5 Port Pilot Operated Solenoid Valve Series Variations and Specifications

P1111-P1228-E.qxd 08.9.
2 2:52 PM Page 1111
5 Port Pilot Operated Solenoid Valve

VFS1000/2000/3000/4000/5000/6000 Series
Metal Seal
Series Variations
Sonic conductance Type of Voltage Electrical entry With light/surge Manual
Series C [dm3/s·bar)] actuation voltage suppressor override
4/2 5/3(A/B R1/R2) (Option)
Single 3 SJ
Double position
2 position single (Standard) With light/surge voltage
Grommet (G) Grommet
terminal suppressor
Non-locking SY
100 VAC, 50/60 Hz push type
VFS1000 1.8 1.8
200 VAC, 50/60 Hz
(E)
• Grommet terminal (EZ) (Flush) SV
Body Ported
(P.1114) 2 position double • Conduit terminal (TZ)

24 VDC
• DIN terminal (DZ)
With surge voltage
Non-locking SYJ
3 position closed center (Option) push type
suppressor (Extended)
VFS2000 3.4 3.4 110 to 120 VAC, 50/60 Hz Conduit DIN • Grommet (GS) SZ
(P.1122) 220 VAC, 50/60 Hz terminal (T) terminal (D)
Note) • Indicator light is not
Locking type
3 position exhaust center
240 VAC, 50/60 Hz available for grommet
type. Only surge voltage (Tool required)
VP4
12 VDC suppressor can be
equipped on the middle
100 VDC Locking type ∗ S0700
VFS3000 6.8 6.5 3 position pressure center of lead wire.
• DC: There is polarity. (Lever)
(P.1130) (Lead wire
Red: +, Black: –) VQ
∗ Locking type (lever) is not available for body ported Series VFS2000/3000.
Plug-in With light/surge voltage VQ4

2 position single suppressor
Conduit
terminal (F) • Plug-in type VQ5
Conduit terminal (FZ)
• Non plug-in type
2 position double
Non plug-in
Grommet
Grommet terminal (EZ) VQC
Conduit terminal (TZ)
Grommet (G) terminal (E) DIN terminal (DZ)
VFS2000 With surge voltage suppressor
VQZ
Plug-in type
2.8 2.7 • Non plug-in type
Non plug-in type
3 position
Grommet (GS) Non-locking SQ
(P.1138)
closed center Note) • Indicator light is not push type
Conduit DIN terminal
terminal (T) (D)
available for grommet
type. Only surge voltage (Flush) VFS
suppressor can be
equipped on the middle
of lead wire. Non-locking VFR
Base Mounted
(Standard) • DC: There is polarity. push type

3 position (Lead wire
exhaust center 100 VAC, 50/60 Hz Red: +, Black: –) (Extended)
VQ7
200 VAC, 50/60 Hz
With light/surge voltage
VFS3000 24 VDC Plug-in
suppressor Locking type
Plug-in type 5.8 5.4 Conduit
• Plug-in type (Tool required)
Non plug-in type terminal (F)
(P.1162) 3 position Conduit terminal (FZ)
pressure center (Option) • Non plug-in type Locking type
VFS4000 110 to 120 VAC, 50/60 Hz Non plug-in Grommet terminal (EZ)
DIN terminal (DZ)
(Lever)
Plug-in type 12 11 220 VAC, 50/60 Hz Grommet DIN
Non plug-in type 240 VAC, 50/60 Hz terminal (E) terminal (D)
(P.1182) 3 position 12 VDC
VFS5000 double check 100 VDC
Plug-in type 20 17
Non plug-in type
(P.1202)
Plug-in
Conduit
2 position single
terminal (F)
VFS6000 Non plug-in
Non-locking
Plug-in type push type
38 — Grommet DIN
Non plug-in type (Flush)
2 position double terminal (E) terminal (D)
(P.1218)
1111
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Series VFS
Manifold Variations
Manifold
Bar Stacking With With With With Non plug-in
base base attachment terminal multi- D-sub (Connection to
plug lead wire block connector connector each valve)
Body Ported
VFS1000 (P.1119)
VFS2000 (P.1127)
VFS3000 (P.1136)
VFS2000 (P.1146) (P.1146) (P.1146) (P.1146)

Base Mounted
Plug-in Type
VFS3000 (P.1168) (P.1168) (P.1168)
VFS4000 (P.1188) (P.1188) (P.1188)
VFS5000 (P.1208) (P.1208) (P.1208)
VFS2000 (P.1146)
Non Plug-in Type
Base Mounted
VFS3000 (P.1168)
VFS4000 (P.1188)
VFS5000 (P.1208)
Bar Base Plug-in With terminal block

(Series VFS1000/2000)
Pilot individual EXH
Pilot common EXH

With attachment
plug lead wire
With multi-connector
With D-sub connector
Stacking base
(Series VFS3000)
Pilot common EXH Non Plug-in
Grommet terminal DIN terminal
∗ Bottom piping is available as an option.
1112
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Metal Seal
5 Port Pilot Operated Solenoid Valve Series VFS
Manifold Option Manifold Option Parts

With With Dripproof Serial Individual Individual SUP EXH Throttle Interface Air shutoff Air release Double Blanking
exhaust control manifold transmission SUP EXH block block valve regulator valve valve check plate
kit manifold
cleaner unit (Equivalent (EX123/4-type spacer spacer disk disk spacer spacer spacer spacer
to IP65) compatible)

(P.1119)
SJ

(P.1127)
SY

(P.1136)
SV
Note)
Note)
SYJ
(P.1153) (P.1155) (P.1158) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148)
Note)
SZ
(P.1173) (P.1175) (P.1178) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170)
Note)
VP4
(P.1193) (P.1195) (P.1198) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190)
Note)
S0700
(P.1212) (P.1214) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209)
VQ

(P.1153) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148)
VQ4

(P.1173) (P.1175) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170)
VQ5

(P.1193) (P.1195) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190)
VQC

(P.1212) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209)
VQZ
Individual SUP spacer Interface regulator SQ
With exhaust cleaner VFS
VFR
VQ7
Air shutoff valve spacer
Individual EXH spacer
With control unit

Air release valve spacer
SUP/EXH block disk
Double check spacer

Throttle valve spacer
Dripproof Manifold (Equivalent to IP65)

With serial transmission kit
Note) Made to Order Specifications
1113
P1111-P1228-E.qxd 08.9.2 2:52 PM Page 1114

Metal Seal, Body Ported
Series VFS1000
Model
Model Flow characteristics (1)
Max. (2)
(3)
Type of Port 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Mass
cycle time (kg)
actuation Plug-in Non plug-in size C C (ms)
[dm3/(s·bar)] b Cv [dm3/(s·bar)] b Cv (cpm)
2 position
Single VFS1120 VFS1130 18 1.7 0.22 0.38 1.8 0.19 0.40 1200 15 or less 0.18
Double VFS1220 VFS1230 18 1.7 0.22 0.39 1.8 0.19 0.40 1200 13 or less 0.26
Closed 18
VFS1320 VFS1330 1.6 0.20 0.37 1.8 0.20 0.41 600 20 or less 0.27
center
3 position
Exhaust 18
center VFS1420 VFS1430 1.7 0.18 0.38 1.9 0.19 0.44 600 20 or less 0.27
Pressure
center
VFS1520 VFS1530 18 1.7 0.24 0.40 1.6 0.18 0.37 600 20 or less 0.27
Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.
Note 2) According to JIS B 8375-1981. (The value at supply pressure 0.5 MPa.)
Note 3) In the case of grommet type
Note 4) “Note 1)” and “Note 2)” are with controlled clean air.
Compact yet provides a Standard Specifications

large flow capacity Fluid Air/Inert gas
Maximum operating pressure 1.0 MPa
C: 1.8 dm3/(s·bar)
Valve specifications
2 position 0.1 MPa

Min. operating pressure
Low power consumption: 3 position 0.15 MPa
Proof pressure 1.5 MPa
1.8 W DC Ambient and fluid temperature –10 to 60°C (1)
Lubrication Non-lube (2)
Pilot valve manual override Non-locking push type (Flush)
Shock/Vibration resistance 150/50 m/s2 (3)
Enclosure Dustproof (Degrees of protection 0) (4)
Coil rated voltage 100, 200 VAC, 50/60 Hz; 24 VDC
Electricity specifications
VFS1320-D-01
Allowable voltage fluctuation –15 to +10% of rated voltage
Coil insulation type Class B or equivalent (130°C) (5)
Apparent power Inrush 5.6 VA (50 Hz), 5.0 VA (60 Hz)
(Power consumption) AC Holding 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz
VFS1120-G-01-F Power consumption (DC) 1.8 W (2.04 W: With light/surge voltage suppressor)
Grommet, Grommet terminal,
VFS1220-E-01 Electrical entry
Conduit terminal, DIN terminal
Note 1) Use dry air at low temperatures.
Note 2) Use turbine oil Class 1 (ISO VG32), if lubricated.
Note 3) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial
VFS1120-G-01 direction and at the right angles to the main valve and armature in both
energized and de-energized states every once for each condition.
(Values at the initial period)
Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz.
Test was performed at both energized and de-energized states in the
JIS Symbol axial direction and at the right angles to the main valve and armature.
2 position 3 position Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.
Single Closed center
Option Specifications
Pilot valve manual override Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
12, 100 VDC
Option With light/surge voltage suppressor Note)
Double Exhaust center
Foot bracket (With screw) Part No.: AXT626-10A, VFS1120 (single) only
Note) Grommet type is available only w/ surge voltage suppressor (which is directly connected with
lead wire).
Manifold
Pressure center Body type Applicable manifold base (Pilot EXH)
VFS120 Bar manifold (Individual EXH)
VFS130 Bar manifold (Common EXH base side)
Note) VFS130: Manifold only. Cannot be used as a single unit.
1114
P1111-P1228-E.qxd 08.9.2 2:52 PM Page 1115

Metal Seal, Body Ported Series VFS1000
How to Order
VFS1 1 20 1 G 01
Symbol Option
2 position single
F: With foot bracket
Thread type
1 Nil Rc
Port size N∗ NPT
01 Rc 1 8 T∗ NPTF
2 position double
F∗ G SJ
∗ Option
2 ∗ Mountable only
Manual override
for VFS1120. SY
3 position closed center Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type C∗: Locking type
(Flush) (Extended) (Lever) SV
3
SYJ
3 position exhaust center SZ
∗ Option
4
Light/Surge voltage suppressor VP4
Nil None
3 position pressure center Z With light/surge voltage suppressor S0700
S∗ With surge voltage suppressor
5 ∗ Grommet type is available only w/ surge voltage suppressor, not w/ indicator light. VQ
Electrical entry VQ4
Body (Pilot exhaust) G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
20: Individual EXH VQ5
VQC
VQZ
Coil rated voltage SQ
30∗: Common EXH 1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz) VFS
3∗ 110 to 120 VAC (50/60 Hz)
4∗ 220 VAC (50/60 Hz)
5 24 VDC VFR
6∗ 12 VDC
7∗ 240 VAC (50/60 Hz) VQ7
9∗ Other
∗ Manifold only ∗ Option
How to Order Pilot Valve Assembly

SF4 1 DZ 21
Applicable model
Coil rated voltage Manual override Individual pilot
1 100 VAC, 50/60 Hz Electrical entry, Light/Surge voltage suppressor Non-locking push 21 For VFS120
exhaust
2 200 VAC, 50/60 Hz G Grommet Nil
type (Flush) Common pilot
3∗ 110 to 120 VAC (50/60 Hz) GS Grommet with surge voltage suppressor Non-locking push 22 For VFS130
4∗ 220 VAC, 50/60 Hz D DIN terminal A∗ exhaust
type (Extended)
5 24 VDC DZ DIN terminal with light/surge voltage suppressor Locking type
B∗
6∗ 12 VDC DO DIN terminal ∗∗ (Tool required)
7∗ 240 VAC, 50/60 Hz DOZ DIN terminal with light/surge voltage suppressor ∗∗ Locking type
C∗
9∗ Other Y∗ DIN terminal (Lever)
∗ Option YZ∗ DIN terminal with light/surge voltage suppressor ∗ Option
YO∗ DIN terminal ∗∗
YOZ∗ DIN terminal with light/surge voltage suppressor ∗∗
T Conduit terminal
TZ Conduit terminal with light/surge voltage suppressor
E Grommet terminal
EZ Grommet terminal with light/surge voltage suppressor
∗ D: Conforming to DIN43650 standard; Y: Conforming to DIN43650B standard
∗∗ DIN connector is not attached.
1115
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Series VFS1000
Cylinder Speed Chart

Use as a guide for selection.
Please confirm the actual conditions with SMC
Body Ported Sizing Program.
Bore size
Series CJ2 Series CM2 Series MB, CA2
Average
Pressure 0.5 MPa Pressure 0.5 MPa Pressure 0.5 MPa
Series speed
Load factor 50% Load factor 50% Load factor 50%
(mm/s)
Stroke 60 mm Stroke 300 mm Stroke 500 mm
ø6 ø10 ø16 ø20 ø25 ø32 ø40 ø40 ø50 ø63 ø80 ø100
800 Perpendicular,
700 upward actuation
600 Horizontal
500 actuation
VFS1120-01 400
300
200
100
0
Conditions ∗ It is when the cylinder is extending that is meter-out controlled by

Body ported Series CJ2 Series CM2 Series MB, CA2 speed controller which is directly connected with cylinder, and its
Tube bore x Length T0604 x 1 m T0806 x 1 m needle valve with being fully open.
∗ The average velocity of the cylinder is the value that the stroke is
VFS1120-01 Speed controller AS3001F-06 AS3001F-08 divided by the total stroke time.
Silencer AN101-01 ∗ Load factor: ((Load weight x 9.8)/Theoretical force) x 100%
Construction
2 position single 2 position double
Closed center 3 position closed center/exhaust center/pressure center
Exhaust center
Pressure center
Component Parts
No. Description Material Note
1 Body Aluminum die-casted Platinum silver
2 Spool/Sleeve Stainless steel —
3 End plate Resin —
4 Piston Resin —
5 Return spring Stainless steel —
6 Pilot valve assembly — —
7 Detent assembly — —
∗ Refer to “How to Order Pilot Valve Assembly” on page 1115.
1116
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2 Position Single — Grommet, Grommet terminal, Conduit terminal, DIN terminal

Grommet : VFS1120-G Foot bracket (F)
Part no. : AXT626-10A
2 x ø4.5
Manual mounting hole
override 2 x ø4.5 mounting hole
Non-locking push type
SJ
Solenoid valve
SY
(Lead wire length)
Manual 2 x ø3.5
SV
override mounting hole
≅ 300
(Locking type) SYJ

Pilot EXH
(No VFS130)
SZ
VP4
S0700
5 x Rc 1/8
VQ
M3 x 0.5 x 14L VQ4
Countersunk head screw
Tightening torque: 0.6 N·m
VQ5
VQC
VQZ
Grommet terminal: VFS1120-E/EZ DIN terminal: VFS1120-D/DZ/Y/YZ SQ
Lead wire O.D.
Max. ø3.5 Applicable heavy-duty code VFS
O.D. ø6 to ø8
suppressor (EZ)
(Y: ø4.7 to ø7)
With light/surge voltage VFR
Light suppressor (DZ)
Manual override VQ7
(Locking type) Light
Manual override
(Locking type)
Conduit terminal: VFS1120-T/TZ
Applicable heavy-duty code ( ): Y, YZ

O.D. ø6 to ø8
suppressor (TZ)
Light
Manual override
(Locking type)
1117
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Series VFS1000
2 Position Double, 3 Position — Grommet, Grommet terminal, Conduit terminal, DIN terminal
Grommet: VFS1220-G, VFS1320-G, VFS1420-G, VFS1520-G
2 x ø4.5 mounting hole
Manual override
151 (3 position: 155.5)
(Lead wire length)

Manual 2 x ø3.5 mounting hole
override
≅300
(Locking type)
Pilot EXH
(No VFS130)
Grommet terminal: VFS1220-E/EZ VFS1320-E/EZ DIN terminal : VFS1220-D/DZ/Y/YZ

VFS1420-E/EZ VFS1320-D/DZ/Y/YZ
VFS1520-E/EZ VFS1420-D/DZ/Y/YZ
Lead wire O.D.
VFS1520-D/DZ/Y/YZ
Max. ø3.5 152 (3 position: 156.5)
Applicable heavy-duty cord
With light/surge voltage O.D. ø6 to ø8
suppressor (EZ) (Y: ø4.7 to ø7)
188 (3 position: 192.5)
Light
Manual override
(Locking type) With light/surge voltage
suppressor (DZ)
Light
Manual override
(Locking type)
Conduit terminal: VFS1220-T/TZ VFS1320-T/TZ

VFS1420-T/TZ
VFS1520-T/TZ
Applicable heavy-duty cord ( ): Y, YZ
O.D. ø6 to ø8
188 (3 position: 192.5)

suppressor (TZ)
Light
Manual override
(Locking type)
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Series VFS1000
Manifold Specifications
Single Base Type
Specifications
Compact and lightweight Manifold base type Bar manifold, Body ported
Compact due to manifolding on a single Stations Max. 15 stations
base for mounting in small spaces.
Keeps environmental air Port Specifications

Porting specifications: Rc (Connecting port size)
clean from pilot exhaust Symbol
Passage
Base Valve Base SJ
Use of the VV5FS1-30 manifold can exhaust
intensively the pilot exhaust gas to the base 1(P) 5(R1), 3(R2) 1(P) 4(A), 2(B) 5(R1), 3(R2)
side, and can prevent environmental 1 Common Common Side/Rc 1/8 Top/Rc 1/8 Side/Rc 1/8 SY
aggravation due to noise and oil mist.
Option SV
Blanking plate VVFS1000-10A-1 With gasket, screw
SYJ
How to Order Manifold Base
SZ
VV5FS1 20 05 1 01 VP4
Thread type
Series VFS1000 P, EA, EB port size
VV5FS1-20 Manifold 01 Rc 1/8
Nil
N∗
Rc S0700
NPT
T∗ NPTF
F∗ G VQ
∗ Option
Symbol
VQ4
Stations Passage Porting specifications
02 2 stations
Symbol
1(P) 3(R2), 5(R1) 2(B), 4(A) VQ5
Common Common Top
•••
•••
15 15 stations
1
Rc 1 8 Rc 1 8 Rc 1 8 VQC
Base model VQZ

Model Pilot exhaust Applicable valve model
VV5FS1-30
Pilot individual EXH SQ
VFS
Part no. for mounting bolt 20 VFS120--01
and gasket
BG-VFS1030
VFR
Pilot common EXH

VQ7
VFS130--01
30
∗VFS120--01
mountable
How to Order Manifold Assembly [Example]

Add the valve and option part numbers in order starting from the first station
on the D side.
<Example>
(Manifold base) VV5FS1-20-061-01 1
(2 position single) ∗ VFS1120-1D-01 3
(2 position double) ∗ VFS1220-1D-01 2
(Blanking plate) ∗ VVFS1000-10A-1 1
The asterisk denotes the symbol for
assembly. Prefix it to the part numbers of
the solenoid valve.
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Series VFS1000
Type 20 Manifold — Pilot individual exhaust: VV5FS1-20- Station 1-01

Grommet: G
Manual override
U side D side
Blanking plate
3 position Double Single ≅300

(Lead wire length)
Gasket
Pilot EXH
Stations
Formula for manifold weight M = 0.049n + 0.059 (kg) n: Station
Grommet terminal: E/EZ Conduit terminal: T/TZ DIN terminal: D/DZ/Y/YZ

Applicable heavy-duty cord O.D. ø6 to ø8
Lead wire O.D. O.D. ø6 to ø8 (Y: ø4.7 to ø7)
Max. ø3.5
3 position (156.5)
3 position (192.5)
Double (152)
3 position (192.5)
Double (188)
Double (188)
Single (103.5)
Single (121.5)
Single (121.5)
(With light/surge voltage suppressor: 82.5)
(With light/surge voltage suppressor: 91.5) (With light/surge voltage suppressor: 97.5 (99.5))
(With light/surge voltage suppressor: 106.5 (108.5))
( ): Y, YZ
n: Station
Symbol Stations 2 3 4 5 6 7 8 9 10 Formula
L1 59 83 107 131 155 179 203 227 251 L1 = 24 x n + 11
L2 77 101 125 149 173 197 221 245 269 L2 = 24 x n + 29
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Type 30 Manifold — Pilot common exhaust: VV5FS1-30- Station 1-01

Grommet: G
Manual override
SJ
U side D side
SY
SV
4 x ø5.2 mounting hole Blanking plate
4 x M5 SYJ
Pilot EXH port
3 position Double Single ≅300

SZ
(Lead wire length)
VP4
S0700
Gasket
VQ
VQ4
Stations VQ5
Formula for manifold weight M = 0.079n + 0.093 (kg) n: Station VQC

VQZ
Applicable heavy-duty code SQ
O.D. ø6 to ø8
Applicable heavy-duty code (Y: ø4.7 to ø7)
Lead wire O.D. O.D. ø6 to ø8 VFS
VFR
VQ7
3 position (156.5)
3 position (191.5)
Double (152)
3 position (192.5)
Double (187)
Double (188)
Single (103.5)
Single (121)
Single (121.5)
Pilot EXH port

Pilot EXH port
Pilot EXH port
( ): Y, YZ
n: Station
Symbol Stations 2 3 4 5 6 7 8 9 10 Formula
L1 59 83 107 131 155 179 203 227 251 L1 = 24 x n + 11
L2 77 101 125 149 173 197 221 245 269 L2 = 24 x n + 29
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Series VFS2000
Model
Model Flow characteristics (1) (2) (3)
Port Max.
Type of
size
1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Mass
actuation Plug-in Non plug-in C C cycle time (kg)
Rc b Cv b Cv (cpm) (ms)
[dm3/(s·bar)] [dm3/(s·bar)]
18 3.2 0.24 0.78 3.4 0.28 0.82
2 position
Single VFS2120 VFS2130 1200 22 or less 0.26

14 4.0 0.20 0.90 3.5 0.32 0.85
18 3.2 0.24 0.78 3.4 0.28 0.82
Double VFS2220 VFS2230 1200 13 or less 0.35
14 4.0 0.20 0.90 3.5 0.32 0.85
Closed 18 3.2 0.24 0.78 3.2 0.27 0.80
VFS2320 VFS2330 600 40 or less 0.42
center 14 4.0 0.20 0.90 3.4 0.29 0.83
3 position
Exhaust 18 3.2 0.25 0.79 3.4 0.26 0.82

VFS2420 VFS2430 600 40 or less 0.42
center 14 4.0 0.20 0.90 3.4 0.32 0.84
Pressure 18 3.1 0.23 0.75 3.3 0.27 0.80
VFS2520 VFS2530 600 40 or less 0.42
center 14 4.0 0.24 0.92 3.3 0.30 0.82
Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.
Note 3) In the case of grommet type Note 4) Factors of “Note 1)” and “Note 2)” are achieved in controlled clean air.
Compact yet provides a Standard Specifications

high flow capacity Fluid Air/Inert gas
Maximum operating pressure 1.0 MPa

1/4: C: 3.4 dm3/(s·bar) Minimum operating pressure 0.1 MPa
Low power consumption: Proof pressure 1.5 MPa
Ambient and fluid temperature –10 to 60°C (1)
1.8 W DC Lubrication Non-lube (2)
100, 200 VAC, 50/60 Hz; 24 VDC
Coil rated voltage

VFS2320-T-02 Allowable voltage fluctuation –15 to +10% of rated voltage
Apparent power Inrush 5.6 VA (50 Hz), 5.0 VA (60 Hz)
VFS2120-E-02-F Power consumption 1.8 W (2.04 W: With light/surge voltage suppressor)
VFS2220-E-02 Electrical entry Conduit terminal, DIN terminal
VFS2120-G-02 direction and at the right angles to the main valve and armature in both
JIS Symbol energized and de-energized states every once for each condition. (Values
at the initial period)
2 position 3 position Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz.
Single Closed center Test was performed at both energized and de-energized states in the
axial direction and at the right angles to the main valve and armature.
Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.
Double Exhaust center Pilot type External pilot (1)
Pilot valve manual override Non-locking push type (Extended), Locking type (Tool required)
110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
12, 100 VDC
Option With light/surge voltage suppressor (2)
Foot bracket (With screw) Part no.: VFN200-17A, VFS2120 (single) only
Pressure center
Note 1) Operating pressure: 0 to 1.0 MPa. Pilot pressure: 0.1 to 1.0 MPa.
Note 2) Grommet type is available only w/ surge voltage suppressor (which is directly connected with
lead wire), not w/ indicator light.
Manifold
Body type Applicable manifold base (Pilot EXH)
VFS220 Bar manifold (Individual EXH)
VFS230 Bar manifold (Common EXH base side)
Note) VFS230: Manifold only. Cannot be used as a single unit.
1122
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1123

How to Order
VFS2 1 20 1 G 01
Symbol Option
1: 2 position single F: With foot bracket
Thread type
Nil Rc
Port size N∗ NPT
2: 2 position double 01 Rc 1 8
T∗ NPTF
02 Rc 1 4
F∗ G
∗ Option
SJ
∗ Mountable only
3: 3 position closed center
Manual override
for VFS2120. SY
Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type
(Flush) (Extended) (Tool required) SV
4: 3 position exhaust center
SYJ
SZ
5: 3 position pressure center
∗ Option
Light/Surge voltage suppressor VP4

