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Also Include topics such as clean room protocol, facility safety, non-disclosure etc.
• May not be directly related to manufacturing role but are necessary to begin work at illumina
• Include training that needs annual or semi-annual refresher
compare current workforce capability against analysis to determine training gaps and begin
to formulate a certification/training plan
Analysis sample analysis data High Level Task Equipment Type Component
DL Expert
DL Expert
What Role Performs Task
Veldhoven
Trumpf
Trumpf
AOM Alignment DL Expert Trumpf
Delay Cell Alignment DL Expert Trumpf
Seed Table O-SD Spatial Filter Alignment DL Expert Trumpf
Role Task Equipment Action TruCoax Alignment DL Expert Trumpf
Test Point Beam Profile Measurements DL Expert Trumpf
3300 System Operator Alignment Seed Table Align Seed Laser Test Point Power Measurements DL Expert Trumpf
Colinearity Alignment DL Expert Trumpf
3300 System Operator Alignment Seed Table Align the EOM PA0 Alignment DL Expert Trumpf
PA1 Alignment DL Expert Trumpf
3300 System Operator Alignment Seed Table Align the AOM PA2 Alignment DL Expert Trumpf
Drive Laser O
3300 System Operator Alignment Seed Table Align the Delay Cell PA3 Alignment
Spatial Filters Alignment (2)
DL Expert
DL Expert
Trumpf
Trumpf
3300 System Operator Alignment Seed Table Align the Spatial Filter Power Measurements Trumpf Trumpf
FFA/OP O OP Alignment Optics Team BTS Team
3300 System Operator Alignment Seed Table Align the TruCoax Alignment BTS O BTS Alignment Optics Team BTS Team
Final Focus O
3300 System Operator Alignment Seed Table Test Point Beam Profile Measurements Final Focus Alignment
Seed
Optics Team
DL Expert
BTS Team
Trumpf
3300 System Operator Alignment Seed Table Test Point Power Measurements CO2 Metrology O
TruCoax DL Expert Trumpf
FFA/OP DL Expert Trumpf
3300 System Operator Alignment Seed Table Align colinear beams DL PEMs DL Expert Trumpf
RBD O RBD Alignment DL Expert BTS Team
3300 System Operator Alignment Drive Laser Align PA0 Collector O Verify Collector Alignment (COAT) Metrology Expert MF
CDS Metrology Expert MF
3300 System Operator Alignment Drive Laser Align PA1 FDS Metrology Expert MF
3300 System Operator Alignment Drive Laser Align PA2 DFC
PPC
Metrology Expert
Metrology Expert
MF
MF
3300 System Operator Alignment Drive Laser Align PA3 Vessel Metrology O DIM Metrology Expert MF
DDM Metrology Expert MF
3300 System Operator Alignment Drive Laser Align the Spatial Filters (2) BLM Metrology Expert MF
LLM Metrology Expert MF
3300 System Operator Alignment Drive Laser Perform Power Measurements EUV PDs Metrology Expert MF
development training programs may or may not include the evaluation of KSA’s
While in a certification program it is incumbent on the participant to demonstrate KSA’s to a
certain standard.
Develop micro-lessons/training sessions that engage the trainee on individual topics that
lead to full skill development
• Keep purpose and process in mind for a 20 t0 30 minute engagement
• Involvement of Sme’s provides more consistent work information and training validation
Develop training using the right media mix for the training situation