Itv PDF

Electro-Pneumatic Regulator/Electronic Vacuum Regulator
Series ITV
Stepless control of air pressure ®
proportional to an electrical signal ARJ
Series ITV1000/2000/3000 are compatible with various

AR425
RoHS IP65 to 935
input specifications, including serial communications. ARX

AMR
Serial communications specifications
ARM
Applicable Fieldbus protocols
ARP
Built-in communication board,
so no converter needed. IR
Note 2)
IRV
RS-232C specification to serial communications is standardized.
98(108)
VEX
Compact/lightweight (Integrated communicatioin parts) SRH
Weight: g 350
(ITV1000)
Note 1)
SRP
Power consumption: W or less 4 Note 1) SRF

VCHR
50
Note 1) Value for communications type. (PROFIBUS DP) 50
Electro-Pneumatic Regulators Note 2) ITV1000. Dimensions in parentheses ( ) are for the CC-Link or PROFIBUS DP.
ITV
Series ITV0000 Series ITV1000 IC

Maximum flow rate Maximum flow rate ITVX
6 L /min (ANR) 200 L /min (ANR) PVQ
Set pressure: 0.6 MPa Set pressure: 0.6 MPa
Supply pressure: 1.0 MPa Supply pressure: 1.0 MPa VEF
Grease-free specification (wetted parts) VEP
VER
Series ITV2000 Series ITV3000
VEA
Maximum flow rate Maximum flow rate
1500 L /min (ANR) 4000 L /min (ANR) VY1
Set pressure: 0.6 MPa Set pressure: 0.6 MPa VBA
Supply pressure: 1.0 MPa Supply pressure: 1.0 MPa VBAT
AP100
Electronic Vacuum Regulators

Series ITV009  Series ITV209 
803 D
Compact Electro-Pneumatic Regulator Series ITV0000
Compact Vacuum Regulator Series ITV009 
ITV009
Realizes space-
Compact 15
With a simplified high-
mm
saving and
reduction of weight
for manifold use.
density circuit board de- Stations can easily be in-
sign, an extremely com-
pact size has been ach-
ieved.
Lightweight 100 g
creased or decreased due to
DIN rail mount design.
Model Pressure range Power supply

voltage Input signal Output signal Option
ITV001 0.1 MPa • Cable connectors
4 to 20 mA DC Straight type
ITV003 0.5 MPa Analog Right angle type
24 VDC 0 to 20 mA DC
output
ITV005 0.9 MPa 12 VDC 0 to 5 VDC • Brackets
1 to 5 VDC
 Cable connectors ITV009 –100 kPa
0 to 10 VDC Flat bracket
L-bracket
Straight type and right angle type are available.
Straight type Right angle type  Equivalent to IP65

 Linearity: ±1% F.S. or less
Hysteresis: 0.5% F.S. or less
Repeatability: ±0.5% F.S. or less
 Built-in One-touch
 High-speed response time: 0.1 sec (Without load)
Note) This is not a guaranteed value as it depends on the operating environment.
fittings  High stability
 With error indication Sensitivity 0.2% F.S. or less ITV (Electro-pneumatic regulator)
LED Mist separator

(0.3 µm or less) (0.01 µm or less)
 Brackets
Flat and L-brackets are available.
Air Filter IR (Precision regulator)
L-bracket (5 µm or less)
Flat bracket
Electro-Pneumatic Regulator Series ITV1000/2000/3000

ITV209 
Electronic Vacuum Regulator Series ITV209
Serial communications specifications to
Series ITV1000/2000/3000 are standardized.
 Reduced wiring
Applicable Fieldbus protocols
ITV1000 ITV2000 ITV3000 ITV2090

RS-232C specification to serial communications is standardized.
 Application examples
 Sensitivity: 0.2% F.S. or less
Multi-stage control to analog control Electrostatic coating control
 Linearity: ±1% F.S. or less
Air filter
 Hysteresis: 0.5% F.S. or less Solenoid valves OUT. SUP.
Electro-pneumatic regulator
Pressure
 IP65 regulators
 Cable connections in 2 directions Controller Control
Straight type Right angle type signal Coating material
Electro-pneumatic regulator OUT.
Air filter
Controller
SUP. Mist separator
Coating nozzle
SUP. Controller
 Grease-free specification (Series ITV1000) Analog control
F 804
Electro-Pneumatic Regulator
Electronic Vacuum Regulator
 Stepless control of air pressure proportional to an electrical signal.
Series ITV
Series Model Set pressure range Input signal Port size Page ARJ
Current type: AR425
Series ITV0000 to 935
ITV001 0.001 to 0.1 MPa 4 to 20 mA DC
(Sink type)
Current type: Built-in ARX
0 to 20 mA DC One-touch fittings
ITV003 0.001 to 0.5 MPa 806
(Sink type) Metric size: ø4 AMR
Voltage type: Inch size: ø5/32
0 to 5 VDC
ITV005 0.001 to 0.9 MPa Voltage type: ARM
0 to 10 VDC
ARP
Series ITV1000
ITV101 0.005 to 0.1 MPa
IR
IRV
ITV103 0.005 to 0.5 MPa 1/8, 1/4 814
Current type:
VEX
4 to 20 mA DC
ITV105 0.005 to 0.9 MPa (Sink type)
SRH
Current type:
0 to 20 mA DC
Series ITV2000 (Sink type)
SRP
ITV201 0.005 to 0.1 MPa
Voltage type:
0 to 5 VDC
SRF
Voltage type:
ITV203 0.005 to 0.5 MPa 1/4, 3/8 814 VCHR
0 to 10 VDC
Preset input
(4 points/16 points) ITV
ITV205 0.005 to 0.9 MPa
10 bit digital input
CC-Link compatible IC
Series ITV3000 DeviceNet™ compatible
ITVX
ITV301 0.005 to 0.1 MPa
PROFIBUS DP compatible
RS-232C communication PVQ
ITV303 0.005 to 0.5 MPa 1/4, 3/8, 1/2 814 VEF
VEP
ITV305 0.005 to 0.9 MPa VER

VEA
Series ITV009  Current type:
4 to 20 mA DC (Sink type) VY1
Current type: Built-in

0 to 20 mA DC (Sink type) One-touch fittings VBA
ITV009 –1 to –100 kPa
Voltage type: Metric size: ø4 836 VBAT
0 to 5 VDC Inch size: ø5/32
Voltage type: AP100
0 to 10 VDC
Series ITV209  Current type:

4 to 20 mA DC (Sink type)
Current type:
0 to 20 mA DC (Sink type)
Voltage type: 0 to 5 VDC
Voltage type: 0 to 10 VDC
ITV209 –1.3 to –80 kPa Preset input 1/4 843
(4 points/16 points)
10 bit digital input
CC-Link compatible
DeviceNet™ compatible
PROFIBUS DP compatible
RS-232C communication
805 D
Compact Electro-Pneumatic Regulator
Series ITV0000
RoHS
How to Order
For single unit and single unit for manifold
ITV00 1 0 0 N
Pressure range
Cable connector (Option)
1 0.1 MPa Power supply voltage N Without cable connector
3 0.5 MPa
0 24 VDC ±10% S Straight type 3 m
5 0.9 MPa
1 12 to 15 VDC L Right angle type 2 m
Input signal
0 Current type 4 to 20 mA DC (Sink type) Bracket/Option for single unit only
1 Current type 0 to 20 mA DC (Sink type) Nil Without bracket
2 Voltage type 0 to 5 VDC Flat
3 Voltage type 0 to 10 VDC Bracket
B
Built-in One-touch fittings type
For single unit
Symbol SUPz OUTx EXHc L-bracket
Metric size
Nil ø4
(Light gray)
C
Inch size
U ø5/32"
(Orange)
For manifold
Symbol SUPz OUTx EXHc
Metric size Base type
Nil ø6 ø4 ø6
(Light gray)
Nil For single unit
Inch size
U ø1/4" ø5/32" ø1/4" M For manifolds
(Orange)
How to Order Manifold Assembly (Example)

Manifold
Indicate the part numbers of electro-pneumatic regulators to be mounted
IITV00 02 n below the manifold part number.
Example)
Due to the common supply/exhaust feature, note that different pressure
Option range combinations are not available.
Stations If a DIN rail longer than IITV00-03········1 set (Manifold part no.)
02 2 stations
the specified stations is ∗ITV0030-3MS······2 sets (Electro-pneumatic regulator part no. (1, 2 stations))
required, specify the ∗ITV0030-3ML······1 set (Electro-pneumatic regulator part no. (3 stations))
03 3 stations
applicable stations in Indicate part numbers in order starting from the first station on
···
···
two digits. the D side.

10 10 stations (Maximum 10 stations)
Example) IITV00-05-07 Note)Combination with having different pressure ranges is not
available due to common supply/exhaust features.
One-touch fitting size for supply/
The asterisk (∗) specifies mounting. Add an asterisk (∗) at the beginning
exhaust parts (End plate) of electro-pneumatic regulator part numbers to be mounted.
Nil ø6 (Light gray)
D sid
U ø1/4" (Orange) e
1
2
3·
··
Note) A DIN rail with the length specified by the number of stations
is attached to the manifold. For dimensions of the DIN rail,
refer to the external dimensions. 1
1
DIN rail
3
ITV0030-3MS
ITV0030-3ML
B 806
Specifications
Model ITV001 ITV003 ITV005

Minimum supply pressure Set pressure +0.1 MPa
Maximum supply pressure 0.2 MPa 1.0 MPa
Set pressure range 0.001 to 0.1 MPa 0.001 to 0.5 MPa 0.001 to 0.9 MPa
ARJ
Voltage 24 VDC ±10%, 12 to 15 VDC
Power supply Current Power supply voltage 24 VDC type: 0.12 A or less AR425
consumption Power supply voltage 12 to 15 VDC type: 0.18 A or less to 935
Input signal
Voltage type 0 to 5 VDC, 0 to 10 VDC
ARX
Current type 4 to 20 mA DC, 0 to 20 mA DC (Sink type)
Input impedance
Voltage type Approx. 10 kΩ
AMR
Current type Approx. 250 Ω
Output signal Note 4) Analog output

1 to 5 VDC (Output impedance: Approx. 1 kΩ)
Output accuracy: ±6% F.S. or less
ARM
Linearity ±1% F.S. or less
ARP
Hysteresis 0.5% F.S. or less
Repeatability ±0.5% F.S. or less
IR
Sensitivity 0.2% F.S. or less
Temperature characteristics ±0.12% F.S./°C or less
IRV
Operating temperature range 0 to 50°C (No condensation)
Equivalent to IP65 ∗
Enclosure
VEX
Connection type Built-in One-touch fittings
For single unit

Metric size z, x, c: ø4
SRH
Inch size z, x, c: ø5/32"
Connection size
Manifold
Metric size z, c: ø6, x: ø4
SRP
Inch size z, c: ø1/4", x: ø5/32"
Weight Note 1) 100 g or less (without option)
SRF
Note 1) Indicates the weight of a single unit.
For IITV00-n
Total weight (g) � Stations (n) x 100 + 130 (Weight of end block A, B assembly) + Weight VCHR
(g) of DIN rail
Note 2) When there is a downstream flow consumption, pressure may become unstable
depending on piping conditions. ITV
Note 3) When the input signal is at 0%, the exhaust solenoid valve is controlled to reduce the
outlet pressure to zero. For this reason, a noise may be generated. This noise is normal
and does not indicate a fault.
IC
Note 4) When measuring ITV analog output from 1 to 5 VDC, if the load impedance is less than
100 kΩ, the analog output monitor accuracy of ±6% F.S. or less may not be available. ITVX
The product with the accuracy of within ±6% is supplied upon your request.
Output pressure remains unaffected.
∗ When using under the conditions equivalent to IP65, connect the fitting or tube to the breathing PVQ
hole prior to use. (For details, refer to "Specific Product Precautions 1" on page 849)
Accessories (Option) VEF
VEP
Bracket Cable connector
VER
Flat bracket assembly (includes 2 mounting screws) Straight type
P39800022 M8-4DSX3MG4 VEA
VY1
VBA
VBAT
AP100
L-bracket assembly (includes 2 mounting screws) Right angle type

P39800023 P398000-501-2
Tighting torque when assembling is 0.3 N·m.
807 A
Series ITV0000
Working Principle
When the input signal rises, the air supply soloenoid valve q turns ON. Due to this, part of the supply pressure passes through
the air supply solenoid valve q and changes to output pressure. This output pressure feeds back to the control circuit r via the
pressure sensor e. Here, pressure corrections continue until output pressure becomes proportional to the input signal, enabling
output pressure that is proportional to the input signal.
Working Principle Diagram
Power supply and error

LED indication
Power supply Output signal

r Control circuit
Input signal
P
e Pressure sensor
q Air supply solenoid valve w Exhaust solenoid valve
SUP
EXH OUT
Block Diagram
Supply pressure
q Air supply
solenoid valve
+ Output pressure
Input signal r Control
circuit
–
w Exhaust
solenoid valve
Discharged to atmosphere
e Pressure
sensor
808
Series ITV001
Linearity, Hyteresis Repeatability With 50% of signal input
1 1
0.8
Output deviation factor (% F.S.)

0.6
0.4
0.5
ARJ
Return
0.2
AR425
0 0 to 935
–0.2
–0.4
ARX
Out –0.5
–0.6
AMR
–0.8
–1
0 25 50 75 100
–1
1 2 3 4 5 ARM
Input signal (%F.S.) Count
ARP
Pressure Characteristics Set pressure: 0.05 MPa Flow Characteristics Supply pressure: 0.2 MPa
1 120
IR
100
0.5
Set pressure (kPa) 100kPa
IRV
80
80kPa
Out
VEX
0 60 60kPa
Return
40 40kPa
SRH
–0.5
20 20kPa SRP
10kPa
–1
0.15 0.16 0.17 0.18 0.19 0.20
0
0 0.5 1 1.5 2 2.5 3 3.5 4
SRF
Supply pressure (MPa) Flow rate (L/min (ANR))
VCHR
Series ITV003 ITV
Linearity, Hyteresis Repeatability With 50% of signal input IC
1 1
0.8
ITVX
0.6
Return 0.5
0.4 PVQ
0.2
VEF
0 0
VEP
Out
–0.2
–0.4 VER
–0.5
–0.6
–0.8 VEA
–1 –1
0 25 50 75 100 1 2 3 4 5 VY1
VBA
Pressure Characteristics Set pressure: 0.25 MPa Flow Characteristics Supply pressure: 0.6 MPa VBAT
1 600
500kPa AP100
500
0.5
Set pressure (kPa)
400kPa
400
Out
300kPa
0 300
Return
200kPa
200
–0.5
100kPa
100
50kPa
–1 0
0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 1 2 3 4 5 6 7
809
Series ITV0000
Series ITV005
1 1
0.8

0.6
Return 0.5
0.4
0.2
0 0
Out
–0.2
–0.4
–0.5
–0.6
–0.8
–1 –1
0 25 50 75 100 1 2 3 4 5
Pressure Characteristics Set pressure: 0.45 MPa Flow Characteristics Supply pressure: 1.0 MPa
1 1000
900kPa
900
800kPa
800
0.5 700kPa
Set pressure (kPa)
700
600kPa
Out 600
500kPa
0 500
400kPa
Return 400
300kPa
300
–0.5 200kPa
200
100kPa
100
50kPa
–1 0
0.4 0.6 0.8 1.0 1.2 0 1 2 3 4 5 6 7
810
Dimensions
28
For Single Unit ø6
4x 74
64
PWR
6
ERR
xø
2 ARJ
38
27
15
PWR
ERR 2x AR425
Mo ø3. to 935
4
xø un 5
M tin
L-bracket ou 3.5 gh
(Option)
nt
ing
Flat bracket
(Option)
o le ARX
ho
M8 x 1 le
Cable connection thread AMR
15 6 50
ARM
ARP
IR
IRV
82
73
Note)
Breathing hole
(M3 x 0.5)
3.7 3.7
1
VEX
OUT port SUPz
SUP port
OUTx SRH
13.7
13.7
3
5
(ø4, ø5/32") EXHc (ø4, ø5/32")

2
EXH port
SRP
5
3
6
(ø4, ø5/32")
3.5
7
L-bracket
Flat bracket
(Option)
(Option) SRF
19 VCHR
Port Location
No. z x c ITV
1
ITV00 3  SUP OUT EXH
5 IC
2 x M3 x 0.5 thread depth 3.5
Mounting thread
80 ITVX
ius
rad
Note) When using under the conditions
equivalent to IP65, connect the nd
ing PVQ
+50 be
fittings or tube to the breathing 3000 0 um
m VEF
hole prior to use. ini
(For details, refer to "Specific
15 35 (30.9) M Body VEP
Product Precautions 1" on page
849) VER
ø4
8.7
Cable connector (4 cores)

9.9
VEA
7 14
Straight type (Option)
VY1
Cable connector (4 cores) VBA
Right angle type (Option) VBAT
(21.8)
AP100
Mi (24)
nim Body
um
be
nd
SMC
ing
(24)
SMC
M8
ra
ø10
diu
s8
0
ø4
200050
(45)
(15)
811
Series ITV0000
Dimensions
Single unit for manifold

50
PWR
ERR
M8 x 1
Cable connection thread
15
6
82
Note)
Breathing hole
(M3 x 0.5) 3.7
13.7
2
5
(2)
OUTx port
(4)
(ø4, ø5/32")
Bushing assembly
(2.7)
Note) When using under the conditions equivalent to IP65,

connect the fittings or tube to the breathing hole prior
to use. (For details, refer to "Specific Product Precau-
tions 1" on page 849)
Note) For dimensions of the cable connector, refer to single unit on page 811.
812
Dimensions
Manifold
ARJ
27.5
27.5
AR425
to 935
ARX
40
40
AMR
ARM
Mounting hole
11 11
ARP
IR
L2
Port Location L1
No. z x c
25
IRV
1
ITV00 3  SUP OUT EXH
8
VEX
5.5
5
SRH
PWR
PWR
PWR
PWR
ERR
ERR
ERR
ERR
Note) Stations are counted starting from the D side.
25
35
50
SRP
SRF
5.25
8.5 14 15 8.5 12.5 VCHR

(Pitch) (Pitch)
ITV
6 D side U side IC
1 2 ····stations
ITVX
3 (8) PVQ
Dimensions in inch are SUPz port
noted in parentheses. 1 1 VEF
(ø6, ø1/4") 89.5 VEP
EXHc port
80.5
VER
3 3
(ø6, ø1/4")
47.5
VEA
32.5
21.2
2 2 2
12.5
VY1
3.7 Note)
7.5
Breathing hole VBA