Nil None
∗ Reverse pressure: Can Z With light/surge voltage suppressor S0700
S∗
be used by external
pilot specifications. With surge voltage suppressor
∗ Grommet type is available only w/ surge voltage suppressor, not w/ indicator light. VQ
Body (Pilot exhaust)
20: Individual EXH Electrical entry VQ4
G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
VQ5
VQC
30: Common EXH∗
VQZ
Coil rated voltage
1 100 VAC (50/60 Hz)
SQ
2 200 VAC (50/60 Hz)
∗ Manifold only 3∗ 110 to 120 VAC (50/60 Hz) VFS
4∗ 220 VAC (50/60 Hz)
Pilot type
Nil
5 24 VDC VFR
Internal pilot 6∗ 12 VDC
R∗ External pilot 7∗ 240 VAC (50/60 Hz) VQ7
∗ Option: Individual
external pilot (Ex- 9∗ Other
ternal pilot port: ∗ Option
Body side)
SF4 1 DZ 12
Applicable model
Coil rated voltage
Individual pilot
1 100 VAC, 50/60 Hz Electrical entry, Light/Surge voltage suppressor 12 For VFS220 exhaust
2 200 VAC, 50/60 Hz G Grommet
Common pilot
3∗ 110 to 120 VAC (50/60 Hz) GS Grommet with surge voltage suppressor 13 For VFS230 exhaust
4∗ 220 VAC, 50/60 Hz D∗ DIN terminal
5 24 VDC DZ∗ DIN terminal with light/surge voltage suppressor
Manual override
6∗ 12 VDC DO∗ DIN terminal ∗∗
Nil Non-locking push type (Flush)
7∗ 240 VAC, 50/60 Hz DOZ∗ DIN terminal with light/surge voltage suppressor ∗∗
A∗ Non-locking push type (Extended)
9∗ Other Y∗ DIN terminal
B∗ Locking type (Tool required)
∗ Option YZ∗ DIN terminal with light/surge voltage suppressor
∗ Option
T Conduit terminal
E Grommet terminal
EZ Grommet terminal with light/surge voltage suppressor
∗ D: Conforming to DIN43650 standard; Y: Conforming to DIN43650B standard
∗∗ DIN connector is not attached.
1123
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1124
Series VFS2000

Bore size
Average Series CJ2 Series CM2 Series MB, CA2
Series speed Load factor 50% Load factor 50% Load factor 50%
(mm/s) Stroke 60 mm Stroke 300 mm Stroke 500 mm
ø6 ø10 ø16 ø20 ø25 ø32 ø40 ø40 ø50 ø63 ø80 ø100
800 Perpendicular,
600 Horizontal
500 actuation
VFS2120-02 400
300
200
100
0
Conditions ∗ It is when the cylinder is extending that is meter-out

controlled by speed controller which is directly
Body ported Series CJ2 Series CM2 Series MB, CA2 connected with cylinder, and its needle valve with being
Tube bore x Length T0604 x 1 m T1075 x 1 m fully open.
VFS2120-02 Speed controller AS3001F-06 AS4001F-10 ∗ The average velocity of the cylinder is the value that
the stroke is divided by the total stroke time.
Silencer AN110-01
∗ Load factor: ((Load weight x 9.8)/Theoretical force) x
100%
Construction
Closed center 3 position closed center/exhaust center/pressure center
Exhaust center
Pressure center
Component Parts
No. Description Material Note
3 End plate Resin —
4 Piston Resin —
1124
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1125


Grommet: VFS2120-G Foot bracket (F)
Part no.: VFN200-17A
Manual override SJ
(Non-locking)
( M5:
∗ Only for external pilot model.)
External pilot port 2 x ø4.5
mounting hole Solenoid valve SY
(Lead wire length)
SV
≅300
SYJ
SZ
VP4
S0700
3 x Rc 1/8, 1/4
2 x Rc 1/8 VQ
VQ4
VQ5
VQC
Grommet terminal: VFS2120-E/EZ DIN terminal: VFS2120-D/DZ/Y/YZ
VQZ
With light/surge voltage suppressor (EZ)
Lead wire O.D. SQ

Max. ø3.5 Applicable heavy-duty code O.D. ø6 to ø8 (Y: ø4.7 to ø7)
Light With light/surge voltage suppressor (DZ) VFS
VFR
VQ7
Light

Applicable heavy-duty code O.D. ø6 to ø8
With light/surge voltage suppressor (TZ) 2 x ø3.5 mounting hole
( ): Y, YZ
Light
1125
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1126
Series VFS2000
182 (3 position: 192.5)
Manual override
(Non-locking) (M5: External pilot port
2 x ø3.5 mounting hole ∗ Only for external pilot model.)
(Lead wire length)
≅300
3 x Rc 1/8, 1/4
2 x Rc 1/8
Grommet terminal:VFS2220-E/EZ VFS2320-E/EZ DIN terminal: VFS2220-D/DZ/Y/YZ

VFS2420-E/EZ VFS2520-E/EZ VFS2320-D/DZ/Y/YZ
VFS2420-D/DZ/Y/YZ
Lead wire O.D. Max. ø3.5 VFS2520-D/DZ/Y/YZ
182 (3 position: 193)
Applicable heavy-duty code O.D. ø6 to ø8 (Y: ø4.7 to ø7)
With light/surge voltage suppressor (DZ)
Light
219 (3 position: 229)
Light
Conduit terminal:VFS2220-T/TZ VFS2320-T/TZ

VFS2420-T/TZ VFS2520-T/TZ
Applicable heavy-duty code O.D. ø6 to ø8

( ): Y, YZ
With light/surge voltage suppressor (TZ)
219 (3 position: 229)
Light
1126
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1127
Series VFS2000
Single Base Type
Specifications
Keeps environmental air Manifold base type Bar manifold, Body ported
Stations Max. 15 stations
clean from pilot exhaust
Use of the VV5FS2-30 manifold can exhaust
intensively the pilot exhaust gas to the base Port Specifications
side, and can prevent environmental Porting specifications: Rc
aggravation due to noise and oil mist. Passage
Symbol Base Valve Base SJ
1(P) 5(R1), 3(R2) 1(P) 2(B), 4(A) 3(R2), 5(R1)
1 Common Common Side: 3 8 Top: 1 8, 1 4 Side: 3 8 SY
Option SV
SYJ
SZ
VV5FS2 20 05 1 03 VP4
VV5FS2-20 Thread type
Series VFS2000
Manifold
Nil
N∗
Rc S0700
NPT
T∗ NPTF
F∗ G VQ
∗ Option
VQ4
P, EA, EB port size
03 Rc 38
VQ5
Symbol
Stations Passage Porting specifications VQC
02 2 stations 1(P) 3(R2), 5(R1) 2(B), 4(A)
Common Common Top
•••
•••
VV5FS2-30
15 15 stations
1
Rc 3 8 Rc 3 8 Rc 1 8, 1 4 VQZ
Part no. for mounting bolt and gasket Base model

SQ
BG-VFS2030 Model Pilot exhaust Applicable valve model
Pilot individual EXH
VFS
VFR
20 VFS220-- 01
02
VQ7
Pilot common EXH
VFS230--01
02
30
∗VFS220--01
02
mountable
How to Order Manifold Assembly
[Example]
Add the valve and option part numbers in order starting from the
first station on the D side.
<Example>
assembly. Prefix it to the part num-
bers of the solenoid valve.
1127
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1128
Series VFS2000
Type 20 Manifold — Pilot individual exhaust: VV5FS2-20- Station 1-03

Grommet: G
2n x Rc 1/8, 1/4
M3 x 44
6 x Rc 3/8
U side D side
4 x ø5 mounting hole
Blanking plate
≅300
(Lead wire length)
Pilot EXH
Gasket
Stations

Applicable heavy-duty code
O.D. ø6 to ø8
O.D. ø6 to ø8 (Y: ø4.7 to ø7)
Lead wire O.D.
Max. ø3.5
6 x Rc 3/8 6 x Rc 3/8 6 x Rc 3/8

3 position (229)
3 position (229)
3 position (193)
Double (219)
Double (219)
Double (182)
Single (143.5)
Single (125)
Single (143)

(With light/surge voltage suppressor: 96)
( ): Y, YZ
n: Station
L Stations 2 3 4 5 6 7 8 9 10 Formula
L1 58 83 108 133 158 183 208 233 258 L1 = 25 x n + 8
L2 68 93 118 143 168 193 218 243 268 L2 = 25 x n + 18
1128
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1129


Grommet: G
2n x Rc 1/8, 1/4
M3 x 44
SJ
U side D side
SY
SV
4 x ø5 mounting hole SYJ

6 x Rc 3/8
4 x M5 (Pilot EXH port) SZ
Blanking plate ≅300
(Lead wire length) VP4
S0700
VQ
Gasket
VQ4
VQ5
Stations VQC
VQZ
SQ
O.D. ø6 to ø8
O.D. ø6 to ø8 (Y: ø4.7 to ø7) VFS
Lead wire O.D.
Max. ø3.5
VFR
VQ7
3 position (193)
3 position (229)
3 position (229)
Double (219)
Double (182)
Double (219)
Single (143.5)
Single (125)
Single (143)

(With light/surge voltage suppressor: 115 (117))
(With light/surge voltage suppressor: 124 (126))
( ): Y, YZ
n: Station
L1 62 87 112 137 162 187 212 237 262 L1 = 25 x n + 12
L2 92 117 142 167 192 217 242 267 292 L2 = 25 x n + 42
1129
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1130

Series VFS3000
Model
Port Max. (2)

(3)
Type of 1 4/2(P A/B) 4/2 5/3(A/B R1/R2) operating Response Mass
actuation Plug-in Non plug-in size cycle time (kg)
C C (ms)
Rc [dm3/(s·bar)] b Cv [dm3/(s·bar)] b Cv (cpm)
14 5.0 0.20 1.1 6.8 0.30 1.7
2 position
Single VFS3120 VFS3130 38

1200 20 or less 0.33
6.1 0.14 1.4 7.3 0.23 1.8
14 5.0 0.20 1.1 6.8 0.3 1.7
Double VFS3220 VFS3230 38
1500 15 or less 0.43
6.1 0.14 1.4 7.3 0.23 1.8
Closed 14 5.0 0.20 1.1 6.3 0.27 1.6
center VFS3320 VFS3330 38
600 40 or less 0.45
5.7 0.20 1.4 6.8 0.21 1.7
3 position
Exhaust 14 4.9 0.24 1.1 6.5 0.28 1.6

center VFS3420 VFS3430 38 600 40 or less 0.45
5.8 0.15 1.4 7.0 0.22 1.7
Pressure 14 4.9 0.23 1.1 6.6 0.28 1.6
6.5 0.15 1.6 7.0 0.23 1.7
Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency. Note 3) In the case of grommet type.
Note 2) Based on JIS B 8375-1981. (The value at supply pressure 0.5 MPa.) Note 4) Factors of “Note1)” and “Note 2)” are achieved in controlled clean air.
Standard Specifications
Compact yet provides a Fluid Air/Inert gas
large flow capacity Maximum operating pressure 1.0 MPa

Minimun operating pressure 0.1 MPa
3/8: C: 6.8 dm3/(s·bar) Proof pressure 1.5 MPa
Low power consumption: Ambient and fluid temperature –10 to 60°C (1)
1.8 W DC Pilot valve manual override Non-locking push type (Flush)
VFS3120-E-03-F
VFS3320-E-03

Apparent power Inrush 5.6 VA/50 Hz, 5.0 VA/60 Hz
Power consumption 1.8 W (2.04 W: With light/surge voltage suppressor)
Electrical entry
Conduit terminal, DIN terminal
VFS3220-T-03 Note 1) Use dry air at low temperatures.
direction and at the right angles to the main valve and armature in both
VFS3120-G-03 energized and de-energized states every once for each condition.
JIS Symbol Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz.
2 position 3 position
Single Closed center (Values at the initial period)
Pilot type External pilot (1)
Double Exhaust center Pilot valve manual override Non-locking push type (Extended), Locking type (Tool reguired)
110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
12, 100 VDC
Option With light/surge voltage suppressor (2)
Foot bracket (With screw) Part no.: VFS3000-52A, VFS3120 (single) only
Pressure center Note 1) Operating pressure: 0 to 1.0 MPa Note 2) Grommet type is available only w/
Pilot pressure: 0.1 to 1.0 MPa surge voltage suppressor (which
is directly connected with lead
wire), not w/ indicator light.
Manifold
Body type Applicable manifold base Pilot EXH
VFS320 Individual EXH (Valve side)
Stacking manifold
VFS330 Common EXH (Manifold base side)
1130
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1131

How to Order
VFS3 1 20 1 G 02
Symbol Option
1: 2 position single F: With foot bracket
Thread type
Nil Rc
Port size N∗ NPT
2: position double 02 Rc T∗
14
NPTF
03 Rc F∗
38
G
SJ
∗ Option ∗ Mountable only
for VFS3120.
3: position closed center
Manual override SY
Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type
(Flush) (Extended) (Tool required) SV
4: position exhaust center
SYJ
SZ
5: position pressure center
∗ Option
Light/Surge voltage suppressor
VP4
Nil None
∗ Reverse pressure:
Can be used by Z With light/surge voltage suppressor
S0700
external pilot S∗ With surge voltage suppressor
specifications.
∗ Grommet type is available only w/ surge voltage VQ
Body (Pilot exhaust) suppressor, not w/ indicator light.
20: Individual EXH VQ4
Electrical entry
G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal VQ5
VQC
30∗: Common EXH
VQZ
SQ
Coil rated voltage
1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz)
VFS
3∗ 110 to 120 VAC (50/60 Hz)
∗ Manifold only
4∗ 220 VAC (50/60 Hz) VFR
5 24 VDC
Pilot type
Nil Internal pilot
6∗ 12 VDC VQ7
7∗ 240 VAC (50/60 Hz)
R∗ External pilot
9∗ Other
∗ Option. It will be
an individual ex- ∗ Option
ternal pilot.
(External pilot port: Body side. For 30 type, common external pilot (on manifold side).)

SF4 1 DZ 21
Applicable model
Coil rated voltage Manual override 1
2
1 100 VAC, 50/60 Hz Electrical entry, Light/Surge voltage suppressor Non-locking push
14 A side pilot operator for VFS3 34 20
Nil 5 Individual
2 200 VAC, 50/60 Hz G Grommet type (Flush) 15 B side pilot operator for VFS3220 pilot
3∗ 110 to 120 VAC (50/60 Hz) GS Grommet with surge voltage suppressor Non-locking push exhaust
4∗ 220 VAC, 50/60 Hz D∗ DIN terminal A∗ type (Extended)
3
16 B side pilot operator for VFS3 45 20
5 24 VDC DZ∗ DIN terminal with light/surge voltage suppressor Locking type 1
B∗ 2
6∗ 12 VDC DO∗ DIN terminal ∗∗ (Tool required) 17 A side pilot operator for VFS3 34 30
7∗ DOZ∗ DIN terminal with light/surge voltage suppressor ∗∗ Common
5
240 VAC, 50/60 Hz Locking type
C∗ 18 B side pilot operator for VFS3230 pilot
9∗ Other Y∗ DIN terminal (Lever) exhaust
YZ∗
3
∗ Option DIN terminal with light/surge voltage suppressor ∗ Option 19 B side pilot operator for VFS3 45 30
T Conduit terminal
∗ D: Conforming to DIN43650 standard;
E Grommet terminal Y: Conforming to DIN43650B standard
EZ Grommet terminal with light/surge voltage suppressor ∗∗ DIN connector is not attached.
1131
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1132
Series VFS3000

Bore size
Average Series CJ2 Series CM2 Series MB, CA2 Series CS1/CS2
Pressure 0.5 MPa Pressure 0.5 MPa Pressure 0.5 MPa Pressure 0.5 MPa
Series speed Load factor 50% Load factor 50% Load factor 50% Load factor 50%
(mm/s) Stroke 60 mm Stroke 300 mm Stroke 500 mm Cylinder stroke 1000 mm
ø6 ø10 ø16 ø20 ø25 ø32 ø40 ø40 ø50 ø63 ø80 ø100 ø125 ø140 ø160
900 Perpendicular,
700 Horizontal
600 actuation
VFS3120-03 500
400
300
200
100
0
∗ It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being
fully open.
∗ The average velocity of the cylinder is the value that the stroke is divided by the total stroke time.
∗ Load factor: ((Load weight x 9.8)/Theoretical force) x 100%
Conditions
Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1/CS2
Tube bore x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m
VFS3120-03 Speed controller AS3001F-06 AS4001F-10 AS4001F-12
Silencer AN200-02 AN202-02
1132
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1133

Construction
SJ
SY
SV
3 position closed center/exhaust center/pressure center SYJ

Closed center
SZ
VP4
Exhaust center
S0700
Pressure center
VQ
VQ4
VQ5
VQC
Component Parts
No. Description Material Note VQZ
3 End plate Resin Black
SQ
4 Piston Resin —
5 Return spring Stainless steel — VFS
7 Detent assembly — — VFR
VQ7
1133
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1134
Series VFS3000

Grommet: VFS3120-G Foot bracket (F)
Part no.: VFS3000-52A
Manual override
(Non-locking) 2 x ø6 Solenoid valve
M5: External pilot port mounting hole
(For external pilot model)
(Lead wire length)
≅300
Grommet terminal: VFS3120-E/EZ DIN terminal: VFS3120-D/DZ/Y/YZ

Lead wire O.D.
Max. ø3.5 Applicable heavy-duty cord
Light O.D. ø6 to ø8 With light/surge voltage suppressor (DZ)
(Y: ø4.7 to ø7)
Light
2 x ø4.3
mounting hole

Applicable
With light/surge voltage suppressor (TZ) ( ): Y, YZ
heavy-duty cord
O.D. ø6 to ø8
Light
1134
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1135

194 (3 position: 204)
Manual override SJ
(Non-locking)
M5: External pilot port
(For external pilot model) SY
(Lead wire
length)
SV
≅300
SYJ
SZ
2 x ø4.3 mounting hole VP4
S0700
VQ
VQ4
VQ5
Grommet terminal: VFS3220-E/EZ VFS3320-E/EZ DIN terminal: VFS3220-D/DZ/Y/YZ VQC
VFS3420-E/EZ VFS3520-E/EZ VFS3320-D/DZ/Y/YZ
VFS3420-D/DZ/Y/YZ VQZ
Lead wire O.D.
Max. ø3.5 VFS3520-D/DZ/Y/YZ
194 (3 position: 204)
With light/surge voltage suppressor (EZ) Applicable heavy-duty cord SQ
O.D. ø6 to ø8
Light (Y: ø4.7 to ø7) 231 (3 position: 241) VFS
With light/surge voltage suppressor (DZ)
VFR
Light
VQ7
Conduit terminal: VFS3220-T/TZ VFS3320-T/TZ 2 x ø4.3 mounting hole

VFS3420-T/TZ VFS3520-T/TZ
( ): Y, YZ
O.D. ø6 to ø8
231 (3 position: 241)
With light/surge voltage suppressor (TZ)
Light
1135
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1136
Series VFS3000
Stacking Type
Specifications
Keeps environmental air Manifold base type Stacking type
Stations Max. 15 stations
clean from pilot exhaust
Use of the VV5FS3-31 manifold can
exhaust intensively the pilot exhaust Port Specifications
gas to the base side, and can prevent Passage
Porting specifications: Rc
environmental aggravation due to noise Symbol Base Valve Base
and oil mist. 1(P) 3(R2), 5(R1) 1(P) 2(B), 4(A) 3(R2), 5(R1)
1 Common Common Side: 3 8 Top: 1 4 , 3 8 Side: 3 8
Option
SUP block plate AXT636-10A —
EXH block plate AXT636-11A —
Note) Individual SUP or EXH is possible with bottom porting of SUP or EXH. For your order, please
indicate it in the manifold specification sheet.

VV5FS3-31
Part no. for mounting bolt and gasket

VV5FS3 31 05 1 03
BG-VFS3030 Thread type
Series VFS3000
Nil Rc
Manifold
N∗ NPT
T∗ NPTF
F∗ G
∗ Option
Exploded View of Manifold P, EA, EB port size

03 Rc 3 8
Manifold block assembly Symbol
VVFS3000-1A-30 Stations Passage Porting specifications
02 2 stations 1(P) 3(R2), 5(R1) 2(B), 4(A)
Hexagon socket head cap screw: M4 x 53
Common Common Top
•••
•••
1
15 15 stations Rc 3 8 Rc 3 8 Rc 1 4 , Rc 3 8
Base model
Gasket Model Pilot exhaust Applicable valve model
Pilot common EXH
VFS320-- 02
03
31
VFS330-- 02
03
Type 20 Type 30
Note) Also VFS320 is possible to manifold. In this case, it uses

an individual pilot exhaust.

Add the valve and option part numbers in order starting from the first
station on the D side.
• For increasing the manifold bases, please prepare
the manifold block assembly no. <Example>
The asterisk denotes the symbol for assem-
bly. Prefix it to the part numbers of the sole-
noid valve.
1136
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1137


Grommet: G
SJ
SY
U side D side
SV
SYJ
Rc 1/8
External pilot port SZ
Blanking plate
4 x Rc 1/8 VP4
Pilot EXH port: PE
≅300 S0700
(Lead wire length)
VQ
Gasket
VQ4
VQ5
Stations
VQC
VQZ
Applicable heavy-duty cord Applicable heavy-duty cord SQ
O.D. ø6 to ø8 O.D. ø6 to ø8
(Y: ø4.7 to ø7)
VFS
Lead wire O.D.
Max. ø3.5 VFR
VQ7
3 position (241)
3 position (240)
Double (231)
3 position (204)
Double (230)
Double (194)
Single (135)
Single (153)
Single (153)
4 x Rc 1/8
Pilot 4 x Rc 1/8
EXH port: PE 4 x Rc 1/8
Pilot
EXH port: PE Pilot
EXH port: PE
(With light/surge voltage suppressor: 114) (With light/surge voltage suppressor: 128.5 (130.5))
( ): Y, YZ
n: Station
L1 77 108 139 170 201 232 263 294 325 L1 = 31 x n + 15
L2 92 123 154 185 216 247 278 309 340 L2 = 31 x n + 30
1137
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1138

Metal Seal, Plug-in/Non Plug-in
Series VFS2000
Model
Port Max. (2)
(3)
Type of
size
1 4/2(P A/B) 4/2 5/3(A/B R1/R2) operating Response Mass
actuation cycle time (kg)
Plug-in Non plug-in Rc C C (ms)
18 2.4 0.16 0.55 2.8 0.20 0.65
2 position

1200 15 or less 0.34
2.5 0.18 0.58 2.8 0.21 0.65
18 2.4 0.16 0.55 2.8 0.20 0.65
1200 13 or less 0.42
2.5 0.18 0.58 2.8 0.21 0.65
Closed 18 2.3 0.14 0.53 2.6 0.20 0.61
2.5 0.18 0.58 2.6 0.23 0.62
Exhaust 18 2.4 0.15 0.54 2.7 0.25 0.63
3 position

2.5 0.20 0.60 2.7 0.24 0.63
Pressure 18 2.5 0.11 0.55 2.7 0.20 0.62
2.8 0.17 0.63 2.7 0.22 0.63
Double 18 1.2 – – 1.3 – –
check VFS2600 VFS2610 14 600 25 or less 0.6
1.2 – – 1.3 – –
Note 1) Based on JIS B 8375 (Once per 30 days) for the minimum operating frequency. Note 2) Based on JIS B 8375-1981 (The value at supply press. 0.5 MPa).
Note 3) Values for VFS200-FZ-01. Note 4) Factors of “Note 1)” and “Note 2)” are ones achieved in controlled clean air.
Compact yet provides a large flow Fluid Air/Inert gas
capacity Maximum operating pressure 1.0 MPa
1/4: C: 2.8 dm3/(s·bar) 2 position 0.1 MPa

Min. operating pressure
Low power consumption: 1.8 W DC 3 position 0.15 MPa
Easy maintenance Proof pressure 1.5 MPa
2 types of sub-plates: Ambient and fluid temperature –10 to 60°C (1)
Plug-in and non plug-in Lubrication Non-lube (2)
Type G, E: Dustproof (Class 0),
Enclosure Type F, T, D: Splashproof (Class 4) (4)
100, 200 VAC, 50/60 Hz; 24 VDC
Coil rated voltage

Apparent power Inrush 5.6 VA/50 Hz, 5.0 VA /60 Hz
Plug-in type 1.8 W (2.04 W: With light/surge voltage suppressor)
Power consumption DC
Plug-in type Conduit terminal
Electrical entry
Non plug-in type Grommet terminal, DIN terminal
Note 3) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial direction and
at the right angles to the main valve and armature in both energized and de-
energized states every once for each condition. (Values at the initial period)
Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at
both energized and de-energized states in the axial direction and at the right angles to the main
Non plug-in type valve and armature. (Values at the initial period)
JIS Symbol
2 position 3 position Option Specifications
Single Closed center Pilot type External pilot Note)
Manual override Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
Coil rated voltage 110 to 120, 220, 240 VAC, 50/60 Hz
12, 100 VDC
Porting specifications Bottom ported
Option With light/surge voltage suppressor
Note) Operating pressure: 0 to 1.0 MPa
Pilot pressure 2 position: 0.1 to 1.0 MPa 3 position: 0.15 to 1.0 MPa
Pressure center
Compact, lightweight type sub-plate Sub-plate

L Mass Sonic conductance ∗
Compared with the standard type, this is the sub- (mm) (kg) C [dm3/(s·bar)]
Double check plate having the reduced external dimensions and Standard type 31.0 0.2 2.2
lighter weight. But, use caution that Cv factor or Compact type 25.5 0.13 2.8
piping port position is different from the standards.
∗ 2 position single Rc 1/4
For details, refer to page 1161.
1138
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1139

Metal Seal, Plug-in/Non Plug-in Series VFS2000
How to Order
Porting specifications Port size
Nil Side ported Nil Without sub-plate
B∗ Bottom ported Plug-in type conduit
01 Rc 1 8
∗ Option terminal
Option (With terminal block)
02 Rc 1 4 Standard type
Nil None
With attachment plug Z With light/surge voltage suppressor Note) Plug-in type grommet
P01 Rc 1 8
lead wire (With attachment
Body type Electrical entry plug lead wire)
Note)
O: Plug-in type F: Plug-in type P02 Rc 1 4 Compact type
sub-plate SJ
Thread type Note) Please note Cv
factor and piping
Nil Rc port location of SY
N∗ NPT compact sub-
plate is different
T∗ NPTF
F∗ G
from standard.
Refer to page
SV
With terminal block
1161 for details.
∗ Option
SYJ
Plug-in VFS2 2 00 5 F 01
SZ
Non plug-in VFS2 2 10 1 E 02 VP4
Port size S0700
Pilot valve manual override Nil Without sub-plate
Nil: Non-locking push type B∗: Locking type Rc Non plug-in type,
(Flush) (Tool required) 01 18 Standard
VQ
Rc type
02 14 VQ4
Symbol
2 position single Body type Note) Rc Non plug-in type,
A∗: Non-locking push type C∗: Locking type S01
1
1: Non plug-in type
sub-plate (Extended) (Lever)
18 Compact
type
VQ5
Note) Rc
S02 14
Note) Please note Cv factor

