164 PILine® Furthermore, the controller has
motors enabling a compact linear motors provide push a number of special character-
design and low profile. An inte- forces to 6 N and a maximum istics, including continuous
grated linear encoder enables velocity of up to 350 mm/s. automatic drive frequency
closed-loop control with The stages can be arranged adjustment, dynamic parame-
0.1 µm resolution. The M-683 to form compact XY systems. ter switching for optimized
translation stages use paired If an additional Z-axis is high-speed motion and settling
crossed-roller bearings mount- required, the M-110 micro- behavior and some other fea-
stage series (see page 4-22) is tures to address the require-
Application Examples recommended due to its high- ments of ultrasonic motors.
er holding force. The M-683 The broad-band encoder input
쮿 Biotechnology
design is scalable and can be (50 MHz) supports the out-
쮿 Micromanipulation extended to provide longer standing high accelerations
travel ranges to 300 mm. and velocities of PILine® drives
쮿 Microscopy
Vacuum-compatible versions at high resolutions.
쮿 Quality assurance testing are also available on request.
쮿 Metrology Optionally, for use with third

Limit and Reference Switches party servo controllers, the
쮿 Semiconductor testing For the protection of your C-185 analog drive electronics
equipment, non-contact limit (stand-alone unit) (see page
쮿 Mass storage device
testing and reference switches are 1-36) is available. It accepts an
installed. The reference switch analog ±10 V signal to control
쮿 R&D supports advanced auto- the motor velocity. For opti-
mation applications with high mum performance the driver
쮿 Photonics packaging
precision. must be tuned together with
M-683.2U4 dimensions in mm

Model M-683.2U4 Tolerance
Active axes X
Travel range 50 mm
Bidirectional repeatability ±1 µm typ.
Pitch ±150 µrad typ.
Yaw ±50 µrad typ.
Max. load capacity 50 N
Max. push / pull force 6N
Max. holding force 6N
Drive properties
Motor type 2 x U-164 PILine®
ultrasonic piezo drive
Operating Voltage 60 Vrms*
Electrical power 15 W** nominal
Power consumption 1.5 A**
Reference Switch optical
Limit Switches Hall-effect
Miscellaneous
Operating temperature range 0 to +50 °C
Mass 0.65 kg ±5 %
Recommended controller / driver C-867.160 single-axis
controller / driver
C-185.D64 drive electronics
*Power to the motor is supplied by the drive electronics, which runs on 12 V DC, or by the controller (24 V).
Ultrasonic Motor XY Stage
Fast, Low Profile and Large Aperture with Direct Position Measurement
frame stage. Depending on
the application, these highly
specialized, ultra-precise nano- M-686.D64
XY Open-Frame Stage with
positioning systems are avail- Closed-Loop PILine® Piezomotor
able as fast XY scanners (for Drives, 25 x 25 mm, 7 N, 0.1 µm
fluorescence microscopy), as Linear Encoder
vertical Z positioners (3D imag- Ask about custom designs!
ing), or with up to 6 degrees of
freedom.
Limit and Reference Switches

For the protection of your
equipment, non-contact Hall-
effect limit and reference
The M-686.D64 open-frame stage with closed-loop
piezo motors provides 25 x 25 mm travel range
switches are installed. The
direction-sensing reference
switch supports advanced
automation applications with
Integrated Closed-Loop Piezomotor Drives Provide High high precision.
Speed to 100 mm/s
Travel Ranges 25 x 25 mm Advantages of PILine®
Integrated Linear Encoders with 0.1 µm Resolution Micropositioning Systems Notes
Compact Design: The ultrasonic piezoceramic Nanopositioning stages that fit
32 mm Profile Height, 170 x 170 mm Footprint drives used in PIline® micropo- directly on the M-686:
Clear Aperture 78 x 78 mm, 66 x 66 mm sitioners have a number