(M3 x 0.5)
VBAT
OUTx port
(ø4, ø5/32")
AP100
Note) For dimensions of the cable connector, refer to single unit on page 811. Note) When using under the conditions equivalent
to IP65, connect the fittings or tubing to the
breathing hole prior to use.
(mm) (For details, refer to "Specific Product Pre-
cautions 1" on page 849).
Manifold stations n 2 3 4 5 6 7 8 9 10
L1 60 75 90 105 120 135 150 165 180
L2 110.5 123 148 160.5 173 185.5 198 223 235.5
Weight of DIN rail (g) 20 22 27 29 31 34 36 41 43
813
Series ITV1000/2000/3000
®
RoHS
How to Order
ITV 3 0 1 0 0 1 2 S
Model
1 1000 type
2 2000 type
3 3000 type
Pressure range Made to Order Specifications

1 0.1 MPa Refer to pages 816, 832, and 833 for details.
3 0.5 MPa
5 0.9 MPa
Pressure display unit
Nil MPa
Power supply voltage 2 Note) kgf/cm2
0 24 VDC
3 bar
1 12 to 15 VDC
4 Note) psi
5 kPa
Note) Communication models
(CC, DE PR, RC), 16 Note) Under Japan's new Measurement Act,
points preset input and 10 this is only for overseas sales (SI units
bit digital input are are to be used inside Japan). For the
available only for 24 VDC. communication models, CC, DE, PR
and RC, only “Nil” is available as it
does not have a pressure display.
Input signal/
Cable connector type
Communication model Monitor output
S Straight type 3 m
Current type 4 to 20 mA DC 1 Analog output 1 to 5 VDC
0 (Sink type)
L Right angle type 3 m
2 Switch output/NPN output
Without cable connector
N
Current type 0 to 20 mA DC 3 Switch output/PNP output
1 (Sink type)
Note) Even when a cable connector is
Analog output 4 to 20 mA DC selected, communication cable is
4
2 Voltage type 0 to 5 VDC (Sink type) not included in the communication
models, CC, DE and PR. Please
3 Voltage type 0 to 10 VDC Nil None order it separately. Refer to the
40 4 points preset input below.
For 10 bit digital input, right angle
16 points preset input type cannot be selected.
52 (Switch output/NPN output)
16 points preset input Bracket ∗
53 (Switch output/PNP output) Thread type Nil Without bracket
60 10 bit digital input Nil Rc B Flat bracket
CC CC-Link N NPT C L-bracket
DE DeviceNet™ T NPTF ∗ Bracket is included.
PR PROFIBUS DP F G
RC RS-232C communication Port size
1 1/8 (1000 type)
2 1/4 (1000, 2000, 3000 type)
3 3/8 (2000, 3000 type)
4 1/2 (3000 type)
For communication cables, use the parts listed below

(refer to M8/M12 connector in Best Pneumatics No.1 for details)
or order the product certified for the respective protocol (with M12 connector) separately.
Application Communication cable part number Note
PCA-1567720 (Socket type) Dedicated Bus adapter supplied
CC-Link compatibility
PCA-1567717 (Plug type) with the product.
DeviceNet™ PCA-1557633 (Socket type)
T-branch connector not supplied.
compatibility PCA-1557646 (Plug type)
PROFIBUS DP PCA-1557688 (Socket type)
C 814
Standard Specifications
ITV101 Note 8) ITV103 Note 8) ITV105 Note 8)
Model ITV201 ITV203 ITV205
ITV301 ITV303 ITV305
Maximum supply pressure
Set pressure range Note 1)
0.2 MPa
0.005 to 0.1 MPa 0.005 to 0.5 MPa
1.0 MPa
0.005 to 0.9 MPa
ARJ
Voltage 24 VDC ± 10%, 12 to 15 VDC AR425
Power supply Current Power supply voltage 24 VDC type: 0.12 A or less Note 9) to 935
consumption Power supply voltage 12 to 15 VDC type: 0.18 A or less
Note 9)
Current type Note 2) 4 to 20 mA DC, 0 to 20 mA DC (Sink type) ARX
ITV1000 ITV2000 Input signal
Preset input
Digital input
4 points (Negative common), 16 points (No common polarity)
10 bit (Parallel)
AMR
Current type 250 Ω or less Note 6)
Voltage type Approx. 6.5 kΩ ARM
Input
impedance Power supply voltage 24 VDC type: Approx. 4.7 kΩ
Preset input
Power supply voltage 12 VDC type: Approx. 2.0 kΩ ARP
Digital input Approx. 4.7 kΩ
Note 3) Analog
4 to 20 mA DC (Sink type) (Output impedance: 250 Ω or less)
IR
Output signal output
(monitor Output accuracy ± 6% F.S. or less
output) Switch NPN open collector output: Max. 30 V, 80 mA IRV
output PNP open collector output: Max. 80 mA
Linearity ± 1% F.S. or less VEX
Repeatability ± 0.5% F.S. or less
ITV3000 Serial-communications Sensitivity 0.2% F.S. or less
SRH
model Temperature characteristics ± 0.12% F.S./°C or less
Symbol
Output pressure Accuracy ± 2% F.S. ± 1 digit or less SRP
display Note 4) Minimum unit MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1 Note 5) , kPa: 1
Ambient and fluid temperature 0 to 50°C (No condensation) SRF
3 Enclosure IP65
ITV10
2
Weight Note 10) ITV20
Approx. 250 g (without options)
Approx. 350 g (without options)
VCHR
1
ITV30 Approx. 645 g (without options)
Note 1) Please refer to Figure 1 for the relationship between set pressure and input. Because the maximum set pres-
ITV
Rated pressure sure differs for each pressure display, refer to page 853.
Note 2) 2-wire type 4 to 20 mA DC is not available. Power supply voltage (24 VDC or 12 to 15 VDC) is required.
Note 3) Select either analog output or switch output. IC
Output pressure
Further, when switch output is selected, select either NPN output or PNP output.
When measuring ITV analog output from 1 to 5 VDC, if the load impedance is less than 100 kΩ, the analog
ITVX
(MPa)
output monitor accuracy of within ±6% (full span) may not be available. The product with the accuracy of
within ±6% is supplied upon your request. Output pressure remains unaffected.
Note 4) Adjustment of numerical values such as the zero/span adjustment or preset input type is set based on the
minimum units for output pressure display (e.g. 0.001 to 0.500 MPa). Note that the unit cannot be changed.
Note 5) The minimum unit for 0.9 MPa (130 psi) types is 1 psi.
PVQ
This range is outside
Note 6) Value for the state with no over current circuit included. If an allowance is provided for an over current circuit, the
0.005MPa
of the control (output).
input impedance varies depending on the input current. This is 350 Ω or less for an input current of 20 mA DC. VEF
0 Note 7) The above characteristics are confined to the static state. When air is consumed on the output side, the pres- VEP
0 100 sure may fluctuate.
Input signal (%F.S.) Note 8) The ITV1000 series is a Grease-free specification (Wetted parts).
Note 9) Refer to the table below for communication specifications. VER
Figure 1. Input/output characteristics chart Note 10) Add 50 g for digital input type, 70 g for 16 points preset input type respectively.
VEA
Communication Specifications (CC, DE, PR, RC)
VY1
Model ITV00-CC ITV00-DE ITV00-PR ITV00-RC
Protocol CC-Link DeviceNet™ PROFIBUS DP RS-232C VBA
Version Note 1) Ver 1.10 Volume1 (Edition3.8), Volume3 (Edition1.5) DP-V0 — VBAT
9.6 k/19.2 k/45.45 k
Communication 156 k/625 k
speed 2.5 M/5 M/10 M bps
125 k/250 k/500 k bps 93.75 k/187.5 k/500 k
1.5 M/3 M/6 M/12 M bps
9.6 kbps AP100
Configulation file Note 2) — EDS GSD —
I/O occupation area 4 word/4 word, 32 bit/32 bit —
(input/output data) (per station, remote device station) 16 bit/16 bit 16 bit/16 bit
Communication data resolution 12 bit (4096 resolution) 12 bit (4096 resolution) 12 bit (4096 resolution) 10 bit (1024 resolution)
Fail safe HOLD Note 3)/CLEAR HOLD/CLEAR
CLEAR HOLD
(Switch setting) (Switch setting)
Electric insulation Note 4) Insulation Insulation Insulation Non-insulation
Terminating resistor Built into the product (Switch setting) Not built into the product Built into the product (Switch setting) —
Current consumption 0.16 A or less 0.14 A or less 0.16 A or less 0.12 A or less
ITV1000 330 320 350 320
Weight ITV2000 430 420 450 420
ITV3000 730 720 750 720
Note 1) Note that version information is subject to change.
Note 2) Configuration files can be downloaded from the operation manual page on SMC's website:http://www.smcworld.com
Note 3) The output HOLD value when a CC-Link communications error occurs can be set based on the bit area data.
Note 4) The insulation between the electrical signal of the communication system and ITV power supply.
815 E
Series ITV1000/2000/3000
Modular Products and Accessory Combinations
Applicable model
Applicable products and accessories
ITV20 ITV30
rSpacer ITV20 q Air filter AF30-A AF40-A
w Mist separator AFM30-A AFM40-A
e L-bracket B310L B410L
r Spacer Y30 Y40
≈189
t Spacer with L-bracket (e + r) Y30L Y40L

≈133
y Spacer with T-bracket — Y40T

∗ For ITV10, use a modular adapter (Refer to page 585 for details).
eL-bracket
178 Accessories (Option)/Part No.

qAF30-A wAFM30-A [Bracket]
Applicable model Description Part No.
ITV10 P398010-600
ITV30 Flat bracket assembly (including mounting screws)
ITV20, 30 P398020-600
ITV10 P398010-601
L-bracket assembly (including mounting screws)
ITV20, 30 P398020-601
[Cable connector]
≈243

Current type Straight type 3 m P398020-500-3
≈172
Voltage type Cable connector (4 cores)

4 points preset input Right angle type 3 m P398020-501-3
Straight type 3 m P398020-500-3
Power cable (4 cores)
Right angle type 3 m P398020-501-3
16 points preset input
234 Signal cable (5 cores)
10 bit digital input Cable connector (13 cores) Straight type 3 m INI-398-0-59
qAF40-A wAFM40-A CC-Link Straight type 3 m P398020-500-3
PROFIBUS DP Power cable (4 cores)
DeviceNetTM Right angle type 3 m P398020-501-3
Made to Order RS-232C
(Refer to pages 832 and 835 for details.) Communication cables
connector (5 cores) Right angle type 3 m P398020-503-3
Symbol Specifications
Note 1) For the 10-bit digital type, there is no right angle type cable connector.
X102 Reverse type Note 2) Even when "with cable connector" is selected the communication cable is not included in the
High pressure type communication model (CC, DE, PR). Please order separately.
X224
(SUP 1.2 MPa, OUT 1.0 MPa)
[Bus adapter]
Set pressure range 1 to 100 kPa Applicable model Description Part No.
X25 (Except Series ITV3000)
CC-Link Bus adapter (Bus adapter supplied with the product.) EX9-ACY00-MJ
High speed response type
X88
(Except Series ITV3000)
X26
For manifold mounting Dimensions
(Except Series ITV3000)
Flat bracket L-bracket
X410 Linearity: ±0.5% F.S. or less
100
X420 With alarm output 10
7
Note 1) Manifolds are compatible with 2 to 8 stations.

15
25
Consult with SMC for 9 stations or more. 4x

Note 2) Products without symbols are also compatible. R3
52
40
.5 2.3
Consult with SMC separately. (8.5) 33
Note 3) Compliant with CE marking 50
4 x ø7 84 50
Model Bracket tightening torque
ITV1000 0.76 ± 0.05 N·m
ITV2000/3000 1.5 ± 0.05 N·m 60 20
70
12
1.6
C 816
Working Principles
When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF. Therefore,
supply pressure passes through the air supply solenoid valve q and is applied to the pilot chamber e. The pressure in the pilot
chamber e increases and operates on the upper surface of the diaphragm r.
As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output
pressure. ARJ
This output pressure feeds back to the control circuit i via the pressure sensor u. Here, a correct operation functions until the
output pressure is proportional to the input signal, making it possible to always obtain output pressure proportional to the input AR425
to 935
signal.
ARX
AMR
Pressure display
ARM
Power supply i Control Output signal
Input signal circuit P
u Pressure sensor
ARP
Pressure display
q Air supply
solenoid
w Exhaust
solenoid
IR
Power supply i Control Output signal
circuit valve valve
Input signal P
u Pressure sensor EXH
IRV
q Air supply w Exhaust
solenoid solenoid VEX
valve valve
r Diaphragm
EXH e Pilot chamber SRH
y Exhaust SRP
valve
r Diaphragm
e Pilot chamber t Supply
EXH
SRF
valve
t Supply valve
VCHR
SUP OUT SUP OUT
ITV
EXH
y Exhaust
valve
IC
ITV1000 ITV2000, 3000 ITVX
PVQ
VEF
Block Diagram VEP
VER
Supply pressure
VEA
q Air supply solenoid valve

VY1
Input signal Output pressure VBA
i Control circuit r Diaphragm Pilot valve VBAT
w Exhaust solenoid valve
AP100
u Pressure sensor
817 B
Series ITV1000/2000/3000
Series ITV101
Linearity Hysteresis Repeatability

1.0 1.0
0.10
Output deviation factor (%F.S.)

Out
0.09
0.5 0.5
Set pressure (MPa)
0.08
0.07
0.06 Return
0.0 0.0
0.05
0.04
0.03
–0.5 –0.5
0.02
0.01
0.00 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
Input signal (%F.S.) Input signal (%F.S.) Repetition
Pressure characteristics Set pressure: 0.05 MPa Flow characteristics Supply pressure: 0.2 MPa Relief flow characteristics Supply pressure: 0.2 MPa
1.0 0.15 0.25
0.20
0.5
Set pressure (MPa)
Set pressure (MPa)

0.10
Set point 0.15
0.0
0.10
0.05
–0.5
0.05
–1.0 0.00
0.0 0.1 0.2 0.3 0 20 40 60 80 100 0 20 40 60 80
Supply pressure (MPa) Flow rate (L/min (ANR)) Flow rate (L/min (ANR))
Series ITV201

1.0 1.0
0.10
0.09
0.5 0.5
Set pressure (MPa)
0.08
0.07 Out
0.06
0.0 0.0
0.05
0.04 Return
0.03
–0.5 –0.5
0.02
0.01
0.00 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
1.0 0.15 0.25
0.20
0.5
Set pressure (MPa)
Set pressure (MPa)
0.10
Set point
0.15
0.0
0.10
0.05
–0.5
0.05
–1.0 0.00
0.0 0.1 0.2 0.3 0 200 400 600 0 200 400 600 800
818
Series ITV301

1.0 1.0
0.10

0.09
0.5 0.5 ARJ
Set pressure (MPa)
0.08
0.07
0.06
Out AR425
0.05
0.0 0.0 to 935
Return
ARX
0.04
0.03 –0.5 –0.5
0.02
0.01 AMR
0.00 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
Input signal (%F.S.) Input signal (%F.S.) Repetition ARM
ARP
1.0 0.15 0.25
IR
0.20
0.5
IRV
Set pressure (MPa)
Set pressure (MPa)

0.10
Set point
0.15
0.0 VEX
0.10
–0.5
0.05
SRH
0.05
SRP
–1.0 0.00 0.00
0.0 0.1 0.2 0.3 0 500 1000 1500 2000 0 500 1000 1500 2000
Supply pressure (MPa) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) SRF
VCHR
ITV
IC
ITVX
PVQ
VEF
VEP
VER
VEA
VY1
VBA
VBAT
AP100
819
Series ITV1000/2000/3000
Series ITV103

0.6 1.0 1.0

0.5 Out
0.5 0.5
Set pressure (MPa)
0.4
Return
0.3 0.0 0.0
0.2
–0.5 –0.5
0.1
0.0 –1.0 –1.0

0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
1.0 0.6 0.8
0.7
0.5
0.5 0.6
Set pressure (MPa)
Set pressure (MPa)

Set point 0.4
0.5
0.0 0.3 0.4
0.3
0.2
–0.5 0.2
0.1
0.1
–1.0 0.0 0.0
0.2 0.4 0.6 0.8 0 50 100 150 200 250 0 50 100 150 200
Series ITV203

0.6 1.0 1.0
0.5
0.5 0.5
Set pressure (MPa)
0.4
Out
0.3 0.0 0.0

Return
0.2
–0.5 –0.5
0.1
0.0 –1.0 –1.0

0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
1.0 0.6 0.8
0.7
0.5
0.5 0.6
Set pressure (MPa)
Set pressure (MPa)
Set point 0.4

0.5
0.0 0.3 0.4
0.3
0.2
–0.5 0.2
0.1
0.1
–1.0 0.0 0.0

0.2 0.4 0.6 0.8 0 500 1000 1500 2000 0 500 1000 1500 2000
820
Series ITV303

0.6 1.0 1.0

0.5
0.5 0.5 ARJ
Set pressure (MPa)
0.4
Out
AR425
0.3 0.0 0.0 to 935
Retirm
0.2
ARX
–0.5 –0.5
0.1
AMR
0.0 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
ARP
1.0 0.6 0.8
IR
0.7
0.5
0.5 0.6
IRV
Set pressure (MPa)
Set pressure (MPa)

Set point 0.4
0.5
0.0 0.3 0.4 VEX

0.3
–0.5
0.2
0.2 SRH
0.1
0.1
SRP
–1.0 0.0 0.0
0.2 0.4 0.6 0.8 0 1000 2000 3000 4000 5000 6000 0 1000 2000 3000 4000 5000
Supply pressure (MPa) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) SRF
VCHR
ITV
IC
ITVX
PVQ
VEF
VEP
VER
VEA
VY1
VBA
VBAT
AP100
821
Series ITV1000/2000/3000
Series ITV105

1.0 1.0 1.0
0.9

0.8
Out
0.5 0.5
Set pressure (MPa)
0.7
0.6
0.5 0.0 0.0
0.4
Return
0.3
–0.5 –0.5
0.2
0.1
0.0 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
1.0 1.0 1.0
0.9 0.9
0.8 0.8
0.5
Set pressure (MPa)
Set pressure (MPa)