VQC
2 position double
and piping port
2
Option
∗ Option location of compact
sub-plate are different
VQZ
from standard. Refer
Pilot type Nil None
3 position closed center Nil Internal pilot Z With light/surge voltage suppressor
to page 1161 for
details.
SQ
3 R∗ External pilot S∗ With surge voltage suppressor
∗ Option: External pilot is ∗ Grommet type is available only w/ surge VFS
possible only to the one voltage suppressor, not w/ indicator light.
3 position exhaust center with sub-plate.
Coil rated voltage
VFR
Electrical entry
4
1 100 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
2 200 VAC, 50/60 Hz
VQ7
3 position pressure center 3∗ 110 to 120 VAC, 50/60 Hz
5 4∗ 220 VAC, 50/60 Hz
5 24 VDC
6∗ 12 VDC
3 position double check 7∗ 240 VAC, 50/60 Hz
6 9∗ Other
∗ Option

SF4 1 DZ 20 Manual
override
Non-locking
Coil rated voltage Electrical entry, Light/Surge voltage suppressor Nil push type
1 100 VAC, 50/60 Hz YO DIN terminal∗ (Flush)
F Plug-in Plug-in
2 200 VAC, 50/60 Hz YOZ DIN terminal with light/surge voltage suppressor∗ Non-locking
3∗ 110 to 120 VAC (50/60 Hz) G Grommet T Conduit terminal Non A∗ push type
4∗ 220 VAC, 50/60 Hz GS Grommet with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor plug-in (Extended)
5 24 VDC D DIN terminal E Grommet terminal Locking type
Non B∗ (Tool required)
6∗ 12 VDC DZ DIN terminal with light/surge voltage suppressor plug-in EZ Grommet terminal with light/surge voltage suppressor
7∗ 240 VAC, 50/60 Hz DO DIN terminal ∗ ∗ DIN connector is not attached. Locking type
DOZ DIN terminal with light/surge voltage suppressor∗ C∗
9∗ Other ∗∗ Refer to page 1223 for voltage conversion. (Lever)
∗∗∗ D: Conforming to DIN43650 standard;
∗ Option Y DIN terminal ∗ Option
Y: Conforming to DIN43650B standard
YZ DIN terminal with light/surge voltage suppressor
1139
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1140
Series VFS2000

Sizing Program.
Bore size
Average Series CM Series MB, CA2 Series CS1/CS2
System speed
Load factor 50% Load factor 50% Load factor 50%
(mm/s) Stroke 300 mm Stroke 500 mm Cylinder stroke 1000 mm
ø20 ø25 ø32 ø40 ø40 ø50 ø63 ø80 ø100 ø125 ø140 ø160
800 Perpendicular,
600 Horizontal
500 actuation
A 400
300
200
100
0
800
700
600
500
B 400
300
200
100
0
System Components
∗ It is when the cylinder is extending that is meter-out controlled by speed
Speed
System Solenoid valve Silencer Tube bore x Length controller which is directly connected with cylinder, and its needle valve
controller with being fully open.
∗ The average velocity of the cylinder is the value that the stroke is
Series divided by the total stroke time.
AS3000-02 AN110-01
A VFS2000 T0604 x 1 m ∗ Load factor: ((Load weight x 9.8)/Theoretical force) x 100%
(S = 12 mm2) (S = 35 mm2)
Rc 1 8
Series
AS4000-02 AN110-01
B VFS2000 T1075 x 1 m
(S = 21 mm2) (S = 35 mm2)
Rc 1 4
Double Check Spacer/Specifications

Can hold an intermediate cylinder Specifications Check Valve Operating
position for an extended time Plug-in type Non plug-in type
Double check
If the double check spacer with a built-in spacer part no. VVFS2000-22A-1 VVFS2000-22A-2
double check valve is combined, it will en-
G Cylinder pressure Check valve
able the cylinder to stop in the intermediate Applicable E
stroke and maintain its position for a long valve model VFS2400-F VFS2410- T
D
time without being affected by the leakage
between the spools.
Caution
• In the case of 3 position double check SUP side pressure (P1)
Piston
valve (VFS260), check the leakage from
SUP side pressure P1 (MPa)
piping and fittings in between valve and

cylinder by means of synthetic detergent Operating range
Double check spacer solutions, and ensure that there is no such
leakage found there. Also check the
leakage from cylinder seal and piston seal.
If there is any leakage, sometimes the
cylinder, when valve is de-energized, can
move without stopping at intermediate
position.
• Be aware that if the exhaust side is
Cylinder pressure P2 (MPa)
restricted excessively, the intermediate
stopping accuracy will decrease and will • The combination of VFS211 0, VFS22 1 0 and
0 0
lead to improper intermediate stops. a double check spacer can be used as
prevention of falling at the stroke end but
cannot hold the intermediate position of the
cylinder.
1140
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1141

Construction
SJ
SY
SV
SYJ
SZ
VP4
S0700
VQ
3 position closed center/exhaust center/pressure center
VQ4
Closed center
VQ5
VQC
Exhaust center
VQZ
SQ
Pressure
VFS
VFR
VQ7
Component Parts Sub-plate Assembly (Standard) Part No.

No. Description Material Note Plug-in VFS2000-LP- 01
02
1 Body Aluminum die-casted Platinum silver 01
Non plug-in VFS2000-LS- 02
2 Sub-plate Aluminum die-casted Platinum silver
Spool/Sleeve ∗ Mounting bolt and gasket are not included.
3 Stainless steel —
4 Adapter plate Resin Black
5 End plate Resin Black Sub-plate Assembly (For External Pilot) Part No.
6 Piston Resin —
Plug-in VFS2000-LP-R 01
02
7 Junction cover Resin —
01
8 Cover Resin — Non plug-in VFS2000-LS-R 02
10 Gasket NBR — Part no. for mounting bolt and gasket
11 Hexagon socket head screw Steel — BG-VFS2000
1141
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1142
Series VFS2000
Plug-in — 2 Position single/Double/3 Position closed center/Exhaust center/Pressure center/Double check

2 position single: VFS2100-F-01
02
3 x Rc 1 8, 1 4
1(P), 4(A), 2(B) bottom ported
Manual override 2 x Rc 1 8
3(R2), 5(R1) bottom ported
(Non-locking)
Bottom ported
With light/surge voltage suppressor
(External pilot port)

Electrical entry
Pilot EXH port
( ): Rc 1 8
2 position double: VFS2200-F-01

02 3 position double check: VFS2600-F-01
02
3 position closed center: VFS2300-F-01
02
3 position exhaust center: VFS2400-F-01
02
3 position pressure center: VFS2500-F-01
02
150.5 (3 position: 158) Manual override 2 x ø5

2 x ø5 (Non-locking) mounting hole
Manual override mounting hole
(Non-locking)

163.5 (3 position: 171) suppressor

suppressor
( ): Rc 1 8 ( ): Rc 1 8
1142
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1143

Non Plug-in — 2 Position single

Grommet: VFS2110-G-01
02
3 x Rc 1 8 , 1 4
2 x ø5 mounting hole 1(P), 4(A), 2(B) bottom ported
Manual override
2 x Rc 1 8
(Non-locking) 3(R2), 5(R1) bottom ported
SJ
Bottom ported
SY
SV
(Lead wire length)
≅300
SYJ
SZ
VP4
A, B S0700
Pilot EXH port M5 x 0.8 VQ

(External pilot port M5 x 0.8)
VQ4
( ): Rc 1 8 VQ5
Grommet terminal: VFS2110-E-01
02 DIN terminal: VFS2110-D 01
Y -02 VQC
Lead wire O.D. Max. ø3.5
suppressor With light/surge voltage
VQZ
suppressor
O.D. ø6 to ø8
Light
(Y: ø4.7 to ø7)
SQ
Light
VFS
VFR
VQ7
Conduit terminal: VFS2110-T-01

02
( ): Y, YZ
Applicable heavy-duty cord With light/surge
O.D. ø6 to ø8 voltage suppressor
Light
1143
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1144
Series VFS2000
Non Plug-in — 2 Position double/3 Position closed center/Exhaust center/Pressure center

Grommet: Double VFS2210-G-01
02
Closed center VFS2310-G-01 01 01
02, Exhaust center VFS2410-G-02, Pressure center VFS2510-G-02
150.5 (3 position: 158) 3 x Rc 1 8,1 4

2 x ø5 1(P), 2(B), 4(A) bottom ported
mounting hole 2 x Rc 1 8
Manual override
(Non-locking) 3(R2), 5(R1) bottom ported
(Lead wire length)
Bottom ported
≅300
Pilot EXH port M5 x 0.8

(External pilot port M5 x 0.8)
( ): Rc 1 8
Grommet terminal: Double VFS2210-E-01

02 DIN terminal: Double VFS2210-D 01
Y -02
Closed center VFS2310-E-01
02 Closed center VFS2310-D 01
Y -02
Exhaust center VFS2410-E-01
02
D 01
Exhaust center VFS2410-Y -02
Pressure center VFS2510-E-01
02 Pressure center VFS2510-D 01
Y -02
With light/surge voltage suppressor 151 (3 position: 159)
Lead wire O.D.
Max. ø3.5 Light Applicable
heavy-duty cord 187.5 (3 position: 195)
O.D. ø6 to ø8
(Y: ø4.7 to ø7)
suppressor (DZ)
Light
Conduit terminal: Double VFS2210-T-01

02
Closed center VFS2310-T-01
02
Exhaust center VFS2410-T-01
02
Applicable Pressure center VFS2510-T-01
02
heavy-duty
cord
187.5 (3 position: 195)
O.D. ø6 to ø8
With light/surge voltage ( ): Y, YZ
suppressor
Light
1144
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1145

Non Plug-in — 3 Position double check

Grommet: VFS2610-G-01
02
3 x Rc 1/8, 1/4
1(P), 2(B), 4(A) bottom ported
2 x ø5 mounting 2 x Rc 1/8
Manual override
hole 3(R2), 5(R1) bottom ported
(Non-locking)
(Lead wire length)

SJ
Bottom ported
SY
≅300
SV
SYJ
SZ
VP4
S0700
(M5 x 0.8) VQ
Pilot EXH port
M5 x 0.8 ( ): Rc 1 8
VQ4
Grommet terminal: VFS2610-E-01
02 DIN terminal: VFS2610-D 01
Y -02 VQ5
Lead wire O.D. Max. ø3.5
suppressor
VQC
Light With light/surge voltage
suppressor (DZ) VQZ
Light
SQ
Applicable VFS
heavy-duty
code
O.D. ø6 to ø8 VFR
(Y: ø4.7 to ø7)
VQ7
Conduit terminal: VFS2610-T-01

02
With light/surge voltage ( ): Y, YZ

suppressor
Light
Applicable
heavy-duty
code
O.D. ø6 to ø8
1145
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1146
Series VFS2000
Plug-in Type: With Attachment Plug Lead Wire
The insert plug is attached to the manifold Thread type
block and lead wire is plugged into the valve VV5FS2 01 06 1 01 Nil Rc
N∗ NPT
side. Please connect with corresponding Symbol T∗ NPTF
Series VFS2000
power side.
Symbol
Passage Porting
specifications F∗ G
Manifold P EA,EB A, B ∗ Option
Plug-in type 1 Side Port size
Common Common
With attachment plug lead wire 2∗ Bottom Symbol P, EA, EB A, B
3∗
Common Individual Side 01 Rc 1 8
4∗ Bottom 02
Rc
Rc 1 4
Stations 5∗ Individual Common Side M
14
Mixed
02 2 stations 6∗ Bottom
∗ For bottom ported,
7∗
•••
•••
Side Rc 1/8 is only
Individual Individual
With attachment plug lead wire
16 16 stations 8∗ Bottom ∗ Option available.
Plug-in Type: With Terminal Block

Since lead wires of solenoid valve are connected Thread type
with the terminals on upper surface of terminal
block, corresponding lead wires from power source
VV5FS2 01T 1 08 1 02 Nil
N∗
Rc
NPT
can be wired at the bottom of terminal block. Symbol T∗ NPTF
One-piece junction cover Series VFS2000 Passage Porting F∗ G
Manifold Symbol specifications
P EA,EB A, B ∗ Option
Plug-in type 1 Side Port size
Common Common
With terminal block 2∗ Bottom Symbol P, EA, EB A, B
3∗
Common Individual Side 01 Rc 1 8
Junction cover 4∗ Bottom 02
Rc
Rc 1 4
5∗
14
Separate junction Stations
Nil Individual Common Side M Mixed
cover 02 2 stations 6∗ Bottom
7∗ ∗ For bottom ported,
•••
•••
One-piece junction Side

1 Individual Individual Rc 1/8 is only
Individual junction cover Conduit port cover 16 16 stations 8∗ Bottom ∗ Option available.
Plug-in Type: With Multi-connector (Wiring specifications: Refer to page 1227.)

• Master connection of power and solenoid valves. Thread type
• Quick wiring permits ease of installation. VV5FS2 01C D 1 05 2 01 Nil
N∗
Rc
NPT
Series Plug-in type Symbol T∗ NPTF
VFS2000 With multi-connector Passage Porting F∗ G
U side Manifold Connector mounting direction Symbol specifications
P EA,EB A, B Port size ∗ Option
D D side mounting 1 Side
Common Common Symbol P, EA, EB A, B
2∗ Bottom
U U side mounting Rc 1 8
3∗ 01
Plug
assembly Common Individual Side Rc
Refer to page 1227. Junction cover Stations 4∗ Bottom 02 14 Rc 1 4
One-piece junction 02 2 stations 5∗ Individual Common Side M Mixed
1 6∗ Bottom ∗ For bottom
•••
•••
D side cover
08 8 stations 7∗ Side ported, Rc 1/8 is
Multi-connector Individual Individual
∗ Max. 8 stations 8∗ Bottom ∗ Option only available.
Plug-in Type: With D-sub Connector (Wiring specifications: Refer to page 1227.)
• Wide range of interchangeability Thread type
(D-sub connector (25P) conforming to MIL
standard)
VV5FS2 01F U 1 06 1 01 Nil
N∗
Rc
NPT
• Quick wiring permits easier installation. Series Plug-in type Symbol T∗ NPTF
U side
VFS2000 With D-sub connector Passage Porting F∗ G
Manifold Connector mounting direction Symbol specifications
P EA,EB A, B Port size ∗ Option
D D side mounting 1 Side Symbol P, EA, EB A, B
Common Common
U U side mounting 2∗ Bottom
01 Rc 1 8
3∗ Rc
Common Individual Side Rc 1 4
Plug assembly
Junction cover Stations 4∗ Bottom 02 14
Refer to page 1227. One-piece junction 02 2 stations 5∗ Individual Common Side

M Mixed
1 6∗ Bottom ∗ For bottom
•••
•••
cover
D side
08 8 stations 7∗ Side ported, Rc 1/8 is
D-sub connector ∗ Max. 8 stations 8∗ Bottom ∗ Option only available.
Non Plug-in Type: Grommet, Grommet Terminal, Conduit Terminal, DIN Terminal
• Wiring for every valve Thread type
VV5FS2 10 05 2 01 Nil
N∗
Rc
NPT
Symbol T∗ NPTF
Series VFS2000 Passage Porting F∗ G
Manifold Symbol specifications
∗ Option
P EA,EB A, B
1 Side Port size
Non plug-in type Common Common
2∗ Bottom Symbol P, EA, EB A, B
3∗ Rc 1 8
Common Individual Side 01 Rc
4∗ Bottom 02 14 Rc 1 4
Stations 5∗ Individual Common Side M Mixed
02 2 stations 6∗ Bottom ∗ For bottom
7∗
•••
•••
Side ported, Rc 1/8 is

16 16 stations 8∗ Bottom ∗ Option only available.
Note) The individual specification of the P port at the composition symbol 3 to 8 or the EA, EB, ports should be taken as individual port using a block plate.
Therefore, if an individual port is using a single SUP spacer of option or a single EXH spacer, the composition symbol mark is “1”.
1146
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1147

How to Order Manifold Assembly Manifold Specifications

Porting
Please indicate manifold base type, Port size Rc
specifications Applicable
Base model Wiring Stations
corresponding valve, and option parts. A, B port P, EA, EB A, B valve model
• With attachment plug lead wire
<Example> Plug-in type • With terminal block
• Plug-in type with terminal block VFS200-F
VV5FS2-01 • With multi-connector
(6 stations, one-piece style junction cover) • With D-sub connector 2 to 15∗
Side/Bottom 14 1 8, 1 4
(Manifold base) VV5FS2-01T1-061-02····1 • Grommet stations VFS210-G
(2 position single) VFS2100-5FZ ············3 Non plug-in type • Grommet terminal VFS210-E
(2 position double) VFS2200-5FZ···········2 VV5FS2-10 • Conduit terminal VFS210-T
(Blanking plate) VVFS2000-10A············· 1 • DIN terminal VFS210-D
• Non plug-in type (6 stations) ∗ With multi-connector, with D-sub connector: 8 stations at the maximum.
(Manifold base) VV5FS2-10-061-01········ 1
SJ
(2 position single) VFS2110-5D············· 3
(3 position exhaust center) VFS2410-5D····· 1 Flow Characteristics at the Number of Manifold Stations (Operated individually) SY
(Individual EXH spacer) VVFS2000-R-01-2···1 Model Passage/Stations Station 1 Station 5 Station 10
1 4/2
C [dm3/(s·bar)] 2.4 2.4 2.4 SV
b 0.14 0.14 0.14
(P A/B)
VVFS2
Cv 0.50 0.50 0.50 SYJ
C [dm3/(s·bar)] 2.5 2.5 2.5
4/2 5/3
b 0.18 0.18 0.18
(A/B R1/R2)
Cv 0.60 0.60 0.60
SZ
∗ Port size Rc 1 4
VP4
S0700
VQ
VQ4
VQ5
VQC
VQZ
SQ
VFS
VFR
VQ7
1147
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1148
Series VFS2000
Manifold Option Parts Assembly

Individual SUP spacer Interface regulator (P port regulation) Blanking plate
An individual SUP spacer set on manifold Interface regulator set on manifold block can It is used by attaching on the manifold block
block can form SUP port for every valve. regulate the pressure to each valve. Refer to for being prepared for removing a valve for
Body type Plug-in type Non plug-in type “Flow Characteristics” on page 1225. maintenance reasons or planning to mount a
spare valve, etc.
Part no.
Rc 1 8 VVFS2000-P-01-1 VVFS2000-P-01-2 Body type Plug-in type Non plug-in type

Rc 1 4 P port regulation ARBF2000-00-P-1 ARBF2000-00-P-2 Body type Plug-in type Non plug-in type
VVFS2000-P-02-1 VVFS2000-P-02-2
Part no. VVFS2000-10A
Accessory
One pair of gasket and mounting thread is
attached to every option parts assembly.
Individual EXH spacer Manifold Option

An individual EXH spacer set on manifold Air shutoff valve spacer
block can form EXH port for every valve. When stopping supply air and releasing With control unit
(Common EXH type) residual pressure after completion of work, Plug-in type/Non plug-in type
Body type Plug-in type Non plug-in type
actuators may move from original position. • Filter, regulation valve, pressure switch
Air shut off valve spacer makes it possible to and air release valve are all combined to
Part no.
Rc 1 8 VVFS2000-R-01-1 VVFS2000-R-01-2
stop actuators in original position for form one unit.
Rc 1 4 VVFS2000-R-02-1 VVFS2000-R-02-2 extended periods. • Piping processes are eliminated.
Part no. VVFS2000-21A-1 VVFS2000-21A-2
SUP block plate

When supplying manifold with more than two
∗ Not mountable for standard type sub-plate.
different pressures, high and low, insert a
block plate in between stations subjected to
different pressures.
Air release valve spacer
The concurrent use of air release valve
Body type Plug-in type Non plug-in type spacer with VFS210 (single) can release air.
Part no. AXT625-12A Body type Plug-in type Non plug-in type For details, refer to page 1153.
Part no. VVFS2000-24A-1 RL VVFS2000-24A-2 RL
EXH block plate Note) L: U side mount R: D side mount
When valve exhaust affects the other Dripproof Manifold
stations on the circuit or when the reverse Plug-in type
pressure valve is used to standard manifold • Equivalent to IP65
valve, insert EXH block plate in between
stations to separate valve exhaust. For details, refer to page 1155.
Part no. AXT625-12A
Made to Order
Manifold with serial transmission kit
Double check spacer Plug-in type
If the double check spacer with a built-in • Solenoid valve wiring process reduced
double check valve is combined, it will
Throttle valve spacer enable the cylinder to stop in the
considerably.
Needle valve set on the manifold block can
intermediate stroke and maintain its position For details, refer to page 1158.
control cylinder speed by throttling exhaust.
for a long time without being affected by the
Body type Plug-in type Non plug-in type leakage between the spools.
Part no. VVFS2000-20A-1 VVFS2000-20A-2 Body type Plug-in type Non plug-in type
1148
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1149

Manifold — Plug-in type, Non plug-in type

Plug-in type (Insert plug with lead wire): VV5FS2-01- Station 1- Port size
U side
2(B), 4(A) port
SJ
SY
SV
Stations
SYJ
D side 2(B), 4(A) port SZ

Bottom ported:
VV5FS2-01- Station 2- Port size VP4
S0700
Pilot EXH port
Electrical entry
VQ
VQ4
1(P), 3(R2), 5(R1) port VQ5
Formula for manifold weight M = 0.201n + 0.299 (kg) n: Station VQC
Non plug-in type: VV5FS2-10- Station 1- Port size VQZ
SQ
U side VFS
VFR
2(B), 4(A) port
VQ7
Stations
D side
Bottom ported:
VV5FS2-10- Station 2- Port size 2(B), 4(A) port
≅300 mm
(Lead wire length)
Pilot EXH port
Formula for manifold weight M = 0.174n + 0.218 (kg) n: Stations 1(P), 3(R2), 5(R1) port
Stations
L 1 2 3 4 5 6 7 8 9 10
Formula
L1 75 103 131 159 187 215 243 271 299 327 L1 = 28 x n + 47
L2 84 112 140 168 196 224 252 280 308 336 L2 = 28 x n + 56
1149
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1150
Series VFS2000
Manifold — Plug-in type: Individual/One-piece junction cover

Plug-in type with terminal block (Individual junction covers): VV5FS2-01T- Station 1- Port size
U side
2(B), 4(A) port
Stations
D side 2(B), 4(A) port

Bottom ported:
VV5FS2-01T- Station 2- Port size With light/surge voltage suppressor
Pilot EXH port
Electrical entry
1(P), 3(R2), 5(R1) port

Plug-in type with terminal block (One-piece junction covers): VV5FS2-01T1- Station 1- Port size
U side
2(B), 4(A) port
Stations
D side
2(B), 4(A) port
Bottom ported:
VV5FS2-01T1- Station 2- Port size
Pilot EXH port
Electrical entry
1(P), 3(R2), 5(R1) port

Stations
L 1 2 3 4 5 6 7 8 9Formula
10
L1 75 103 131 159 187 215 243 271 299 327 L1 = 28 x n + 47
L2 84 112 140 168 196 224 252 280 308 336 L2 = 28 x n + 56
1150
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1151

Manifold — Plug-in with multi-connector/with D-sub connector

Plug-in with multi-connector: VV5FS2-01CD1- Station 1- Port size , VV5FS2-01CU1- Station 1- Port size
U side
2(B), 4(A) port

SJ
SY
SV
SYJ
Stations
SZ
D side
Bottom ported: 2(B), 4(A) port VP4
VV5FS2-01CD1
CU1- Station 2- Port size
Plug assembly: VVFS2000-30A- S0700
(Option: Refer to page 1227.) With light/surge voltage suppressor
VQ
Pilot EXH port
VQ4
VQ5
∗ Wiring specifications: Refer to page 1227. 1(P), 3(R2), 5(R1) port
VQC
VQZ
Plug-in type with D-sub connector: VV5FS2-01FD1- Station 1- Port size , VV5FS2-01FU1- Station 1- Port size
SQ
VFS
U side
VFR
2(B), 4(A) port
VQ7
Stations
D side 2(B), 4(A) port
Bottom ported:
Plug assembly: VVZS3000-21A-
VV5FS2-01FD1
FU1- Station 2- Port size (Option: Refer to page 1227.) With light/surge voltage suppressor
Pilot EXH port
Formula for manifold weight M = 0.178n + 0.378 (kg)

∗ Wiring specifications: Refer to page 1227.
n: Stations 1(P), 3(R2), 5(R1) port

Stations
L 1 2 3 4 5 6 7 8
Formula
L1 75 103 131 159 187 215 243 271 L1 = 28 x n + 47
L2 84 112 140 168 196 224 252 280 L2 = 28 x n + 56
1151
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1152
Series VFS2000
Manifold Option Parts — Plug-in type, Non plug-in type

Individual SUP spacer: Interface regulator:
VVFS2000-P-0102-1 (Plug-in type) ARBF2000-00-P-1 (Plug-in type)
VVFS2000-P-0102-2 (Non plug-in type) ARBF2000-00-P-2 (Non plug-in type)
Individual SUP Interface

spacer regulator
SUP port
Individual EXH spacer: Air shutoff valve spacer:

VVFS2000-R-0102-1 (Plug-in type) VVFS2000-21A-1 (Plug-in type)
VVFS2000-R-0102-2 (Non plug-in type) VVFS2000-21A-2 (Non plug-in type)
Individual Air shutoff valve

EXH port spacer
EXH port
SUP block plate: AXT625-12A Release valve spacer:

