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Applied Acoustics
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Article history: A new type of piezoelectric ultrasonic transducer for longitudinal-flexural vibrational mode-conversion is
Received 5 November 2016 proposed. The mode-conversion transducer has a back metal mass, longitudinally polarized piezoelectric
Received in revised form 3 July 2017 ceramic pieces, and a circular metal plate. The longitudinal vibration of the piezoelectric vibrator drives
Accepted 11 August 2017
the circular metal plate to produce flexural vibration. The analytical method for designing this type of
Available online 18 August 2017
mode-conversion transducer is mainly given in this paper, and the numerical simulation and the exper-
imental measurement are used to verify this method. The performance analysis of the mode-conversion
Keywords:
transducer is focused on comparing frequencies and mode shapes. Based on equivalent lumped mass and
Longitudinal-flexural vibration
Mode conversion
elastic parameters, the equivalent circuit and resonance frequency of the mode-conversion transducer
Equivalent lumped parameters are given. The vibrational modes and the harmonic response of the transducer are simulated via the
Resonance frequency numerical method. The results show satisfying concurrence among the analytical theory, numerical sim-
Electro-mechanical equivalent circuit ulation, and experimental measurement. The suitability of this type of mode-conversion transducer for
ultrasonic liquid processing, which requires high power and a large radiation area, will be investigated
in the future.
Ó 2017 Published by Elsevier Ltd.
http://dx.doi.org/10.1016/j.apacoust.2017.08.009
0003-682X/Ó 2017 Published by Elsevier Ltd.
X. Zhang, B. Liang / Applied Acoustics 129 (2018) 284–290 285
In the following analysis, for this type of mode-conversion the radius of the thin circular plate. j is the imaginary unit, and
pffiffiffi 4
j ¼ 1. k ¼ qhx2 =D, D ¼ Eh =12ð1 r2 Þ, where k and D are the
transducer, the electro-mechanical equivalent circuit method is 3
mainly given. Firstly, the equivalent lumped parameters for a cir- wave number and flexural rigidity of the plate [5], respectively. q,
cular plate in flexural vibration are obtained for the free boundary E, r and x are the density, Young’s modulus, Poisson’s ratio and
condition, and its equivalent circuit is derived. The equivalent cir- angular frequency, respectively. A and B are two constants that
cuit of the mode-conversion transducer system is then given. Sec- can be determined by the boundary condition of the plate.
ondly, the vibrational mode and frequency characteristics of the When the boundary of the plate is free, the flexural moment
mode-conversion transducer are simulated via the numerical and transverse shearing force at the boundary are zero. The follow-
method. Finally, some of the piezoelectric ultrasonic transducers ing equations can be obtained based on Eqs. (2) and (3):
of the vibrational mode-conversion are designed and manufac-
tured; their resonance frequencies and vibrational displacement 1r 1r
A kJ0 ðkaÞ J1 ðkaÞ ¼ B kI0 ðkaÞ I1 ðkaÞ ð4Þ
distributions are measured and compared with the theoretical a a
results.
AJ1 ðkaÞ ¼ BI1 ðkaÞ ð5Þ
2. Theoretical analysis of the piezoelectric ultrasonic transducer where J1 ðkaÞ and I1 ðkaÞ are the first order Bessel functions.
for longitudinal-flexural vibrational mode-conversion The normal function of the normal vibration of order n can be
expressed as
The geometrical diagram of a piezoelectric transducer for
longitudinal-flexural vibrational mode-conversion is presented in fn ðr; tÞ ¼ nn ðrÞ expðjxn tÞ ¼ ½An J0 ðkn rÞ þ Bn I0 ðkn rÞ expðjxn tÞ ð6Þ
Fig. 1. In the mode-conversion transducer, the piezoelectric longi- Therefore, the vibrational velocity can be obtained as follows:
tudinal vibrator, which has a back metal mass and longitudinally
(that is to say, polarized direction is thickness direction of piezo- v n ðr; tÞ ¼ jxn ½An J0 ðkn rÞ þ Bn I0 ðkn rÞ expðjxn tÞ ð7Þ
electric ceramic pieces) polarized piezoelectric ceramic pieces,
drives a circular metal plate to produce flexural vibration, which
2.1.1. The equivalent mass M n of the plate in the n th flexural vibration
radiates acoustic waves into the fluid medium.