0.7 0.7
Set point
0.6 0.6
0.0 0.5 0.5
0.4 0.4
0.3 0.3
–0.5
0.2 0.2
0.1 0.1
–1.0 0.0 0.0
0.4 0.6 0.8 1 1.2 0 50 100 150 200 250 300 350 0 50 100 150 200 250 300
Supply pressure (MPa) Flow rate (L /min (ANR)) Flow rate (L /min (ANR))
Series ITV205

1.0 1.0 0.5
0.9
0.8 Out
0.5 0.25
Set pressure (MPa)
0.7
0.6
0.5 0.0 0
0.4 Return
0.3
0.2
–0.5 –0.25
0.1
0.0 –1.0 –0.5
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
1.0 1.0 1.0
0.9
0.9
0.8 0.8
0.5
Set pressure (MPa)
Set pressure (MPa)
0.7 0.7
Set point
0.6 0.6
0.0 0.5 0.5
0.4 0.4
0.3 0.3
–0.5
0.2 0.2
0.1 0.1
–1.0 0.0 0.0
0.4 0.6 0.8 1.0 1.2 0 500 1000 1500 2000 2500 0 500 1000 1500 2000 2500
Supply pressure (MPa) Flow rate (L /min (ANR)) Flow rate (L /min (ANR))
822
Series ITV305

1.0 1.0 1.0
0.9

0.8

0.7
0.5
Out
0.5 ARJ
Set pressure (MPa)
0.6 AR425
0.5 0.0 0.0 to 935
0.4 Return
0.3
–0.5
ARX
–0.5
0.2
0.1 AMR
0.0 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
ARP
1.0 1.0
0.9
1.0
0.9
IR
0.8 0.8
0.5
IRV
Set pressure (MPa)

Set pressure (MPa)
0.7 0.7
Set point
0.6 0.6
0.0 0.5 0.5 VEX
0.4 0.4
–0.5
0.3 0.3 SRH
0.2 0.2
0.1 0.1 SRP
–1.0 0.0 0.0
0.4 0.6 0.8 1.0 1.2 0 1000 2000 3000 4000 5000 6000 7000 0 1000 2000 3000 4000 5000 6000
Supply pressure (MPa) Flow rate (L /min (ANR)) Flow rate (L /min (ANR)) SRF
VCHR
ITV
IC
ITVX
PVQ
VEF
VEP
VER
VEA
VY1
VBA
VBAT
AP100
823
Series ITV1000/2000/3000
Construction
ITV1000
Main Component Parts
No. Description Material
 1 Body Aluminum alloy
o !2
2 Cover Aluminum alloy
 3 Valve guide Aluminum alloy
y Aluminum alloy
t  4 Diaphragm assembly Weather resistant NBR
Steel
!4 u 5 Seal NBR
Resin
6 Bowl assembly
Silicone rubber
w
i 7 Sub-plate Resin
8 Seal NBR
!5 9 Control circuit assembly —
r  10 Bumper NBR
Stainless steel
 11 Valve
!0 HNBR
!1 12 Solenoid valve —
SUP OUT
 13 O-ring NBR
q 14 Round head Phillips screw Steel
!3
 15 Flat washer Stainless steel
∗ Parts in contact with fluid are indicated with a mark .
e
ITV2000
!7 No. Description Material
!8  2 Intermediate body Aluminum alloy
!4
3 Cover Aluminum alloy
 4 Valve guide Aluminum alloy
@1 !5  5 Valve (Supply valve) HNBR/Brass
 6 Valve (Exhaust valve) HNBR/Brass
!3  7 Valve spring Stainless steel
!6  8 Valve spring Stainless steel
e Stainless steel
o  9 Diaphragm assembly
Aluminum alloy
!1 Weather resistant NBR
Steel
!0 w  10 Seal NBR
 11 Bias spring Stainless steel
!9
u  12 O-ring NBR
13 Seal NBR
q
Resin
@2 14 Bowl assembly
y Silicone rubber
15 Sub-plate Resin
SUP OUT
16 Seal NBR
!2 17 Control circuit assembly —
18 Solenoid valve —
@0 t  19 O-ring NBR
20 O-ring NBR
r 21 Round head Phillips screw Steel
i
 22 Retaining ring Stainless steel
∗ Parts in contact with fluid are indicated with a mark .
A 824
Construction
ITV3000
No. Description Material
!8
1 Cover Aluminum alloy ARJ
 3 Valve guide Aluminum alloy AR425
!9 to 935
!5  4 Bias spring Stainless steel
 5 Intermediate body Aluminum alloy ARX
Weather resistant NBR
@3 !4
Rolled sheet steel AMR
!6  6 Diaphragm assembly Stainless steel
!7 Aluminum alloy ARM
Steel
q  7 Valve (Supply valve) HNBR/Brass ARP
y  8 Valve (Exhaust valve) HNBR/Brass
!1  9 Valve spring Stainless steel IR
@2  10 Seal NBR
r 11 Seal NBR IRV
 12 Rod guide Brass
!0 t  13 O-ring retainer Aluminum alloy VEX
14 Seal NBR
i !2 15 Bowl assembly
Resin SRH
Silicone rubber
u 16 Sub-plate Resin SRP
17 Seal NBR
SUP OUT 18 Control circuit assembly — SRF
19 Solenoid valve —
!3
w
20 O-ring NBR VCHR
@1  21 O-ring NBR
@0
 22 O-ring NBR ITV
e 23 Round head Phillips screw Steel
o ∗ Parts in contact with fluid are indicated with a mark . IC
ITVX
PVQ
VEF
VEP
VER
VEA
VY1
VBA
VBAT
AP100
825 A
Series ITV1000/2000/3000
Dimensions
ITV10
Note) Do not attempt to rotate, as the cable connector does not turn.
Flat bracket
Right angle type (4 cores) Straight type (4 cores)
Cable connector 3 m Cable connector 3 m
100
84
50
(33)
52
40
ø7
Setting part
x
4
M12 x 1 12.5
Cable connection thread (Plug type)
11
Digital pressure display
M3 x 0.5
Solenoid valve
EXH
Solenoid
71
valve
1/8 (Rc, NPT, NPTF, G)
EXH
EXH port
11 8.5
SUP OUT EXH (3)

11
1.6
12
13.5
Flat bracket assembly 2 x 1/8, 1/4 (Rc, NPT, NPTF, G)
40 SUP port, OUT port
P398010-600
(Option)
4 x M4 x 0.7 thread depth 6 mm
L-bracket
L-bracket assembly
P398010-601
(Option)
15
25
2.3
22
10 45
(8.5) 33
50
B 826
Dimensions (16 points preset input, 10 bit digital input, CC-Link, DeviceNet™, PROFIBUS DP and RS-232C)
16 points preset input 10 bit digital input
M12 x 1
Signal cable connection M12 x 1
Power cable connection thread HIROSE ELECTRIC CO., LTD. Made
thread (Plug type) RP13A-12RB-13PA (71)
(Plug type)
20
11
8.5 (ø14.3) (ø14.3) ARJ
9
Digital pressure Digital pressure AR425
display display to 935
M3 x 0.5 M3 x 0.5 ARX

Solenoid Solenoid
valve EXH
98
Solenoid
98
valve EXH
valve
Solenoid
valve AMR
8.5
8.5
EXH EXH
SUP OUT EXH (3) SUP OUT EXH (3) ARM

ARP
11
11
13.5 13.5
12
12
IR
CC-Link/ITV100-CC IN M12 x 1 DeviceNet™/ITV100-DE
Communication cable
OUT M12 x 1
connection thread IRV
Communication cable connection (Plug type)
thread (Socket type)
20
M12 x 1
(60)
M12 x 1 VEX
M12 x 1
Power cable connection Communication cable connection
thread (Plug type) thread (Plug type) Power cable connection thread
(Plug type) SRH
(53)
11
BUS 20 8.5
SRP
11
adapter
8.5
SRF
M3 x 0.5 M3 x 0.5
Solenoid Solenoid VCHR
108
98
valve EXH Solenoid valve EXH Solenoid
valve valve
ITV
8.5
8.5
EXH EXH
SUP OUT SUP OUT

EXH (3) EXH (3)
IC
11
11
13.5 13.5
12
12
∗ Dimensions not shown are same as on page 826. ∗ Dimensions not shown are same as on page 826.
ITVX
PROFIBUS DP/ITV100-PR RS-232C/ITV100-RC PVQ

M12 x 1
M12 x 1 M12 x 1 VEF
Communication cable connection
thread (Socket type) Power cable connection thread Communication cable connection
M12 x 1 VEP
(Plug type) thread (Plug type) Power cable connection thread
10.5 11.5 9.5 (Plug type)
VER
11
20 8.5
16.3
11
VEA
M3 x 0.5 M3 x 0.5 VY1

Solenoid Solenoid
108
VBA
98
valve EXH Solenoid valve EXH Solenoid

valve valve VBAT
8.5
8.5
EXH EXH
AP100
SUP OUT EXH (3) SUP OUT EXH (3)
11
11
13.5 13.5
12
12
With power cable connector Straight type (4 cores) Right angle type (4 cores)
52 Cable connector 3 m Cable connector 3 m
53
CC
∗ ITV100- DE common dimensions
(33)
PR
RC
Note) Order communication cable Note) Do not attempt to rotate,
(other than 16 points, RS-232C) as the cable connector
separately. (Refer to page 814.) does not turn.
827 C
Series ITV1000/2000/3000
Dimensions
ITV20
Flat bracket
100
84
50
(33)
52
40
ø7
x
4
12.5
M12 x 1
11
M5 x 0.8
Solenoid valve
EXH Solenoid
93
valve
EXH 1/4 (Rc, NPT, NPTF, G)
EXH port
13.5
SUP OUT EXH (3)

19
19
1.6
12
10 2 x 1/4, 3/8 (Rc, NPT, NPTF, G)

36 Flat bracket assembly SUP port, OUT port
P398020-600
(Option)
L-bracket
L-bracket assembly
P398020-601
(Option)
15
25
2.3
45
10
(8.5) 33
50
B 828
M12 x 1 M12 x 1
Signal cable connection Power cable connection thread HIROSE ELECTRIC CO., LTD. Made
thread (Plug type) (Plug type) RP13A-12RB-13PA (71)
20 8.5 (ø14.3) (ø14.3)
11
ARJ
9
Digital pressure Digital pressure
display display
AR425
M5 x 0.8 to 935
M5 x 0.8
Solenoid
Solenoid
valve EXH valve EXH ARX
120
120
Solenoid Solenoid
13.5
13.5
valve valve
EXH EXH AMR
SUP OUT EXH (3) SUP OUT EXH (3) ARM
19
19
10 10
ARP
12
12
CC-Link/ITV200-CC IN M12 x 1 DeviceNet™/ITV200-DE IR

M12 x 1 Communication cable connection
Power cable connection thread
(Plug type)
thread (Plug type)
M12 x 1 M12 x 1 IRV
20 (60)
OUT M12 x 1 Communication cable connection Power cable connection thread
Communication cable thread (Plug type) (Plug type) VEX
connection thread
(53)
(Socket type)
11
BUS 20 8.5
SRH
11
adapter
8.5 SRP
M5 x 0.8 M5 x 0.8
Solenoid Solenoid SRF
valve EXH
130
valve EXH Solenoid

Solenoid 120
VCHR
13.5
valve valve
13.5
EXH EXH
SUP OUT EXH (3) SUP OUT EXH (3)

ITV
19
19
10 10 IC
12
12
ITVX
PROFIBUS DP/ITV200-PR RS-232C/ITV200-RC
M12 x 1
PVQ
M12 x 1 M12 x 1 M12 x 1
thread (Socket type)
Power cable connection thread Communication cable connection Power cable connection thread VEF
10.5 11.5
(Plug type) 9.5 thread (Plug type) (Plug type) VEP
11
20 8.5
VER
11
16.3
VEA
M5 x 0.8 M5 x 0.8
Solenoid Solenoid VY1
130
valve EXH valve EXH

Solenoid Solenoid
120
VBA
13.5
valve valve
13.5
EXH EXH VBAT
SUP OUT EXH (3) SUP OUT EXH (3) AP100

19
19
10 10
12
12
With power cable connector

Straight type (4 cores) Right angle type (4 cores)
52
∗ ITV200- CC
DE common dimensions
(33)
PR
RC

829 C
Series ITV1000/2000/3000
Dimensions
ITV30
Flat bracket
52
ole Right angle type (4 cores) Straight type (4 cores)
40 7 gh
x ø ntin Cable connector 3 m Cable connector 3 m
4
ou
M
(33)
66
50
100
84
M12 x 1 12.5
11
M5 x 0.8
Solenoid
valve EXH
Solenoid
valve EXH
114
44

EXH port
EXH (3)
SUP OUT
25
22
12
1.6
Flat bracket assembly 2 x 1/4, 3/8, 1/2 (Rc, NPT, NPTF, G)

15.5 P398020-600 36 SUP port, OUT port
(Option)
L-bracket
L-bracket assembly
P398020-601
(Option)
15
25
2.3
45
10
(8.5) 33
50
B 830
M12 x 1 M12 x 1
Signal cable connection Power cable connection thread HIROSE ELECTRIC CO., LTD. Made
thread (Plug type) (Plug type) RP13A-12RB-13PA (71)
20 11 8.5 (ø14.3) (ø14.3)
ARJ
9
display display
AR425
M5 x 0.8 M5 x 0.8 to 935
Solenoid Solenoid
Solenoid Solenoid
valve
EXH valve valve valve ARX
EXH
141
141
EXH EXH
AMR
44
44
EXH (3) EXH (3)
SUP OUT SUP OUT ARM
22
22
15.5 15.5
ARP
12
12
IR
CC-Link/ITV30-CC IN M12 x 1
DeviceNet™/ITV30-DE
M12 x 1
thread (Plug type)
IRV
(Plug type) M12 x 1 M12 x 1
20 (60)
OUT M12 x 1
Communication cable
thread (Plug type)
(Plug type)
VEX
connection thread
(53)
BUS
SRH
11
(Socket type) 20 8.5
11
adapter
8.5
M5 x 0.8
SRP
M5 x 0.8
Solenoid
Solenoid
valve
valve SRF
EXH
EXH
151
151
141
Solenoid Solenoid VCHR

valve
44
valve
44
EXH EXH (3) EXH EXH (3)

ITV
SUP OUT SUP OUT
22
22
IC
15.5 15.5
12
12
12
ITVX
PROFIBUS DP/ITV30-PR RS-232C/ITV30-RC PVQ

M12 x 1 M12 x 1 M12 x 1 M12 x 1 VEF
Communication cable connection thread (Socket type) Power cable connection thread (Plug type) Communication cable connection Power cable connection thread VEP
10.5 11.5 9.5 thread (Plug type) (Plug type)
11
20 8.5
VER
11
16.3
M5 x 0.8
M5 x 0.8
VEA
Solenoid
Solenoid
valve
EXH
valve VY1
EXH
151
151
141
VBA
Solenoid Solenoid VBAT
valve valve
44
44
EXH (3) EXH (3)

EXH EXH
AP100
SUP OUT SUP OUT
22
22
15.5 15.5
12
12
12
53
∗ ITV30- CC
DE common dimensions
(33)
PR
RC
831 C
®
RoHS
Series ITV1000/2000/3000
Made to Order Specifications 1 Made to
Order
Please contact SMC for detailed dimensions, specifications and lead times.
1 Reverse Type 2 High Pressure Type (SUP 1.2 MPa, OUT 1.0 MPa)
In compliance with input, inverse proportional pressure is displayed.
ITV10 5 X224
ITV10 X102
ITV20 5 X224
ITV20 X102
ITV30 5 X224
ITV30 X102 Note 1) For preset input type, digital input type and communication models,
consult SMC for availability.
Rated
pressure
Output pressure
(MPa)
This range is
outside of the
control (output).
0.005 MPa
0
0 100
Input signal (%F.S.)
Input/output characteristics chart
Note 1)  in part number is the same model no. for the standard products.
Note 2) Except for preset input type and digital input type.
Note 3) For communication models, consult SMC for availability.
3 Set Pressure Range 1 to 100 kPa

ITV10 1 X25
ITV20 1 X25
Note 1) For preset input type, digital input type and communication models,
consult SMC for availability.
B 832
®
RoHS
Series ITV1000/2000/3000
Made to Order Specifications 2
4 High-Speed Response Time Type

Pressure response with no load is approx. 0.1 sec.
Note 1) This is not a guaranteed value as it depends on the operating environment.
Note 2) When the input signal is at 0%, the exhaust solenoid valve is controlled to reduce the outlet pressure to zero. For this reason, a noise may be ARJ
generated. This noise is normal and does not indicate a fault.
AR425
to 935
ITV 2 0 1 0 01 2 S X88 ARX
Model
AMR
1 1000 type
Nil
2 2000 type
2∗
MPa
kgf/cm2
ARM
3 bar
Pressure range 4∗ psi ARP
5 kPa
1 0.1 MPa
3 0.5 MPa
∗ Under Japan's new Measurement Act,
this is only for overseas sales
IR
5 0.9 MPa (SI units are to be used inside Japan).
IRV
Power supply voltage S Straight type 3 m VEX
0 24 VDC L Right angle type 3 m
1 12 to 15 VDC N Without cable connector SRH
Input signal SRP

0 Current type 4 to 20 mA DC (Sink type) Bracket ∗
1 Current type 0 to 20 mA DC (Sink type) SRF
Nil Without bracket
2 Voltage type 0 to 5 VDC
B Flat bracket
C L-bracket VCHR
∗ Bracket is included.
ITV
Monitor output
1 Analog output 1 to 5 VDC Port size IC
1 1/8 (1000 type)
3 Switch output/PNP output
2 1/4 (1000, 2000 type) ITVX
Analog output 4 to 20 mA DC
4 3 3/8 (2000 type)
(Sink type)
PVQ
VEF
Thread type VEP
Nil Rc
N NPT VER
T NPTF
F G VEA
VY1
VBA
VBAT
AP100
833 C
®
RoHS
Series ITV1000/2000/3000
Made to Order Specifications 3 Made to
Order
5 Manifold Specifications (Except Series ITV3000)

2 through 8 station manifold.
How to Order Manifolds How to Order Manifold Assemblies ARJ