in Extreme Position of advantages over classical P-561 to P-563
drives: PIMars™ XYZ Nanoposition-
Self-Locking at Rest
ing systems with up to
Compatible with PI Piezo Nanopositioning / Higher Accelerations, 300 µm travel
Scanning Stages up to 5 g
Speeds up to 500 mm/s P-541.2 to P-542.2
Small Form Factor Low-profile microscopy XY
Self-Locking When scanners
M-686 open-frame piezomotor Space Saving Piezomotors Powered Down
stages are mainly designed for Compared to conventional No Shafts, Gears or Other P-541.Z
automated positioning applica- motorized translation stages, Rotating Parts Low-profile Z/tip/tilt piezo
tions in microscopy. The opti- the M-686 provides a lower Non-Magnetic and Vacuum- nanopositioning stages for
mized form factor with a low profile and smaller footprint. Compatible Drive Principle microscopy
profile height of only 32 mm The compact PILine® piezoelec-
and the standardized mount- tric linear motors and high-res-
ing pattern allows the combi- olution linear encoders make
nation with many PI standard both, the lead screw duct and
nanopositioning systems. the flanged, bulky stepper
motor employed in traditional
stages obsolete. In addition,
Application Examples the piezomotors are self-lock-
ing at rest and hold the stage in
Biotechnology a stable position without heat-
ing up.
Microscopy
Scanning microscopy Compatibility to PI Nanopo-
sitioning and Scanning Stages
Confocal microscopy
A number of standard PI piezo
two-channel C-867.260 controller
Semiconductor testing flexure stages (150 x 150 mm
footprint) can be mounted
Handling customized M-686 stage for microscopy
directly on the M-686 open-
M-686.D64, dimensions in mm. The minimum aperture is 66 x 66 mm
with both axes at the maximum position
Customized M-686 stage with a bigger footprint, to sink

the piezo Z scanner. The system height together with
the P-541 piezo scanner is reduced to only 33 mm

Model M-686.D64
Active axes XY
Travel range 25 x 25 mm
Design resolution 0.1 µm
Min. incremental motion 0.3 µm
Bidirectional repeatability 0.3 µm
Pitch / yaw ±50 µrad
Load Capacity* 50 N
Max. push/pull force 7N M-686 open-frame stage with P-541.2DD piezo scan-
Max. lateral force 4N ner on top, providing a resolution of 0.1 nm and a
scanning range of 30 x 30 µm. The system height
Drive properties of the combination with the P-541 XY (or Z) piezo
Motor type 2 x PILine® P-664 per axis scanner is only 48 mm
Operating voltage 190 V (Peak-Peak)**

