MECH 466

Microelectromechanical Systems
University of Victoria
Dept. of Mechanical Engineering

Lecture 12:
Piezoelectric Sensors & Actuators

© N. Dechev, University of Victoria 1

Overview

Examples of piezoelectric sensors and actuators making use of

cantilever beams
Example of piezoelectric sensors and actuators making use of a thin
plate
Case Studies:
• Membrane Accelerometer
• Hard Drive Scanning Head Correction
Future Applications of Piezoelectric Sensors:
• The Daintiest Dynamos

© N. Dechev, University of Victoria 2

 Example #3: Piezoelectric Actuator

Given the following actuator:

electrode layers

Piezoelectric layer
V
t(piezo)
tb

3 2 Silicon beam

1 w
LA LB

Q: Find the vertical displacement (direction 3) at the end of the

beam, when voltage V is applied across the piezoelectric
material, via the electrodes.

© N. Dechev, University of Victoria 3

Example #3: Piezoelectric Actuator

Note: Only the portion of the beam ‘LA’ will be bent due to the
piezoelectric strip.
This is a case of the ‘inverse effect’, therefore:

Since there are no applied forces, this reduces to:

© N. Dechev, University of Victoria 4

 Example #3: Piezoelectric Actuator

Under the applied voltage, V:

Note: this equation can be re-written indicating the directions as:

(In other words, the electric field along direction 3, will cause
strain along direction 1.)

© N. Dechev, University of Victoria 5

Example #3: Piezoelectric Actuator

The equation for the strain due to the ‘inverse effect’ can be
written in matrix format as:

In the case of this example, we know that:

© N. Dechev, University of Victoria 6

 Example #3: Piezoelectric Actuator

Additionally, we know that for typical piezoelectric materials,

many values of the peizoelectric coefficient matrix are zero.
For example, for ZnO, the matrix is:

Therefore, given the applied electric fields, and assuming the use
of ZnO, the equation for strain due to the ‘inverse effect’ is:

© N. Dechev, University of Victoria 7

Example #3: Piezoelectric Actuator

Due to the applied voltage V, the piezoelectric element will

expand (strain) in direction 1. Since it is firmly attached to the
beam, this expansion (strain) will cause segment LA to be curved
into an arc with a radius r, as defined by:

where s(long) is the longitudinal strain = s1 in this example

© N. Dechev, University of Victoria 8

 Example #3: Piezoelectric Actuator

Therefore, since only segment LA of the beam will be bent, we can

define the displacement (along direction 3) at the end of
segment LA as:

δ(x=LA)
1

where: r
φ

Therefore:

© N. Dechev, University of Victoria 9

Example #3: Piezoelectric Actuator

Since the rest of the beam does not bend, the tip deflection of the
entire beam can be defined as:

δ(x=LA)
1

δ(beam)
φ

Straight Portion of beam

© N. Dechev, University of Victoria 10

 Example #4: Piezoelectric Actuator

Given the same actuator as in Example #3:

V
t(piezo)
tb

3 2 Silicon beam
LA LB w
1
L

Q: Find the tip deflection given the following values:

Piezo = ZnO (see table 7.2 for properties)
Beam = polysilicon (see past notes for properties)
Vapplied = 100 V
tpiezo = 10 um
tbeam = 5 um
LA = 100 um
L = 400 um
wbeam = wpiezo = 30 um

© N. Dechev, University of Victoria 11

Example #4: Piezoelectric Actuator

See Class Notes

© N. Dechev, University of Victoria 12

 Case Study 7.2: Membrane Piezoelectric
Accelerometer
A membrane based accelerometer is made using the piezoelectric
effect, using the following design:

Top Electrodes

Bottom Electrode

Cross-Section
A-A’

Figure 7.6. Piezoelectric Accelerometer [Chang Liu]

© N. Dechev, University of Victoria 13

Case Study: Hard Drive R/W Head Correction

Disc drives store information on the surface of a ‘hard platter’

using magnetic ‘read/write heads’ to create magnetic ‘bits’ of info.
As the density (# of bits/unit area on the surface) of hard drives
increased over the past two decades, mechanical factors such as
ball bearings, manufacturing errors and inertial effects have created
bottlenecks on the possible read/write speeds and data density.

Inside of a typical hard drive, with platter, Multi-platters and Multi-scan heads visible.
voice coil, and scan arm visible. [How Stuff Works.com]
[How Stuff Works.com]
© N. Dechev, University of Victoria 14
 Case Study: Hard Drive R/W Head Correction

To overcome these problems, recent hard drives incorporate a ‘self-

correction system, using piezoelectric (or other) microactuators, to
keep the read/write head centered on the ‘data track’.

Illustration of hard drive internals. Movie of hard drive operation,

[IBM-Almaden-Research-Center] without and with ‘error correction’ from a microactuator
[IBM-Almaden-Research-Center]

© N. Dechev, University of Victoria 15

Case Study: Hard Drive R/W Head Correction

SEM (scanning electron

microscope) image of a
typical hard drive head,
with microactuator.

SEM image of hard drive head (upside down)

[IBM-Almaden-Research-Center]

© N. Dechev, University of Victoria 16

 Case Study: The Daintiest Dynamos

A proposal for Piezoelectric plate

creating small sized
generators for Silicon cantilever

energy storage. Copper sheet

Seeks to take High-energy

electrons

advantage of high Radioactive source

energy densities 1 Beta particles (high-energy electrons) fly spontaneously

from the radioactive source and hit the copper sheet,
where they accumulate.
2 Electrostatic attraction between the copper sheet and
the radioactive source bends the silicon cantilever
and the piezoelectric plate on top of it.
available in some
radioisotopes.

ENERGY CONTENT
ENERGY DENSITY
TECHNOLOGY (MILLIWATT-HOUR/MILLIGRAM)
Lithium-ion in a chemical battery 0.3
Methanol in a fuel cell* 3
Tritium in a nuclear battery** 850
Polonium-210 in a nuclear battery** 57 000
*Assuming 50 percent efficiency
**Assuming 8 percent efficiency and 4 years of operation

3 When the cantilever bends to the point where the copper 4 The cantilever then oscillates, and the mechanical stress in
sheet touches the radioactive source, the electrons the piezoelectric plate creates an imbalance in its
flow back to it, and the attractive force ceases. charge distribution, resulting in an electric current.

Operation of Piezoelectric Beam Generator [IEEE Spectrum, Sept 2004]

© N. Dechev, University of Victoria 17

Case Study: The Daintiest Dynamos

Issue for discussion:

• How can you use new “MEMS technology” to extract power
from materials with high energy density?
Proposed Solution:
• MEMS based power generator, based on extracting energy
from radio isotopes.
Benefits:
____________________________________________________
____________________________________________________
Problems:
____________________________________________________
____________________________________________________
© N. Dechev, University of Victoria 18