EXH block plate: AXT625-12A VVFS2000-24A-1RL (Plug-in type)
VVFS2000-24A-2RL (Non plug-in type)
Valve VFS210 (Single)
Release valve
spacer SUP port
Block plate
Note) VVFS2000-24A-12 12 R. D-side mounting.
Throttle valve spacer: Double check spacer:

VVFS2000-20A-1 (Plug-in type) VVFS2000-22A-1 (Plug-in type)
VVFS2000-20A-2 (Non plug-in type) VVFS2000-22A-2 (Non plug-in type)
Throttle valve
spacer Double check
spacer
1152
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1153

Manifold with Control Unit

• Control unit (Filter, Regulator, Manifold Specifications
Pressure switch, Air release valve) Manifold Plug-in type: VV5FS2-01 Non plug-in type: VV5FS2-10
are all standardized to the one unit, Plug-in with attachment plug lead wire Grommet
and can be mounted on the With terminal block Grommet terminal
Wiring
manifold base without any With multi-connector Conduit terminal
attachments. With D-sub connector DIN terminal
• Piping processes are eliminated. VFS210-G, VFS210-E
Applicable valve model VFS200-F
VFS210-T, VFS210-D
Common SUP, Common EXH
Porting specifications
2(B), 4(A) port Side: Rc 1/8, 1/4, Bottom: Rc 1/8 (Option) SJ
Rc
1 (P), 3(R2), 5(R1) port Side: Rc 1/4, 1/8, Bottom: Rc 1/8 (Option)
Stations 2 to 15 stations∗ SY
∗ With multi-connector, or D-sub connector: 8 stations max.
SV
Control Unit Specifications Control Unit/Option
Plug-in type
Air filter (With auto-drain/With manual drain) <Plug-in type> SYJ
Filtration degree 5 μm (2) VVFS2000-24A-1R (D side mounting)
Air release VVFS2000-24A-1L (U side mounting)
Regulator
Set pressure (Outlet pressure) 0.05 to 0.85 MPa
valve
spacer <Non plug-in type> SZ
Pressure switch (1) VVFS2000-24A-2R (D side mounting)
Set pressure range: OFF 0.1 to 0.6 MPa
VVFS2000-24A-2L (U side mounting) VP4
Differential 0.08 MPa or less Pressure switch (3) IS1000P-2-1
With control unit/Filter regulator MP2-2
Contact 1a Blanking
Pressure switch MP3-2
S0700
Indicator light LED (RED) plate
Non plug-in type Release valve AXT625-18A
Max. switch capacity 2 VA AC, 2 W DC
24 VAC/DC or less: 50 mA Filter element 111511-5B VQ
Max. operating current
Caution 100 VAC/DC: 20 mA Note 1) Voltage: 24 VDC to 100 VAC
When using an air filter with auto-drain or Air release valve (Single only) Inner voltage drop: 4 V VQ4
Note 2) Refer to manifold option parts on
manual drain, mount the filter vertically. Operating pressure range 0.1 to 1.0 MPa page 1148.
Note 3) The non plug-in type cannot be VQ5
mounted afterwards.
VQC
How to Order Note) The manifold of plug-in type with attachment plug lead wire is applied to individual type only. Non plug-in type has no junction cover.
VQZ
VV5FS2 10 08 1 01 AP
Air release valve coil rating SQ
Series VFS2000
Manifold Nil None (F, G type only)
Base type/Electrical entry

1 100 VAC, 50/60 Hz VFS
5 24 VDC
01 Plug-in type with attachment plug lead wire
01T Plug-in type with terminal block Control unit type 9 Other VFR
01C Plug-in type with multi-connector Symbol
Nil A AP M MP F G C E
01F Plug-in type with D-sub connector Control equipment VQ7
10 Non plug-in type Air filter with auto-drain
Air filter with manual drain
Connector mounting direction Stations Regulator
Symbol With connector Applicable base 02 2 stations Air release valve
Nil None 01, 01T, 10
···
···
Pressure switch
D D side mounting
01C, 01F 15∗ 15 stations Blanking plate (Air release valve)
U U side mounting ∗ Base type Blanking plate (Filter, Regulator)
01, 01T, 10 2 to 15 stations
01C, 01F 2 to 8 stations Blanking plate (Pressure switch)
Junction cover Number of manifold blocks
Nil Stacking type Symbol required for mounting (stations)
2 2 2 2 2 2 2 1
Porting
1 Integrated type Passage specifications
Symbol
Note) Stacking type: P EA, EB B, A How to Order Manifold Assembly [Example]
Base type 01, 01T 1 Side Thread type Add the valve and option part numbers in order starting
Common Common
Integrated type: 2∗ Bottom Nil Rc from the first station on the D side.
Base type 01T, 01C, 01F
3∗ Side N∗ NPT <Example>
Common Individual
4∗ Bottom T∗ NPTF • Plug-in type with terminal block
5∗ Side F∗ G (Manifold base) VV5FS2-01T1-091-02-MP5 1
Individual Common (2 position single) ∗ VFS2100-5FZ 5
6∗ Bottom ∗ Option
(2 position double) ∗ VFS2200-5FZ 2
7∗ Side ∗ 2 stations are needed to mount control unit.
∗ Option 8∗ Bottom Port size • Non plug-in type
The individual specification of the P port in the composition Symbol P, EA, EB B, A (Manifold base) VV5FS2-10-071-01-M 1
symbol marks 3 to 8 or EA, EB ports should be taken as (2 position single) ∗ VFS2110-5D 5
01 Rc 1 8
individual port using a block plate. Therefore, if an individual Rc ∗ 2 stations are needed to mount control unit.
port is taken using a single SUP spacer of option or a single 02 14 Rc 1 4
The asterisk denotes the symbol for assembly. Prefix it to
EXH spacer, the composition symbol mark is “1”. M Mixed the part numbers of the solenoid valve.
1153
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1154
Series VFS2000
Manifold with Control Unit — Plug-in type, Non plug-in type

Plug-in type:
VV5FS2-01T- Station 1- Port size - Control unit Voltage for release valve Example for manifold
U side Double check spacer
Individual SUP spacer

With light/surge
voltage
suppressor
Air release valve

Pressure switch
Stations
Pressure switch
Air release valve Control unit Outlet for check
regulator
Air filter
D side
Control unit
Po port
Pilot EXH port
Electrical entry
1(P), 3(R2), 5(R1) port
Non plug-in type:

VV5FS2-10- Station 1- Port size - Control unit Voltage for release valve Example for manifold
U side Double check spacer

A, B port

Air release valve
Pressure switch
Stations
Pressure switch
Outlet for check
Air release
regulator
Air filter
Pressure valve
switch
electrical
entry
D side Control unit
Po port n: Stations
Stations
L 3 4 5 6 7 8 9 Formula 10
Pilot EXH port L1 131 159 187 215 243 271 299 327 L1 = 28 x n + 47
L2 140 168 196 224 252 280 308 336 L2 = 28 x n + 56
L3 (MP) 278 306 334 362 390 418 446 474 L3 = 28 x n + 194
1(P), 3(R2), 5(R1) port L3 (AP) 319.5 347.5 375.5 403.5 431.5 459.5 487.5 515.5 L3 = 28 x n + 235.5
1154
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1155

Dripproof Manifold (Equivalent to IP65)

Manifold VV5FS2-01WTBU D VV5FS2-01W
Wiring Common terminal box Attachment plug lead wire
Applicable value model VFS200-F-X54
Porting specifications 2(B), 4(A) port Side: Rc 1/8, 1/4, Bottom: Rc 1/8 (Option)
Rc
1(P), 3(R2), 5(R1) port Side: Rc 1/4
Stations 2 to 10 stations 2 to 15 stations
SJ
How to Order
SY
How to order manifold
SV
VV5FS2 01WTBU 08 1 02
Port size SYJ
Plug-in dripproof manifold Symbol P, R1, R2 A, B
(Equivalent to IP65) 01 Rc 1 8 SZ
01WTBU Common terminal box (U side mounting) 02 Rc 1 4 Rc 1 4
M
01WTBD Common terminal box (D side mounting) Mixed
∗ For bottom ported, A/B port
VP4
01W Attachment plug lead wire
is available only with Rc 1 8 .
S0700
Stations Symbol
02
•••
2 stations
Symbol
Passage Porting
specifications VQ
•••
P, R1, R2 A, B
15 15 stations 1 Side
2∗
Common
Bottom
VQ4
∗ Option
VQ5
How to order valves
VQC
VFS2 1 00 5 F X54
VQZ
Dripproof
Symbol Pilot valve manual override SQ
1 2 position single Nil Non-locking push type (Flush)
2 2 position double A∗ Non-locking push type (Extended) VFS
3 3 position closed center B∗ Locking type (Tool required)
4 3 position exhaust center C∗ Locking type (Lever) VFR
5 3 position pressure center ∗ Option
6 3 position double check
VQ7
Pilot type Option
Nil Internal pilot Nil None
R∗ External pilot With light/surge
Z voltage suppressor
∗ Option
Coil rated voltage

1 100 VAC, 50/60 Hz
2 200 VAC, 50/60 Hz
3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz
5 24 VDC
6∗ 12 VDC
7∗ 240 VAC, 50/60 Hz
9∗ Other
∗ Option
1155
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1156
Series VFS2000
Dripproof Manifold
With common terminal box: VV5FS2-01WTB UD - Station 1- Port size
Indicator light
Push type manual override
Pilot EXH port
101 (Single)
150.5 (Double)
158 (3 position)
1(P), 3(R2), 5(R1) port External pilot port
x 25 Printed
D side U side
Stations
Electrical entry
Bottom ported: VV5FS2-01WTBD- Station 2-01
2(B), 4(A) port
n: Stations
Stations
L 1 2 3 4 5 6 7Formula 8 9 10
∗ Terminal mounting stations are not included. L1 120 145 170 195 220 245 270 295 320 345 L1 = 25 x n + 95
Indicates Solenoid valve mounting stations. L2 131 156 181 206 231 256 281 306 331 356 L2 = 25 x n + 106
With attachment plug lead wire: VV5FS2-01W- Station 1- Port size

Electrical entry
Pilot EXH port
1(P), 3(R2), 5(R1) port
Insert plug Indicator light
with lead wire Push type manual override
Lead wire length
L = 1000
101 (Single)
150.5 (Double)
158 (3 position)
External pilot port
Bottom ported: VV5FS2-01W- Station 2-01 Stations

D side U side
2(B), 4(A) port
n: Stations
Stations
L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Formula
L1 70 95 120 145 170 195 220 245 270 295 320 345 370 395 420 L1 = 25n + 45
L2 81 106 131 156 181 206 231 256 281 306 331 356 381 406 431 L2 = 25n + 56
1156
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1158
Made to Order
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output)
Serial Transmission System
How to Order
How to Order Manifold
VV5FS2 01S V 0 1 02 X460

Plug-in type Thread type
Serial transmission kit Nil Rc
Port size N NPT
Stations Symbol P, R1, R2 A, B T NPTF
3 3 stations 01 Rc 1/8 F G
02 Rc 1/4 Rc 1/4
18 18 stations M Mixed
Note 1) Max. 18 stations. Add 2 stations for serial unit ∗ For bottom ported: Rc 1/8 only
mounting.
Note 2) Max. 18 stations for all-single wiring. (No. of
valves: 16) Combination symbol
For the standard double wiring, the maximum Port specification Piping specification
number of stations is 10. (No. of valves: 8) Symbol
P R1, R2 A, B
1 Side
Compatible with SI unit U side 2∗
Common Common
Bottom
mounating only 3∗ Side
Applicable models Common Individual
Symbol SI unit part no. Description
4∗ Bottom
0 — Without SI unit 5∗ Side
Individual Common
F1 EX123U-SUW1 NKE Corporation: Uni-wire System (16 outputs) 6∗ Bottom
H EX123U-SUH1 NKE Corporation: Uni-wire H System (16 outputs) 7∗ Side
J1 EX123U-SSL1 SUNX Corporation: S-LINK System (16 outputs) 8∗ Bottom
J2 EX123U-SSL2 SUNX Corporation: S-LINK System (8 outputs) ∗ Option
Q EX124U-SDN1 DevieNet (2 power supply systems)

R1 EX124U-SCS1 OMRON Corporation: CompoBus/S (16 outputs) (2 power supply systems) Refer to pages 1653 to 1655 for the details of the
R2 EX124U-SCS2 OMRON Corporation: CompoBus/S (8 outputs) (2 power supply systems) EX123/124 integrated type (for output) serial
V EX124U-SMJ1 CC-Link (2 power supply systems) transmission system.
Correspondence of SI unit output numbers and solenoid valve coils

<Wiring Example 1> Double wiring (Standard) <Wiring Example 2> Single/Double mixed wiring (Option)
D side U side D side U side
SI unit output no.
SI unit output no.
1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 11 12
Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
AB AB AB AB AB AB AB AB AB AB A A A AB A AB A A
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11 12
∗ Mixed wiring is available as an option. Use the manifold specification sheet to specify this.
How to Order Valves
VFS2 00 5F
Symbol Pilot valve manual override
2 2 position double A Non-locking push type (Extended)
3 3 position closed center B Locking type (Tool required)
4 3 position exhaust center C Locking type (Lever)
5 3 position pressure center
6 3 position double check Option
Nil None
Pilot type Z With light/surge voltage suppressor
Nil Internal pilot
Coil rated voltage
R External pilot
Nil None
24 VDC
1158
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1159

Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output) Serial Transmission System
VV5FS2-01S Model - Stations Symbol - Port size -X460
6 x Rc 1/4
26.5 1(P), 5(R1), 3(R2) port
SI unit
13 2 x Rc 1/8 Manual override
PE port
SJ
44
SY
22.5
14.5
79
75
63
PE
126.5
101
A A A A A
119.5
SETTINGS
119.5
1
0
SV
R1
EA
MOD/NET
MODEL
68
150.5
PWR
SQ
158
P
(SI No.EX124-SDN1)
.7
40.5
R2
EB
SYJ
R2
B B B B B
TM
8.5
SMC
5.4
SZ
14.5
16.5
30.5 L1
VP4
L2
38 S0700
VQ
D side Stations 1 2 3 4 5 6 7 8 n U side
VQ4
VQ5
VQC
123.5
SMC SMC SMC
SMC SMC
VQZ
88.5
B B B B B B B B
SQ
47
37.5
A A A A A A A A
VFS
2
11.5
9
42 28 37.5
2n x Rc 1/8, 1/4
4(A), 2(B) port EX123: 2 x G 1/2 VFR
∗ Use a dripproof plug assembly EX124: 4 x G 1/2
(AXT100-B04A) for the unused
conduit port (G 1/2).
Formula L1 = 28n + 47 L2 = 28n + 56

Dimensions n: Stations (Max. 18 stations)
L n 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18
L1 131 159 187 215 243 271 299 327 355 383 411 439 467 495 523 551
L2 140 168 196 224 252 280 308 336 364 392 420 448 476 504 532 560
Note) Actual number of manifold base stations: Add 2 SI unit mounting stations to the number of valve stations.
1159
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1160
Series VFS2000
Manifold Base Construction — Plug-in type, Non plug-in type
End plate (D side)
End plate (U side)
Replacement Parts No. Description Material Part no.

No. Description Material Part no. For 01 AXT625-7A
1 Connection fitting A Steel plate AXT625-4-1#1 For 01T AXT625-28-3A
2 Connection fitting B Steel plate AXT625-5 Junction cover For 01T1
9 — AXT625-28-7A- Stations
3 Gasket A NBR AXT625-17 assembly For 01C
4 Gasket B NBR AXT625-16 For 01F VVF2000-26-5A- Stations
5 O-ring NBR 18 x 15 x 1.5 For 01S AZ738-10A- Stations

6 O-ring NBR 10.5 x 7.5 x 1.5 For 01 AXT333-12
Rubber plug NBR
7 O-ring NBR 8 x 5 x 1.5 13 For 01T
01S AXT625-22
Adapter plate Resin For 01 AXT625-6 Plug — For 01 W EXP22S
Adapter For 01T AXT625-28-1A • For increasing the manifold bases, please order the manifold block
— (Terminal section with adapter plate)
plate assembly For 01T1 assembly number of the principle number assembly !0.
8
For 01C AXT625-28-1 For plug-in type: The manifold base with terminal stand (integrated with
Adapter plate Resin For 01F VVF2000-26-6 a junction cover) is required with the o junction cover assembly.
For 01S AXT625-6
Note) Manifold Base/Construction: Plug-in type with terminal block.
Replacement Parts: Sub Assembly
No. Description Assembly part no. Component parts Applicable manifold base
Note) Manifold block !0, Metal joint q, w. O-ring t, y, u Junction Plug-in type
AXT625-01A- 12
cover, Adapter plate, Pin housing, Guide, Insert plug lead wire With attachment plug lead wire
Manifold block
10 Note) Manifold block !0, Metal joint q, w, O-ring t, y, u Terminal i, Plug-in type
assembly AXT625-20A- 12
Junction cover o, Adaptor plate, Pin housing, Guide With terminal block
AXT625-10A- 12 Note)
Manifold block !0, Metal joint q, w, O-ring t, y, u Non plug-in type
Plug-in type
AXT625-2A End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 With attachment plug lead wire
End plate (U side)
11 assembly Plug-in type
AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 With terminal block
AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 Non plug-in type
Plug-in type
AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball
With attachment plug lead wire
End plate (D side)
12 Plug-in type
assembly AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball
With terminal block
AXT625-3A-10 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball Non plug-in type
Note) 1: A, B port size Rc 1/8, 2: A, B port size Rc 1/4
1160
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1161

Light Compact Type Sub-plate/C: 2.8 dm3/(s·bar)

C: 2.2 dm3/(s·bar) C: 2.8 dm3/(s·bar) Sub-plate
L dimension Mass
Type (mm) (kg)
L dimension Compact type 25.5 0.13
L dimension
Standard type 31 0.2
Compact type Standard type SJ
Sub-plate — Compact: Plug-in, Grommet (With attachment plug lead wire) SY

VFS200-F-(B) P01
P02
Sub-plate assembly part no.: VFS2000-CP-(B) 01
02 (01: Rc 8 , 02: Rc 4 )
1 1 SV
≅300
SYJ
SZ
Lead wire
VP4
5 x bottom ported size

(Refer to the below right.) S0700
Bottom ported
VQ
Port Size
Port
Port size
P01
P, A, B
Rc 1 8
EA, EB
Rc 1 8
VQ4
1 (Center)
Pilot EXH port P02 Rc 1 4 Rc 1 8
Bottom Ported Size
(Refer to the right.)
Port size Port P, A, B EA, EB VQC
( ): Port size P02 BP02 Rc 1 8 ,1 4 Rc 1 8
VQZ
Sub-plate — Compact: Non plug-in
SQ
VFS210--(B) S01
S02
Sub-plate assembly part no.: VFS2000-CS-(B) 01
02 (01: Rc 8 , 02: Rc 4 )
1 1
(Refer to the below right.) VFS
VFR
VQ7

Bottom ported
Port Size
Port size Port P, A, B EA, EB
S01 Rc 1 8 Rc 1 8
1 (Center) S02 Rc 1 4 Rc 1 8
Pilot EXH port

5 x bottom ported size Bottom Ported Size
(Refer to the right.) Port P, A, B EA, EB
Port size
( ): Port size S02 BS02 Rc 1 8 1 4 Rc 1 8
Precautions Please pay attention to piping port location of sub-plate. Electrical Connection
Compact type, plug-in type grommet sub-
VFS20-- P01/02
S01/02 : Compact type VFS20-- 01
02 : Standard type plate (With attachment plug lead wire)
• The attachment plug lead wire is attached to the
manifold block and lead wire is plugged in with
valve side as shown in the following list. Please
connect with corresponding power side.
Solenoid A side B side
Lead wire color Red Black Brown White
• There is no polarity.
1161
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1162

Series VFS3000
Model
Port Max. (2)

(3)
Type of
size
1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Mass
cycle time (kg)
actuation Plug-in Non plug-in C C (ms)
Rc b Cv b Cv (cpm)
[dm3/(s·bar)] [dm3/(s·bar)]
14 6.0 0.15 1.4 5.8 0.12 1.3
2 position

1200 20 or less 0.31
7.3 0.23 1.8 6.8 0.12 1.6
14 6.0 0.15 1.4 5.8 0.12 1.3
1500 15 or less 0.41
7.3 0.23 1.8 6.8 0.12 1.6
Closed 14 5.8 0.21 1.4 5.4 0.14 1.2
VFS3300 VFS3310 600 40 or less 0.43
center 38 6.8 0.22 1.7 6.3 0.12 1.5
Exhaust 14 6.1 0.23 1.4 5.0 0.14 1.2
3 position

7.4 0.20 1.8 5.6 0.18 1.3
Pressure 14 6.0 0.22 1.5 5.8 0.16 1.3
center
VFS3500 VFS3510 38 600 40 or less 0.43
7.2 0.19 1.8 7.1 0.18 1.8
Double 14 4.0 — — 3.5 — —
check
VFS3600 VFS3610 38 600 50 or less 0.91
4.0 — — 3.7 — —
Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency. Note 2) Based on JIS B 8375-1981 (the value at supply press. 0.5 MPa).
Note 3) The figures in the above list are for without sub-plate. In the case of with plug-in sub-plate and with non plug-in sub-plate, add 0.30 kg and 0.27 kg respectively.
Compact yet provides a large flow capacity Fluid Air/Inert gas
3/8: C: 5.8 dm3/(s·bar) Maximum operating pressure 1.0 MPa

Minimum operating pressure 0.1 MPa
Low power consumption: 1.8 W DC
Easy maintenance Ambient and fluid temperature –10 to 60°C (1)
2 types of sub-plates: Lubrication Non-lube (2)
Plug-in and non plug-in
Enclosure Type E: Dustproof (Level 0), Type F: Dripproof (Level 2), Type D: Splashproof (Level 4) (4)

Power consumption DC 1.8 W (2.04 W: With light/surge voltage suppressor)
Electrical entry
Plug-in type Non plug-in type DIN terminal, Grommet terminal
Note 3) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial di-
rection and at the right angles to the main valve and armature in both
energized and de-energized states every once for each condition. (Values
Test was performed at both energized and de-energized states in the axial
Non plug-in type direction and at the right angles to the main valve and armature. (Values
JIS Symbol
2 position 3 position Option
Single Closed center Pilot type External pilot Note)
Manual Main valve Direct manual override type
override Pilot valve Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
110 to 120, 220, 240 VAC (50/60 Hz)
Exhaust center Coil rated voltage
Double 12, 100 VDC
Option With light/surge voltage suppressor
Pressure center Pilot pressure: 0.1 to 1.0 MPa
Double check
1162
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1163

How to Order
Port size
Nil Without sub-plate
Body type Electrical entry 02 Rc 1 4
O: Plug-in type F: Plug-in type 03 Rc 3 8
sub-plate conduit terminal ∗ For bottom ported, Rc 1 4
Porting is only available.
specifications Thread type
Nil Side ported Nil Rc
B∗ Bottom ported N∗ NPT
∗ Option T∗
F∗
NPTF
G
SJ
∗ Option
SY
Plug-in VFS3 1 0 0 1 F 02 SV
SYJ
Non plug-in VFS3 2 1 1 2 D 02
Pilot valve
SZ
Manual override
Option
Nil: Non-locking push type
VP4
Nil None (Flush)
Z With light/surge voltage suppressor S0700
Electrical entry
Symbol E: Grommet terminal D: DIN terminal
VQ
2 position single 3 position pressure center
1 5 A∗: Non-locking push type VQ4
(Extended)
2 position double 3 position double check VQ5

2 6
VQC
3 position closed center
Coil rated voltage B∗: Locking type
VQZ
3 (Tool required)
1 100 VAC, 50/60 Hz
2 200 VAC, 50/60 Hz SQ
3 position exhaust center 3∗ 110 to 120 VAC, 50/60 Hz
4 4∗ 220 VAC, 50/60 Hz VFS
5 24 VDC
6∗
∗ Reverse pressure: Can be used by
7∗
12 VDC
240 VAC, 50/60 Hz C∗: Locking type
VFR
external pilot specifications. (Lever)
9∗ Other
Body type VQ7
1: Non plug-in type
sub-plate Pilot type
Nil Internal pilot
R∗ External pilot
∗ Option
∗ Option

Body Option
0 Standard
SF4 1 F 30
1∗ Direct manual override
∗ Option Coil rated voltage Manual override
Symbol Rated voltage Symbol Manual override
1 100 VAC, 50/60 Hz Non-locking push type
Nil
2 200 VAC, 50/60 Hz (Flush)
3∗ 110 to 120 VAC, 50/60 Hz
A∗
4∗ 220 VAC, 50/60 Hz (Extended)
5 Locking type
B∗
24 VDC
6∗ 12 VDC (Tool required)
7∗ 240 VAC, 50/60 Hz C∗
Locking type
9∗ Other (Lever)
∗ Option ∗ Option
∗ Refer to page 1224 for voltage
conversion.
1163
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1164
Series VFS3000

Sizing Program.
Bore size
Series MB, CA2 Series CS1/CS2
Average Pressure 0.5 MPa Pressure 0.5 MPa
System speed Load factor 50% Load factor 50%
(mm/s) Stroke 500 mm Cylinder stroke 1000 mm
ø40 ø50 ø63 ø80 ø100 ø125 ø140 ø160 ø180 ø200
1000 Perpendicular,
800 Horizontal
700 actuation
600
A 500
400
300
200
100
0
1000
900
800
700
600
B 500
400
300
200
100
0
System Components
Speed ∗ It is when the cylinder is extending that is meter-
SGP (Steel pipe)
System Solenoid valve Silencer out controlled by speed controller which is
controller Port size x Length directly connected with cylinder, and its needle
Series valve with being fully open.
AS4000-02 AN200-02 6A x 1 m ∗ The average velocity of the cylinder is the value
A VFS3000
(S = 24 mm2) (S = 35 mm2) that the stroke is divided by the total stroke time.
Rc 1 4
∗ Load factor: ((Load weight x 9.8)/Theoretical
Series force) x 100%
AS420-03 AN300-03
B VFS3000 10A x 1 m
(S = 73 mm2) (S = 60 mm2)
Rc 3 8

Can hold an intermediate cylinder Specifications Check Valve Operation
position for an extended time Double check Plug-in type Non plug-in type
double check valve is combined, it will Applicable VFS3410-D Cylinder side Check valve
enable the cylinder to stop in the VFS3400-F pressure (P2)
valve model VFS3410-E
intermediate stroke and maintain its
position for a long time without being
affected by the leakage between the Caution
spools. • In the case of 3 position double check
Double check spacer valve (VFS360), check the leakage Piston SUP side pressure (P1)
from piping and fittings in between valve
and cylinder by means of synthetic

detergent solutions, and ensure that Operating range
there is no such leakage found there.
Also check the leakage from cylinder
seal and piston seal. If there is any
leakage, sometimes the cylinder, when
valve is de-energized, can move without
Plug-in type stopping at intermediate position.
• Be aware that if the exhaust side is Cylinder side pressure P2 (MPa)
0 0
stopping accuracy will decrease and will • The combination of VFS31 1 0, VFS32 1 0
lead to improper intermediate stops. and double check spacer can be used
as prevention for falling at the stroke end
but cannot hold the intermediate
Non plug-in type position of the cylinder.
1164
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1165

Construction
SJ
SY
SV
SYJ
SZ
VP4
S0700
3 position closed center/exhaust center/pressure center VQ
Closed center VQ4
VQ5
Exhaust center VQC
VQZ
Pressure center SQ
VFS
VFR
VQ7
Component Parts Sub-plate Assembly Part No.