67 V (RMS)**
Electrical power 10 W / axis***
Miscellaneous
Material Aluminium (black anodized)
Mass 1.2 kg
Cable length 1.5 m
Connector 2 x MDR connector, 14-pin
Recommended controller/driver 2 x C-867.D64 single-axis controller / driver
2 x C-185.D64 single-axis drive electronics
for external servo-controllers (p. 4-116, p. 1-36)
*10 N for max. velocity
**The operating voltage or the piezomotor is supplied by the drive electronics which requi-
res 12 VDC 0.3 µm steps performed by M-686
***For drive electronics
Ultrasonic Motor Controller
Servo-Controller with Integrated Driver for High-Speed Ultrasonic Piezo Motors
Because of the motion proper-
ties typical for ultrasonic piezo-
motors, the controller has a C-867.160
Piezomotor Controller with
number of advanced features, Drive Electronics, Networkable,
including dynamic control for PILine® Systems
parameter adaption. By auto-
C-867.260
matically switching between Piezomotor Controller with
gainsets for dynamic and static Drive Electronics, 2 Channels,
operation an optimized settling for PILine® Systems
behavior within a couple of Accessories:
10 milliseconds is achieved. C-819.20
The broadband encoder input Analog Joystick for 2 axes
(50 MHz) allows high resolution C-819.20Y
encoders to be used with the Y-Cable for Connecting
C-867 ultrasonic motor controller outstandingly high accelera- 2 Controllers to C-819.20
with low-profile positioner tions and velocities that PILine® C-170.PB
drives deliver. Pushbutton Box, 4 Buttons
and 4 LEDs
Highest Stability by Ask about custom designs!
쮿 Optimized for PILine® Ultrasonic Piezo Linear Motors Frequency Control
쮿 High-Bandwidth Encoder Inputs Allow High Speed and The integrated piezomotor several advantages over posi-
Resolution drive electronics support all tioners that apply classic drive
쮿 PID Servo-Control with Dynamic Parameter Switching PILine® ultrasonic piezomotors technology:
쮿 Integrated Piezo Motor Power Driver used for the M-66x to M-69x
쮿 USB, RS-232 and Analog Interfaces (e. g. for Joystick) positioning stage series. 쮿 Smaller dimensions
쮿 4 + 4 Programmable TTL-I/Os for Flexible Automation 쮿 Higher holding force when
Drift in the mechanical frequen-
쮿 Data Recorder powered down; no holding
cy of the motor caused by tem-
쮿 Daisy-Chain Networking for up to 16 Axes current
perature or load changes is
쮿 Powerful Macro Programming Language, e. g. for Stand-Alone 쮿 Increased acceleration of
automatically compensated by
Operation a frequency-control loop which up to 5 g
쮿 Extensive Software Support, LabVIEW, DLL ... adjusts the operating frequen- 쮿 Increased velocity of up
cy of the driving voltage. This to 500 mm/s or 720°/s
leads to the highest stability 쮿 No leadscrews, gears
The C-867 controller is espe- The controller can be operated
in pushing force, velocity and or other mechanical
cially designed for closed-loop from a host PC either via a USB
closed-loop control.
positioning systems equipped port or an RS-232 interface. components, no wear
with PILine® piezo linear motor Alternatively, a stand-alone or maintenance
drives. A compact case con- operation is possible. Here, Software / Programming
쮿 No lubricants
tains both drive electronics for stored macro commands can In addition to the user software
쮿 Non-magnetic and
the piezo ceramic motors and be executed, or manual control for setup, system optimization
and operation, comprehensive vacuum-compatible
components for controlling and by joystick or pushbutton box
communication. is possible. LabVIEW and DLL libraries are operating principle
provided.
Two models are available:
C-867.160 is used to operate The PIMikroMove™ user soft-
쮿 Biotechnology
single-axis positioning systems, ware provides the PITuningTool
쮿 Microscopy the two-channel C-867.260 is for optimizing system perfor-
used with XY scanning stages. mance. Graphic displays show
쮿 Fiber positioning
the system's behaviour and
쮿 Automation Highly Specialized facilitate parameter setting.
PID Servo-Controller
쮿 Photonics / integrated
The C-867 is based on a highly Advantages of PILine®
optics
specialized DSP (Digital Signal Micropositioning Systems
쮿 Quality assurance testing Processor) that handles the PID Positioning systems equipped
쮿 Testing equipment servo-control algorithm as well with ceramic ultrasonic drives
as other system functions. of the PILine® series provide
The two-channel C-867.260 ultrasonic motor controller operates XY scanning stages, here:
a customized M-686 stage for microscopy

Model C-867.160 C-867.260
Function Controller and drive electronics for PILine® piezomotors / systems
Drive type PILine® motors, single and dual drives with P-661, P-664, U-161 or U-164
Channels 1 2
Motion and control
Servo characteristics Programmable PID V-ff filter, parameter changes on the fly
Trajectory profile modes Trapezoidal
Encoder input A/B differential signals, 50 x 106 impulses/s
Stall detection Servo off, triggered by programmable position error
Limit switch 2 x TTL per channel (programmable)
Reference switch 1 x TTL per channel (active high / low, programmable)
Electrical properties
Max. output power / channel 15 W
Max. output voltage / channel 200 Vpp
Interfaces and operation
Communication interfaces USB, RS-232
Motor connector MDR14 2 x MDR14
Controller network Up to 16 units on single interface
I/O ports 4 analog/digital in, 4 digital out (Mini-DIN, 9-pin)
digital: TTL
analog: 0 to 5 V
Command set PI General Command Set (GCS)
User software PIMikroMove
Software drivers GCS-DLL, LabVIEW drivers
Supported functionality Start-up macro; macro; data recorder for recording parameters as motor input voltage,
velocity, position or position error
Manual control Pushbutton box, joystick, Y-cable Pushbutton box, joystick
for control of 2 axes with joystick
Miscellaneous
Operating voltage 24 VDC from external power supply (included)
Current consumption 300 mA + motor current (2 A max.) 600 mA + motor current (4 A max.)
Operating temperature range +5 °C to +40 °C
Mass 1.0 kg 2.4 kg
Dimensions 206 x 130 x 66 mm 320 x 150 x 80.5 mm
(including mounting rails) (including mounting rails)
USA (East) & CANADA USA (West) & MEXICO
Products and Technologies PI (Physik Instrumente) L.P. PI (Physik Instrumente) L.P.