IITV20 02 5 Example Blanking plate assembly
AR425
to 935
Stations Electro-pneumatic regulator P398020-13
2 2 stations ITV1030-311S-X26 Electro-pneumatic regulator ARX
ITV2050-212S-X26
8 8 stations
AMR
ITV1000, 2000 OUT port size
02 1/4 Rc, NPT, NPTF1/2 ARM
03 3/8 2 x SUP port
Connection thread type

ARP
Nil Rc
N NPT IR
F NPTF
IRV
VEX
How to Order for Manifold Mounted 1
ITV 1 0 1 X26
2 SRH
Manifold base (3 stations)
3
ITV 2 0 2 X26 IITV20-02-3
Rc, NPT, NPTF1/4
····S
tatio
ns Note 1)
SRP
OUT port
Note 1)  in part number is the same model no. for the standard products. SRF
Note 2) For communication models, consult SMC for availability.
Note 3) The thread type is Rc only.
Note 4) For Series ITV1000, the port size is 1/8 only. Note) Refer to the table below for possible mixed combination. VCHR
Note 5) For Series ITV2000, the port size is 1/4 only. Model ITV101 ITV103 ITV105 ITV201 ITV203 ITV205
Note 6) The bracket accessory can not be selected.
Note 7) Not applicable to Series ITV3000
ITV101  — —  — — ITV
ITV103 —   —  
ITV105 —   —   IC
ITV201  — —  — —
ITV203 —   —  
IITV20-02-3 …………………1 set (3 station manifold base part no.)
∗ITV1030-311S-X26 ………1 set (Electro-pneumatic regulator part no.) Note 2) ITV205 —   —   ITVX
∗P398020-13 ……………… 1 set (Blanking plate assembly part no.) Note 1) Electro-pneumatic regulators are counted starting from station 1 on the
∗ITV2050-212S-X26 ………1 set (Electro-pneumatic regulator part no.) Note 2) left side with the OUT ports in front. PVQ
Note 2) The port size for mounted electro-pneumatic regulators is Rc 1/8 (ITV1000),
The ∗ is the symbol for mounting. Add the ∗ symbol at the VEF
Rc 1/4 (ITV2000) only.
beginning of part numbers for electro-pneumatic regulators, etc. to
be mounted on the base. Note 3) When there is a large number of stations, use piping with the largest VEP
possible inside diameter for the supply side, such as steel piping.
Note 4) The use of the straight type cable connector is recommended. To mount VER
right angle type, be certain to check that no possible interference occurs.
Note 5) When mounting a blanking plate and the regulator with different pressure set,
please inform SMC of the order of a manifold station beside a purchase order. VEA
VY1
VBA
VBAT
AP100
833-1 B
®
RoHS
Series ITV1000/2000/3000
Please contact SMC for detailed dimensions, specifications, and lead times.
6 Linearity: ±0.5% F.S. or Less

Application examples: Polishing equipment and peripheral equipment for wafers, LCD glasses, color filters, etc.
ITV 3 0 1 0 0 1 2 S X410
Model Linearity:
1 1000 type
Pressure range ±0.5% F.S. or less
2 2000 type
1 0.1 MPa Pressure display unit
3 3000 type
3 0.5 MPa
Nil MPa
5 0.9 MPa
2 Note) kgf/cm2
Bracket ∗
3 bar
Power supply voltage Nil Without bracket
4 Note) psi
0 24 VDC B Flat bracket
5 kPa
1 12 to 15 VDC C L-bracket ,
Note) Under Japan s new Measurement Act,
∗ Bracket is included. this is only for overseas sales (SI units
Input signal are to be used inside Japan).
Current type 4 to 20 mA DC Port size
0 1 1/8 (1000 type) Cable connector type
(Sink type)
2 1/4 (1000, 2000, 3000 type) S Straight type 3 m
Current type 0 to 20 mA DC
1 3 3/8 (2000, 3000 type) L Right angle type 3 m
(Sink type)
2 Voltage type 0 to 5 VDC 4 1/2 (3000 type) N Without cable connector
Monitor output Rated

1 Analog output 1 to 5 VDC pressure
2 Switch output/NPN output -X410 Standard model
Output pressure (MPa)
3 Switch output/PNP output ±0.5% F.S. ±1% F.S.

Analog output 4 to 20 mA DC
4
(Sink type)
Thread type
Nil Rc
N NPT
T NPTF
0
F G
Input signal (% F.S.) 100
The graph shown above is a typical example. (This graph shows that the output
pressure curve is in a negative range when compared to the ideal line.)
Specifications
Fluid Air
Maximum supply pressure 1.0 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
(Supply side) 1.5 MPa (Pressure range 0.1 MPa type: 0.3 MPa)
Proof pressure
(Output side) 1 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
Set pressure range 1: 0.005 to 0.1 MPa, 3: 0.005 to 0.5 MPa, 5: 0.005 to 0.9 MPa
Power supply voltage 0: 24 VDC ±10%, 1: 12 to 15 VDC
0.12 A or less (24 VDC ±10% type)
Current consumption
0.18 A or less (12 to 15 VDC type)
Input signal 0: 4 to 20 mA, 1: 0 to 20 mA, 2: 0 to 5 VDC, 3: 0 to 10 VDC
Input impedance Voltage type: Approx. 6.5 kΩ, Current type: 250 Ω or less
Output signal Analog output: 1 to 5 VDC/4 to 20 mA DC, Switch output (NPN/PNP)
Linearity ±0.5% F.S. or less
Accuracy ±2% F.S. ±1 digit or less
Output pressure display
Minimum unit MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1, kPa: 1
Ambient and fluid temperature 0 to 50°C (No condensation)
Enclosure IP65
Weight ITV10: Approx. 250 g, ITV20: Approx. 350 g, ITV30: Approx. 645 g (without brackets)
The above characteristics (specifications) are confined to the static state. When air is consumed on the output side, the pressure may fluctuate.
B 834
®
RoHS
Series ITV1000/2000/3000
Please contact SMC for detailed dimensions, specifications, and lead times.
7 With Alarm Output

Alarm is output if the set pressure is not reached or maintained for 5 seconds or more.
Application examples: Pressure management for thrust control, etc.
ARJ
ITV 3 0 1 0 0 2 2 S X420 AR425
to 935
Model
With alarm output
Pressure range
1 1000 type
Pressure display unit ARX
2 2000 type 1 0.1 MPa
Cable connector type Nil MPa
3 0.5 MPa
3 3000 type
S Straight type 3 m 2 Note) kgf/cm2 AMR
5 0.9 MPa
L Right angle type 3 m 3 bar
Power supply voltage N Without cable connector 4 Note) psi ARM
0 24 VDC Bracket ∗ 5 kPa
1 12 to 15 VDC Nil Without bracket Note) Under Japan’s new ARP
Measurement Act,
B Flat bracket
Input signal
C L-bracket
this is only for over- IR
Current type 4 to 20 mA DC seas sales (SI units
0 Monitor output are to be used in-
(Sink type) 2 Alarm output/NPN output side Japan). IRV
Current type 0 to 20 mA DC 3 Alarm output/PNP output Port size
1
(Sink type) 1 1/8 (1000 type) VEX
2 Voltage type 0 to 5 VDC 2 1/4 (1000, 2000, 3000 type)
Thread type
Nil Rc 3 3/8 (2000, 3000 type) SRH
4 1/2 (3000 type)
N NPT
T NPTF SRP
F G
SRF
Rated
pressure +10% VCHR
Output pressure (MPa)
Alarm detection range: Detects Set pressure

output pressure outside the ITV
±10% F.S. range. For example, −10%
in the case of ITV2050 (0.9
MPa), a 50% input (0.45 MPa)
IC
5 sec.
creates a detectable range of
0.36 to 0.54 MPa.
ON
Alarm output
ITVX
OFF
0 Input signal (% F.S.) 100 PVQ
Figure 1. Alarm output range Figure 2. Relationship between output VEF
pressure and alarm output VEP
Specifications
VER
Fluid Air
Minimum supply pressure Set pressure +0.1 MPa VEA
Maximum supply pressure 1.0 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
Proof pressure
(Supply side) 1.5 MPa (Pressure range 0.1 MPa type: 0.3 MPa) VY1
(Output side) 1 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
Set pressure range 1: 0.005 to 0.1 MPa, 3: 0.005 to 0.5 MPa, 5: 0.005 to 0.9 MPa VBA
Power supply voltage 0: 24 VDC ±10%, 1: 12 to 15 VDC VBAT
0.12 A or less (24 VDC ±10% type)
Current consumption
0.18 A or less (12 to 15 VDC type) AP100
Input signal 0: 4 to 20 mA, 1: 0 to 20 mA, 2: 0 to 5 VDC, 3: 0 to 10 VDC
Input impedance Voltage type: Approx. 6.5 kΩ, Current type: 250 Ω or less
Output signal Alarm output (NPN/PNP)
Linearity ±1.0% F.S. or less
Accuracy ±2% F.S. ±1 digit or less
Output pressure display
Minimum unit MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1, kPa: 1
Enclosure IP65
Weight ITV10: Approx. 250 g, ITV20: Approx. 350 g, ITV30: Approx. 645 g (without brackets)
The above characteristics (specifications) are confined to the static state. When air is consumed on the output side, the pressure may fluctuate.
835 B
Compact Vacuum Regulator
Series ITV009 
RoHS
How to Order
For single unit and single unit for manifold
ITV00 9 0 3 N
Pressure range
9 –100 kPa
Cable connector (Option)
Power supply voltage N Without cable connector
S Straight type 3 m
0 24 VDC ±10%
L Right angle type 2 m
1 12 to 15 VDC
Input signal
0 Current type 4 to 20 mA DC (Sink type) Bracket/Option for single unit only
1 Current type 0 to 20 mA DC (Sink type) Nil Without bracket
2 Voltage type 0 to 5 VDC Flat
3 Voltage type 0 to 10 VDC Bracket
B
Built-in One-touch fittings type
For single unit
Symbol VACz OUTx ATMc L-bracket
Metric size
Nil (Light gray) ø4
Inch size C
U (Orange) ø5/32"
For manifold
Symbol VACz OUTx ATMc
Metric size
Nil ø6 ø4 ø6
(Light gray) Base type
Inch size Nil For single unit
U (Orange) ø1/4" ø5/32" ø1/4"
M For manifolds
Manifold How to Order Manifold Assembly (Example)
IITV00 02 n Indicate the part numbers of electro-pneumatic regulators to be mounted

below the manifold part number.
Example)
Due to the common supply/exhaust feature, note that different pressure
range combinations are not available.
Stations Option
IITV00-03········1 set (Manifold part no.)
If a DIN rail longer than
02 2 stations ∗ ITV0090-3MS······2 sets (Vacuum regulator part no. (1, 2 stations))
the specified stations is
03 3 stations required, specify the ∗ ITV0090-3ML······1 set (Vacuum regulator part no. (3 stations))
applicable stations in Indicate part numbers in order starting from the first station on
···
···
10 10 stations two digits. the D side.

(Maximum 10 stations) Note)Combination with having different pressure ranges is not
Example) IITV00-05-07 available due to common supply/exhaust features.
One-touch fitting size for supply/
exhaust parts (End plate) The asterisk (∗) specifies mounting. Add an asterisk (∗) at the beginning
of electro-pneumatic regulator part numbers to be mounted.
Nil ø6 (Light gray)
D sid
U ø1/4" (Orange) e
1
2
3·
··
Note) A DIN rail with the length specified by the number of stations is
attached to the manifold. For dimensions of the DIN rail, refer to
the external dimensions. 1
1
DIN rail
3
ITV0090-3MS
ITV0090-3ML
B 836
Compact Vacuum Regulator Series ITV009 
Specifications
Model ITV009
Minimum supply pressure Set pressure –1 kPa
Maximum supply pressure –101 kPa
Set pressure range –1 to –100 kPa
ARJ
Voltage 24 VDC ±10%, 12 to 15 VDC
Power supply Current Power supply voltage 24 VDC type: 0.12 A or less AR425
consumption Power supply voltage 12 to 15 VDC type: 0.18 A or less to 935
Input signal
ARX
Current type 4 to 20 mA DC, 0 to 20 mA DC (Sink type)
Input impedance
Voltage type Approx. 10 kΩ
AMR
Current type Approx. 250 Ω
Output signal Note 4)

Analog
output
Output accuracy: ±6% F.S. or less
ARM
ARP
IR
IRV
Operating temperature range 0 to 50°C (No condensation)
IP65 equivalent ∗
Enclosure
VEX
Connection type Built-in One-touch fittings
For single
unit
Metric size z, x, c: ø4
SRH
Inch size z, x, c: ø5/32"
Connection size
Manifold
Metric size z, c: ø6, x: ø4
SRP
Inch size z, c: ø1/4", x: ø5/32"
Weight Note 1) 100 g or less (without option)
SRF
Note 1) Indicates the weight of a single unit.
For IITV00-n
Total weight (g) � Stations (n) x 100 + 130 (Weight of end block A, B assembly) + Weight (g) of VCHR
DIN rail
Note 2) When there is a downstream flow consumption, pressure may become unstable
depending on piping conditions.
ITV
Note 3) When the power is turned on, a noise may be generated. This noise is normal and does
not indicate a fault. IC
Note 4) When measuring ITV analog output from 1 to 5 VDC, if the load impedance is less than
100 kΩ, the analog output monitor accuracy of ±6% F.S. or less may not be available.
The product with the accuracy of within ±6% is supplied upon your request. ITVX
Output pressure remains unaffected.
∗ When using under the conditions equivalent to IP65, connect the fitting or tube to the breathing
hole prior to use. (For details, refer to "Specific Product Precautions 1" on page 849)
PVQ
Accessories (Option) VEF
VEP
Bracket Cable connector
Straight type
VER
Flat bracket assembly (including 2 mounting screws)
P39800022 M8-4DSX3MG4
VEA
VY1
VBA
VBAT
AP100
L-bracket assembly (including 2 mounting screws) Right angle type
P39800023 P398000-501-2
Tighting torque when assembling is 0.3 N·m.
837
Series ITV009 
Working Principle
When the input signal rises, the vacuum pressure soloenoid valve q turns ON. Due to this, part of the vacuum pressure (VAC.)
passes through the vacuum pressure solenoid valve q and changes to a vacuum pressure. This vacuum pressure feeds back to
the control circuit r via the pressure sensor e. Here, the vacuum pressure soloenoid valve and the atmospheric pressure
soloenoid valve work alternately to make continuous pressure corrections until vacuum pressure becomes proportional to the
input signal, thus, supplying vacuum pressure that is consistently proportional to the input signal.
Power supply and error

LED indication
Power supply Output signal

r Control circuit
Input signal
P
e Pressure sensor
q Vacuum pressure solenoid valve w Atmospheric pressure solenoid valve
VAC.
(Vacuum pump, etc.)
ATM OUT
(Atmospheric pressure)
Block Diagram
VAC.
q Vacuum pressure
solenoid valve
Input signal + Output pressure
r Control circuit
–
w Atmospheric pressure
solenoid valve
ATM
e Pressure sensor
838
Compact Vacuum Regulator Series ITV009
Series ITV009
1 1

0.5 0.5
ARJ
Return
AR425
0 0 to 935
ARX
Out
–0.5 –0.5
AMR
–1
0 25 50 75 100
–1
1 2 3 4 5 ARM
ARP
Pressure Characteristics Set pressure: –10 kPa Flow Characteristics
1 0 –10 kPa IR
–20 kPa
–20
0.5
Set pressure (kPa)
–40 kPa
IRV
–40
Out
–60 kPa VEX
0 –60
Return
–80 kPa SRH
–80
–0.5
–100
–100 kPa
SRP
–1 SRF
–120 –100 –80 –60 –40 –20 0 0.5 1 1.5 2 2.5 3 3.5 4
Supply pressure (kPa) Flow rate (L/min (ANR))
VCHR
ITV
IC
ITVX
PVQ
VEF
VEP
VER
VEA
VY1
VBA
VBAT
AP100
839
Series ITV009 
Dimensions
28
For Single Unit ø6
4x 74
64
PWR
6
ERR
xø
2
38
27
15
PWR
ERR 2x
Mo ø3.5
4 un
xø tin
M gh
L-bracket ou 3.5 Flat bracket ole
nt
(Option) ing
ho (Option)
M8 x 1 le
15 6 50
82
73
Breathing hole Note) 3.7 3.7

(M3 x 0.5) 1
OUT port VACz
VAC port
13.7
OUTx
13.7
3
5
(ø4, ø5/32”) ATMc (ø4, ø5/32”)

2
5
ATM port
3
6
(ø4, ø5/32”)
7
3.5
L-bracket
Flat bracket
(Option)
(Option)
19
Port Location
No. z x c
ITV009 VAC OUT ATM

Mounting thread
80
ius
rad
Note) When using under the conditions ing
equivalent to IP65, connect the nd
+50 be
fittings or tube to the breathing 3000 0 um
m
hole prior to use. 15 35 M ini Body
(30.9)
849)
ø4
8.7
9.9
7 14
Straight type (Option)

Right angle type (Option)
(21.8)
Mi Body
nim (24)
um
be
nd
SMC
(24)
ing
SMC
ø10
M8
ra
diu
s8
0
ø4
2000±50
(45)
(15)
A 840
Compact Vacuum Regulator Series ITV009
Dimensions
Single unit for manifold

50
ARJ
AR425
PWR to 935
ERR
M8 x 1 ARX
AMR
ARM
15
6
ARP
IR
IRV
VEX
SRH
82
SRP
Breathing hole Note)
3.7
SRF
(M3 x 0.5)
VCHR
13.7
2
ITV
5
(2)
OUTx port
(4)
(ø4, ø5/32") IC
ITVX
Bushing assembly
PVQ
(2.7)
Note) When using under the conditions

equivalent to IP65, connect the
fittings or tube to the breathing
hole prior to use.
VEF
(For details, refer to "Specific VEP
849) VER
VEA
VY1
Note) For dimensions of the cable connector, refer to single unit on page 840.
VBA
VBAT
AP100
841
Series ITV009 
Dimensions
Manifold
27.5
27.5
40
40
Mounting hole
11 11
L2
25 L1
Port Location 8
No. z x c
5.5
ITV009 VAC OUT ATM
PWR
PWR
PWR
PWR
ERR
ERR
ERR
ERR
Note) Stations are counted
starting from the D side.
25
35
50
5.25
8.5 14 15 8.5 12.5