No. Description Material Note Plug-in VFS3000-P- 02
03
1 Body Aluminum die-casted Platinum silver Non plug-in VFS3000-S- 02

03
2 Sub-plate Aluminum die-casted Platinum silver ∗ Mounting bolt and gasket are not included.
5 End plate Resin Black Sub-plate Assembly
6 Piston Resin — (For External Pilot) Part No.
7 Junction cover Resin — Plug-in VFS3000-P-R 02
03
8 Light cover Resin — Non plug-in VFS3000-S-R 02
03
10 Gasket NBR — Part no. for mounting bolt and gasket
11 Hexagon socket head screw Steel — BG-VFS3000
1165
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1166
Series VFS3000
Plug-in — 2 Position single/3 Position closed center/Exhaust center/Pressure center/Double check

2 position single: VFS3100-F
2 x ø5.6
mounting hole Rc 1/8 external pilot port
(Only for external pilot) 2(B), 4(A) port
(PE port)
Pilot valve manual override Light window At FZ
2 x ø5.6
mounting hole
With direct manual override
G 1/2 electrical entry

Bottom ported
( ): Rc 1 4
2 position double: VFS3200-F 3 position double check: VFS3600-F

3 position closed center: VFS3300-F
3 position exhaust center: VFS3400-F
3 position pressure center: VFS3500-F 2 x ø5.6
mounting hole
170.5 (3 position: 175)
2 x ø5.6
mounting hole
Light window
At FZ
86.5 (3 position: 96.5)
Pilot valve
manual
override
Light window
At FZ
Pilot valve
manual
override

( ): Rc 1 4 ( ): Rc 1 4
1166
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1167

Non Plug-in — 2 Position single/Double/3 Position closed center/Exhaust center/Pressure center/Double check
2 position single: VFS3110-E, VFS3110-D
Rc 1/8 external pilot port
(Only for external pilot)
2 x ø5.6 2(B), 4(A) port
mounting hole
(PE port) SJ
SY
SV
Cable ø8 to ø10
SYJ
Pilot valve 2 x ø5.6 SZ
manual override Light window mounting hole
At DZ, EZ
VP4
S0700
VQ
VQ4
Bottom ported
VQ5
( ): Rc 1 4
VQC
2 position double: VFS3210-E, VFS3210-D 3 position double check: VFS3610-E, VFS3610-D VQZ
3 position closed center: VFS3310-E, VFS3310-D
3 position exhaust center: VFS3410-E, VFS3410-D SQ
3 position pressure center: VFS3510-E, VFS3510-D
2 x ø5.6
mounting hole VFS
VFR
VQ7
Applicable heavy-duty cord O.D.

ø8 to ø10
Pilot valve
manual override Light window at DZ, EZ
165 (3 position: 175)

Applicable heavy-duty cord O.D.
ø8 to ø10
Pilot valve Light window

manual At DZ, EZ
override
( ): Rc 1 4 ( ): Rc 1 4
1167
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1168
Series VFS3000
• Since lead wires of solenoid valve
are connected with the terminals VV5FS3 01T 06 1 02
on upper surface of terminal block, Thread type
corresponding lead wires from Series VFS3000 Port size Nil Rc
power source can be wired at the Manifold Symbol P, EA, EB A, B N∗ NPT
bottom of terminal Plug-in type 02
Rc
Rc 1 4 T∗ NPTF
block. with terminal block 03 1 2 Rc 3 8 F∗ G
Stations M Mixed ∗ Option
02 2 stations Symbol
···
···
Passage Porting
Symbol specifications
16 16 stations P EA, EB (A, B)
1 Side
Common Common
2 Bottom∗ ∗ Option
Terminal block

• Master connection of power
and solenoid valves. VV5FS3 01C D 05 2 02
• Quick wiring permits easier
Thread type
installation. Series VFS3000 Port size Nil Rc
Manifold Symbol P, EA, EB A, B N∗
U side Connector mounting NPT
Plug-in type direction 02
Rc
Rc 1 4 T∗ NPTF
with multi-connector D D side mounting 03 1 2 Rc 3 8 F∗ G
D side U U side mounting M Mixed ∗ Option
Stations Symbol
Plug assembly (Option) Porting
02 2 stations Passage
Refer to page 1227. Symbol specifications
···
···
P EA, EB (A, B)
08∗ 8 stations 1 Side
Multi-connector Common Common
∗ Max. 8 stations 2 Bottom∗ ∗ Option
• Wide range of interchangeability

(MIL Spec D-sub connector termi- VV5FS3 01F D 06 1 02
nal 25 pcs attached.)
Thread type
• Quick wiring permits easier Series VFS3000 Port size
installation. Nil Rc
Manifold Symbol P, EA, EB A, B N∗
Connector mounting NPT
U side Plug-in type direction 02
Rc
Rc 1 4 T∗ NPTF
with D-sub connector D D side mounting 03 1 2 Rc 3 8 F∗ G
U U side mounting M Mixed ∗ Option
D side Stations Symbol
02 2 stations Passage Porting
Plug assembly (Option) Symbol specifications
···
···
Refer to page 1227. P EA, EB (A, B)

D-sub 08∗ 8 stations 1 Side
connector Common Common
∗ Max. 8 stations 2 Bottom∗ ∗ Option
Non Plug-in Type: Grommet Terminal, DIN Terminal

• Wiring for every valve.
DIN terminal
VV5FS3 10 05 2 02
Thread type
Grommet terminal Series VFS3000 Port size Nil Rc
Manifold Symbol P, EA, EB A, B N∗ NPT
02
Rc
Rc 1 4 T∗ NPTF
Non plug-in type 03 1 2 Rc 3 8 F∗ G
Stations M Mixed ∗ Option
02 2 stations Symbol
···
···
Passage Porting
16 16 stations Symbol specifications
P EA, EB (A, B)
1 Side
Common Common
1168
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1169


Porting
corresponding valve, and option parts. A, B port P, EA, EB A, B valve model
• With terminal block
<Example> Plug-in type
• With multi-connector (2)
VFS300-F
• Plug-in type with terminal block: 6 stations VV5FS3-01 Side/ (1)
• With D-sub connector 12 1 4, 3 8 2 to 10
(Manifold base) VV5FS3-01T-061-02 ······1 Bottom
Non plug-in type • DIN terminal VFS310-D
(2 position single) VFS3100-5FZ ············3
VV5FS3-10 • Grommet terminal VFS310-E
(2 position double) VFS3200-5FZ ···········2
(Blanking plate) VVFS3000-10A ·············1 Note 1) Appropriate silencer for EA, EB port: “AN403-04” (O.D. ø27).
Note 2) With multi-connector, or with D-sub connector: 8 stations max.
<Example>
• Non plug-in type: 6 stations SJ
(Manifold base) VV5FS3-10-061-03 ········1
(2 position single) VFS3110-5D ···············5 Flow Characteristics at the Number of Manifold Stations (Operated individually)
(3 position exhaust center) VFS3410-5D ·····1 Model Passage/Stations Station 1 Station 5 Station 10 SY
(Individual EXH spacer) VVFS3000-R-03-2 ···1 C [dm3/(s·bar)] 6.0 6.0 6.0
1 4/2
(P A/B)
b 0.20 0.20 0.20 SV
Cv 1.4 1.4 1.4
VV5FS3
C [dm3/(s·bar)]
4/2 5/3
b
7.0
0.20
7.0
0.20
7.0
0.20
SYJ
(A/B R1/R2)
Cv 1.8 1.8 1.8
∗ Port size: Rc 3/8
SZ
VP4
S0700
VQ
VQ4
VQ5
VQC
VQZ
SQ
VFS
VFR
VQ7
1169
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1170
Series VFS3000
Manifold Option Parts Assembly Manifold Option

Individual SUP spacer Throttle valve spacer With exhaust cleaner
An individual SUP spacer set on manifold Needle valve set on the manifold block can Plug-in type/Non Plug-in type
block can form SUP port for every valve. control cylinder speed by throttling exhaust. • Valve exhaust noise dampening: 35 dB
Body type Plug-in type Non plug-in type Body type Plug-in type Non plug-in type or more.
• Oil mist collection: Rate of collection
Part no. VVFS3000-P-03-1 VVFS3000-P-03-2 Part no. VVFS3000-20A-1 VVFS3000-20A-2
99.9% or more.
• Piping process reduced.
Individual EXH spacer Double check spacer

An individual EXH spacer set on manifold If the double check spacer with a built-in double
check valve is combined, it will enable the For details, refer to page 1173.
block can form EXH port for every valve.
(common EXH type) cylinder to stop in the intermediate stroke and
maintain its position for a long time without being
Body type Plug-in type Non plug-in type affected by the leakage between the spools. With control unit
Part no. VVFS3000-R-03-1 VVFS3000-R-03-2 Plug-in type/Non Plug-in type
Part no. VVFS3000-22A-1 VVFS3000-22A-2 • Filter, regulation valve, pressure switch
and air release valve are all combined
to form one unit.
• Piping processes are eliminated.
∗ SUP block plate

When supplying manifold with more than two Interface regulator
different pressures, high and low, insert a Interface regulator set on manifold
block plate in between stations subjected to block can regulate the pressure to
different pressures. each valve. (Refer to page 1225 for
Body type Plug-in type Non plug-in type “Flow Characteristics”.) For details, refer to page 1175.
Part no. AXT636-1A Body type Plug-in type Non plug-in type
P port regulation ARBF3050-00-P-1 ARBF3050-00-P-2
∗ EXH block plate A port regulation ARBF3050-00-A-1 ARBF3050-00-A-2 Made to Order
When valve exhaust affects the other B port regulation ARBF3050-00-B-1 ARBF3050-00-B-2 Serial transmission kit manifold
stations on the circuit or when the reverse Plug-in type
pressure valve is used to standard manifold • Solenoid valve wiring process reduced
valve, insert EXH block plate between considerably.
stations to separate valve exhaust.
Part no. AXT636-1A
Blanking plate
It is used by attaching on the manifold block
for being prepared for removing a valve for
maintenance reasons or planning to mount a
spare valve, etc.
1170
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1171


Plug-in type (With terminal block): VV5FS3-01T- Station 1- Port size
U side
Pilot valve
manual override
SJ
SY
SV
Light window
Stations SYJ
SZ
Bottom ported:
VV5FS3-01T- Station 2- Port size D side VP4
S0700
(Pilot EXH port: PE) (External pilot port) VQ
VQ4
VQ5
Electrical entry
VQC
VQZ
Non plug-in type: VV5FS3-10- Station 1- Port size
SQ
U side
Pilot valve
VFS
manual override
VFR
VQ7
Light window
Stations
Bottom ported:
VV5FS3-10- Station 1- Port size D side
Applicable cabtire cable O.D.
ø8 to ø10
(Pilot EXH port: PE) (External pilot port)
Formula for manifold weight M = 0.309n + 0.532 (kg) n: Stations

Stations
L 2 3 4 5 6 7 8 9 10
Formula
L1 129 162 195 228 261 294 327 360 393 L1 = 33 x n + 63
L2 141 174 207 240 273 306 339 372 405 L2 = 33 x n + 75
1171
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1172
Series VFS3000
Manifold — Plug-in type with multi-connector/D-sub connector

Plug-in type with multi-connector: VV5FS3-01CD- Station 1- Port size , VV5FS3-01CU- Station 1- Port size
Pilot valve manual override
U side
Light
window
Stations
Bottom ported: D side

VV5FS3-01 CD
CU - Station 2- Port size
Plug assembly VVFS2000-30A-

(Option: Refer to page 1227.)
(Pilot EXH port: PE)


Plug-in type with D-sub connector: VV5FS3-01FD- Station 1- Port size , VV5FS3-01FU- Station 1- Port size
U side
Pilot valve
manual override
Light window
Stations
Bottom ported:
VV5FS3-01FD
FU - Station 2- Port size
D side
Plug assembly VVZS3000-21A-


Formula for manifold weight M = 0.41n + 0.677 (kg) n: Station (External pilot port)
n: Stations
Stations
L 2 3 4 5 6 7 8
Formula
L1 129 162 195 228 261 294 327 L1 = 33 x n + 63
L2 141 174 207 240 273 306 339 L2 = 33 x n + 75
1172
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1173

Manifold with Exhaust Cleaner

• Serves to protect working Manifold Plug-in type: VV5FS3-01 Non plug-in type: VV5FS3-10
environment. With terminal blocks
• Valve exhaust noise dampening: 35 Wiring DIN terminal
With multi-connector
Grommet terminal
dB or more. With D-sub connector
• Collection rate of drainage and oil Applicable valve model VFS300-F VFS310-D, VFS310-E
mist: 99.9% or more. Common SUP, Common EXH
• Piping work is reduced. 2(B), 4(A) port 1/4, 3/8
Rc
1(P), 3(R2), 5(R1) port P: 1/2, EXH: 1
Stations 2 to 10 (1) SJ
Applicable exhaust cleaners AMC610-10 (Connecting port size R 1) (2)
Note 1) With multi-connector, or with D-sub connector: 8 stations max. SY
Note 2) Exhaust cleaner “AMC610-10” is not attached.
How to Order SV
SYJ
Plug-in type
VV5FS3 10 06 1 03 CD
SZ
Exhaust cleaner AMC610-10
Series VFS3000 Exhaust cleaner
(Option) mounting direction
Manifold
Exhaust cleaner
VP4
Symbol mounting direction
Base type/Electrical
U side
entry CD D side D side mounting S0700
Plug-in type CU U side U side mounting
01T
with terminal block
Thread type
VQ
Plug-in type
01C Nil Rc
with multi-connector
N∗ NPT VQ4
Plug-in type
01F
with D-sub connector
T∗ NPTF
10 Non plug-in type
F∗ G VQ5
D side ∗ Option
Non plug-in type Connector mounting direction Port size VQC
Symbol With connector Applicable base Symbol P A, B
Exhaust cleaner AMC610-10
(Option) Nil None 01T, 10 02
Rc
Rc 1 4 VQZ
D D side mounting 03 1 2 Rc 3 8
01C, 01F
U U side mounting M Mixed SQ
Stations Symbol
02 2 stations Passage Porting VFS
···
···
P R1, R2 (A, B)
10 10 stations 1
Common Common
Side VFR
Base type 01T, 10: 2-10 stations 2 Bottom∗
Base type 01C, 01F: 2-8 stations ∗ Option VQ7

Caution on the D side.
When using an exhaust cleaner, mount it <Example>
downwards. • Plug-in type with terminal block (6 stations)
(Manifold base) VV5FS3-01T-061-03-CD 1
(2 position single) ∗ VFS3100-5FZ 3
(Blanking plate) ∗ VVFS3000-10A 1
(Exhaust cleaner) AMC610-10 1
• Non plug-in type (6 stations)
(Manifold base) VV5FS3-10-061-03-CU 1
(2 position single) ∗ VFS3110-5E 3
∗ For details about exhaust cleaners, refer to Best (2 position double) ∗ VFS3210-5E 2
Pneumatic Vol. 6. (Blanking plate) ∗ VVFS3000-10A 1
the solenoid valve.
1173
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1174
Series VFS3000
Manifold with Exhaust — Plug-in type, Non plug-in type

Plug-in type: VV5FS3-01T- Station 1- Port size - CD
CU
U side
Light
Pilot valve
manual override Pilot valve D side
manual override
Stations
Exhaust cleaner
(Option)
≅
D side U side
D side mounting
(Pilot EXH port: PE) (External pilot port: X12)

U side mounting
Electrical entry
Non plug-in type: VV5FS3-10- Station 1- Port size - CD

CU
U side
Pilot valve D side

manual override
Light
Stations
Exhaust cleaner
(Option)
≅
D side U side
D side mounting
(External pilot port: X12)

(Pilot EXH port: PE) U side mounting
n: Stations
Stations
L 2 3 4 5 6 7 8 9 10
Formula
L1 129 162 195 228 261 294 327 360 393 L1 = 33 x n + 63
L2 141 174 207 240 273 306 339 372 405 L2 = 33 x n + 75
1174
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1175


• Control unit (Filter, Regulator, Manifold Specifications
Pressure switch, Air release valve) Manifold Plug-in type: VV5FS3-01 Non plug-in type: VV5FS3-10
are all standardized to the one unit, With terminal block
DIN terminal
and can be mounted on the Wiring With multi-connector
Grommet terminal
manifold base without any With D-sub connector
Applicable valve model VFS300-F VFS310-D, VFS310-E
attachments.
• Piping processes are eliminated. Porting specifications 2(B), 4(A) port 1/4, 3/8
Rc
1(P), 3(R2), 5(R1) port 1/2
Stations 2 to 10 ∗ SJ
∗ With multi-connector, or with D-sub connector: 8 stations max.
SY
Control Unit Specifications Control Unit/Option SV
U side
Air filter (With auto-drain/With manual drain) <Plug-in type>
Plug-in type Filtration degree 5 μm Air release VVFS3000-24A-1R (D side mounting)
valve
SYJ
Regulator spacer (2) <Non plug-in type>
VVFS3000-24A-2R (D side mounting)
Pressure
IS1000P-2-1
SZ
Pressure switch(1) switch (3)
Set pressure range: OFF 0.1 to 0.6 MPa Filter regulator MP2-3
Differential 0.08 MPa or less
Blanking
plate Pressure switch MP3-2 VP4
Contact 1a Release valve VVFS3000-24A-10
D side
Non plug-in type Indicator light LED (RED)
Filter
element INA-13-854-12-5B S0700
Max. switch capacity 2 VA AC, 2 W DC Note 1) Voltage: 24 VDC to 100 VAC
Inner voltage drop: 4 V
Max. operating current
24 VAC/DC or less: 50 mA
Note 2) Combination of valve VFS31 VQ
Caution 100 VAC/DC: 20 mA (single) and a release valve spacer
Air release valve (Single only)
When using an air filter with auto-drain or
Operating pressure range 0.1 to 1.0 MPa
can be used an air release valve.
Note 3) The non plug-in type cannot be
VQ4
manual drain, mount the filter vertically.
mounted afterwards.
VQ5
How to Order
VQC
VV5FS3 10 08 1 02 AP VQZ
Air release valve coil rating
Series VFS3000
Manifold Nil None (F, G type only) SQ
Base type/Electrical entry 1 100 VAC, 50/60 Hz
01T Plug-in type with terminal block 5 24 VDC
VFS
Plug-in type with multi-connector 9 Other
01C
01F Plug-in type with D-sub connector Control unit type VFR
10 Non plug-in type Symbol
Nil A AP M MP F G C E
Control equipment
Connector mounting direction
Air filter with auto-drain
VQ7
Symbol With connector Applicable base
Nil None 01T, 10 Regulator
D D side mounting
01C, 01F Air release valve
U U side mounting
Pressure switch
Stations Blanking plate (Air release valve)
02 2 stations Blanking plate (Filter, Regulator)
Symbol Blanking plate (Pressure switch)
···
···
Passage Porting
10 10 stations Symbol specifications Number of manifold blocks
P EA, EB (A, B) 2 2 2 2 2 2 2 1
Base type 01T, 10: required for mounting (stations)
2 to 10 stations 1 Side
Common Common
Base type 01C, 01F: 2 Bottom∗ How to Order Manifold Assembly [Example]
2 to 8 stations ∗ Option
station on the D side.
Port size
Symbol P, EA, EB
<Example>
A, B
• Plug-in type with terminal block — In order to mount control unit,
02 Rc 1 4 Thread type
Rc it requires 2 stations.
03 12 Rc 3 8 Nil Rc (Manifold base) VV5FS3-01T-081-03-AP5 1
M Mixed N∗ NPT (2 position single) ∗ VFS3100-5FZ 4
T∗ NPTF (2 position double) ∗ VFS3200-5FZ 2
F∗ G
• Non plug-in type — In order to mount control unit, it requires 2 stations.
∗ Option (Manifold base) VV5FS3-10-061-03-A 1
(2 position single) ∗ VFS3110-5D 4
The asterisk denotes the symbol for assembly. Prefix it to the part
numbers of the solenoid valve.
1175
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1176
Series VFS3000
Manifold with Control unit — Plug-in type, Non plug-in type

Plug-in type: VV5FS3-01T- Station 1- Port size -AP Voltage for release valve
Example for manifold
Double check spacer

U side
Light
Pressure
Air release valve

switch
Air release valve Pressure switch
Stations
(195: -MP)
D side Outlet for check
regulator
Air filter
≅ (Po port)
(External pilot port: X12) Control unit

≅
Electrical entry
Non plug-in type: VV5FS3-10- Station 1- Port size -AP Voltage for release valve
Pilot valve Double check spacer

manual override
U side
Pressure Individual SUP spacer

switch Light
Air release
valve
Air release valve
Pressure
Stations switch
(195: -MP)

regulator
Air filter
Control unit
Rc 1/2 (Po port)
(External pilot port: X12)

≅
Stations
L 3 4 5 6 7 8 9 10 Formula
L1 162 195 228 261 294 327 360 393 L1 = 33 x n + 63
L2 174 207 240 273 306 339 372 405 L2 = 33 x n + 75
L3 (MP) 363 396 429 462 495 528 561 594 L3 = 33 x n + 264
L3 (AP) 384.5 417.5 450.5 483.5 516.5 549.5 582.5 615.5 L3 = 33 x n + 285.5
1176
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1178
Made to Order
How to Order
VV5FS3 01S V 08 1 02 X279

Serial transmission kit Nil Rc
Port size N NPT
Stations Symbol P, R1, R2 A, B T NPTF
2 2 stations 02 Rc 1/4 F G
03 Rc 1/2 Rc 3/8
17 17 stations M Mixed
Note 1) Max. 17 stations. Add 1 station for serial unit ∗ For bottom ported: Rc 1/8 only
mounting.
Note 2) Max. 17 stations for all-single wiring. (No. of
valves: 16) Combination symbol
For the standard double wiring, the maximum Port specification
Piping specification
number of stations is 9. (No. of valves: 8) Symbol
P R1, R2 A, B
1 Side
Compatible with SI unit U side 2∗
Common Common
Bottom
mounating only ∗ Option
Applicable models
Symbol SI unit part no. Description
0 — Without SI unit
F1 EX123U-SUW1 NKE Corporation: Uni-wire System (16 outputs)
H EX123U-SUH1 NKE Corporation: Uni-wire H System (16 outputs)
J1 EX123U-SSL1 SUNX Corporation: S-LINK System (16 outputs)
J2 EX123U-SSL2 SUNX Corporation: S-LINK System (8 outputs)
Q EX124U-SDN1 DevieNet (2 power supply systems)
R1 EX124U-SCS1 OMRON Corporation: CompoBus/S (16 outputs) (2 power supply systems) Refer to pages 1653 to 1655 for the details of the
R2 EX124U-SCS2 OMRON Corporation: CompoBus/S (8 outputs) (2 power supply systems) EX123/124 integrated type (for output) serial
V EX124U-SMJ1 CC-Link (2 power supply systems) transmission system.