In the thin plate, the mass of the volume element of a radial
Let h and a be the thickness and radius of the thin circular plate,
coordinate (r, r þ dr) is 2pqhrdr, and the kinetic energy of the nor-
respectively. p identical circular piezoelectric pieces can be found
mal vibration of order n can be expressed as
in the longitudinal vibrator. Generally, p is an even number. l0 , r 1
and r2 are the thickness, outer radii and inner radii of each piece. 1
dEkn ¼ ð2pqhrdrÞv n v n
The thickness and radius of the back metal mass are lb and Rb , 2
respectively.
Based on Eq. (7), the kinetic energy of the circular plate in the n
th flexural vibration can be obtained as follows:
2.1. Equivalent lumped parameters of a circular plate in Z Z
a a
axisymmetrical flexural vibration for the free boundary condition
dEkn ¼ pqhx2n
2
Ekn ¼ ½An J0 ðkn rÞ þ Bn I0 ðkn rÞ rdr ð8Þ
0 0
In the following analysis, the thickness of the circular plate is
The vibration velocity at the center of the circular plate can be
assumed to be significantly less than its radius. The shearing strain
derived from Eq. (7) in the following manner:
and the rotary inertia are ignored in this case, and the classic thin
plate theory can be used [10]. The transverse displacement for the v n ¼ jxn ðAn þ Bn Þ expðjxn tÞ
axisymmetrical flexural vibration of a circular plate can be
When the center of the circular plate is chosen as the reference
expressed based on the linear elasticity theory as [5].
point of the equivalent mass, the equivalent kinetic energy of the n
fðr; tÞ ¼ nðrÞ expðjxtÞ ¼ ½AJ0 ðkrÞ þ BI0 ðkrÞ expðjxtÞ ð1Þ th flexural vibration can be written as
The flexural moment and transverse shearing force of the thin 1 1
circular plate can be expressed as follows:
E0kn ¼ M n v n v n ¼ Mn ðAn þ Bn Þ2 x2n ð9Þ
2 2
!
@ 2 f r @f where Mn is the equivalent mass at the center of the circular plate in
M r ¼ D þ ð2Þ
@r 2 r @r the n th flexural vibration. Let E0kn ¼ Ekn . The equivalent mass at the
! center of the circular plate can be obtained as follows:
@ 3 f 1 @ 2 f 1 @f Z
Q r ¼ D þ ð3Þ 2m a
@r 3 r @r 2 r 2 @r Mn ¼
2
½An J0 ðkn rÞ þ Bn I0 ðkn rÞ rdr ð10Þ
2
a2 ðA n þ Bn Þ 0
where J0 ðkrÞ is the first-kind Bessel function of order zero, and I0 ðkrÞ
is the first-kind modified Bessel function of order zero, where r is where m is the mass of the plate, m ¼ pa2 hq .
Fig. 1. Geometrical diagram of a piezoelectric ultrasonic transducer for longitudinal-flexural vibrational mode-conversion.
286 X. Zhang, B. Liang / Applied Acoustics 129 (2018) 284–290
Given the free boundary condition Eqs. (4) and (5), for the n th 2.2. Electro-mechanical equivalent circuit for the piezoelectric
flexural vibration, we have ultrasonic transducer of the vibrational mode-conversion
Bn kn J0 ðkn aÞ 1a r J1 ðkn aÞ The equivalent circuit for a circular plate in the flexural vibra-
¼ :
An kn I0 ðkn aÞ 1a r I1 ðkn aÞ tion can be obtained when the radiation impedance and the inter-
Using the recursive formulas and integral relations of Bessel nal mechanical loss are ignored based on the preceding analysis as
functions [11] and substituting the above equation into Eq. (10), shown in Fig. 2. C n is the equivalent compliance constant of the cir-
we can express the equivalent mass at the center of the circular cular plate, C n ¼ 1=K n .
plate in the n th flexural vibration as Based on the transmission line theory and the Mason electro-
h i mechanical equivalent circuit model, the electro-mechanical
J21 ðkn aÞI20 ðkn aÞ 4J21 ðkn aÞð1rÞ equivalent circuit for the mode-conversion piezoelectric ultrasonic
J20 ðkn aÞ þ I21 ðkn aÞ
ðkn aÞ2 I21 ðkn aÞ
Mn ¼ m 2
ð11Þ transducer can be obtained by using the force and velocity contin-
½I1 ðkn aÞ J1 ðkn aÞ uous condition at the boundaries of the longitudinal vibrator and
It is obvious that the equivalent mass depends on the material, the circular plate as shown in Fig. 3.
geometrical dimensions, and frequency. In the figure, the dashed lines a and b divide the equivalent cir-
cuit of the mode-conversion transducer into three parts I, II and III.