(Pitch) (Pitch)
6 D side U side
1 2 ····stations
3 (8)
Dimensions in inch are VACz port
noted in parentheses. 1 1
(ø6, ø1/4") 89.5
ATMc port
80.5
3 3
(ø6, ø1/4")
47.5
32.5
21.2
2 2 2
12.5
Breathing hole Note)

7.5
3.7
(M3 x 0.5)
OUTx port
(ø4, ø5/32")
Note) For dimensions of the cable connector, refer to single unit on page 840. Note) When using under the conditions
equivalent to IP65, connect the
fittings or tubing to the breathing
(mm) hole prior to use.
Manifold stations n 2 3 4 5 6 7 8 9 10 Product Precautions 1" on page
L1 60 75 90 105 120 135 150 165 180 849)
L2 110.5 123 148 160.5 173 185.5 198 223 235.5
Weight of DIN rail (g) 20 22 27 29 31 34 36 41 43
A 842
Series ITV2090/2091
®
RoHS ARJ
How to Order AR425
to 935
ARX
ITV 209 0 0 1 2 S 5
AMR
Pressure range
9 –1.3 to –80 kPa
Pressure display unit ARM
5 kPa
Note) For the communication models,
CC, DE, PR and RC, only “Nil” is ARP
Power supply voltage available as it does not have a
0 24 VDC pressure display.
IR
1 12 to 15 VDC
Note) Communication models Cable connector type IRV
(CC, DE, PR, RC), 16
points preset input and 10 S Straight type 3 m
bit digital input are available L Right angle type 3 m
only for 24 VDC.
N Without cable connector VEX
Note) Even when a cable connector is
Input signal/
selected, communication cable is not
included in the communication
SRH
Communication model Monitor output models, CC, DE and PR. Please order
Current type 4 to 20 mA DC 1 Analog output 1 to 5 VDC

it separately. Refer to the below.
For 10 bit digital input, right angle type
SRP
0 (Sink type) cannot be selected.
1
Current type 0 to 20 mA DC 3 Switch output/PNP output SRF
(Sink type)
4
Analog output 4 to 20 mA DC Bracket ∗
2 Voltage type 0 to 5 VDC (Sink type)
Nil Without bracket VCHR
3 Voltage type 0 to 10 VDC Nil None B Flat bracket
40 4 points preset input C L-bracket ITV
16 points preset input ∗ Bracket is included.
52 (Switch output/NPN output)
IC
53 (Switch output/PNP output) Port size
60 10 bit digital input 2 1/4
ITVX
CC CC-Link
DE DeviceNet™ PVQ
PR PROFIBUS DP Thread type
RC RS-232C communication VEF
Nil Rc
VEP
N NPT
T
F
NPTF VER
G
VEA
For communications cables, use the parts listed below
(refer to M8/M12 connector in Best Pneumatics No.1 for details)
VY1
or order the product certified for the respective protocol (with M12 connector) separately. VBA
Application Communication cable part number Note VBAT
PCA-1567720 (Socket type) Dedicated Bus adapter supplied
CC-Link compatibility
PCA-1567717 (Plug type) with the product. AP100
DeviceNet™ PCA-1557633 (Socket type)
PROFIBUS DP PCA-1557688 (Socket type)
843 C
Series ITV2090 /2091
Model ITV2090 ITV2091
Stepless control of vacuum Minimum supply vacuum pressure Note 1) Set pressure –13.3 kPa
pressure proportional to an Maximum supply vacuum pressure –101 kPa
electrical signal Set pressure range –1.3 to –80 kPa
Voltage 24 VDC ±10% 12 to 15 VDC
Power supply Current Power supply voltage 24 VDC type: 0.12 A or less Note 7)
consumption Power supply voltage 12 to 15 VDC type: 0.18 A or less
Current type Note 2) 4 to 20 mA DC, 0 to 20 mA DC (Sink type)
Input signal Note 7)
Preset input 4 points (Negative common), 16 points (No common polarity)
Digital input 10 bit (Parallel)
Current type 250 Ω or less Note 3)
Voltage type Approx. 6.5 kΩ
Input
impedance Power supply voltage 24 VDC type: Approx. 4.7 kΩ
Preset input
Power supply voltage 12 VDC type: Approx. 2.0 kΩ
Digital input Approx. 4.7 kΩ
Note 4) Analog output 4 to 20 mA DC (Sink type) (Output impedance: 250 Ω or less)
Output signal Output accuracy ± 6% F.S. or less
(Monitor output) NPN open collector output: Max. 30 V, 80 mA
Switch output
PNP open collector output: Max. 80 mA
Linearity ± 1% F.S. or less
Repeatability ± 0.5% F.S. or less
Temperature characteristics ± 0.12% F.S./°C or less
Output pressure Accuracy ± 2% F.S. ± 1 digit or less
display Units kPa Note 5) Minimum display: 1
Enclosure IP65
Weight Note 7, 8) 390 g
Note 1) The minimum supply vacuum pressure should be 13.3 kPa less than the maximum vacuum pressure setting value.
Note 2) 4 to 20 mA DC is not possible with the 2-wire type. Power supply voltage (24 VDC or 12 to 15 VDC) is required.
Piping/Wiring Diagram Note 3) Value for the state with no over current circuit included. If an allowance is provided for an over cur-
rent circuit, the input impedance varies depending on the input power supply. This is 350 Ω or less
Power supply and input signal (VDC, mA DC) for an input current of 20 mA DC.
When measuring ITV analog output from 1 to 5 VDC, if the load impedance is less than 100 kΩ, the
analog output monitor accuracy of within ±6% (full span) may not be available. The product with the
VAC accuracy of within ±6% is supplied upon your request. Output pressure remains unaffected.
OUT
ITV2090 Tank Note 4) Either analog output or switch output must be selected. Furthermore, when switch output is se-
Vacuum pump, Set pressure
lected, either NPN output or PNP output must also be selected. Use caution that the preset in-
Ejector (Vacuum)
put type is not equipped with an output signal function.
Note 5) Please contact SMC regarding indication with other units of pressure.
Note 6) The product characteristics are confined to the static state.
Pressure may fluctuate when air is consumed at the output side.
Note 7) Refer to the table below for communication specifications.
Note 8) Add 50 g for digital input type, 70 g for 16 points preset input type respectively.
Communication Specifications (CC, DE, PR, RC)

Model ITV00-CC ITV00-DE ITV00-PR ITV00-RC
Protocol CC-Link DeviceNet™ PROFIBUS DP RS-232C
Version Note 1) Ver 1.10 Volume1 (Edition3.8), Volume3 (Edition1.5) DP-V0 —
9.6 k/19.2 k/45.45 k
Communication 156 k/625 k
125 k/250 k/500 k bps 93.75 k/187.5 k/500 k 9.6 kbps
speed 2.5 M/5 M/10 M bps
1.5 M/3 M/6 M/12 M bps
Configulation file Note 2) — EDS GSD —
I/O occupation area 4 word/4 word, 32 bit/32 bit
16 bit/16 bit 16 bit/16 bit —
(input/output data) (per station, remote device station)
Communication data resolution 12 bit (4096 resolution) 12 bit (4096 resolution) 12 bit (4096 resolution) 10 bit (1024 resolution)
HOLD Note 3)/CLEAR HOLD/CLEAR
Fail safe CLEAR HOLD
(Switch setting) (Switch setting)
Electric insulation Note 4) Insulation Insulation Insulation Non-insulation
Terminating resistor Built into the product (Switch setting) Not built into the product Built into the product (Switch setting) —
Current consumption 0.16 A or less 0.14 A or less 0.16 A or less 0.12 A or less
Weight ITV2090 470 460 490 460
Note 1) Note that version information is subject to change.
Note 2) Configuration files can be downloaded from the operation manual page on SMC’s website: http://www.smcworld.com
Note 3) The output HOLD value when a CC-Link communications error occurs can be set based on the bit area data.
Note 4) The insulation between the electrical signal of the communication system and ITV power supply.
D 844
Working Principle
Working Principle
Pressure
display When the input signal increases, the vacuum pressure solenoid
valve q turns ON, and the atmospheric pressure solenoid valve
Power supply i Control Output signal w turns OFF. Because of this, VAC. and the pilot chamber e are ARJ
Input signal circuit connected, the pressure in the pilot chamber e becomes
P
u Pressure sensor negative and acts on the top of the diaphragm r. AR425
As a result, the vacuum pressure valve t which is linked to the to 935
q Vacuum pressure w Atmospheric pressure
diaphragm r opens, VAC. and OUT. are connected, and the set
solenoid valve solenoid valve
pressure becomes negative. ARX
Atmospheric This negative pressure feeds back to the control circuit i via the
pressure sensor u. Then, a correct operation works until a
pressure
vacuum pressure proportional to the input signal is reached, and
AMR
a vacuum pressure is obtained which is always proportional to
r Diaphragm
the input signal. ARM
e Pilot chamber
ARP
Block Diagram
t Vacuum pressure VAC. IR
VAC. valve
(Vacuum pump, etc.)
q IRV
Input Vacuum Set
pressure
ATM OUT. signal + t
Control
solenoid valve r
Diaphragm
Pilot valve
pressure
VEX
(Atmospheric pressure) (Set pressure) – circuit w
Atmospheric
y Atmospheric pressure
pressure
solenoid valve SRH
valve ATM ATM
u Pressure sensor
SRP
SRF
Series ITV209 VCHR
Linearity Hysteresis Repeatability ITV
0 1 1.0
IC
–20
ITVX
Output pressure (kPa)
0.5 0.5
Return
–40
PVQ
0 0
Out
VEF
VEP
–60
–0.5 –0.5
VER
–80
–1 –1.0 VEA
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
Input signal (% F.S.) Input signal (% F.S.) Count
VY1
Pressure Flow Supply vacuum pressure: VBA
Characteristics Set pressure: –20 kPa Characteristics –100 kPa Flow characteristics VBAT
measurement conditions
0
1.0
• Exhaust flow rate of the vacuum pump AP100
–10 used for measurement: 500 L/min (ANR)
• Inlet vacuum pressure: –100 kPa
Set point
–20 (When outlet flow rate is 0 L/min (ANR))
0.5
–30 • Maximum flow rate: 132 L/min (ANR)
Set pressure (kPa)
(With inlet vacuum pressure at –39 kPa)

–40
0
–50
–60
–0.5 –70
–80
–1.0 –90
–100 –80 –60 –40 –20 50 100 150
VAC. side pressure (Supply pressure) (kPa) Flow rate (L/min(ANR))
845
Series ITV209 
Dimensions
ITV209
Note) Do not attempt to rotate the cable connector, as it does not turn.
Flat bracket
100
84
50 7 g
x ø ntin
(33)
4
ou
M le
ho
52
40
M12 x 1 12.5
(Plug type)
11
M5 x 0.8
Air introduction port
99
34

VAC. port
ATM. OUT VAC.

(Vacuum
19
19
pressure)
1.6
12
13.5
Flat bracket assembly 2 x 1/4 (Rc, NPT, NPTF, G)
36 ATM. port, OUT port
P398020-600
(Option)
L-bracket
L-bracket assembly
P398020-601
(Option)
15
25
2.3
45
10
(8.5) 33
50
B 846
M12 x 1 M12 x 1 HIROSE ELECTRIC CO., LTD. Made
Signal cable connection thread (Plug type) Power cable connection thread (Plug type) RP13A-12RB-13PA (71)
20 8.5
(ø14.3) (ø14.3)
11
ARJ
9
display display
AR425
M5 x 0.8 to 935
M5 x 0.8
Air introduction port Air Air introduction port Air
introduction introduction ARX
126
126
port port
AMR
34
34
ATM. OUT VAC. ATM. OUT VAC. ARM
19
19
13.5 13.5
ARP
12
12
CC-Link/ITV2090-CC IN M12 x 1 DeviceNet™/ITV2090-DE IR
Communication cable connection thread (Plug type)
20
OUT M12 x 1
Communication cable connection thread (Socket type)
IRV
(60)
M12 x 1
M12 x 1
Power cable connection thread Communication cable connection thread
M12 x 1
VEX
(Plug type)
(53)
(Plug type) (Plug type)

11
BUS 20 8.5
SRH
11
adapter
8.5
SRP
M5 x 0.8
Air introduction port
M5 x 0.8
Air introduction port SRF
136
126
VCHR
34
34
ITV
ATM. OUT VAC. ATM. OUT VAC.
19
19
13.5 13.5
IC
12
12
∗ Dimensions not shown are same as on page 846. ∗ Dimensions not shown are same as on page 846. ITVX
PROFIBUS DP/ITV2090-PR RS-232C/ITV2090-RC PVQ
M12 x 1 M12 x 1 M12 x 1
Communication cable connection thread (Soket type) Power cable connection thread (Plug type)
M12 x 1 VEF
Communication cable connection thread (Plug type)
10.5 11.5 9.5 Power cable connection thread (Plug type) VEP
11
20 8.5
VER
11
16.3
VEA
M5 x 0.8 M5 x 0.8
Air introduction port Air introduction port
VY1
136
126
VBA
VBAT
34
34
ATM. OUT VAC. ATM. OUT VAC. AP100

19
19
13.5 13.5
12
12
53
CC
∗ ITV2090- DE common dimensions
(33)
PR
RC
Note) Order communication cable (other than 16 points, Note) Do not attempt to rotate the cable
RS-232C) separately. (Refer to page 814.) connector, as it does not turn.
847 C
Series ITV209 
Accessories (Option)/Part No.
[Bracket]
Description Part No.
Flat bracket assembly (including mounting screws) P398020-600
L-bracket assembly (including mounting screws) P398020-601
[Cable connector]
Current type Straight type 3 m P398020-500-3
Voltage type Cable connector (4 cores)
4 points preset input Right angle type 3 m P398020-501-3
Signal cable (5 cores)
10 bit digital input Cable connector (13 cores) Straight type 3 m INI-398-0-59
CC-Link Straight type 3 m P398020-500-3
PROFIBUS DP Power cable (4 cores)
DeviceNetTM Right angle type 3 m P398020-501-3
RS-232C
Communication cables Straight type 3 m P398020-502-3
connector (5 cores) Right angle type 3 m P398020-503-3
Note 1) For the 10-bit digital type, there is no right angle type cable connector.
Note 2) Even when "with cable connector" is selected the communication cable is not included in the
communication model (CC, DE, PR). Please order separately.
[Bus adapter]
CC-Link Bus adapter (Bus adapter supplied with the product.) EX9-ACY00-MJ
Dimensions
100 10
7
15
25
4x
R3
52
40
.5 2.3
(8.5) 33
50
4 x ø7 84 50
60 20
70
12
1.6
Model Bracket tightening torque

ITV1000 0.76 ± 0.05N·m
ITV2000/3000 1.5 ± 0.05N·m
A 848
Series ITV0000/1000/2000/3000
Specific Product Precautions 1
Be sure to read before handling. Refer to front matter 43 for Safety Instructions and
pages 365 to 369 for Common Precautions.
Series ITV0000/009 Precautions

Air Supply Handling ARJ
Caution Caution AR425
to 935
1. Install an air filter near this product on the supply side. 1. Do not use a lubricator on the supply side of this product, as
Select a filtration degree of 5 µm or less. this can cause malfunction. When lubrication of terminal ARX
equipment is necessary, connect a lubricator on the output
2. Compressed air containing large amounts of drainage side of this equipment.
can cause malfunction of this product and other pneu- 2. If electric power is shut off while pressure is being applied, AMR
pressure will be retained on the output side.
matic equipment. As a countermeasure, install an
However, this output pressure is held only temporarily and is not guar- ARM
aftercooler, air dryer or Drain Catch, etc. anteed. If exhausting of this pressure is desired, shut off the power af-
ter reducing the set pressure, and discharge the air using a residual
3. If large amounts of carbon dust are generated by the pressure exhaust valve, etc. ARP
compressor, it can accumulate inside this product and 3. If power to this product is cut off due to a power failure, etc.
cause malfunction. when it is in a controlled state, output pressure will be re-
tained temporarily. Handle carefully when operating with out-
IR
For details on the above compressed air quality, refer put pressure released to the atmosphere, as air will continue
to SMC's "Air Preparation Systems".
to flow out. IRV
4. If supply pressure to this product is interrupted while the power
Wiring
is still on, the internal solenoid valve will continue to operate
and a humming noise may be generated.
VEX
Since the life of the product may be shortened, shut off the power sup-
SRH
Caution ply also when supply pressure is shut off.
5. This product is adjusted for each specification at the time of
Connect the cable to the connector on the body with shipment from the factory. Avoid careless disassembly or re-
moval of parts, as this can lead to malfunction.
SRP
the wiring arranged as shown below. Proceed care-
6. The optional cable connector is a 4 wire type. When the moni-
fully, as incorrect wiring can cause damage. tor output (analog output or switch output) is not being used, SRF
Further, use DC power with sufficient capacity and a low ripple. keep it from touching the other wires as this can cause mal-
Body
function. VCHR
7. Please note that the right angle cable does not rotate and is
Brown limited to only one entry direction.
Blue 8. Take the following steps to avoid malfunction due to noise.
ITV
White 1) Remove power supply noise during operation by installing a line fil-
Black
Note)
ter, etc. in the AC power line. IC
2) For avoiding the influence of noise or static electricity, install this
product and its wiring as far as possible from strong electric fields
Terminal No. 1 2 3 4 Note) A right angle type cable is also such as those of motors and power lines, etc. ITVX
available. The entry direction 3) Be sure to implement protective measures against load surge for in-
Lead wire color Brown White Blue Black for the right angle type con- duction loads (solenoid valves, relays, etc.).
Wiring Power Signal COM Monitor nector is to downwards (SUP
9. The product characteristics are confined to the static state. When
PVQ
port side).
Never turn the connector as it air is consumed on the output side, and especially used in the VEF
2: (White) 4: (Black)
is not designed to turn. Using system with large leakage, pressure cannot approach the set pres- VEP
1: (Brown) 3: (Blue) force to turn the connector will sure and the service life is drastically shortened with a humming
damage the connector cou- noise of the solenoid valve.
pling.
10. For details on the handling of this product, refer to the
VER
operation manual which is included with the product.
11. In locations where the body is exposed to water, dust, etc., VEA
there is a possibility that moisture or dust could enter the
Wiring Diagrams body through the breathing hole. VY1
Current signal type Voltage signal type Mount a fitting and tube (M-3AU-3 fitting and
Brown Brown TIU01m-mm tube recommended) onto the breath- Breathing VBA
ing hole and run the tube to a location not ex- hole
VBAT
Blue Blue posed to moisture or dust, etc. M3 x 0.5 2
Vs Vs
12. If this product will be used in a sealed environment, such as in-
White White
side an inspection box, a ventilation fan should be installed to AP100
Black Black
A Vin
ensure adequate ventilation as this product can generate heat
in some operating conditions.
Vs: Power Supply 24 VDC ±10% Vs : Power Supply 24 VDC ±10% When the power is turned on, a noise may be generated as a
12 to 15 VDC 12 to 15 VDC means of checking the operating condition of the solenoid
A : Input signals 4 to 20 mA DC Vin: Input signals 0 to 5 VDC valve. This noise is normal and does not indicate a fault.
0 to 20 mA DC 0 to 10 VDC 13. Each product needs to be powered by one power supply unit.
Monitor output wiring diagram The wiring of this product has the same common between the GND for
power and the signals; there is a possibility that a wrong current occurs
Brown and prevents a proper operation if one power supply unit controls mul-
Analog output, voltage type
tiple electro-pneumatic regulators.
Blue
14. This product does not have a shut-off valve function. If air
White pressure is supplied without electric power being applied,
Monitor output voltage
Black output pressure may increase to the pressure equivalent of
the supply pressure. Operate the system to shut off the sup-
ply pressure when not operating the product.
849 B
Series ITV0000/1000/2000/3000
Series ITV1000/2000/3000/209 Precautions