SI unit output no.
SI unit output no.
1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 10
Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
AB AB AB AB AB AB AB AB AB AB A A A AB A AB A
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11
How to Order Valves
VFS3 00 5F
Nil None
Nil Internal pilot
Coil rated voltage
R External pilot
Nil None
24 VDC
1178
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1179

VV5FS3-01S Model - Stations Symbol - Port size Thread -X279
2 x Rc 1/8 Light SI unit

Pilot EXH port L2
32 L1
SMC SMC SMC

SMC SMC
SJ
96.5
SY
86.5
SMC
79.5
PE
SERIAL UNIT
9
A A A A A
FG
DG
R4
129
STATION NO.
DB
44
.5
SV
185
DA
24.5 24.5
181
175
EA
B RATE
24G
165
MODEL
RD
LRUN
+24V
SD
PW
SV
LERR.
P
0V
24V
SYJ
2
(SI No.EX124U-SMJ1)
EB
44
54.5
B B B B B
SZ
X
SMC SMC SMC
27
46 VP4
2 x Rc 1/8
54 (External pilot port)
S0700
6 x Rc 1/2
1(P), 5(R1), 3(R2) port Pilot valve manual override VQ
D side U side
Stations 1 2 3 4 5 6 7 n VQ4
VQ5
VQC
SMC SMC
VQZ
139
123
SQ
104
B B B B B B B
79.5
14.5
63.5
49.5
VFS
A A A A A A A
19 VFR
2
54 33
2n x Rc 1/4, 3/8 VQ7

4(A), 2(B) port EX123: 2 x G 1/2
EX124: 4 x G 1/2
∗ Use a dripproof plug assembly
Electrical entry
(AXT100-B04A) for the unused
conduit port (G 1/2).
Formula L1 = 33n + 63 L2 = 33n + 75

Dimensions n: Stations (Max. 17stations)
L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17
L1 129 162 195 228 261 294 327 360 393 426 459 492 525 558 591 624
L2 141 174 207 240 273 306 339 372 405 438 471 504 537 570 603 636
Note) Actual number of manifold base stations: Add 1 SI unit mounting station to the number of valve stations.
1179
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1180
Series VFS3000

Individual SUP spacer: Double check spacer:
VVFS3000-P-03-1 (Plug-in type) VVFS3000-22A-1 (Plug-in type)
VVFS3000-P-03-2 (Non plug-in type) VVFS3000-22A-2 (Non plug-in type)
(157: With direct manual override)
Individual
SUP
spacer
Double check
spacer
Individual EXH spacer: Interface regulator/P port regulation:

VVFS3000-R-03-1 (Plug-in type) ARBF3050-00-P-1 (Plug-in type)
VVFS3000-R-03-2 (Non plug-in type) ARBF3050-00-P-2 (Non plug-in type)

Individual
EXH Interface
spacer regulator
SUP/EXH block plate: AXT636-1A Interface regulator/A port regulation:

ARBF3050-00-A-1 (Plug-in type)
ARBF3050-00-A-2 (Non plug-in type)
Interface
regulator
Block disk mounting position
Throttle valve spacer: Interface regulator/B port regulation:

VVFS3000-20A-1 (Plug-in type) ARBF3050-00-B-1 (Plug-in type)
VVFS3000-20A-2 (Non plug-in type) ARBF3050-00-B-2 (Non plug-in type)
Throttle
valve
spacer Interface
regulator
1180
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1181

End plate (D side)
SJ
SY
SV
SYJ
SZ
VP4
S0700
VQ
VQ4
VQ5
VQC
VQZ
SQ
End plate (U side) VFS
VFR
VQ7
Replacement Parts
No. Description Material Part no.
1 Connection fitting A Steel plate VVFS3000-5-1A
2 Connection fitting B Steel plate VVFS3000-5-2 • For increasing the manifold bases, please order the manifold block
3 assembly number of the principal part assembly !0.
Gasket NBR VVFS3000-7-1
For plug-in type: The manifold base with terminal stand (integrated
4 Gasket NBR VVFS3000-8
with a junction cover) is required with the o junction cover
5 O-ring NBR 19.8 x 16.6 x 1.6 (End plate) assembly.
6 O-ring NBR 20 x 16 x 2 (Manifold block)
7 O-ring NBR 6.2 x 3 x 1.6
8 Terminal assembly — VVFS3000-6A
For 01T VVFS3000-4A- Stations
9 Junction cover assembly
For 01S AZ738-22A- Stations
13 Rubber plug NBR AXT336-9
Replacement Parts: Sub Assembly Note) Manifold Base/Construction: Plug-in with terminal block.
02 Manifold block !0, Terminal i, Metal joint q, w,
Manifold block VVFS3000-1A-1- 03 Plug-in type
10 Gasket e, r, O-ring y, u, Receptacle assembly
assembly
VVFS3000-1A-2- 02
03 Manifold block !0, Metal joint q, w, Gasket e, r, O-ring y, u Non plug-in type
End plate (U side) VVFS3000-2A-1 End plate (U) !1, Metal joint q, w, O-ring t, y Plug-in type
11
assembly VVFS3000-2A-2 End plate (U) !1, Metal joint q, w, O-ring t, y Non plug-in type
End plate (D side) VVFS3000-3A-1 End plate (D) !2, Metal joint q, w, Gasket e Plug-in type
12
assembly VVFS3000-3A-2 End plate (D) !2, Metal joint q, w, Gasket e Non plug-in type
1181
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1182

Series VFS4000
Model
Max.
(1)
(2)
(3)(4)
Type of Port 1 → 4/2 (P → A/B) 4/2 → 5/3 (A/B → R1/R2) operating Response Mass
cycle time (kg)
actuation Plug-in Non plug-in size C C (ms)
38 11 0.18 2.6 12 0.20 2.8
2 position
Single VFS4100 VFS4110 1,000 40 or less 0.63

12 12 0.15 2.8 12 0.22 3.1
38 11 0.18 2.6 12 0.20 2.8
Double VFS4200 VFS4210 12 1,200 15 or less 0.75
12 0.15 2.8 12 0.22 3.1
Closed 38 10 0.18 2.5 10 0.14 2.3
VFS4300 VFS4310 600 50 or less 0.82
center 12 11 0.18 2.7 11 0.22 2.6
38 11 2.6 10 0.15 2.3
3 position
Exhaust 0.16
VFS4400 VFS4410 600 50 or less 0.82
center 12 12 0.15 2.9 10 0.15 2.4
38 11 0.22 2.7 11 0.22 2.7
Pressure 50 or less 0.82
VFS4500 VFS4510 12 600
center 12 0.22 2.9 11 0.22 2.8
Double 38 6.3 — — 6.5 — —
VFS4600 VFS4610 200 55 or less 1.71
check 12 6.8 — — 6.8 — —
Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency. Note 2) Based on JIS B 8375-1981 (The value at supply press. 0.5 MPa).
Note 3) The figures in the above list are for without sub-plate. In the case of with plug-in sub-plate and with non plug-in sub-plate, add 0.50 kg and 0.43 kg
respectively. Note 4) “Note 1)” and “Note 2)” are with controlled clean air.
1/2: C: 12 dm3/(s·bar) Maximum operating pressure 1.0 MPa
Low power consumption: 1.8 W DC 2 position 0.1 MPa

Minimum operating pressure
3 position 0.15 MPa
Easy maintenance Proof pressure 1.5 MPa
2 types of sub-plates:
Ambient and fluid temperature –10 to 60°C (1)
Plug-in and non plug-in
Enclosure Type E: Dustproof (level 0), Type F: Dripproof (level 2), Type D: Splashproof (level 4) (4)

Plug-in type
Electrical entry
Non plug-in type Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz.
Note 4) Based on JIS C 0920.
JIS Symbol Note 5) Based on JIS C 4003.
2 position 3 position
Single Closed center Option Specifications
Pilot type External pilot Note)
Manual Main valve Direct manual override
override Pilot valve Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
110 to 120, 220, 240 VAC, 50/60 Hz
Coil rated voltage
12, 100 VDC
Pressure center Option With light/surge voltage suppressor, Non-rotating DIN terminal
Pilot pressure 2 position: 0.1 to 1.0 MPa, 3 position: 0.15 to 1.0 MPa
Double check
1182
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1183

How to Order
Port size
Porting Nil Without sub-plate
Body type Electrical entry specifications
03 Rc 3 8
O: Plug-in type F: Plug-in type Nil Side ported 04∗ Rc 1 2
sub-plate conduit terminal B∗ Bottom ported
∗ EA, EB: Rc 3 8
Thread type
∗ In the case of external Nil Rc
pilot (Option), bottom N∗ NPT
piping is not available.
T∗ NPTF
F∗ G
SJ
∗ Option
SY
Plug-in VFS4 2 0 0 5 F 03 SV
SYJ
Non plug-in VFS4 2 1 0
1 1 E 03
Pilot valve SZ
Option Manual override
Nil None Nil: Non-locking push type VP4
(Flush)
Z With light/surge voltage suppressor
P∗ Non-rotating DIN terminal S0700
∗ In the case of w/ “Z”, enter “ZP”.
∗ Type “P” is available for DIN type only. VQ
Symbol Electrical entry
2 position single 3 position pressure center A∗: Non-locking push type VQ4
E: Grommet terminal D: DIN terminal (Extended)
1 5
VQ5
2 position double 3 position double check VQC
2 6
B∗: Locking type VQZ

3 position closed center (Tool required)
3 SQ
Coil rated voltage
3 position exhaust center
1 100 VAC, 50/60 Hz VFS
2 200 VAC, 50/60 Hz
4 3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz C∗: Locking type VFR
(Lever)
5 24 VDC
∗ Reverse pressure: Can be used by
external pilot specifications. 6∗ 12 VDC VQ7
7∗ 240 VAC, 50/60 Hz
Body type 9∗ Other
1: Non plug-in type ∗ Option
sub-plate
Pilot type ∗ Option
Nil Internal pilot
R∗ External pilot
∗ Option
SF4 1 F 30
Body option
0 Standard Coil rated voltage Manual override
1∗ Direct manual override 1 100 VAC, 50/60 Hz
Nil
∗ Option 2 200 VAC, 50/60 Hz (Flush)
3∗ 110 to 120 VAC, 50/60 Hz Non-locking push type
A∗
5 24 VDC Locking type
B∗
6∗ 12 VDC (Tool required)
7∗ 240 VAC, 50/60 Hz C∗
Locking type
9∗ Other (Lever)
∗∗ Refer to page 1224
for voltage conversion.
1183
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1184
Series VFS4000

Sizing Program.
Bore size
Series CA2 Note) The CA1 series Series CS1/CS2
Average
Pressure 0.5 MPa has been changed Pressure 0.5 MPa
System speed
Load factor 50% to the CA2 series. Load factor 50%
(mm/s)
Stroke 500 mm Cylinder stroke 1000 mm
ø50 ø63 ø80 ø100 ø125 ø140 ø160 ø180 ø200 ø250 ø300
1000 Perpendicular,
800 Horizontal
700 actuation
600
A 500
400
300
200
100
0
1000
900
800
700
600
B 500
400
300
200
100
0
System Components
Speed SGP (Steel pipe) ∗ It is when the cylinder is extending that is meter-out
System Solenoid valve Silencer controlled by speed controller which is directly connected
controller Port size x Length
with cylinder, and its needle valve with being fully open.
A
Series VFS4000 AS420-03 AN300-03 10A x 1 ∗ The average velocity of the cylinder is what the stroke is
Rc 3 8 (S = 73 mm2) (S = 60 mm2) divided by the total stroke time.
Series VFS4000 AS420-04 AN400-04 ∗ Load factor: ((Load weight x 9.8)/Theoretical force) x 100%
B Rc 1 2 15A x 1
(S = 97 mm2) (S = 90 mm2)

Can hold an intermediate cylinder Specifications Check Valve Operation
position for an extended time Double check Plug-in type Non plug-in type
double check valve is combined, it will Applicable VFS4410-D Cylinder side Check valve
VFS4400-F pressure (P2)
enable the cylinder to stop in the valve model VFS4410-E
position for a long time without being
affected by the leakage between the Caution
spools. • In the case of 3 position double check
valve (VFS460), check the leakage Piston SUP side pressure (P1)

Double check spacer and cylinder by means of synthetic
Plug-in type stopping at intermediate position.
stopping accuracy will decrease and will • The combination of VFS41010, VFS42010
lead to improper intermediate stops. and Double check spacer for prevention
of falling at the stroke end but cannot
Non plug-in type hold the intermediate position of the
cylinder.
1184
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1185

Construction
SJ
SY
SV
SYJ
SZ
VP4
S0700
3 position closed center/exhaust center/pressure center
VQ
Closed center
VQ4
VQ5
Exhaust center
VQC
Pressure center VQZ

SQ
VFS
VFR
VQ7

04
1 Body Aluminum die-casted Platinum silver Non plug-in VFS4000-S- 03
04
5 End plate Resin Black Sub-plate Assembly
6 Piston Resin —
—
(For External Pilot) Part No.
7 Junction cover Resin
Light cover —
Plug-in VFS4000-P-R 03
04
8 Resin
Return spring —
Non plug-in VFS4000-S-R 03
04
9 Stainless steel
10 Gasket NBR —
11 Hexagon socket head screw Steel — Part no. for mounting bolt and gasket
12 Detent assembly — — BG-VFS4000
1185
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1186
Series VFS4000

2 x ø6.5 mounting hole Rc 1/8 external pilot port
(Only for external pilot)
2(B), 4(A) port
(PE port)
Pilot valve
manual override With light/surge voltage suppressor
(With direct manual override)
107 (FZ)
Electrical entry (R1, R2: Rc 3 8)
mounting hole
Bottom ported
(R1, R2: Rc 3 8)

3 position closed center: VFS4300-F 2 x ø6.5 mounting hole
3 position pressure center: VFS4500-F

187 (3 position: 196.5)
With light/surge voltage suppressor Light window
Pilot valve
With light/surge voltage suppressor Light window
manual override
Pilot valve
manual override
177 (FZ)
107 (FZ)

1186
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1187

2(B), 4(A) port
(PE port)
SJ
SY
SV
DIN terminal
ø8 to ø10 SYJ
Pilot valve
manual override SZ
VP4
S0700
2 x ø6.5
mounting hole
VQ
(R1, R2: Rc 3 8)
VQ4
(R1, R2: Rc 3 8) Bottom ported
VQ5
2 position double: VFS4210-E, VFS4210-D 3 position double check: VFS4610-E, VFS4610-D VQC
3 position closed center: VFS4310-E, VFS4310-D
3 position exhaust center: VFS4410-E, VFS4410-D 2 x ø6.5 mounting hole
VQZ
SQ
187 (3 position: 196.5) VFS
VFR
VQ7
DIN terminal
Applicable cabtire
cable O.D. ø8 to ø10
Applicable cabtire DIN terminal

cable O.D. ø8 to ø10 Pilot valve
manual
With direct manual overide
Pilot valve override

manual override
(R1, R2: Rc 3 8)
(R1, R2: Rc 3 8)
1187
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1188
Series VFS4000
on upper surface of terminal block, Thread type
corresponding lead wires from Series VFS4000 Stations Port size Nil Rc
power source can be wired at the Manifold 02 2 stations Symbol P, R1, R2 A, B N∗ NPT
bottom of terminal Plug-in type T∗
···
···
03 Rc 3 8 NPTF
block. Rc
with terminal block 10 10 stations 04 1 2 Rc 1 2 F∗ G
M Mixed ∗ Option
Symbol ∗ For bottom ported,
Passage Porting Rc 3 8 is only avail-
Symbol specifications able.
P R1, R2 (A, B)
1 Side
Common Common
Terminal block

• Quick wiring permits easier Thread type
Stations
installation. Series VFS4000 Port size
02 2 stations Nil Rc
Manifold ··· N∗
···
U side Symbol P, R1, R2 A, B NPT

Plug-in type 08∗ 8 stations 03 Rc 3 8 T∗ NPTF
Rc
with multi-connector ∗ Max. 8 stations 04 1 2 Rc 1 2 F∗ G
Connector mounting M Mixed ∗ Option
D side
direction Symbol ∗ For bottom ported,
D D side mounting Passage Porting Rc 3 8 is only avail-
Plug assembly Symbol specifications able.
U U side mounting P R1, R2 (A, B)
(Option)
1 Side
Refer to page 1227. Common Common
Multi-connector 2 Bottom∗ ∗ Option
Plug-in Type With: D-sub Connector (Wiring specifications: Refer to page 1227.)

(MIL Spec D-sub connector termi- VV5FS4 01F D 06 1 03
nal 25 pcs attached.)
Stations Thread type
• Quick wiring permits easier Series VFS4000 Port size
installation. 02 2 stations Nil Rc
Manifold N∗
···
Symbol P, R1, R2 A, B
···
NPT
U side Plug-in type 08∗ 8 stations 03 Rc 3 8 T∗ NPTF
Rc
with D-sub connector ∗ Max. 8 stations 04 1 2 Rc 1 2 F∗ G
Connector mounting M Mixed ∗ Option
direction Symbol ∗ For bottom ported,
D side
D D side mounting Porting Rc 3 8 is only avail-
Plug assembly Passage
U U side mounting Symbol specifications able.
(Option) P R1, R2 (A, B)
Refer to page 1227. 1 Side
Common Common
D-sub connector

VV5FS4 10 05 2 03
DIN terminal Thread type
Series VFS4000 Stations Port size Nil Rc
Grommet terminal
Manifold 02 2 stations N∗
Symbol P, R1, R2 A, B NPT
Non plug-in T∗
···
···
03 Rc 3 8 NPTF
Rc
type 10 10 stations 04 1 2 Rc 1 2 F∗ G
M ∗ Option
Mixed
P R1, R2 (A, B)
1 Side
Common Common
1188
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1189


Porting
corresponding valve, and option parts. A, B port P, R1, R2 A, B valve model
<Example> • With terminal block
Plug-in type
• Plug-in type with terminal block: 6 stations • With multi-connector VFS400-F
VV5FS4-01 Side/ ∗
(Manifold base) VV5FS4-01T-061-03 ······1 • With D-sub connector 12 3 8,1 2 2 to 10
Bottom
(2 position single) VFS4100-5FZ ·············3 Non plug-in type • DIN terminal VFS410-D
(2 position double) VFS4200-5FZ ············2 VV5FS4-10 • Grommet terminal VFS410-E
(Blanking plate) VVFS4000-10A ··············1 ∗ With multi-connector, or with D-sub connector: 8 stations max.
• Non plug-in type: 6 stations
(Manifold base) VV5FS4-10-061-04 ········1
(2 position single) VFS4110-5D ···············5
(3 position exhaust center) VFS4410-5D ····1
Flow Characteristics at the Number of Manifold Stations (Operated individually) SJ
(Individual EXH spacer) VVFS4000-R-04-2·····1 Model Passage/Stations Station 1 Station 5 Station 10
C [dm3/(s·bar)] 10.5 10.5 10.5 SY
1 4/2
b 0.20 0.20 0.20
(P A/B)
VV5FS4
Cv 2.5 2.5 2.5 SV
C [dm3/(s·bar)] 11 11 11
4/2 5/3
(A/B R1/R2)
b 0.20 0.20 0.20 SYJ
Cv 2.9 2.9 2.9
∗ Port size: Rc 1/2
SZ
VP4
S0700
VQ
VQ4
VQ5
VQC
VQZ
SQ
VFS
VFR
VQ7
1189
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1190
Series VFS4000

An individual SUP spacer set on manifold Needle valve set on the manifold block can Plug-in type/Non Plug-in type
or more.
Body type Plug-in type Non plug-in type Body type Plug-in type Non plug-in type
• Oil mist collection: Rate of collection
Part no. VVFS4000-P-03-1 VVFS4000-P-03-2 Part no. VVFS4000-20A-1 VVFS4000-20A-2 99.9% or more.
• Piping process reduced.
Double check spacer

Individual EXH spacer If the double check spacer with a built-in
An individual EXH spacer set on manifold double check valve is combined, it will
block can form EXH port for every valve. enable the cylinder to stop in the
intermediate stroke and maintain its position For details, refer to page 1193.
(common EXH type)
Body type Plug-in type Non plug-in type leakage between the spools.
Part no. VVFS4000-R-04-1 VVFS4000-R-04-2 With control unit
Part no. VVFS4000-22A-1 VVFS4000-22A-2 Plug-in type/Non Plug-in type
• Filter, regulation valve, pressure switch
and air release valve are all combined
to form one unit.
• Piping processes are eliminated.
∗ SUP block plate
block plate in between stations subjected to Interface regulator
Plug-in different pressures. Interface regulator set on manifold
block can regulate the pressure to
Body type Plug-in type Non plug-in type each valve. (Refer to page 1225 for
Part no. AXT634-10A “Flow Characteristics”.)
∗ EXH block plate P port regulation ARBF4050-00-P-1 ARBF4050-00-P-2 For details, refer to page 1195.
When valve exhaust affects the other A port regulation ARBF4050-00-A-1 ARBF4050-00-A-2
stations on the circuit or when a reverse
B port regulation ARBF4050-00-B-1 ARBF4050-00-B-2
pressure valve is used to a standard
manifold valve, insert EXH block plate in
Made to Order
between stations to separate valve exhaust. Manifold with serial transmission kit
Plug-in type
Body type Plug-in type Non plug-in type • Solenoid valve wiring process reduced
Part no. AXT634-11A considerably.
Blanking plate
EXH block plate SUP block plate spare valve, etc.
1190
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1191


U side
SJ
SY
SV
Light
SYJ
Stations
SZ
D side
Bottom ported: VP4
VV5FS4-01T- Station 2- Port size
S0700
VQ

VQ5
Formula for manifold weight M = 0.565n + 0.923 (kg) n: Stations VQC
Non plug-in type: VV5FS4-10- Station 1- Port size VQZ

Pilot valve manual override SQ
U side
VFS
VFR
VQ7
Light
Stations
D side
Bottom ported: Cable

VV5FS4-10- Station 2- Port size
Formula for manifold weight M = 0.478n + 0.671 (kg) n: Stations

Stations
L 2 3 4 5 6 7 8 9 10
Formula
L1 156 199 242 285 328 371 414 457 500 L1 = 43 x n + 70
L2 168 211 254 297 340 383 426 469 512 L2 = 43 x n + 82
1191
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1192
Series VFS4000

U side Pilot valve manual override
Light
Stations
D side
Bottom ported:
VV5FS4-01CD
CU - Station 2- Port size Plug assembly VVFS2000-30A-


Plug-in type with D-sub connector: VV5FS4-01FD- Station 1- Port size , VV5FS4-01FU- Station 1- Port size
U side Pilot valve manual override
Light
Stations
D side
Bottom ported:
VV5FS4-01 FD
FU - Station 2- Port size

Formula for manifold weight M = 0.57n + 0.935 (kg)
n: Stations
Stations
L 2 3 4 5 6 7 8
Formula
L1 156 199 242 285 328 371 414 L1 = 43 x n + 70
L2 168 211 254 297 340 383 426 L2 = 43 x n + 82
1192
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1193


environment. With terminal block
• Valve exhaust noise dampening: 35 DIN terminal
Wiring With multi-connector
Grommet terminal
dB or more. With D-sub connector
mist: 99.9% or more. Common SUP/Common EXH
• Piping work is reduced. 2(B), 4(A) port Side: 3/8, 1/2, Bottom: 3/8 (Option)
Rc
1(P), 3(R2), 5(R1) port P: 1/2, EXH: 1, 1 1/2
Stations 2 to 10 (1)
SJ
Applicable exhaust cleaners AMC610-10 (Connecting port size R 1), AMC810-14 (Connecting port size R 1 1/2) (2)
Note 1) With multi-connector, or with D-sub connector: 8 stations max. SY
Note 2) Stations of 5 or more and high frequency of operation should be used with AMC810-14.
Exhaust cleaners AMC610-10 and AMC810-14 are not attached.
SV
SYJ
Plug-in type Exhaust cleaner How to Order
(Option) SZ
U side VV5FS4 10 06 1 03 CD VP4
Manifold mounting direction S0700
Exhaust
Symbol Exhaust cleaner

mounting direction
CD D side D side mounting
VQ
D side Plug-in type CU U side U side mounting
Non plug-in type 01T with terminal block ∗ Please indicate exhaust VQ4
Exhaust cleaner
Plug-in type cleaner size or port size.
(Option) 01C with multi-connector Thread type VQ5
Plug-in type Nil Rc
01F with D-sub connector N∗ NPT VQC
10 Non plug-in type T∗ NPTF
F∗ G
∗ Option
VQZ
Port size
Nil None 01T, 10
Symbol P A, B
SQ
D D side mounting
01C, 01F 03 Rc 3 8
U U side mounting
04
Rc
1 2 Rc 1 2 VFS
Stations M Mixed
02 2 stations ∗ For bottom ported, VFR
Rc 3 8 is only available.
···
···
10 10 stations
Symbol
VQ7
Base type 01T, 10: 2 to 10 stations
Base type 01C, 01F: 2 to 8 stations Passage Porting
P R1, R2 (A, B)
1 Side
Common Common
2 Bottom∗
∗ Option
Caution How to Order Manifold Assembly [Example]

When using an exhaust cleaner, mount it Add the valve and option part numbers in order starting from the first station
on the D side.
downwards.
<Example>
• Plug-in type with terminal block (6 stations)
(Manifold base) VV5FS4-01T-061-03-CD 1
∗ Refer to Best Pneumatics Vol. 6 for Exhaust (Manifold base) VV5FS4-10-061-04-CU 1
Cleaner details. (2 position single) ∗ VFS4110-5E 3
(2 position double) ∗ VFS4210-5E 2
The asterisk denotes the symbol for assem-
bly. Prefix it to the part numbers of the sole-
noid valve.
1193
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1194
Series VFS4000
Manifold with Exhaust Cleaner — Plug-in type, Non plug-in type

CU
U side
D side
R1, 1 1 2
Stations D side
Manual
override
Exhaust cleaner
≅
(Option)
≅
U side
D side mounting

Electrical entry U side mounting
( ): AMC810

CU
Pilot valve
U side manual override D side
Manual
Stations override
D side
≅
Exhaust cleaner
(Option)
U side
≅
D side mounting
U side mounting
( ): AMC810 n: Stations
Stations
L 2 3 4 5 6 7 8 9 10
Formula
L1 156 199 242 285 328 371 414 457 500 L1 = 43 x n + 70
L2 168 211 254 297 340 383 426 469 512 L2 = 43 x n + 82
1194
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1195


• Control unit (Filter, Regulator, Pres- Manifold Plug-in type: VV5FS4-01 Non plug-in type: VV5FS4-10
sure switch, Air release valve) are With terminal block
DIN terminal
all standardized to the one unit, Wiring With multi-connector
Grommet terminal
and can be mounted on the mani- With D-sub connector
Applicable valve model VFS400-F VFS410-D, VFS410-E
fold base without any attachments.
• Piping processes are eliminated. Porting specifications
2(B), 4(A) port Side: 3/8, 1/2, Bottom: 3/8
Rc (PT)
1(P), 3(R2), 5(R1) port Side: 1/2
Stations 2 to 10 ∗ SJ
∗ With multi-connector, or with D-sub connector: 8 stations max.
SY
Control Unit Specifications Control Unit/Option SV
Air filter (With auto-drain/With manual drain) <Plug-in type>
Plug-in type
Filtration degree 5 μm Air release VVFS4000-24A-1R (D side mounting)
valve (2) SYJ
Regulator spacer <Non plug-in type>
VVFS4000-24A-2R (D side mounting)
Pressure
IS1000P-2-1
SZ
Pressure switch (1) switch
Set pressure range: OFF 0.1 to 0.6 MPa Filter regulator MP2-3
Differential 0.08 MPa or less
Blanking
(3) Pressure switch MP3-2 VP4
Non plug-in type plate
Contact 1a Release valve VVFS4000-24A-10
Indicator light LED (RED)
Filter
element 11104-5B S0700
Max. switch capacity 2 VA AC, 2 W DC Note 1) Voltage: 24 VDC to 100 VAC
Caution Max. operating current
24 VAC/DC or less: 50 mA
48 VAC/DC: 40 mA
Inner voltage drop: 4 V
Note 2) Combination of a valve VFS41
VQ
100 VAC/DC: 20 mA (single) and a release valve spacer
When using an air filter with auto-drain or
Air release valve (Single only)
manual drain, mount the filter vertically.
Operating pressure range 0.1 to 1.0 MPa
can be used as an air release valve.
Note 3) The non plug-in type cannot be
VQ4
mounted afterwards.
VQ5
How to Order VQC
VV5FS4 01C D 08 1 03 AP VQZ