These three parts represent the equivalent circuits of the back
2.1.2. The equivalent elastic constant K n of the plate in the n th flexural
metal mass, longitudinally polarized piezoelectric ceramic pieces
vibration
and metal circular plate, respectively. The detailed expressions
The potential energy density of the flexural plate based on the
for the impedances of parts I and II are [6].
thin plate theory can be expressed as follows [10]:
2 !2 !2 ! ! !2 3 Z 01 ¼ Z 02 ¼ jZ 0 tanðpk0 l0 =2Þ ð17Þ
D 4 @2n @2n @2n @2n @2n 5
U¼ þ þ 2r þ 2ð1 rÞ
2 @x2 @y2 @x2 @y2 @x@y Z 03 ¼ Z 0 =½j sinðpk0 l0 Þ ð18Þ
The potential energy of the volume element in the n th flexural Z b1 ¼ Z b2 ¼ jZ b tanðkb lb =2Þ ð19Þ
vibration can be obtained in the cylindrical coordinate through the
following coordinate transformation: Z b3 ¼ Z b =½j sinðkb lb Þ ð20Þ
2 !2 3 qffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi
2
D 4 @ 2 nn 1 @nn 2r @nn @ 2 nn 5 where, Z 0 ¼ q0 V 0 S0 , V 0 ¼ 1=ðSE33 q0 Þ, S0 ¼ pðr 21 r22 Þ; and
dEpn ¼ þ 2 þ 2prdr ð12Þ pffiffiffiffiffiffiffiffiffiffiffiffiffi
2 @r2 r @r r @r @r 2
Z b ¼ qb V b Sb , V b ¼ Eb =qb , Sb ¼ pR2b , k0 ¼ x=V 0 , kb ¼ x=V b . k0 , q0 ,
The potential energy for the circular plate in the n th flexural SE33 , V 0 , and S0 are the wave number, volume density, elastic compli-
vibration from Eq. (12) can be expressed as ance constant, sound speed of longitudinal vibration, and cross-
sectional area for the piezoelectric elements, respectively.
E ph
3
Epn ¼
12ð1 r2 Þ
2 !2 3
Z a 2
4 @ 2
nn 1 @nn 2 r @nn @ 2
n n 5rdr
þ 2 þ ð13Þ
@r 2 r @r r @r @r 2 Mn
0
Cn
The final expression of Eq. (13) can be obtained via Bessel func-
tion of the first kind and the modified Bessel function of the first
kind and by substituting Bn =An into Eq. (13) as follows:
Eph kn A2n n
3 2
ðkn aÞ J20 ðkn aÞ 2ð1 rÞðkn aÞ J 0 ðkn aÞJ1 ðkn aÞ
2
Epn ¼
12ð1 r2 Þ
o
2ð1 rÞrJ21 ðkn aÞ ð14Þ
When the center point of the plate is chosen as the reference Fig. 2. Equivalent circuit for a circular plate in flexural vibration.
point, the equivalent potential energy for the circular plate in the
n th flexural vibration can be written as
1 1 a b
E0pn ¼ K n n2nðr¼0Þ ¼ K n ðAn þ Bn Þ2 ð15Þ
2 2
where K n is the equivalent elastic constant of the plate in the n th
Zb1 Zb2 Z01 Z02
flexural vibration. Let E0pn ¼ Epn . Based on the free boundary condi- Z03 Mn
tion, the equivalent elastic constant of the plate in the n th flexural
Zb3
vibration can be expressed as C0 1:n
Cn
Ep h kn n
3 2
2ð1 rÞðkn aÞJ0 ðkn aÞJ1 ðkn aÞ
2
Kn ¼ ðkn aÞ J20 ðkn aÞ
6ð1r 2Þ
o
2ð1 rÞ rJ21 ðkn aÞ I21 ðkn aÞ=½I1 ðkn aÞ J1 ðkn aÞ
2
ð16Þ I II III
It can be seen that the equivalent elastic constant is also related Fig. 3. Electro-mechanical equivalent circuit of the piezoelectric ultrasonic trans-
to the material, geometrical dimensions and frequency. ducer for vibrational mode-conversion.