Piping Operating Environment
Warning Warning
1. Screw piping together with the recommended proper 1. Do not operate in locations having an atmosphere
torque while holding the side that has female threads. of corrosive gases, chemicals, sea water, or where
Looseness or faulty sealing will occur if tightening torque is in- there will be contact with the same.
sufficient, while thread damage will result if the torque is ex- 2. Do not operate in locations where vibration or im-
cessive. Furthermore, if the side with the female threads is not
held while tightening, excessive force will be applied directly to pact occurs.
piping brackets, etc. causing damage or other problems.
Connection thread 1/8

Recommended proper torque: N . m
1/4 3/8 1/2
Caution
Torque 3 to 5 8 to 12 15 to 20 20 to 25 1. In locations where the body is exposed to water,
steam, dust, etc., there is a possibility that moisture
or dust could enter the body through the EXH
(solenoid) ports, thereby causing problems.
2. To overcome this, simply install tubing to each port,
using the fittings, and extend the tubing so that the
other end is at a location where no water splash,
etc. occurs. Make sure not to bend, or block the I.D.
of the tubing as this will have a detrimental affect
on the pressure control.
3. Do not operate in locations where vibration or im-
2. Do not allow twisting or bending moment to be ap- pact occurs.
plied other than the weight of the equipment itself.
4. In locations which receive direct sunlight, provide a
Provide separate support for external piping, as damage may
otherwise occur.
protective cover, etc.
5. In locations near heat sources, block off any radi-
ated heat.
6. In locations where there is contact with spatter from
water, oil or solder etc., implement suitable protec-
tive measures.
Air Supply
3. Since excessive moment loads and the propagation Warning

of vibrations, etc. can easily result from inflexible 1. Type of fluids
piping made of materials such as steel, avoid these Please consult with SMC when using the product in
problems by using flexible tubing for intermediate applications other than compressed air.
connections.
2. Do not use compressed air that contains chemicals,
Caution synthetic oils including organic solvents, salt or
corrosive gases, etc., as it can cause malfunction.
1. Preparation before piping
Before piping is connected, it should be thoroughly blown out
with air (flushing) or washed to remove chips, cutting oil and
other debris from inside the pipe.
Caution
If chips, sealing material or other debris enter into this product, 1. Install an air filter near this product on the supply
the solenoid valve may buzz, or the outlet pressure may not side. Select a filtration degree of 5 µm or less.
be output normally.
2. Compressed air containing large amounts of drain-
2. Wrapping of sealant tape age can cause malfunction of this product and
When screwing together pipes Wrapping other pneumatic equipment. As a countermeasure,
and fittings, etc., be certain that direction
install an aftercooler, air dryer or Drain Catch, etc.
chips from the pipe threads
Ex
and sealing material do not get thr pos Sealant tape 3. If large amounts of carbon dust are generated by
ea e a
inside the piping. ds pp
r
the compressor, it can accumulate inside this prod-
ox
Also, when sealant tape is used, .2 uct and cause malfunction. For details on the above
leave 1.5 to 2 thread ridges ex- compressed air quality, refer to SMC’s “Air Prepara-
posed at the end of the threads. tion Systems”.
D 850
Series ITV0000/1000/2000/3000

Handling Handling ARJ
Caution Caution AR425
to 935
1. Do not use a lubricator on the supply side of this 13. For details on the handling of this product, refer to the
product, as this can cause malfunction. When lubri- operation manual which is included with the product. ARX
cation of terminal equipment is necessary, connect 14. This product does not have a shut-off valve function. If air
a lubricator on the output side of this equipment. pressure is supplied without electric power being applied, AMR
2. If electric power is shut off while pressure is being output pressure may increase to the pressure equivalent
applied, pressure will be retained on the output side. of the supply pressure. Operate the system to shut off the ARM
However, this output pressure is held only tempo- supply pressure when not operating the product.
rarily and is not guaranteed. If exhausting of this ARP
15. The solenoid valves built into this product are consum-
pressure is desired, shut off the power after reduc-
ing the set pressure, and discharge the air using a ables. Perform periodic maintenance in environments
residual pressure exhaust valve, etc. where the solenoid valves are operated at a high frequency. IR
The parts can be replaced with a solenoid valve assembly.
3. If power to this product is cut off due to a power
failure, etc. when it is in a controlled state, output
Please contact SMC for the part number. IRV
pressure will be retained temporarily. Handle care- Design and Selection
fully when operating with output pressure released VEX
to the atmosphere, as air will continue to flow out. Caution SRH
4. If supply pressure to this product is interrupted while the
1. Use the following UL approved products for DC power
power is still on, the internal solenoid valve will continue
supply combinations. SRP
to operate and a humming noise may be generated.
(1) Limited voltage current circuit in accordance with UL 508.
Since the life of the product may be shortened, shut off A circuit in which power is supplied by the secondary coil of a
the power supply also when supply pressure is shut off. transformer that meets the following conditions. SRF
5. The setting side pressure cannot be completely released • Maximum voltage (with no load):
from this product in the range below 0.005 MPa (or –1.3 kPa 30 Vrms (42.4 V peak) or less VCHR
for Vacuum models). In cases where the pressure needs to • Maximum current:
(1) 8 A or less (including when short circuited)
be reduced completely to 0 MPa, install a 3 port valve, etc. (2) limited by circuit protector (such as fuse) with the follow- ITV
on the setting side to discharge the residual pressure. ing ratings.
No load voltage (V peak) Max. current rating
6. This product is adjusted for each specification at the time 0 to 20 [V] 5.0 IC
of shipment from the factory. Avoid careless disassembly 100
or removal of parts, as this can lead to malfunction. Over 20 and 30 or less [V]
Peak voltage ITVX
7. The optional cable connector is a 4-wire type. When (2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak)
the monitor output (analog output or switch output) or less, and a power supply consisting of a class 2 power PVQ
is not being used, keep it from touching the other supply unit confirming to UL1310, or a class 2 transformer
wires as this can cause malfunction. confirming to UL1585. VEF
8. When connecting the cable to this product, turn the lock 2. Operate these products only within the specified voltage. VEP
ring of the cable. If a portion other than the lock ring of Using voltages beyond the specified levels could cause VER
the cable is turned, it may damage the connector on the faults or malfunctions.
body. Turn the lock ring by hand without using a tool. 3. Use 0 V as the baseline for the power supplied to
the unit for output, control and input.
VEA
9. The right angle cable does not rotate and is limited
to only one entry direction. If the right angle cable is +24 V +24 V
VY1
rotated forcibly, the cable may be broken or dam- Output power Output power
aged, or may damage the connector on the body. 0V 0V VBA
10. Take the following steps to avoid malfunction due to noise. VBAT
Control/input power Control/input power
1) Remove power supply noise during operation by installing a
line filter, etc. in the AC power line.
+24 V –24 V AP100
2) For avoiding the influence of noise or static electricity, install 4. Each product needs to be powered by one power supply unit.
this product and its wiring as far as possible from strong The wiring of this product has the same common be-
electric fields such as those of motors and power lines, etc. tween the GND for power and the signals; there is a
3) Be sure to implement protective measures against load possibility that a wrong current occurs and prevents a
surge for induction loads (solenoid valves, relays, etc.). proper operation if one power supply unit controls mul-
11. Due to the large volume of the output side, a loud ex- tiple electro-pneumatic regulators.
haust noise will be produced when being used for the 5. Consult SMC for the usage when the downstream
purpose of a relief function. Therefore, install a silenc- side is released to atmosphere.
er (SMC Series AN20 or AN40) on the exhaust port This product is a pressure controller. The downstream side
(EXH port). The port sizes are Rc 1/8, Rc 1/4 and Rc 1/2. being released to atmosphere makes the inlet valve full open,
allowing a large amount of atmosphere flow into the body.
12. Specifications on page 815 and 844 is in case of stat- Consult SMC for the appropriate usage when you use the
ic environment. Pressure may fluctuate when air is product under such condition since the product may not meet
consumed at the output side. the specification or the life of the product may be shortened.
851 B
Series ITV0000/1000/2000/3000

Wiring
Caution
Connect the cable to the connector on the body with Knock-down connectors ∗ Order separately.
the wiring arranged as shown below. Proceed
Part number Application

CC-Link DeviceNetTM PROFIBUS DP
carefully, as incorrect wiring can cause damage. compatibility compatibility compatibility
Further, use DC power with sufficient capacity and a Terminal Terminal
Plug Socket Plug Socket Plug
Plug Socket Plug
low ripple.
PCA- PCA- PCA- PCA- PCA- PCA- PCA- PCA-
Brown
Blue
3: (Blue) 1: (Brown) 1557617 1557620 1557659 1557662 1557675 1557701 1557714 1557727
White 4: (Black) 2: (White)
Black
Wiring diagram
Note)
Current signal type Voltage signal type
Body Brown Brown
Blue Blue
Current Signal Type Vs Vs
White
Voltage Signal Type Preset Input Type White
Black Black
1 Brown Power supply 1 Brown Power supply A Vin
2 White Input signal 2 White Input signal 1

3 Blue GND (COMMON) 3 Blue GND (COMMON) Vs : Power supply 24 VDC Vs : Power supply 24 VDC
4 Black Monitor output 4 Black Input signal 2 12 to 15 VDC 12 to 15 VDC
4 IN
A : Input signal 4 to 20 mA DC Vin: Input signal 0 to 5 VDC
1
0 to 20 mA DC 0 to 10 VDC
2 1 4
3 4 points preset input type 16 points preset input type
3 2 Brown S1 Brown
Communication connector
3 Power supply connector Blue S2 White
OUT Vs S1 White Vs S3 Blue
2 4
5 1
S2 Black S4 Black
CC-Link
5 3 1 Gray
4 Vs : Power supply 24 VDC
2 4 3
12 to 15 VDC
Vs : Power supply 24 VDC (No polarity)
1 2 (Negative common)
Communication connector
One of the preset pressures P1 through P4 is selected by the
Power supply connector ON/OFF combination of S1 and S2.
PROFIBUS DP S1 OFF ON OFF ON OFF ON OFF ON
1
4 S2 OFF OFF ON ON OFF OFF ON ON
5 4 2 S3 OFF OFF OFF OFF ON ··· ON ON ON
2
3 3 S4 OFF OFF OFF OFF OFF ON ON ON
1
Preset pressure P01 P02 P03 P04 P05 P14 P15 P16
Communication connector Power supply connector ∗ For safety reasons, it is recommended that one of the preset pressures
Signal connector COMMUNICATION Power be set to 0 MPa.
DeviceNet™, RS-232C, 16 points preset ∗ Preset pressures are set based on the minimum unit for output display.
IN/OUT communication connector Signal connector MPa kgf/cm2 bar psi kPa
Pin No. CC-Link DeviceNet™ PROFIBUS DP RS-232C 16 points preset 0.001 0.01 0.01 0.1 1
1 SLD [–] DRAIN [–] No connection No connection Input signal 1 [Brown] · Note that this is 1 psi for 130 psi types.
2 DB [White] V+ [Red] RxD/TxD-N [Green] TxD [White] Input signal 2 [White] 10 bit digital input type
3 DG [Yellow] V– [Black] No connection RxD [Blue] Input signal 3 [Blue]
Wire Color Signal name
4 DA [Blue] CAN_H [White] RxD/TxD-P [Red] GND [Black] Input signal 4 [Black]
Pink-Black 2 Power supply (24 VDC)
5 No connection CAN_L [Blue] No connection No connection Common [Gray]
Green-Black 2 Power supply (GND)
Power supply connector Blue Signal Common (No Polarity)
Pin No. CC-Link DeviceNet™ PROFIBUS DP RS-232C 16 points preset Blue-Black 2 MSB 10 bit
1 [Brown] Vcc Vcc Vcc Vcc Vcc Gray-Black 1 9 bit
2 [White] FG Can not connect FG No connection No connection Orange-Black 1 8 bit
3 [Blue] GND GND GND GND GND Green-Black 1 7 bit
4 [Black] No connection Can not connect No connection FG Monitor output Pink-Black 1 6 bit
Note 1) The indicated wire colors are when a cable connector made by SMC is used. Blue-Black 1 5 bit
Note 2) The cable is also available in a right angle type. (Communication Gray 4 bit
cable: straight type only) Orange 3 bit
A right angle type connector is attached facing left (towards Green 2 bit
the SUP port). On communication models, the connector faces
backwards (towards the EXH port). Do not attempt to rotate, Pink LSB 1 bit
as the connector does not turn. Note) The wire color is shown for when an option cable
 Trademark Information is used.
DeviceNet™ is a trademark of ODVA.
B 852
Series ITV0000/1000/2000/3000

Wiring CE Marking ARJ
Monitor output wiring diagram • Series ITV0000 AR425
Analog output: Voltage type Analog output: Current type Model
Ferrite core Recommended to 935
(Sink type) necessity power supply cable
Brown Brown
M8-4DSX3MG4
ARX
Blue Blue (Straight type)

White Monitor output voltage White
ITV0000--Q Unnecessary
P398000-501-2 AMR
Black
(Right angle type)
Black
Note) Recommended power supply cable length is 3 m. (P398000-501-2 is 2 ARM
Switch output: NPN type Switch output: PNP type m.) If any other length is desired, please consult with SMC.
Brown Brown
• Series ITV1000/2000/3000 ARP
Blue Blue
Ferrite
Load
∗
White White Model core
Recommended IR
Load
∗ power supply cable
necessity
Black Black
P398020-500-3 (Straight type) IRV
ITV- —
P398020-501-3 (Right angle type)
∗ When 80 mA DC or more is applied, detecting device for overcur-
rentstarts activating and then emits an error signal. (Error number “5”) P398020-500-3 (Straight type) VEX
Power
ITV-52 P398020-501-3 (Right angle type)
Set Pressure Range ITV-53 P398020-502-3 (Straight type) SRH

Signal
P398020-503-3 (Right angle type)
The set pressure range, by unit of standard measured ITV-60 — INI-398-0-59 (Straight type) SRP
pressure, is shown in the table below.
P398020-500-3 (Straight type)
Set pressure range, by unit of standard measured pressure
Power
P398020-501-3 (Right angle type) SRF
ITV-CC
Set pressure range Note 2) Note 3) PCA-1567720 (Socket type)
Unit
ITV01 ITV03 ITV05 ITV209
Communication
PCA-1567717 (Plug type) VCHR
Unnecessary P398020-500-3 (Straight type)
MPa 0.005 to 0.1 0.005 to 0.5 0.005 to 0.9 —
kgf/cm2 0.05 to 1 0.05 to 5 0.05 to 9 —
Power
P398020-501-3 (Right angle type) ITV
ITV-DE
bar 0.05 to 1 0.05 to 5 0.05 to 9 — Note 2) Note 4) PCA-1557633 (Socket type)
psi 0.7 to 15 0.7 to 70 0.7 to 130 —
Communication
PCA-1557646 (Plug type) IC
kPa 5 to 100 5 to 500 5 to 900 –1.3 to –80 P398020-500-3 (Straight type)
Power
P398020-501-3 (Right angle type) ITVX
ITV-PR
Note 2) Note 4) PCA-1557688 (Socket type)
Communication
PCA-1557691 (Plug type) PVQ
P398020-500-3 (Straight type) VEF
Power
P398020-501-3 (Right angle type) VEP
ITV-RC
P398020-502-3 (Straight type)
Communication
P398020-503-3 (Right angle type) VER
Note 1) Recommended power supply cable length is 3 m. If any other length is
desired, please consult with SMC. VEA
Note 2) Even when the "with cable connector" type is selected, the communication
connector is not included. Refer to the catalog [M8/M12 Connector]
CAT.ES100-73 for the details of the communication cable. VY1
Note 3) For CC-Link compatible products, a dedicated Bus adapter is included
with the product. VBA
Note 4) For DeviceNet™ compatible products, and PROFIBUS DP compatible VBAT
products, a T-branch connector is not included with the product.
AP100
853 C
Series ITV0000/1000/2000/3000
Series ITV009/209 Precautions