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Nanopositioning / Scanning Stages
Auburn, MA 01501 Irvine, CA 92620
Scanning Microscopy Stages Tel: +1 (508) 832 3456 Tel: +1 (949) 679 9191
Steering Mirrors, Mirror Shifters Fax: +1 (508) 832 0506 Fax: +1 (949) 679 9292
info@pi-usa.us info@pi-usa.us
Piezo Actuators
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Piezo Motors
JAPAN
Piezo Controllers
PI Japan Co., Ltd. PI Japan Co., Ltd.
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Motor Controllers Tachikawa-shi 4-11-27 Nishinakajima,
Hexapod 6-Axis Alignment Systems Tokyo 190-0012 Yodogawa-ku, Osaka-shi
Tel: +81 (42) 526 7300 Osaka 532-0011
Fields of Applications Fax: +81 (42) 526 7301 Tel: +81 (6) 6304 5605
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Physik Instrumente PI (Physik Instrumente) Ltd.
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Subjec to change without notice © Physik Instrumente (PI) GmbH & Co. KG 2009
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Headquarters
GERMANY
Ultrasonic Motors PDF 1/04/11/0.0
Physik Instrumente (PI) PI Ceramic GmbH

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Ultrasonic Motors

for Fast and Precise Positioning

Nanotechnology, Nanofabrication, Microscopy/Imaging

Semiconductor Technology Nano/microliter pumps

Medical Design, Medical Technology

Cell penetration, microdosing

motion with a virtually unlimit- into a mechanical setup.

bar. The transverse oscillation assemblies, or magnetic The piezomotor is integrated

PILine® ultrasonic motors are based on a simple construc-

effect of the friction drive components in-house. This

PILine® piezoceramic ultrasonic PILine® motors are self-locking

Technical Data (Preliminary Data) Latest Specs: www.pi.ws

Ask about custom designs!

typical for ultrasonic piezomo-

PILine® ultrasonic piezomotors

Technical Data Latest Specs: www.pi.ws

Positioning systems equipped

Working Principle vacuum-compatible

쮿 No Electro-Magnetic Fields PI has over 30 years experience

쮿 Micromanipulation High Speed and Acceleration

0.3 µm steps performed by P-661 piezomotor

Latest Specs: www.pi.ws

Ask about custom designs!

components such as shafts by the following patents:

M-674K Ultrasonic Z Drive

M-664K Ultrasonic Z Array

M-682K Non-Magnetic Ultrasonic Motor Stage

Model Travel Load capacity Max. push/ Dimensions

there are no gears, leadscrews document are in part protected

System integration for Higher Accelerations, up to

result is smooth motion with a C-184.161

Advantages of PILine® C-185.161

Quality assurance testing

Technical Data Latest Specs: www.pi.ws

Higher Accelerations, C-867.161

testing quency. Through its contact C-185 analog drive electronics

Technical Data Latest Specs: www.pi.ws

Electrical power 5** W nominal

Non-Magnetic and Vacuum- Ordering Information

band encoder input (50 MHz) The products described in this

High Guiding Accuracy with Crossed Roller Bearings

M-664 micropositioning sys- improved guiding accuracy,

Application Examples Advantages of PILine®

Technical Data Latest Specs: www.pi.ws

Principle piezo motor controller also

M-683 precision microposi- ed on ground-aluminum pro- ceramic element.

쮿 Metrology Optionally, for use with third

Latest Specs: www.pi.ws

Limit and Reference Switches

Clear Aperture 78 x 78 mm, 66 x 66 mm sitioners have a number

Customized M-686 stage with a bigger footprint, to sink

Technical Data Latest Specs: www.pi.ws

Operating voltage 190 V (Peak-Peak)**

Technical Data Latest Specs: www.pi.ws

Products and Technologies PI (Physik Instrumente) L.P. PI (Physik Instrumente) L.P.

Physik Instrumente (PI) PI Ceramic GmbH

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