X. Zhang, B. Liang / Applied Acoustics 129 (2018) 284–290 287
C 0 ¼ peT33 ð1 K 233 ÞS0 =l0 and n ¼ d33 S0 =ðSE33 l0 Þ. C 0 and n are the According to Eq. (22), one can get the resonance frequency
clamped electric capacitance and electric-mechanical conversion equation for the mode-conversion transducer,
coefficient, respectively; eT33 , K 33 and d33 are free dielectric constant,
Zm ¼ 0 ð23Þ
electro-mechanical coupling coefficient and piezoelectric constant.
kb , qb , Eb , V b and Sb are the wave number, volume density, Young’s and the anti-resonance frequency equation is
modulus, sound speed of longitudinal vibration, and cross-sectional
area for the back metal mass, respectively. n2 þ jxC 0 Z m ¼ 0 ð24Þ
Let Z b and Z p be the input mechanical impedances of the back Eqs. (23) and (24) clearly depend on the material parameters
metal mass and the circular plate with the following expressions: and geometrical dimensions of the mode-conversion transducer.
Z b1 Z b3
Z b ¼ Z b2 þ
Z b1 þ Z b3 3. Numerical simulation of the piezoelectric ultrasonic
transducer for longitudinal-flexural vibrational mode-
1
Z p ¼ jxM n þ conversion
jxC n
where x ¼ 2pf , with f as the vibrational frequency of the trans- The characteristics of the mode-conversion transducer are stud-
ducer. The input mechanical impedance of the mode-conversion ied via the analytical method in the preceding discussion. As a sup-
transducer Z m can be expressed as plementary means of verifying the analytical results, the vibration
and frequency characteristics of the transducer of longitudinal-
ðZ 01 þ Z b ÞðZ 02 þ Z p Þ flexural vibrational mode-conversion are also simulated by using
Z m ¼ Z 03 þ ð21Þ
Z 01 þ Z b þ Z 02 þ Z p ATILA software [12–14].
The material used for the back metal mass and the circular plate
Based on Fig. 3, the input electric impedance of the mode-
in the mode-conversion transducer is duralumin, its standard
conversion transducer can be obtained as follows,
material parameters are qb ¼ qf ¼ qm ¼ 2700 kg/m3, rb ¼ rf ¼
Zm
Ze ¼ ð22Þ 0:34 and Eb ¼ Ef ¼ Em ¼ 7:048 1010 N/m2. The material for the
n2 þ jxC 0 Z m
piezoelectric elements is PZT-4. Its material parameters are
Table 1
Geometrical dimensions of the mode-conversion transducers.
0.060
Admittance magnitude (S)
0.040
0.020
0.000
(a)
Admittance magnitude(S)
0.010
0.005
0.000
(b)
Fig. 4. Simulated admittance-frequency curves of the ultrasonic transducers for vibrational mode-conversion.
288 X. Zhang, B. Liang / Applied Acoustics 129 (2018) 284–290
Fig. 5. Simulated vibrational modal shapes of the ultrasonic transducers for vibrational mode-conversion.
Table 2
Theoretical and measured resonance frequencies of the mode-conversion
transducers.
No. lb a h fr f nr f mr Dn Dm
(mm) (mm) (mm) (kHz) (kHz) (kHz) (%) (%)
Y(S)
140.00m
23.2663317kHz
120.00m
100.00m
80.00m
60.00m
40.00m
20.00m
0.0000
(a)
100.00m
19.1959799kHz
80.00m
60.00m
40.00m
20.00m
0.0000
10.000k 12.000k 14.000k 16.000k 18.000k 20.000k 22.000k 24.000k 26.000k 28.000k 30.000k
(b)
Fig. 7. Measured admittance-frequency curves of the ultrasonic transducers for vibrational mode-conversion.
290 X. Zhang, B. Liang / Applied Acoustics 129 (2018) 284–290
admittance-frequency curves, and are basically consistent with the Science and Technology Project, Ankang University(2017AYJC04)
numerical simulation results presented in Fig. 4. Besides, the vibra- and National Natural Science Foundation of China (11474192) for
tional displacement distributions of the front faces for the mode- their financial support.
conversion transducers are measured by using Polytec PSV-400
scanning laser vibrometer, as shown in Fig. 8. Compared with
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The author wishes to acknowledge the Scientific Research Fund
for High level talents, Ankang University (2015AYQDZR01), the