Handling
Caution
1. Connect the vacuum pump to the port, which is lab- 9. If the VAC side pressure to this product is interrupt-
eled “VAC”. ed while the power is still on, the internal solenoid
2. Pressure adjustment changes from “atmospheric valve will continue to operate and may cause a
pressure to vacuum pressure” when the input sig- humming noise. Since this may shorten the life of
nal is increased, and from “vacuum pressure to at- the product, be sure to shut off the power when the
mospheric pressure” when the input signal is de- VAC side pressure is shut off.
creased. 10. The setting side pressure cannot be completely re-
3. When adjusting the vacuum pressure, be careful not leased from this product in the range below –1.3
to block the atmospheric pressure inlet port labeled kPa. In cases where the pressure needs to be re-
“ATM”. duced completely to 0 kPa, install a 3 port valve,
etc. on the setting side to discharge the residual
4. Since this product is designed exclusively for use
pressure.
with negative pressure, be careful not to apply posi-
tive pressure in error. 11. This product is adjusted for each specification at the
factory before shipment. Avoid careless disassem-
5. In cases where the vacuum pump being used has a
bly or removal of parts, as this can cause failure.
relatively small capacity, or the piping has a small
inside diameter, etc., large variations in the set 12. The optional cable connector is a 4-wire type. When
pressure (the range of pressure variation when the monitor output (analog output, switch output) is
changing from no flow to flow state) may appear. In not being used, keep it from touching the other
this situation, the vacuum pump or the piping, etc. wires, as this can cause malfunction.
should be changed. In cases where it is not practi- 13. Use caution that the right angle cable does not ro-
cal to change the vacuum pump, install a capacity tate and is limited to only one entry direction.
tank (volume depending on the operating condi- 14. Take the following steps to avoid malfunction due to
tions) on the VAC side. noise.
6. The vacuum pressure response time after a change 1) Eliminate power supply noise during operation by installing
in the input signal is influenced by the internal vol- a line filter, etc. in the AC power line.
ume on the setting side (including piping). Since the 2) For avoiding the influence of noise or static electricity, install
this product and its wiring as far as possible from strong
capacity of the vacuum pump also influences the electric fields such as those of motors and power lines, etc.
response time, give careful consideration to these 3) Make sure to take protective measures against load surge
points before operation. for an induction load (solenoid valves, relays, etc.).
7. If the electric power is shut off when in a control 15. Refer to the operation manual included with the
state, the pressure on the setting side will go into a product for details on its handling.
holding condition. However, this setting side pres-
sure will be held only temporarily and is not guaran-
teed. In addition, when atmospheric pressure is de-
sired, shut off the power after reducing the set pres-
sure, and then introduce atmospheric pressure by
using a vacuum release valve, etc.
8. If the power for this product is cut off by a power
failure, etc. when it is in a controlled state, the set-
ting side pressure will be held temporarily. Further,
if operated without sealing the setting side so that
atmospheric air is sucked in, handle with care as air
will continue to be sucked in.
854
435 psi (3.0 MPa) Maximum Supply Pressure
High Pressure ®
Electro-Pneumatic Regulator RoHS
Maximum supply pressure

435 psi (3.0 MPa)
Set pressure range 29 to 290 psi (0.2 to 2.0 MPa)
Stepless control of air pressure up to 2.0 MPa
±1% F.S. or less

Stability ∗
∗ The value is confined to the static state. Pressure may
fluctuate when air is consumed at the output side.
Proof pressure test ([Example] Tank)
SUP.
Test sample
Power consumption 3 W or less

∗
Maximum flow rate 106 scfm [3000 L/min (ANR)]
∗ Supply pressure: 435 psi (3.0 MPa), Set pressure: 145 psi (1.0 MPa)
Parts in contact with fluid

Fluorine grease
Pipe thread type Rc, NPT, G
Approx. 630 g
Weight ∗ ∗ Without options
Series ITVH CAT.NAS60-23A

Series ITVH

Hysteresis 1% F.S. or less
Repeatability ±1% F.S. or less
Application Examples
Discharge rate control Tension control Pressure control for adhesive application
High pressure electro-pneumatic
regulator
SUP.
High pressure
electro-pneumatic
regulator High pressure
electro-pneumatic
regulator
SUP.
SUP.
Leak tester PET bottle molding machine Multi-stage control to analog control
(for remote control of high pressure regulator)
High pressure High pressure
Pressure switch
electro-pneumatic regulator SUP. regulator
(Air operated)
High pressure
SUP. electro-pneumatic
High pressure
regulator electro-pneumatic
Check valve regulator
SUP.
Straight type Right angle type
L-bracket
Flat bracket
1
High Pressure Electro-Pneumatic Regulator
Variation Map
Max. supply pressure 0.001 Set pressure range
Series Model Port size Maximum flow rate
0.2 1.0 3.0 5.0 0.005 1.0 3.0 5.0
435 psi (3.0 MPa)
Maximum Supply Pressure
High Pressure
New
29 psi
[0.2 MPa] 106 scfm
435 psi 1/4 [3000 L/min (ANR)]
Series ITVH2020
ITVH
[3.0 MPa] 290 psi 3/8
( )
[2.0 MPa] Supply pressure:
435 psi (3.0 MPa)
Set pressure:
145 psi (1.0 MPa)
Compact Electro-Pneumatic 0.15 psi [0.001MPa]

Regulator ITV001 29 psi [0.2 MPa] 15 psi [0.1MPa]
Series ITV0000
Built-in
0.15 psi [0.001MPa] One-touch 0.21 scfm
ITV003 145 psi [1.0MPa] 73 psi [0.5MPa] fittings [6 L/min (ANR)]
ø4
( )
ø5/32 Supply pressure:
0.15 psi [0.001MPa] 145 psi (1.0 MPa)
ITV005 145 psi [1.0MPa] 131 psi [0.9MPa] Set pressure:
87 psi (0.6 MPa)
Electro-Pneumatic Regulator 7.3 psi [0.005MPa]

Series ITV1000 ITV101 29 psi [0.2 MPa] 15 psi [0.1MPa]
7.06 scfm
7.3 psi [0.005MPa]
[200 L/min (ANR)]
1/8
ITV103 145 psi [1.0MPa] 73 psi [0.5MPa]
1/4 For details,
( )
Supply pressure: refer to the
7.3 psi [0.005MPa] 145 psi (1.0 MPa) WEB catalog
Set pressure: or
87 psi (0.6 MPa) Best Pneumatics

Series ITV2000 ITV201 29 psi [0.2 MPa] 15psi [0.1MPa]
53.0 scfm
[1500 L/min (ANR)]
7.3 psi [0.005MPa]
1/4 Page 803
3/8
( )
Supply pressure:
7.3 psi [0.005MPa] 145 psi (1.0 MPa)
ITV205 145 psi [1.0MPa] 131 psi [0.9MPa] Set pressure:
87 psi (0.6 MPa)

Series ITV3000 ITV301 29 psi [0.2 MPa] 15 psi [0.1MPa]
141 scfm
[4000 L/min (ANR)]
7.3 psi [0.005MPa] 1/4
ITV303 145 psi [1.0MPa] 73 psi [0.5MPa] 3/8
1/2
( )
Supply pressure:
7.3 psi [0.005MPa] 145 psi (1.0 MPa)
Set pressure:
87 psi (0.6 MPa)
5.0 MPa Maximum For details,

Supply Pressure refer to the
High Pressure
Electro-Pneumatic Regulator 106 scfm WEB catalog
or
Series ITVX 725 psi (5.0 MPa) 1.5 psi [0.01MPa] [3000 L/min (ANR)] Best Pneumatics
ITVX2030 435 psi 3/8
( )
[3.0MPa]
Supply pressure:
725 psi (5.0 MPa)
Set pressure:
435 psi (3.0 MPa)
Page 863
∗ The outlet of the ITVX series is released to the atmosphere for blowing
2
High Pressure Electro-Pneumatic Regulator
®
Series ITVH2000 RoHS
How to Order
ITVH 2 0 2 0 0 1 2 S
Nil MPa
2 Note) kgf/cm2
Set pressure range 3 bar
2 29 to 290psi (0.2 to 2.0 MPa) 4 Note) psi
Note) Under Japan's new Measurement
Act, this is only for overseas sales
(SI units are to be used inside
Power supply voltage Japan).
0 24 VDC
Straight type 3 m
Input signal
0 Current type 4 to 20 mA DC
1 Current type 0 to 20 mA DC
S
40 4 points preset input type
Right angle type 3 m

Monitor output
Nil None (Preset input only)
1 Analog output 1 to 5 VDC L
3 Switch output/PNP output
4 Analog output 4 to 20 mA DC (Sink type)
N Without cable connector
Pipe thread type

Nil Rc Bracket∗
N NPT
Nil Without bracket
F G Note) Flat bracket
Note) Complies with
ISO1179-1 (2007).
Port size B
2 1/4
3 3/8
Note) EXH port: 1/4
Built-in regulator EXH port: M5
L-bracket
Solenoid valve EXH port: M5
3
High Pressure Electro-Pneumatic Regulator Series ITVH2000
Model ITVH2000
Minimum supply pressure Whichever is higher: 73 psi (0.5 MPa) or the set pressure + 29 psi (0.2 MPa)
Maximum supply pressure 435 psi (3.0 MPa)
Set pressure range Note 1) 29 to 290 psi (0.2 to 2.0 MPa)
Voltage 24 VDC ±10%
Power supply
Current consumption 0.12 A or less
Current type Note 2) 4 to 20 mA DC, 0 to 20 mA DC (Sink type)
Input signal Voltage type 0 to 5 VDC, 0 to 10 VDC
Preset input type 4 points (Negative common)
Current type 500 Ω or less
Input
Voltage type 6.0 to 6.5 kΩ (at 77°F [25°C])
impedance
Preset input type Approx. 4.7 kΩ
1 to 5 VDC
Output impedance: 1 kΩ or more
Analog Output accuracy: ±6% F.S. or less
Symbol
output 4 to 20 mA (Sink type)
Note 3)
Output impedance: 250 Ω or less
Output signal Output accuracy: ±6% F.S. or less
(Monitor output) NPN open collector output: Max. 30 V, 80 mA
Hysteresis: ±3% F.S.
Switch Self-diagnosis: ±5% F.S. or less
output PNP open collector output: Max. 80 mA
Hysteresis: ±3% F.S.
290 [2] Self-diagnosis: ±5% F.S. or less
Output pressure psi [MPa]

Hysteresis 1% F.S. or less
Repeatability ±1% F.S. or less
Sensitivity ±1% F.S. or less
Temperature characteristics ±0.12% F.S. or less/°C
Output pressure Accuracy ±2% F.S. or less ±1 digit
This range is outside
of the control (output). display Minimum unit Note 4) MPa: 0.01, kgf/cm2: 0.1, bar: 0.1, psi: 1
29 [0.2]
0 Ambient and fluid temperature 32 to 122°F (0 to 50°C) (No condensation)
0 100 Weight Approx. 630 g (without options)
Input signal [% F.S.]
Note 1) Refer to Figure 1 for the relationship between set pressure and input signal.
Fig. 1. Input/output characteristics chart Note 2) 2-wire type 4 to 20 mA is not available. Power supply voltage 24 VDC is required.
Note 3) Select either analog output or switch output. Further, when switch output is selected, select either NPN
output or PNP output. When measuring analog output of 1 to 5 VDC with a load impedance less than 100 k
Ω, the analog output may not obtain the output accuracy of ±6% F.S. or less.
Note 4) Adjustment of numerical values such as the zero/span adjustment is set based on the minimum units for
output pressure display. Note that the unit cannot be changed.
Note 5) The above characteristics are confined to the static state. When air is consumed on the output side, the
pressure may fluctuate.
Note 6) This product is not certified by Japan's High Pressure Gas Safety Act.
4
Series ITVH2000
Accessories (Option)/Part No.
Description Part no.

Flat bracket assembly (including mounting screws) P398020-600
L-bracket assembly (including mounting screws) P398020-601
Power cable connector
Straight type cable connector Right angle type cable connector
L-bracket
Flat bracket
Mounting screw Mounting screw
for the body for the body Straight type Right angle type
Flat bracket L-bracket cable connector cable connector
Dimensions (mm)

100 7
10
15
25
4x
R3
52
40
.5 2.3
(8.5) 33
50
4 × ø7 84 50
60 20
70
12
1.6
Working Principle
When the input signal rises, the air supply solenoid valve Working Principle Diagram
q turns ON, and the exhaust solenoid valve w turns OFF.
Therefore, supply pressure regulated by a built-in regulator Pressure
e passes through the air supply solenoid valve q and is display
applied to the pilot chamber r. The pressure in the pilot Output signal
Power supply i Control
chamber r increases and operates on the upper surface of circuit
Input signal
the diaphragm t.
As a result, the air supply valve y linked to the diaphragm q Air supply solenoid valve w Exhaust
t opens, and a portion of the supply pressure becomes solenoid valve
e Built-in regulator
output pressure.
Built-in regulator
This output pressure feeds back to the control circuit i via Solenoid valve
EXH EXH
the pressure sensor u. Here, a correct operation functions
P
until the output pressure is proportional to the input signal, u Pressure

t Diaphragm sensor
making it possible to always obtain output pressure r Pilot
proportional to the input signal. chamber
EXH
y Air supply valve
SUP OUT
5
High Pressure Electro-Pneumatic Regulator Series ITVH2000
Series ITVH2000
Linearity Hysteresis
363 1.0
[2.5]
Output deviation factor [% F.S.]

290
Set pressure psi [MPa]
[2.0] 0.5
Out
218
[1.5]
0.0
145
[1.0]
73 −0.5
[0.5] Return
0.0 −1.0
0 25 50 75 100 0 25 50 75 100
Input signal [% F.S.] Input signal [% F.S.]
Repeatability Pressure Characteristics Set pressure: 145 psi [1.0 MPa]

1.0 1.0

0.5 0.5
Set point
Return
0.0 0.0
Out
−0.5 −0.5
−1.0 −1.0
0 1 2 3 4 5 145 [1.0] 218 [1.5] 290 [2.0] 363 [2.5 ] 435 [3.0] 508 [3.5]
Input signal [% F.S.] Supply pressure psi [MPa]
Flow-rate Characteristics Supply pressure: 145 psi [1.0 MPa] Relief Characteristics Supply pressure: 145 psi [1.0 MPa]
145 [1.0] 145 [1.0]
131 [0.9] 131 [0.9]
116 [0.8] 116 [0.8]

102 [0.7] 102 [0.7]
87 [0.6] 87 [0.6]
73 [0.5] 73 [0.5]
58 [0.4] 58 [0.4]
44 [0.3] 44 [0.3]
29 [0.2] 29 [0.2]
15 [0.1] 15 [0.1]
0.0 0.0
0 18 [500] 35 [1000] 53 [1500] 71 [2000] 0 3.5 [100] 7 [200] 11 [300] 14 [400] 17 [500] 21 [600]
Flow rate scfm [L/min (ANR)] Flow rate scfm [L/min (ANR)]
6
Series ITVH2000
Dimensions (mm)
Do not turn the right angle type cable connector. It does

not rotate and is limited to only one entry direction.
Right angle type
cable connector 3 m
10 52
(33)
Straight type
cable connector 3 m
52
12.5
Setting part
5.5 M12 x 1 10 8
(Plug type)
11

M5 x 0.8
Solenoid valve
Breathing
M5 x 0.8 M4 x 0.7 depth 8 EXH
hole
Built-in regulator Built-in regulator F.G.
EXH EXH
Solenoid valve EXH
111
1/4 (Rc, NPT)

38.5
41
Port 3 (Exhaust port)
72
Port 3
(Exhaust port)
Port 1 Port 2 58
39
(Supply port) (Output port)

24
24
1/4, 3/8 (Rc, NPT) 1/4, 3/8 (Rc, NPT)
Port 1 (Supply port) Port 2 (Output port)
36
4 x M5 x 0.8 depth 11
Bracket mounting hole 36 Do not block three EXH ports on this product.
With flat bracket G thread