Air release valve coil rating SQ
Series VFS4000
Manifold Nil None (F, G type only)
1 100 VAC, 50/60 Hz
5 24 VDC
VFS
01T Plug-in type with terminal block
Plug-in type with multi-connector 9 Other
01C
01F Plug-in type with D-sub connector Control unit type VFR
10 Non plug-in type Symbol
Control equipment
Nil A AP M MP F G C E VQ7
Air filter with auto-drain
Nil None 01T, 10
Regulator
D D side mounting
01C, 01F Air release valve
U U side mounting
Pressure switch
Stations Blanking plate (Air release valve)
02 2 stations Blanking plate (Filter, Regulator)
Symbol Blanking plate (Pressure switch)
···
···
Passage Porting
10∗ 10 stations Symbol specifications Number of manifold blocks 2 2 2 2 2 2 2 1
P R1, R2 (A, B) required for mounting (stations)
∗ Base type 01T, 10:
2 to 10 stations 1 Side
Common Common
2 Bottom∗
Base type 01C, 01F: How to Order Manifold Assembly [Example]
2 to 8 stations ∗ Option
Port size station on the D side.
Symbol P, R1, R2 A, B <Example>
03 Rc 3 8 Thread type • Plug-in type with terminal block: In order to mount control unit,
Rc it requires 2 stations.
04 1 2 Rc 1 2 Nil Rc
M Mixed N∗ NPT (Manifold base) VV5FS4-01T-081-03-AP5 1
∗ For bottom T∗ NPTF
ported, Rc 3 8 is F∗ G
only available. • Non plug-in type: In order to mount control unit, it requires 2 stations.
∗ Option (Manifold base) VV5FS4-10-061-03-A 1
(2 position single) ∗ VFS4110-5D 4
The asterisk denotes the symbol for assembly. Prefix it to the part
numbers of the solenoid valve.
1195
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1196
Series VFS4000
Manifold with Control Unit — Plug-in type, Non plug-in type

Plug-in type: VV5FS4-01T- Station 1- Port size -AP Voltage for release valve
Pilot valve manual
override
Pilot valve Double check spacer

manual override
U side
Air release valve

Pressure switch Pressure switch
Air release valve
Stations
Outlet for check
222 (180.5: -MP)
D side
regulator
Air filter
Control unit
≅
(Po port)
Pilot EXH port: PE

≅
Electrical entry
Non plug-in type: VV5FS4-10- Station 1- Port size -AP Voltage for release valve
Pilot valve
manual override
Double check spacer
U side
Pressure switch
Air release valve
Air release valve

Stations Pressure switch
(180.5: -MP)

regulator
Air filter
Control unit
(Po port)
n: Stations
Stations
L 3 4 5 6 7 8 9 10 Formula
≅
L1 199 242 285 328 371 414 457 500 L1 = 43 x n + 70

Pilot EXH port: PE
L2 211 254 297 340 383 426 469 512 L2 = 43 x n + 82
L3 (MP) 385.5 428.5 471.5 514.5 557.5 600.5 643.5 686.5 L3 = 43 x n + 256.5
(External pilot port) L3 (AP) 427 470 513 556 599 642 685 728 L3 = 43 x n + 298
1196
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1198
Made to Order
How to Order
VV5FS4 01S U V 08 1 03 X199

Thread type
Plug-in type
Nil Rc
Serial transmission kit
N NPT
T NPTF
SI unit mounting position F G
D D side mounting Stations
2 2 stations Port size
U U side mounting
10 10 stations 03 Rc 3/8
Note 1) Max. 10 stations. Add 1 station for serial unit mounting. 04 Rc 1/2 Rc 1/2
Note 2) Max. 10 Stations: For single and double mixed wiring. (No. of M Mixed
valves: 9) ∗ For bottom ported: Rc 1/8 only
Max. 9 stations: For standard double wiring (No. of valves: 8)
SI unit can be mounted on Combination symbol

either U or D side. Piping
Port specification
Applicable models Symbol specification
SI unit part no. P R1, R2 A, B
Symbol Description
For U side mouning For D side mouning 1 Side
Common Common
0 — — Without SI unit 2∗ Bottom
F1 EX123U-SUW1 EX123D-SUW1 NKE Corporation: Uni-wire System (16 outputs) ∗ Option
H EX123U-SUH1 EX123D-SUH1 NKE Corporation: Uni-wire H System (16 outputs)
J1 EX123U-SSL1 EX123D-SSL1 SUNX Corporation: S-LINK System (16 outputs)
Q EX124U-SDN1 EX124D-SDN1 DevieNet (2 power supply systems) Refer to pages 1653 to 1655 for
R1 EX124U-SCS1 EX124D-SCS1 OMRON Corporation: CompoBus/S (16 outputs) (2 power supply systems) the details of the EX123/124
R2 EX124U-SCS2 EX124D-SCS2 OMRON Corporation: CompoBus/S (8 outputs) (2 power supply systems) integrated type (for output) serial
V EX124U-SMJ1 EX124D-SMJ1 CC-Link (2 power supply systems) transmission system.

SI unit output no.
SI unit output no.
1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 10
Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11
How to Order Valves
VFS4 00 5F
Nil None
Nil Internal pilot
R External pilot
Coil rated voltage
Nil None
24 VDC
1198
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1199

Serial Transmission Kit Manifold (EX123/124): Plug-in Type

VV5FS4-01S Mounting position Model - Stations Symbol - Port size Thread -X199
2 x Rc 1/8
2 x G 1 1/4 (Pilot EXH port: PE) SI unit
(Electrical entry)
L2
38 6 L1
18 43 91.5 SJ
SY
SMC SMC SMC
SMC SMC
SV
105
95.5
86
A A A A A
SYJ
SMC
166
EA
SERIAL UNIT
PE
155.5
5.5
FG
47
205.5
DG
202.5
196.5
28
24
STATION NO.
DB
SZ
187
DA
X
P
B RATE
24G
MODEL
RD
LRUN
+24V
24
SD
PW
SV
LERR.
0V
45
24V
55
(SI No.EX124U-SMJ1)
VP4
9
EB
B B B B B
23 SMC SMC SMC SMC

S0700
42
63.5 VQ
D side U side
6 x Rc 1/2
Stations 1 2 3 4 5 6 7 n
VQ4
1(P), 5(R3), 3(R1)
Manual override VQ5
VQC
SMC
VQZ
150.5
141.00
115.5
A A A A A A A
SQ
91.5
74.00
VFS
58
18
14
B B B B B B B
3 3 VFR
3
2n x Rc 3/8, 1/2 30
62.5 43 4(A), 2(B) port
EX123: 2 x G 1/2 VQ7
EX124: 4 x G 1/2
∗ Use a dripproof plug assembly (AXT100-
B04A) for the unused conduit port (G Electrical entry
1/2).
Formula L1 = 43n + 70 L2 = 43n + 82

L n 2 3 4 5 6 7 8 9 10
L1 156 199 242 285 328 371 414 457 500
L2 168 211 254 297 340 383 426 469 512
1199
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1200


Individual
SUP
spacer
169
Double check
spacer


Individual Interface
EXH regulator
spacer
SUP block plate: AXT634-10A Interface regulator/A port regulation:

EXH block plate: AXT634-11A ARBF4050-00-A-1 (Plug-in type)
Interface
regulator
Block plate mounting

position
( ): EXH block plate

Throttle Interface
valve regulator
spacer
1200
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1201

Manifold Base Construction — Plug-in type, Non Plug-in type
End plate (D side)
SJ
SY
SV
SYJ
SZ
VP4
S0700
VQ
Manifold block VQ4
VQ5
VQC
VQZ
End plate (U side) SQ
VFS
VFR
Replacement Parts
No. Description Material Part no. VQ7
1 Connection fitting A Steel plate VVF4000-5-1A
2 Connection fitting B Steel plate VVF4000-5-2 • For increasing the manifold bases, please order the manifold
3 Gasket NBR VVF4000-7 (End plate) block assembly number of the principal part assembly !0.
4 Gasket NBR VVF4000-7-1 (Manifold block) For plug-in type: The manifold base with terminal stand
5 Gasket NBR VVF4000-8 (integrated with a junction cover) is required with the o junction
6 O-ring NBR AS568-011 cover assembly.
7 O-ring NBR P-3
8 Terminal assembly — VVF4000-6A
For 01T VVF4000-4A- Stations
For 01SU AZ738-30A- Stations
Replacement Parts: Sub Assembly Note) Manifold Base/Construction: Plug-in type with terminal block.
Manifold block !0, Terminal i, Metal joint q, w,
Manifold block VVF4000-1A-1- 03
04 Plug-in type
10 Gasket r, Receptacle assembly
assembly
VVF4000-1A-2-03
04 Manifold block !0, Metal joint q, w, Gasket r Non plug-in type
End plate (U side) VVF4000-2A-1 End plate (U) !1, Metal joint q, w Plug-in type
11
assembly VVF4000-2A-2 End plate (U) !1, Metal joint q, w Non plug-in type
End plate (D) !2, Metal joint q, w, Gasket e, t,
VVF4000-3A-1 Plug-in type
End plate (D side) O-ring y, u
12
assembly End plate (D) !2, Metal joint q, w, Gasket e, t,
VVF4000-3A-2 Non plug-in type
O-ring t, y
1201
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1202

Series VFS5000
Model
Port Max. (2) (3)

Type of 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Mass
actuation Plug-in Non plug-in size cycle time (kg)
C C (ms)
38 15 0.30 3.7 15 0.30 4.1
Single VFS5100 VFS5110 12 16 0.15 3.7 19 0.15 4.5 600 45 or less 0.88
2 position
34 17 0.15 3.9 20 0.13 4.7

38 15 0.30 3.7 15 0.30 4.1
Double VFS5200 VFS5210 12 16 0.15 3.7 19 0.15 4.5 600 25 or less 1.06
34 17 0.15 3.9 20 0.13 4.7
38 14 0.25 4.0 14 0.24 4.1
Closed 55 or less 1.16
VFS5300 VFS5310 12 16 0.25 4.1 16 0.24 4.1 300
center
34 16 0.25 4.1 16 0.23 4.1
38 14 0.32 3.8 14 0.25 3.5
Exhaust
VFS5400 VFS5410 12 16 0.17 3.8 16 0.18 4.1 300 55 or less 1.14
3 position
center
34 17 0.20 4.2 17 0.13 4.1
38 14 0.30 3.7 14 0.31 3.8
Pressure
center
VFS5500 VFS5510 12 16 0.23 3.9 16 0.22 4.1 300 55 or less 1.14
34 18 0.25 4.6 17 0.22 4.3
38 9.0 — — 9.0 — —
Double VFS5600 VFS5610 12 60 or less 1.99
9.0 — — 9.0 — — 180
check 34 9.0 — — 9.0 — —
Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency. Note 2) Based on JIS B8375-1981. (The value at supply pressure 0.5 MPa.)
Note 3) The figures in the above list are without sub-plate. In the case of with plug-in sub-plate and, with non plug-in sub-plate add Rc 3/8, 1/2—0.744 kg, Rc
3/4—0.966 kg and Rc 3/8, 1/2—0.577 kg, Rc 3/4—0.823 kg respectively.
Note 4) “Note 1) ” and “Note 2) ” are with controlled clean air.

Low power consumption: 1.8 W DC Proof pressure 1.5 MPa
Plug-in and non plug-in Pilot valve manual override Non-locking push type (Flush)
Plug-in type Enclosure Type E: Dustproof (Level 0), Type F: Dripproof (Level 2), Type D: Splashproof (Level 4) (4)

Electrical entry
Non plug-in type Note 1) Use dry air at low temperatures.
JIS Symbol direction and at the right angles to the main valve and armature in both
energized and de-energized states every once for each condition. (Values
2 position 3 position at the initial period)
Single Closed center Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz.
Pilot type External pilot Note)
Manual Main valve Direct manual override
Pressure center override Pilot valve Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
12, 100 VDC
Double check
Option With light/surge voltage suppressor, Non-rotating DIN terminal
Pilot pressure: 0.1 to 1.0 MPa
1202
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1203

How to Order
Port size
Porting Nil Without sub-plate
Body type Electrical entry specifications
03 Rc 3 8
O: Plug-in type F: Plug-in type Nil Side ported
04 Rc 1 2
sub-plate conduit terminal B∗ Bottom ported
06 Rc 3 4
∗ In the case of
external pilot
(Option), bot- Thread type
tom piping is
not available. Nil Rc
N∗ NPT
T∗ NPTF
F∗ G
SJ
∗ Option
SY
Plug-in VFS5 1 0 0 2 F 04
SV
Non plug-in VFS5 1 1 0 5 D 06 SYJ
Pilot valve SZ
Option Manual override
Nil
Z
None
Nil: Non-locking push type
(Flush)
VP4
P∗ Non-rotating DIN terminal
Light/Surge Voltage Suppressor S0700
ZP∗
Non-rotating DIN terminal
∗ Type “P”, “ZP” is available for DIN VQ
type only.
Symbol A∗: Non-locking push type
2 position single 3 position pressure center Electrical entry (Extended)
VQ4
1 5 E: Grommet terminal D: DIN terminal
VQ5
2 position double 3 position double check VQC
2 6
B∗: Locking type VQZ
(Tool required)
3 position closed center
3 SQ
Coil rated voltage
3 position exhaust center 1 100 VAC, 50/60 Hz
VFS
4 2 200 VAC, 50/60 Hz
C∗: Locking type VFR
3∗ 110 to 120 VAC, 50/60 Hz (Lever)
Body type 4∗ 220 VAC, 50/60 Hz
5 24 VDC VQ7
1: Non plug-in type 6∗ 12 VDC
sub-plate
7∗ 240 VAC, 50/60 Hz
9∗ Other
∗ Option
∗ Option
Pilot type
Nil Internal pilot
R∗ External pilot
∗ Option
Body option How to Order Pilot Valve Assembly

0 Standard
1∗ Direct manual override SF4 1 F 30
∗ Option
Coil rated voltage Manual override
1 100 VAC, 50/60 Hz Non-locking push type
Nil
2 200 VAC, 50/60 Hz (Flush)
3∗ 110 to 120 VAC, 50/60 Hz A∗
Locking type
5 24 VDC B∗
6∗
(Tool required)
12 VDC
7∗ 240 VAC, 50/60 Hz C∗
Locking type
9∗ Other
(Lever)
∗∗ Refer to page 1224
1203
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1204
Series VFS5000

Sizing Program.
Bore size
Series CS1/CS2
Average Pressure 0.5 MPa
Series speed Load factor 50%
(mm/s) Stroke 300 mm
ø125 ø140 ø160 ø180 ø200 ø250 ø300
800 Perpendicular,
600 Horizontal
500 actuation
VFS5100-06 400
300
200
100
0
∗ It is when the cylinder is extending that is meter-out controlled by speed controller which is directly
connected with cylinder, and its needle valve with being fully open.
∗ The average velocity of the cylinder is what the stroke is divided by the total stroke time.
Conditions
Series CS1
Tube bore x Length SGP20A x 1 m
VFS5100-06 Speed controller AS500-06
Silencer AN500-06
Specifications Check Valve Operation

Can hold an intermediate cylinder Double check Plug-in type Non plug-in type
position for an extended time spacer part no. VVFS5000-22A-1 VVFS5000-22A-2
If the double check spacer with a built-in Applicable
VFS5400-F
VFS5410-D Cylinder side pressure Check valve
double check valve is combined, it will valve model VFS5410-E (P2)
enable the cylinder to stop in the
position for a long time without being Caution
affected by the leakage between the • In the case of 3 position double check
spools. valve (VFS560), check the leakage SUP side pressure (P1)
Piston
and cylinder by means of synthetic

Double check spacer
stopping at intermediate position.
Plug-in type restricted excessively, the intermediate
stopping accuracy will decrease and will • The combination of VFS5101 0, VFS52 01 0
lead to improper intermediate stops. and a double check spacer can be used
as prevention of falling at the stroke end
but cannot hold the intermediate
position of the cylinder.
Non plug-in type
1204
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1205

Construction
SJ
SY
SV
SYJ
SZ
VP4
3 position closed center/exhaust center/pressure center S0700
Closed center
VQ
VQ4
Exhaust center
VQ5
VQC
Pressure center
VQZ
SQ
VFS
VFR
VQ7

03
06
1 Body Aluminum die-casted Platinum silver Non plug-in VFS5000-S-

03
04
06
5 End plate Resin Black
Sub-plate Assembly
6 Piston Resin —
7 Junction cover Resin —
(For External Pilot) Part No.
03
8 Light cover Resin — Plug-in VFS5000-P-R 04
06
03
9 Return spring Stainless steel — Non plug-in VFS5000-S-R 04
06
10 Gasket NBR —
11 Hexagon socket head screw Steel — Part no. for mounting bolt and gasket
12 Detent assembly — — BG-VFS5000
1205
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1206
Series VFS5000

Bottom ported
2 x ø7
mounting hole
3(R2), 5(R1): Rc 1/2
Pilot valve
manual override With light/surge
voltage suppressor
Direct manual override
2(B), 4(A) port

Rc 1/8 external pilot
(Port size: Rc 3/8, 1/2)

(Pilot EXH port) (Port size: Rc 3/4)
( ): Rc 3 4

3 position closed center: VFS5300-F
3 position pressure center: VFS5500-F
2 x ø7 mounting
hole
219.3 (218) 3 position 227.3 (226)
2 x ø7 mounting
hole
With light/surge
voltage suppressor
Pilot valve
manual override
With light/surge
voltage suppressor Direct manual
override
Pilot valve
manual override
G 1/2 G 1/2
electrical entry electrical entry
( ): Rc 3 4 ( ): Rc 3 4
1206
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1207

Rc 3/4: 3(R2), Rc 1/2: 5(R1)
SJ
G 1 2
SY
Applicable cabtire cable O.D. SV
ø8 to ø10
Pilot valve
SYJ
manual override
SZ
2(B), 4(A) port

Rc 1/8
external pilot
(Port size Rc 3/8, 1/2) VP4
S0700
VQ
2 x Rc 1/8
(Pilot EXH port) (Port size: Rc 3/4)
VQ4
VQ5
( ): Rc 3/4
VQC
2 position double: VFS5210-E, VFS5210-D 3 position double check: VFS5610-E, VFS5610-D
3 position closed center: VFS5310-E, VFS5310-D VQZ
3 position exhaust center: VFS5410-E, VFS5410-D
2 x ø7 mounting
hole
SQ
VFS
101.5 (3 position: 109.5)
2 x ø7 mounting VFR
hole
VQ7
ø8 to ø10
Pilot valve
Applicable cabtire cable O.D. manual
ø8 to ø10 override
Pilot valve
manual
override
Direct manual
override
Direct manual
override
( ): Rc 3/4 ( ): Rc 3/4
1207
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1208
Series VFS5000
on upper surface of terminal block,
corresponding lead wires from Thread type
power source can be wired at the Manifold
bottom of terminal 02 2 stations Symbol P, R1, R2 A, B N∗ NPT
T∗
···
···
block. Plug-in type 04 Rc 1 2 NPTF
Rc
with terminal block 10 10 stations 06 34 Rc 3 4 F∗ G
M Mixed ∗ Option
P R1, R2 (A, B)
1 Side
Common Common

• Quick wiring permits easier
installation. Stations Thread type
Series VFS5000 Port size
02 2 stations Nil Rc
Manifold
Symbol P, R1, R2 A, B N∗ NPT
···
U side
···
Plug-in type 08∗ 8 stations 04 Rc 1 2 T∗ NPTF

with multi-connector Rc
∗ Max. 8 06 34 Rc 3 4 F∗ G
Connector stations M Mixed ∗ Option
D side mounting Symbol ∗ For bottom ported,
direction Porting
Rc 1 2 is only avail-
Plug assembly Passage able.
(Option) D D side mounting Symbol specifications
P R1, R2 (A, B)
Refer to page U U side mounting
1 Side
1227. Common Common
Multi-connector 2 Bottom∗ ∗ Option

(MIL Spec. D-sub connector terminal VV5FS5 01F D 06 1 04
25 pcs attached.)
• Quick wiring permits easier Stations Thread type
Series VFS5000 Port size Nil Rc
installation. Manifold 02 2 stations
Symbol P, R1, R2 A, B N∗ NPT
···
···
T∗
U side Plug-in type Rc 1 2
08∗ 8 stations 04
Rc
NPTF
with D-sub connector
∗ Max. 8
06 34 Rc 3 4 F∗ G
Connector stations M Mixed ∗ Option
mounting Symbol ∗ For bottom ported,
D side
direction Porting
Rc 1 2 is only avail-
Plug assembly Passage able.
D D side mounting Symbol specifications
(Option) P R1, R2 (A, B)
U U side mounting
Refer to page 1 Side
Common Common
1227.
D-sub connector

VV5FS5 10 05 2 04
DIN terminal Thread type
Manifold
Grommet terminal 02 2 stations Symbol P, R1, R2 A, B N∗ NPT
T∗
···
···
Non plug-in 04 Rc 1 2 NPTF

Rc
type 10 10 stations 06 34 Rc 3 4 F∗ G
M Mixed ∗ Option
P R1, R2 (A, B)
1 Side
Common Common
1208
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1209

How to Order Manifold Assembly Base model Wiring
Porting
Port size Rc
specifications
Stations
Applicable
A, B port P, R1, R2 A, B valve model
Please indicate manifold base type,
corresponding valve, and option parts. • With terminal block
Plug-in type
• With multi-connector VFS500-F
<Example> VV5FS5-01 Side/ Rc 3 Rc
• With D-sub connector
Bottom
4 1
2, 3 4
2 to 10∗
• Plug-in type with terminal block: 6 stations
Non plug-in type • DIN terminal VFS510-D
(Manifold base) VV5FS5-01T-061-04 ······1
VV5FS5-10 • Grommet terminal VFS510-E
(2 position single) VFS5100-5FZ ··········· 3
(2 position double) VFS5200-5FZ ··········2 ∗With multi-connector, or with D-sub connector: 8 stations max.
(Blanking plate) VVFS5000-10A ·············1
• Non plug-in type: 6 stations
(Manifold base) VV5FS5-10-061-04 ········1 Flow Characteristics at the Number of Manifold Stations (Operated individually)
(2 position single) VFS5110-5D ·············5
Model Passage/Stations Station 1 Station 5 Station 10
(3 position exhaust center) VFS5410-5D ········1
(Individual EXH center) VVFS5000-R-04-2 ····1 C [dm3/(s·bar)] 6.0 6.0 6.0
1 4/2
(P A/B)
b 0.20 0.20 0.20 SJ
Cv 1.4 1.4 1.4
VV5FS5
4/2 5/3
C [dm3/(s·bar)] 7.0 7.0 7.0 SY
b 0.20 0.20 0.20
(A/B R1/R2)
Cv 1.8 1.8 1.8
SV
∗ Port size: Rc 1/2, 3/4
SYJ
SZ
Plug-in type/Non plug-in type
An individual SUP spacer set on manifold Needle valve set on the manifold block can VP4
or more.
Body type Plug-in type Non plug-in type Body type Plug-in type Non plug-in type
• Oil mist collection: Rate of collection S0700
Part no. VVFS5000-P-04-1 VVFS5000-P-04-2 Part no. VVFS5000-20A-1 VVFS5000-20A-2 99.9% or more.
• Piping process reduced. VQ
VQ4
Double check spacer VQ5

Individual EXH spacer If the double check spacer with a built-in
An individual EXH spacer set on manifold double check valve is combined, it will VQC
block can form EXH port for every valve. enable the cylinder to stop in the
(common EXH type) intermediate stroke and maintain its position
VQZ
leakage between the spools. For details, refer to page 1212.
Part no. VVFS5000-R-04-1 VVFS5000-R-04-2
SQ
Made to Order VFS
Manifold with serial transmission kit
Plug-in type VFR
• Solenoid valve wiring process reduced
considerably. VQ7
SUP block plate
Interface regulator
block plate in between stations subjected to Interface regulator set on manifold
different pressures. block can regulate the pressure to
each valve. (In the event of using,
Body type Plug-in type Non plug-in type refer to “Flow Characteristics” on
Part no. AXT628-12A page 1225).
EXH block plate
P port regulation ARBF5050-00-P-1 ARBF5050-00-P-2
When valve exhaust affects the other
A port regulation ARBF5050-00-A-1 ARBF5050-00-A-2
stations on the circuit or when a reverse
B port regulation ARBF5050-00-B-1 ARBF5050-00-B-2
pressure valve is used on a standard
manifold valve, insert EXH block plate in
between stations to separate valve exhaust.
Part no. AXT512-14-1A
Blanking plate
EXH block plate SUP block plate
spare valve, etc.
1209
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1210
Series VFS5000

U side
Pilot valve
manual override
P = 51
Pitch
Stations
D side
Bottom ported: (External pilot)
VV5FS5-01T- Station 2- Port size

(Pilot EXH)
Electrical entry
( ): 2(B)/4(A) port Rc 3 4
Non plug-in type: VV5FS5-10- Station 1- Port size

U side
Pilot valve
manual override
P = 51
Pitch
Stations
D side
DIN terminal
Applicable cabtire
VV5FS5-10- Station cable O.D. (External pilot)
2- Port size ø8 to ø10 (External pilot)
(Pilot EXH)
(Pilot EXH)
Stations
L 2 3 4 5 6 7 8 9
Formula 10
L1 194 245 296 347 398 449 500 551 602 L1 = 51 x n + 92
L2 212 263 314 365 416 467 518 569 620 L2 = 51 x n + 110 ( ): 2(B)/4(A) port Rc 3 4
1210
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1211



U side
Pilot valve
manual override
SJ
SY
P = 51
SV
Pitch
SYJ
Stations
SZ
D side VP4
Plug assembly VVFS2000-30A-
Bottom ported: (Option: Refer to page 1227.)