G1/4 G3/8
G1/4 20 depth, depth of counterbore 1.5 23 depth, depth of counterbore 2
100 20 depth, depth of counterbore 1.5 Port 1 (Supply port), Port 1 (Supply port),
Port 3 (Exhaust port) Port 2 (Output port) Port 2 (Output port)
84 7
4x
39
40
52
24
24
Flat bracket
With L-bracket
1/4 (Rc, NPT) 1/4, 3/8 (Rc, NPT) 1/4 (Rc, NPT) 1/4, 3/8 (Rc, NPT)
Port 3 (Exhaust port) Port 2 (Output port) Port 3 (Exhaust port) Port 2 (Output port)
39
39
L-bracket
24
24
1.6
12
15
7
25
10 2.3
(8.5) 33
45
50
7
Series ITVH2000
Be sure to read this before handling. Refer to the back cover for Safety Instructions.
For F.R.L. Precautions, refer to “Handling Precautions for SMC Products” and the Operation Manual on SMC
website, http://www.smcworld.com
Piping Operating Environment
Warning Warning
1. Screw piping together with the recommended proper 1. Do not operate in locations having an atmosphere of
torque while holding the side with the female threads. corrosive gases, chemicals, sea water, or where there will
Looseness or faulty sealing will occur if tightening torque is insuffi- be contact with the same.
cient, while thread damage will result if the torque is excessive.
Furthermore, if the side with the female threads is not held while Caution
tightening, excessive force will be applied directly to piping brack- 1. In locations where the body is exposed to water, steam,
ets etc., causing damage or other problems. dust, etc., there is a possibility that moisture or dust could
Connection thread Recommended proper torque lbf·ft [N ·m] enter the body through the EXH port, solenoid valve EXH
M5 1.1 to 1.5 (1.5 to 2) port and/or built-in regulator EXH port, thereby causing
1/4 5.9 to 8.9 (8 to 12) problems.
3/8 11 to 15 (15 to 20) 2. Do not operate in locations where vibration or impact
occurs.
2. Do not allow twisting or bending moment to be applied
3. In locations which receive direct sunlight, provide a
other than the weight of the equipment.
protective cover etc.
Provide separate support for external piping, as damage may
otherwise occur. 4. In locations near heat sources, block off any radiated heat.
3. Since excessive moment loads and the propagation of 5. Employ suitable protective measures in locations where
vibrations, etc. can easily result from inflexible piping there is contact with water droplets, oil or welding spatter,
made of materials such as steel, avoid these problems etc.
by using flexible tubing for intermediate connections.
4. Piping port indication Fluid Supply
When connecting piping to a product, refer to the Operation Manual
to avoid mistakes regarding the port. Warning
Port 1: Supply port
1. Compressed air or nitrogen can be used as a fluid.
Port 2: Output port
2. Do not use compressed air which includes chemicals,
Port 3: Exhaust port
synthetic oils containing organic solvents, salt, or corro-
5. Exhaust port sive gases, etc., as this can cause damage or malfunction.
Do not reduce the diameter of port 3 (the exhaust port), EXH port of
solenoid valve, or EXH port of built-in regulator too much or block it. It
will lead to an operation failure.
Caution
Caution 1. This product does not have a filtering function. Install an
air filter on the supply side close to the product. Select an
1. Preparation before piping air filter with a filtration degree of 5 µm or finer.
Before piping is connected, it should be thoroughly blown out with air 2. Compressed air containing large amounts of drainage
(flushing) or washed to remove chips, cutting oil and other debris from can cause a malfunction of this product and other pneu-
inside the pipe. matic equipment. As a countermeasure, install an
2. Wrapping of sealant tape aftercooler, air dryer or water separator, etc.
When screwing together pipes and fittings, etc., be certain that chips 3. If large amounts of carbon dust are generated by the
from the pipe threads and sealing material do not get inside the compressor, it can accumulate inside this product and
piping. cause a malfunction (air leakage etc.).
Also, when sealant tape is used, leave 1.5 to 2 thread ridges exposed
at the end of the threads.
Wrapping For details on the above compressed air quality, refer to
direction
“Air Preparation Equipment Model Selection Guide” in the
Ex
Best Pneumatics No. 5 catalog.
thr pos Sealant
ea e a tape
ds pp
rox
.2
8
Series ITVH2000
For F.R.L. Precautions, refer to “Handling Precautions for SMC Products” and the Operation Manual on SMC
website, http://www.smcworld.com
Handling Design/Selection
Caution Caution
1. Do not use a lubricator on the supply side of this product, 1. The direct-current power supply to combine should be UL
as this can cause a malfunction. authorized power supply.
2. If electric power is shut off while pressure is being 1) Limited voltage current circuit in accordance with UL508.
applied, pressure will be retained on the output side. A circuit in which power is supplied by the secondary coil of a
However, this output pressure is held only temporarily and is not transformer that meets the following conditions.
guaranteed. If exhausting of this pressure is desired, shut off the • Maximum voltage (with no load):
power after reducing the set pressure, and discharge the air using a 30 [Vrms] (42.4 [V peak]) or less
residual pressure exhaust valve etc. • Maximum current:
3. If power to this product is cut off due to a power failure 1. 8 [A] or less (including when short circuited)
etc. when it is in a controlled state, output pressure will 2. Limited by circuit protector (such as fuse) with the following
be retained temporarily. Handle carefully when operating ratings
with output pressure released to the atmosphere, as air No load voltage [V peak] Max. current rating [A]
0 to 20 [V] 5.0
will continue to flow out.
100
4. If supply pressure to this product is interrupted while the Over 20 [V] to 30 [V]
Peak voltage
power is still on, the internal solenoid valve will continue
to operate and a humming noise may be generated.
Since the life of the product may be shortened, shut off 2) A circuit using max. 30 [Vrms] or less (42.4 [V peak]), which is
the power supply also when supply pressure is shut off. powered by UL1310 or UL1585 compatible Class-2 power supply.
5. Do not block three EXH ports on this product. 2. Operate these products only within the specified voltage.
Using voltages beyond the specified levels could cause faults or
6. This product does not have a shutoff valve function. If air
malfunctions.
pressure is supplied without electric power being
applied, output pressure may increase to the pressure 3. Use 0 V as the baseline for the power supplied to this prod-
equivalent of the supply pressure. Due to product uct for output, control and input.
construction, a very small amount of air is discharged
+24 V +24 V
from the exhaust port when output pressure is generat-
Output power Output power
ed. Operate the system to shut off the supply pressure
0V 0V
when not operating the product.
Control/Input power Control/Input power
7. The product is adjusted to each specification at the time
+24 V –24 V
of shipment from the factory. Do not perform unneces-
sary disassembly or removal of parts as it will cause
failure. 4. Each product needs to be powered by one power supply
8. The optional cable connector is a 4-core wire type. When unit.
the monitor output (analog output or switch output) is The wiring of this product has the same common between the GND for
not being used, keep it from touching the other wires as power and the signals; there is a possibility that a wrong current occurs
this can cause a malfunction. and prevents a proper operation if one power supply unit controls
multiple electro-pneumatic regulators.
9. Do not turn the right angle type cable connector. It does
not rotate and is limited to only one entry direction. 5. Please contact SMC for the usage when the downstream
side is released to atmosphere.
10. Take the following steps to avoid a malfunction due to
noise. This product is a pressure controller. The downstream side being
released to atmosphere makes the inlet valve fully open, allowing a
1) Remove power supply noise during operation by installing a line large amount of atmosphere flow into the body. Please contact SMC
filter etc. in the AC power line. for the appropriate usage when you use the product under such
2) For avoiding the influence of noise or static electricity, install this condition since the product may not meet the specification or the life of
product and its wiring as far as possible from strong electric fields the product may be shortened.
such as those of motors and power lines, etc.
3) Be sure to implement protective measures against load surge for
induction loads (solenoid valves, relays, etc.).
11. For details on the handling of this product, refer to the
Operation Manual which is included with the product.
9
Series ITVH2000
For F.R.L. Precautions, refer to “Handling Precautions for SMC Products” and the Operation Manual on SMC website,
http://www.smcworld.com
Wiring
Caution
Connect the cable to the connector on the body with the F.G. (Grounding)
wiring arranged as shown below. Proceed carefully, as Ground the frame ground (F.G.) terminal at the front of the main
incorrect wiring can cause damage. body. If the F.G. terminal port is not used, this product may not
operate properly due to the noise.
Further, use DC power with sufficient capacity and a low
ripple.
Brown
Blue
White
Black
3: (Blue) 1: (Brown)
4: (Black) 2: (White)
Note)
M4 x 0.7 depth 8
Body F.G.
Note) The cable is also available in a right angle type.

A right angle type connector is attached facing left (toward the
SUP port). Do not attempt to rotate, as the connector does not
turn.
Current Signal Type Monitor output wiring diagram
Voltage Signal Type Preset Input Type Analog output: Voltage type Analog output: Current type
1 Brown Power supply 1 Brown Power supply (Sink type)
2 White Input signal 2 White Input signal 1 Brown Brown
3 Blue GND (COMMON) 3 Blue GND (COMMON) Blue Blue

4 Black Monitor output 4 Black Input signal 2 White Monitor output current White
Black Black
Wiring diagram
Current signal type Voltage signal type
Switch output: NPN type Switch output: PNP type
Brown Brown
Brown Brown
Blue Blue
Vs Vs Blue Blue
White White
∗
Load White White
Black ∗
Black Load
A Vin
Black Black
Vs : Power supply 24 VDC Vs : Power supply 24 VDC

A : Input signal 4 to 20 mA DC Vin: Input signal 0 to 5 VDC ∗ When 80 mA DC or more is applied, detecting device for over current
0 to 20 mA DC 0 to 10 VDC starts activating and then emits an error signal. (Error number “5”)
4 points preset input type

Brown
Blue
Vs S1 White
S2 Black
Vs: Power supply 24 VDC

(Negative common)
One of the preset pressures P1 through P4 is selected

by the ON/OFF combination of S1 and S2.
S1 OFF ON OFF ON
S2 OFF OFF ON ON
Preset pressure P01 P02 P03 P04
∗ For safety reasons, it is recommended that one of the preset pressures be set
to 0 MPa.
∗ Preset pressures are set based on the minimum unit for output display.
MPa kgf/cm2 bar psi
0.01 0.1 0.1 1
10
These safety instructions are intended to prevent hazardous situations and/or
Safety Instructions equipment damage. These instructions indicate the level of potential hazard with
the labels of “Caution,” “Warning” or “Danger.” They are all important notes for
safety and must be followed in addition to International Standards (ISO/IEC)∗1),
and other safety regulations.
∗1) ISO 4414: Pneumatic fluid power – General rules relating to systems.
Caution indicates a hazard with a low level of risk which, ISO 4413: Hydraulic fluid power – General rules relating to systems.
Caution: if not avoided, could result in minor or moderate injury. IEC 60204-1: Safety of machinery – Electrical equipment of machines.
(Part 1: General requirements)
Warning indicates a hazard with a medium level of risk which,
Warning: if not avoided, could result in death or serious injury.
ISO 10218-1: Manipulating industrial robots – Safety.
etc.
Danger indicates a hazard with a high level of risk which,
Danger : if not avoided, will result in death or serious injury.
Warning Caution
1. The compatibility of the product is the responsibility of the 1. The product is provided for use in manufacturing industries.
person who designs the equipment or decides its The product herein described is basically provided for peaceful use in
specifications. manufacturing industries.
Since the product specified here is used under various operating conditions, If considering using the product in other industries, consult SMC beforehand
its compatibility with specific equipment must be decided by the person who and exchange specifications or a contract if necessary.
designs the equipment or decides its specifications based on necessary If anything is unclear, contact your nearest sales branch.
analysis and test results. The expected performance and safety assurance
of the equipment will be the responsibility of the person who has determined Limited warranty and Disclaimer/
its compatibility with the product. This person should also continuously
review all specifications of the product referring to its latest catalog Compliance Requirements
information, with a view to giving due consideration to any possibility of The product used is subject to the following “Limited warranty and Disclaimer” and
equipment failure when configuring the equipment. “Compliance Requirements”.
Read and accept them before using the product.
2. Only personnel with appropriate training should operate
machinery and equipment. Limited warranty and Disclaimer
The product specified here may become unsafe if handled incorrectly. The
assembly, operation and maintenance of machines or equipment including
1. The warranty period of the product is 1 year in service or 1.5 years after
our products must be performed by an operator who is appropriately trained
the product is delivered, whichever is first.∗2)
and experienced. Also, the product may have specified durability, running distance or
replacement parts. Please consult your nearest sales branch.
3. Do not service or attempt to remove product and machinery/ 2. For any failure or damage reported within the warranty period which is clearly our
equipment until safety is confirmed. responsibility, a replacement product or necessary parts will be provided.
1. The inspection and maintenance of machinery/equipment should only be This limited warranty applies only to our product independently, and not to any
performed after measures to prevent falling or runaway of the driven other damage incurred due to the failure of the product.
objects have been confirmed.
3. Prior to using SMC products, please read and understand the warranty terms
2. When the product is to be removed, confirm that the safety measures as and disclaimers noted in the specified catalog for the particular products.
mentioned above are implemented and the power from any appropriate
∗2) Vacuum pads are excluded from this 1 year warranty.
source is cut, and read and understand the specific product precautions
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
of all relevant products carefully. Also, even within the warranty period, the wear of a product due to the use of the vacuum pad
3. Before machinery/equipment is restarted, take measures to prevent or failure due to the deterioration of rubber material are not covered by the limited warranty.
unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of
Compliance Requirements
safety measures if the product is to be used in any of the 1. The use of SMC products with production equipment for the manufacture of
following conditions. weapons of mass destruction (WMD) or any other weapon is strictly prohibited.
1. Conditions and environments outside of the given specifications, or use 2. The exports of SMC products or technology from one country to another are
outdoors or in a place exposed to direct sunlight. governed by the relevant security laws and regulations of the countries involved
2. Installation on equipment in conjunction with atomic energy, railways, air in the transaction. Prior to the shipment of a SMC product to another country,
navigation, space, shipping, vehicles, military, medical treatment, assure that all local rules governing that export are known and followed.
combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press
applications, safety equipment or other applications unsuitable for the Caution
standard specifications described in the product catalog.
SMC products are not intended for use as instruments for legal
3. An application which could have negative effects on people, property, or metrology.
animals requiring special safety analysis. Measurement instruments that SMC manufactures or sells have not been
4. Use in an interlock circuit, which requires the provision of double interlock qualified by type approval tests relevant to the metrology (measurement) laws
for possible failure by using a mechanical protective function, and of each country. Therefore, SMC products cannot be used for business or
periodical checks to confirm proper operation. certification ordained by the metrology (measurement) laws of each country.
Safety Instructions Be sure to read “Handling Precautions for SMC Products” (M-E03-3) before using.
© 2015 SMC Corporation of America, All Rights Reserved.

All reasonable efforts to ensure the accuracy of the information detailed in this catalog were made at the time of publishing.
However, SMC can in no way warrant the information herein contained as specifications are subject to change without notice. TP-RRD-5M
Compliant
E/P Pressure Regulator
Manufacturing Pneumatics Worldwide
How to Order
ITV 2030 - SEN - N 2 - DUQ00833 - X26

Body Size Made to Order
1010 2010 3010 Nil Standard Mounting

Thread Type
1030 2030 3030 Fieldbus X26 Manifold Mounting *
Nil Rc
1050 2050 3050 SEN EtherNet/IP Port Size
* Note that -X26 is available
N NPT
2090 SEC EtherCat 1 1/8” (1000) only for 2010, 2030,
and 2050 sizes.
2 1/4” (1000, 2000)
SPN Profinet
3 3/8” (2000, 3000)
SMB ModBus/TCP
4 1/2” (3000)
SPL PowerLink
1010 1030 1050

Model 2010 2030 2050 2090
3010 3030 3050
Min. Supply Pressure (psi) Set Pressure +14 -1.9
Max. supply pressure (psi) 29 145 -14.7
ING
• Ethernet/IP SHIPP W Set Pressure Range (psi) 0.7 to 14.5 0.7 to 72.5 0.7 to 130.5 -0.2 to -11.6
N O
Power Supply Voltage DC 24 V ± 10%
Current Consumption 0.15A or less
• PROFINET * Input & Output Signal Ethernet Based Fieldbus
Linearity Within ± 1% (Full Span)
Hysteresis Within ± 0.5% (Full Span)
• EtherCAT* Repeatibility Within ± 0.5% (Full Span)
Sensitivity Within ± 0.2% (Full Span)
Temperature Characteristics Within ± 0.12% (Full Span) / °C
• MODBUS TCP* Ambient & Fluid Temperature 0 to 50°C (32 to 122 °F) (No condensation)
Enclosure Rating IP65
* Inquire for Size 1000 8.8 oz.
Availability
Weight Size 2000 12.3 oz.
Size 3000 15.9 oz.
Fe a t u r e s
Daisy chain Power Over Ethernet
Built-in two port ethernet switch
12 Bit resolution In/Out
Device Level Ring (Ethernet/IP)
Quick Connect (Ethernet/IP)
Built in web server
Available in ITV1000, 2000 and
3000 sizes
Silicone free option
PDF248-B
Ethernet ITV Manifold Assembly
How to Order
IITV20- XX - X - 20X0 - SXX - DUR01490

Port size Number of Stations
Pressure
2 1/4” (1000, 2000) 2 Station
3 Station 1 0.1 MPa
3 3/8” (2000, 3000)
4 Station 3 0.5 MPa
5 Station 5 0.9 MPa
Thread Type
Nil Rc(PT) 6 Station

Porting
N NPT 7 Station Protocol
Supply: 1/2 8 Station SEN Ethernet I/P
F NPTF
Out: 1/4 or 3/8 SMB Modbus TCP
(per order)
Thread Type: Rc,

NPT NPTF (per order)
Dimensions ETHERNET ITV ETHERNET ITV
L Length (mm)
52 (N-1) + 88 PWR NS MS PWR NS MS
Height (mm) 173.2

E/P REGULATOR E/P REGULATOR
H
W Width (mm) 70
Mounting Screws H
4X M5x0.812 SHCS 2 OUT
G G
Pitch (mm)
36 x (52N + 16)
Out Supply
IITV20-XX-X-SXX-DUR01490
SMC Corporation of America W

10100 SMC Blvd.
Noblesville, IN 46060
L
www.smcusa.com
(800) SMC.SMC1
(800 - 762 - 7621)
Specifications
SMC Pneumatics (Canada) Ltd.
www.smcpneumatics.ca Voltage 24 VDC ± 10%
Input Signal (Digital) 12 BIT + SIGN
e-mail: sales@smcusa.com Output Signal (Digital) 12 BIT + SIGN
For International inquires: Linearity Within ± 1% FULL SPAN
www.smcworld.com
Hysteresis Within ± 0.5% FULL SPAN
All reasonable efforts to ensure the accuracy Repeatability Within ± 0.5% FULL SPAN
of the information detailed in this flyer were
made at the time of publishing. However,
Sensitivity Within ± 0.2% FULL SPAN
SMC can in no way warrant the information Enclosure IP 65
herein contained as specifications are subject
to change without notice.

Itv PDF

Încărcat de

Informații document

Titlu original

Drepturi de autor

Formate disponibile

Partajați acest document

Partajați sau inserați document

Opțiuni de partajare

Vi se pare util acest document?

Este necorespunzător acest conținut?

Drepturi de autor:

Formate disponibile

Itv PDF

Încărcat de

Drepturi de autor:

Formate disponibile

Electro-Pneumatic Regulator/Electronic Vacuum Regulator

Stepless control of air pressure ®

proportional to an electrical signal ARJ

Series ITV1000/2000/3000 are compatible with various

input specifications, including serial communications. ARX

Power consumption: W or less 4 Note 1) SRF

Series ITV0000 Series ITV1000 IC

Electronic Vacuum Regulators

Model Pressure range Power supply

Straight type Right angle type  Equivalent to IP65

LED Mist separator

Electro-Pneumatic Regulator Series ITV1000/2000/3000

ITV1000 ITV2000 ITV3000 ITV2090

ITV305 0.005 to 0.9 MPa VER

Current type: Built-in

Series ITV209  Current type:

For single unit and single unit for manifold

How to Order Manifold Assembly (Example)

two digits. the D side.

Model ITV001 ITV003 ITV005

Output signal Note 4) Analog output

For single unit

L-bracket assembly (includes 2 mounting screws) Right angle type

Tighting torque when assembling is 0.3 N·m.

Working Principle Diagram

Power supply and error

Power supply Output signal

q Air supply solenoid valve w Exhaust solenoid valve

Output deviation factor (% F.S.)

Output deviation factor (% F.S.)

Output deviation factor (% F.S.)

(ø4, ø5/32") EXHc (ø4, ø5/32")

Cable connector (4 cores)

Single unit for manifold

Note) When using under the conditions equivalent to IP65,

8.5 14 15 8.5 12.5 VCHR

Breathing hole VBA

Pressure range Made to Order Specifications

For communication cables, use the parts listed below

Modular Products and Accessory Combinations

t Spacer with L-bracket (e + r) Y30L Y40L

y Spacer with T-bracket — Y40T

178 Accessories (Option)/Part No.

Applicable model Description Part No.

Voltage type Cable connector (4 cores)

Note 1) Manifolds are compatible with 2 to 8 stations.

Consult with SMC for 9 stations or more. 4x

q Air supply solenoid valve

Linearity Hysteresis Repeatability

Output deviation factor (%F.S.)

Output deviation factor (%F.S.)

Set pressure (MPa)

Linearity Hysteresis Repeatability

Output deviation factor (%F.S.)

Set pressure (MPa)

Linearity Hysteresis Repeatability

Output deviation factor (%F.S.)

Output deviation factor (%F.S.)

Set pressure (MPa)

Linearity Hysteresis Repeatability

Output deviation factor (%F.S.)

Output deviation factor (%F.S.)

0.0 –1.0 –1.0