S0700
VV5FS5-01CD
CU - Station 2- Port size (External pilot)
(Pilot EXH) VQ
VQ4

VQ5
∗ Refer to page 1227. For wiring specifications.
( ): 2(B)/4(A) port Rc 3 4 VQC
Plug-in type with D-sub connector: VV5FS5-01FD- Station 1- Port size , VV5FS5-01FU- Station 1- Port size VQZ
SQ
VFS
Pilot valve manual override U side
VFR
VQ7
P = 51
Pitch
Stations
D side

Bottom ported: (External pilot)
VV5FS5-01 FD
FU - Station 2- Port size (Pilot EXH)

∗ Refer to page 1227. For wiring specifications.
Stations
L 2 3 4 5 6 7 8 Formula
L1 194 245 296 347 398 449 500 L1 = 51 x n + 92
( ): 2(B)/4(A) port Rc 3 4
L2 212 263 314 365 416 467 518 L2 = 51 x n + 110
1211
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1212
Series VFS5000

environment. With terminal blocks DIN terminal
• Valve exhaust noise dampening: 35 Wiring With multi-connector
With D-sub connector Grommet terminal
dB or more.
mist: 99.9% or more. Common SUP/Common EXH
Porting specifications 2(B), 4(A) port
• Piping work is reduced. Side: 1/2, 3/4, Bottom: 1/2 (Option)
Rc
1(P), 3(R2), 5(R1) P: 3/4, EXH: 1 1/2
Stations 2 to 10 (1)
Applicable exhaust cleaners AMC810-14 (Connecting port size R 1 1/2) (2)
Note 1) With multi-connector, or with D-sub connector: 8 stations max.
Note 2) Exhaust cleaner: Not attached.
How to Order
Plug-in type
Exhaust cleaner VV5FS5 10 06 1 04 CD
(Option)
U side
Manifold mounting direction
Exhaust cleaner
Base type/Electrical Symbol
mounting direction
entry CD D side D side mounting
Plug-in type CU U side U side mounting
01T with terminal block
01C with multi-connector Nil Rc
D side
Non plug-in type Plug-in type N∗ NPT
T∗
Exhaust cleaner 01F with D-sub connector NPTF
(Option)
10 Non plug-in type F∗ G
∗ Option
Port size
Symbol P A, B
Nil None 01T, 10
04 Rc 1 2
D D side mounting Rc
01C, 01F 06 34 Rc 3 4
U U side mounting
M Mixed
Stations ∗ For bottom ported, Rc 1 2
02 2 stations is only available.
···
···
Symbol
10 10 stations Passage Porting
Base type 01T, 10: 2 to 10 stations P R1, R2 (A, B)
Base type 01C, 01F: 2 to 8 stations 1 Side
Common Common
2 Bottom∗
∗ Option

on the D side.
<Example>
Caution • Plug-in type with terminal block (6 stations)
When using an exhaust cleaner, mount it (Manifold base) VV5FS5-01T-061-04-CD 1
downwards. (2 position single) ∗ VFS5100-5FZ 3
(Manifold base) VV5FS5-10-061-04-CU 1
(2 position single) ∗ VFS5110-5E 3
(2 position double) ∗ VFS5210-5E 2
∗ Refer to Best Pneumatics Vol. 6 for Exhaust (Exhaust cleaner) AMC810-14 1
Cleaner details.
the solenoid valve.
1212
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1213

Manifold with Exhaust Cleaner — Plug-in type, Non plug-in type

CU
U side
Direct manual
override
Pilot valve
manual override
D side
SJ
SY
SV
Stations
SYJ
D side
SZ
Exhaust cleaner
(Option)
VP4
D side mounting S0700
U side
VQ
Electrical entry U side mounting VQ4
VQ5
( ): 2(B)/4(A) port Rc 3/4
VQC

CU
VQZ
SQ
Direct manual U side
override
VFS
Pilot valve
manual override
D side
VFR
VQ7
Stations
D side
≅
Exhaust cleaner U side

(Option)
D side mounting
U side mounting
n: Stations
Stations
L 2 3 4 5 6 7 8 9 10
Formula
( ): 2(B)/4(A) port Rc 3/4
L1 194 245 296 347 398 449 500 551 602 L1 = 51 x n + 92
L2 212 263 314 365 416 467 518 569 620 L2 = 51 x n + 110
1213
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1214
Made to Order
How to Order
VV5FS5 01S U V 08 1 04 X199

Thread type
Plug-in type
Nil Rc
Serial transmission kit
N NPT
T NPTF
SI unit mounting position F G
D D side mounting
Stations
2 2 stations Port size
U U side mounting
10 10 stations 04 Rc 1/2
Note 1) Max. 10 stations. Add 1 station for serial unit mounting. 06 Rc 3/4 Rc 3/4
Note 2) Max. 10 Stations: For single and double mixed wiring. (No. of M Mixed
valves: 9) ∗ For bottom ported: Rc 1/8 only
Max. 9 stations: For standard double wiring (No. of valves: 8)
SI unit can be mounted on Combination symbol

either U or D side. Piping
Port specification
Applicable models Symbol specification
SI unit part no. P R1, R2 A, B
Symbol Description
For U side mouning For D side mouning 1 Side
Common Common
0 — — Without SI unit 2∗ Bottom
F1 EX123U-SUW1 EX123D-SUW1 NKE Corporation: Uni-wire System (16 outputs) ∗ Option
H EX123U-SUH1 EX123D-SUH1 NKE Corporation: Uni-wire H System (16 outputs)
Q EX124U-SDN1 EX124D-SDN1 DevieNet (2 power supply systems) Refer to pages 1653 to 1655 for
R1 EX124U-SCS1 EX124D-SCS1 OMRON Corporation: CompoBus/S (16 outputs) (2 power supply systems) the details of the EX123/124
R2 EX124U-SCS2 EX124D-SCS2 OMRON Corporation: CompoBus/S (8 outputs) (2 power supply systems) integrated type (for output) serial
V EX124U-SMJ1 EX124D-SMJ1 CC-Link (2 power supply systems) transmission system.

SI unit output no.
SI unit output no.
1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 10
Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11
How to Order Valves
VFS5 00 5F
Nil None
Nil Internal pilot
R External pilot
Coil rated voltage
Nil None
24 VDC
1214
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1215

VV5FS5-01S Mounting position Model - Stations Symbol - Port size Thread -X199
4 x Rc 1/8
SI unit
L2
2 x G 1 1/4 L1
Electrical entry 2 x Rc 1/8
SMC SMC SMC

SJ
SMC SMC
PE
SY
103.5
EA
103
A A
A A A
61
60
SMC
174.5
SV
SERIAL UNIT
37
FG
244
200
240
DG
STATION NO.
DB
223
207
SMC
DA
P
B RATE
24G
MODEL
RD
LRUN
+24V
37
SD
PW
SYJ
43
SV
LERR.
0V
60
24V
(SI No.EX124U-SMJ1)
72
111.5
B B
B B B
PE
SZ
EB
11
SMC
31
.5
SMC SMC SMC
R5
50
VP4
67
81
D side n U side
S0700
Stations 1 2 3 4 5 6 7
6 x Rc 3/4
VQ
Manual override
1(P), 5(R1), 3(R2) port
VQ4
SMC VQ5
24(23)
VQC
179
167
B B B B B B B
132
70(71.5)
VQZ
91
20
SQ
A A A A A A A
3(1) 3(1) 48.5

2n x Rc 1/2, 3/4
80.5 51 4(A), 2(B) port
EX123: 2 x G 1/2
VFS
EX124: 4 x G 1/2
Electrical entry VFR
∗ Use a dripproof plug assembly (AXT100- ( ): 2(B)/4(B) port Rc 3/4
B04A) for the unused conduit port (G 1/2). VQ7
Formula L1 = 51n + 92 L2 = 51n + 110

L n 2 3 4 5 6 7 8 9 10
L1 194 245 296 347 398 449 500 551 602
L2 212 263 314 365 416 467 518 569 620
1215
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1216
Series VFS5000

Individual
SUP
spacer
Double check
spacer

Interface
Individual regulator
EXH
spacer
SUP block plate: AXT628-12A Interface regulator/A port regulation:

EXH block plate: AXT512-14-1A ARBF5050-00-A-1 (Plug-in type)
Interface
regulator
Block plate
mounting position
( ) : SUP block plate

Interface
regulator
Throttle valve
spacer
1216
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1217

End plate (D side)

SJ
SY
SV
SYJ
SZ
VP4
S0700
Manifold
block VQ
VQ4
VQ5
VQC
End plate (U side) VQZ
SQ
VFS
VFR
Replacement Parts
No. Description Material Part no. VQ7
1 Connection fitting A Steel plate AXT628-6-1A
2 Connection fitting B Steel plate AXT628-6-2 • For increasing the manifold bases, please order the manifold
3 O-ring NBR AS568-006 block assembly number of the principal part assembly !0.
4 O-ring NBR AS568-010 For plug-in type: The manifold base with terminal stand
5 O-ring NBR AS568-013
(integrated with a junction cover) is required with the o junction
cover assembly.
8 Terminal assembly — AXT628-5-1A
For 01T VVFS5000-4A- Stations
For 01SU AZ738-31A- Stations
Replacement Parts: Sub Assembly Note) Manifold Base/Construction: Plug-in type with terminal block.
Manifold block !0, Metal joint q, w,
VVFS5000-1A-1- 04
06 Plug-in type
10 Manifold block assembly Terminal i, O-ring e, r, t, y, u, Receptacle assembly
VVFS5000-1A-2- 04
06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type
VVFS5000-2A-1 End plate (U) !1, Metal joint q, w Plug-in type
11 End plate (U side) assembly
VVFS5000-2A-2 End plate (U) !1, Metal joint q, w Non plug-in type
VVFS5000-3A-1 End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u Plug-in type
12 End plate (D side) assembly
VVFS5000-3A-2 End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type
1217
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1218

Series VFS6000
Model
Model Flow characteristics Max.
(1)
(2)
Port (3)
Type of 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Mass
size cycle time (kg)
actuation Plug-in Non plug-in C C (ms)
34
2 position
Single VFS6100 VFS6110 29 0.10 6.8 38 0.10 9.0 180 160 or less 2.5
1
34
Double VFS6200 VFS6210 29 0.10 6.8 38 0.10 9.0 180 60 or less 2.75
1
Note 1) Based on JIS B 8375-1981 (once per 30 days) for the min. operating frequency.
Note 3) The figures in the above list are for without sub-plate. In case of with sub-plate, add 1.65 kg for Rc 3/4 and 1.5 kg for RC 1 respectively.
Note 5) The flow characteristics is for the port size Rc 4/3.

Low power consumption: 1.8 W DC
Plug-in and non plug-in Pilot valve manual override Non-locking push type (Flush)
Enclosure Type E: Dustproof (Level 0), Type F: Dripproof (Level 2), Type D: Splashproof (Level 4) (4)

AC
(Power consumption) Holding 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz
Electrical entry
JIS Symbol axial direction and at the right angles to the main valve and armature.
2 position (Values at the initial period)
Single Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.
Double Pilot type External pilot Note)
Manual override Main valve Direct manual override
110 to 120, 220, 240 VAC (50 Hz/60 Hz)
Coil rated voltage
12, 100 VDC
Option With light/surge voltage suppressor, Non-rotating DIN terminal
Pilot pressure: 0.1 to 1.0 MPa
1218
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1219

How to Order
Porting Port size
specifications Nil Without sub-plate
Nil Side ported 06 Rc 3 4
10 Rc 1
Body type Electrical entry
O: Plug-in type F: Plug-in type Thread type
sub-plate conduit terminal Nil Rc
N∗ NPT
T∗ NPTF
F∗ G SJ
∗ Option
SY
SV
Plug-in VFS6 1 0 0 5 F Z 10 SYJ
SZ
Non plug-in VFS6 1 1 0 5 D Z 10 VP4
Option S0700
Nil None
Z With light/surge voltage suppressor
VQ
Electrical entry
Symbol
E: Grommet terminal D: DIN terminal
VQ4
2 position single
1 VQ5
2 position double VQC

2
VQZ
Body type Coil rated voltage

SQ
1: Non plug-in type 1 100 VAC, 50/60 Hz
sub-plate 2 200 VAC, 50/60 Hz
VFS
3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz VFR
5 24 VDC
6∗ 12 VDC VQ7
7∗ 240 VAC, 50/60 Hz
9∗ Other
∗ Option
Body Option Pilot type

0 Standard Nil Internal pilot
1∗ Direct manual override R∗ External pilot

SF4 1 F 22
Coil rated voltage
1 100 VAC, 50/60 Hz
2 200 VAC, 50/60 Hz
3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz
5 24 VDC
6∗ 12 VDC
7∗ 240 VAC, 50/60 Hz
9∗ Other
∗ Option
∗ Refer to page 1224
1219
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1220
Series VFS6000

Sizing Program.
Bore size
Series CS1/CS2
Average Pressure 0.5 MPa
Series speed Load factor 50%
(mm/s) Stroke 300 mm
ø125 ø140 ø160 ø180 ø200 ø250 ø300
800 Perpendicular,
600 Horizontal
500 actuation
VFS6100-10 400
300
200
100
0
∗ It is when the cylinder is extending that is meter-out controlled by speed controller which is directly
connected with cylinder, and its needle valve with being fully open.
∗ The average velocity of the cylinder is what the stroke is divided by the total stroke time.
Conditions
Series CS1/CS2
Tube bore x Length SGP25A x 1 m
VFS6100-10 Speed controller AS600-10
Silencer AN600-10
Construction

06
Non plug-in VFS6000-S- 06
10
2 Sub-plate Aluminum die-casted Platinum silver
Spool/Sleeve ∗ Mounting bolt and gasket are not included.
3 Stainless steel —
4 Adapter plate Aluminum die-casted Black
5 End plate Aluminum die-casted Black
6 Resin —
Sub-plate Assembly (For External Pilot) Part No.
Piston
01
7 Junction cover Resin — Plug-in VFS6000-P-R 02
01
8 Light cover Resin — Non plug-in VFS6000-S-R 02
10 Gasket NBR —
Part no. for mounting bolt and gasket
BG-VFS6000
1220
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1221

Plug-in — 2 Position single/Double

SJ
SY

4 x ø9 mounting hole SV
Solenoid valve mounting bolt
(Hexagon socket head cap screw)
with SW SYJ
Light window (FZ)
SZ
VP4
S0700
VQ
(A, B port)
VQ4
VQ5
G 1/2 electrical entry Rc 1/8 external pilot port
2 x Rc 1/8 pilot EXH port (VFS6100R) VQC
VQZ
2 position double: VFS6200-F
SQ
VFS
VFR
VQ7

Light window (FZ)
4 x M8 x 80 with SW
(A, B port)

Rc 1/8 external pilot port
2 x Rc 1/8 pilot EXH port (VFS6200R)
1221
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1222
Series VFS6000
Non Plug-in — 2 Position single/Double

Light window (EZ, DZ)
Pilot valve manual override Solenoid valve mounting bolt
4 x M8 x 80 with SW
ø8 to ø10
(A, B port)
external pilot port
2 x Rc 1/8 pilot EXH port (VFS6110R)
2 position double: VFS6210-E, VFS6210-D

Light window (EZ, DZ)
4 x M8 x 80 with SW
ø8 to ø10
(A, B port)
2 x Rc 1/8 pilot EXH port Rc 1/8 external pilot port

(VFS6210R)
1222
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1223
Series VFS
Specific Product Precautions 1
Be sure to read before handling.
Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port
Solenoid Valve Precautions.
Caution
Light/Surge Voltage Suppressor, Electrical Entry Single unit
Body Ported
Series VFS1000/2000/3000 Base Mounted Series VFS2000
Exchange of pilot valve (Voltage exchange)
Light/Surge Voltage Suppressor Light/Surge Voltage Suppressor • When changing rated voltage and electrical
AC and 100 VDC With indicator light
• In the case of surge voltage suppressor, entry etc., pilot valve assembly can be
Terminal no. 1 (+) surge voltage absorption device ZNR is changed. But in case of a plug-in type with
attached to AC power. light/surge voltage suppressor, pilot valve SJ
Single AC and 100 VDC assembly cannot be changed for changing
Varistor With indicator light
Lead wire, red rated voltage. SY
Terminal no. 2 (–) With indicator light Pilot valve assembly
B side Terminal no. 1 (+) A side Single
Varistor SV
Double Varistor Varistor Black With indicator light Pilot valve assembly
Terminal no. 2 (–) Terminal no. 2 (–) Double

B side lead wire, brown Red A side SYJ
24 VDC or less
Terminal no. 1 +(–)
With indicator light Varistor Varistor SZ
White Black
Varistor 24 VDC or less
Single
Terminal no. 1 +(–)
With indicator light
Electrical Connection VP4
Varistor
Terminal no. 2 –(+) Single Single unit/Plug-in type sub-plate: T
Note) There is no polarity (+, –).
Conduit terminal (With terminal block) S0700
B side Terminal no. 1 +(–)
With indicator light Terminal no. 1 +(–) A side Terminal no. 2 –(+)
• If the junction cover (1) of the sub-plate is
Varistor Varistor
Note) There is no polarity (+, –). removed, you can see the plug-in type VQ
Double B side terminal no. 1 +(–)
terminal block (2) (part no. NVF2000-27A-
With indicator light 1) mounted inside the sub-plate.
Terminal no. 1 +(–) A side
The following markings are on the terminal VQ4
Terminal no. 2 –(+) With indicator light Varistor Varistor
Note) There is no polarity (+, –). Terminal no. 2 –(+) Double block board. Connect with corresponding
• Type G: Lead wire comes directly from the
power side. VQ5
solenoid part. Connect it with the power Terminal no. 2 –(+) With indicator light
Description Solenoid A side Solenoid B side
source. Grommet with DC voltage surge Note) There is no polarity (+, –). Terminal no. 2 –(+) Terminal block
A B
VQC
voltage suppressor has polarity. Connect marking
• Type G: Use lead wire from solenoid to
red lead wire to + (positive) side and black
to – (negative) side.
connect with power side. • There is no polarity.
• When ground wiring and COM wiring are
VQZ
Grommet with DC voltage surge voltage
Surge voltage suppressor suppressor has polarity. Connect red lead required, please specify separately.
DC AC wire to + (positive) side and black to • Applicable terminal: 1.25-3, 1.25-3S, 1.25Y- SQ
Red + – (negative) side. 3N, 1.25Y-3S
Varistor Surge voltage suppressor VFS
(1) (2)
DC AC
Black –
Red + VFR
Wiring Varistor
In the case of DIN terminal and terminal Black –
VQ7
block (with indicator light/surge voltage
suppressor), the interior wiring is shown With light/surge
below. voltage suppressor
Applicable terminal: 1.25-
With DIN With terminal
3, 1.25-3S, 1.25Y-3N, Single unit/Non plug-in type sub-plate: G, E, T, D
terminal block block
1.25Y-3S, but in the case • Type G: Use lead wire from solenoid to
of with DIN terminal connect with power side.
block, is not a terminal
structure. • Type E, T, D: In the case of a DIN terminal
and terminal block (with light/surge voltage
Note) There is no polarity. suppressor), the interior wiring is shown
Plug-in type Non plug-in type below. Connect with corresponding power
Changing Direction of DIN Terminal/Cable Entry side.
To change direction of DIN How to Exchange
terminal retaining screw, Solenoid valve With DIN With terminal Applicable terminal: 1.25-
pull off outer cover, rotate • Loosen 3 set screws (hexagonal socket head terminal block block 3, 1.25-3S, 1.25Y-3N,
connector board through cap screw M3 x 31) and pull solenoid valve 1.25Y-3S, but in the case
out vertically, otherwise it may cause damage of with DIN connector
180°. Replace cover and board, is not a terminal
to the solenoid valve. Never remove a valve at
tighten screw. an angle.
structure.
Tightening torque for
• When mounting terminal: 0.6 N·m
Changing Direction of Electrical Entry and Manual Override solenoid valve onto
Loosen the set screw (M3–2 pcs.), take out the base, plug pin Note) There is no polarity.
assembly (base side)
pilot operator, turn solenoid valve 180° into receptacle
degrees to change the direction of lead wire assembly (body-side)
Receptacle assembly Changing Direction of DIN Terminal/Cable Entry
and manual override. (Possible on Series vertically. • Change of the electrical entry of DIN
VFS1000 only.) type connector cable
Unscrew retaining screw, pull off outer
cover, rotate connector board through
Manual position
180°. Replace cover and tighten screw.
Applicable cable: O.D. ø6 to ø8.
1223
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1224
Series VFS
Caution
Light/Surge Voltage Suppressor, Electrical Entry Single unit
Base Mounted Series VFS3000/4000/5000/6000
Light/Surge Voltage Suppressor Lead Wire Connection
In the case of surge voltage suppressor, DIN terminal block type Plug-in type (With terminal)
surge voltage absorption element is • Male pin terminal of DIN terminal block • If the junction cover (1) of the sub-plate is
attached to terminal block on body area. board of solenoid valve and wires as removed, you can see the plug-in type terminal
100 VAC/DC or more shown below. Connect to corresponding block (2) mounted inside the sub-plate.
Light/Surge voltage terminal block on the connector. (2) (1)
absorption element SOL
24 VDC or less
SOL
DIN terminal (Wiring)
Note) There is no polarity. Ground
1 A side
How to Exchange 2 B side • The following markings are on the terminal
Solenoid valve 3 COM block. Connect with corresponding power
• Loosen set screw and take solenoid valve Ground side.
out vertically, otherwise it may cause • There is no polarity. Solenoid A side Solenoid B side
damage to the solenoid valve. Never Terminal block A B
remove a valve at an angle. 100 VAC/DC or more
marking +– +–
• When mounting solenoid valve onto the
• Applicable terminal:
base, plug pin assembly (base side) into Varistor VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N,
receptacle assembly (body side) vertically. Single
1.25Y-3S
With indicator light VFS4000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M
VFS5000: 1.25-4, 1.25-4M
VFS6000: 1.25-3.5M, 1.25Y-3L, 1.25-3M
Varistor Varistor • There is no polarity.
Double • Tightening torque for terminal: 0.6 N·m
With indicator light
Non plug-in type (With terminal)
• Remove cover (1), over terminal block (2)
Pilot valve 24 VDC or less attached to the inside of body. Connect
• When changing the rated voltage, electrical Single with corresponding power side. For a type
entry, etc., pilot valve assembly can be ex- with indicator light and surge voltage
Varistor
changed easily since this is plug-in type. suppressor, pull out the light and surge
Then, when changing the rated voltage voltage suppressor substrate (3) in a
with indicator light/surge voltage suppres- With indicator light straight direction and then connect them.
sor, change of indi- (1)
cator light/surge
voltage suppressor Varistor Varistor
Double (3)
substrate is also
needed. So, order With indicator light
(2)
together with pilot
valve assembly.
• Heavy-duty cord
VFS3000/4000/5000 Applicable cable O. D.: ø8 to ø10
• Applicable terminal
Applicable terminal on block board: 3
Pilot cover (kinds)
1.25Y-3L, 1.25-3.5S, 1.25-4M A side B side
• Connector/Clamping torque
Set screw 0.6 N·m
Terminal screw 0.6 N·m A side B side
Pilot valve assembly
• Incorrect common (DIN terminal no. 3)
Mounting screw causes damage on power side circuit.
VFS6000 A side B side
Light/Surge Voltage Suppressor Substrate Part No. • Applicable terminal:

VFS3000 VFS3000-10A- VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N,
100V or more VF4000-9A- 1.25Y-3S
VFS4000
24V or less VF4000-9B- VFS4000/5000/6000: 1.25-3.5M,
100V or more AXT627-7A- 1.25Y-3L,
VFS5000 1.25Y-3M
24V or less AXT627-7B-
100V or more VF4000-9A- • There is no polarity.
VFS6000 • Tightening torque for terminal: 0.6 N·m
24V or less VF4000-9B-
-: Coil rated voltage Symbol: Refer to below.
1: 100 to 120 V 6: 12 V
2: 200 to 220 V 7: 240 V
1224 5: 24 V
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1225
Series VFS
Caution Interface Regulator Specifications
Maintenance Interface regulator ARBF2000 ARBF3050 ARBF4050 ARBF5050
(3)
Applicable solenoid valve series VFS2000 VFS3000 VFS4000 VFS5000

1. A lot of carbon powder and oil waste Regulating port P A B P A B P A B P
from air sources (mostly from Proof pressure 1.5 MPa
compressor) entering into the valve Maximum operating pressure 1.0 MPa
sometimes can lead to increased Set pressure range (1) 0.05 to 0.83 MPa 0.1 to 0.83 MPa
sliding resistance at the switching spool Ambient and fluid temperature –5 to 60°C (No freezing)
and cause valve malfunction. Port size for connection of pressure gauge M5 x 0.8 Rc 1/8
In the worst case, spool can adhere to Weight (kg) 0.16 0.46 0.72 0.83
the valve. Therefore, supply air should Effective area at supply side (mm2) (2) P → A 5.5 21 18.5 11 35 31 26 44 38 32 SJ
be kept clean. S at P1 = 0.7 MPa, P2 = 0.5 MPa P→B 5.1 18.5 22 12 31 31 24 38 40 31
Also, if it is left for a long time exposed Effective area at exhaust side (mm2) (2) A → EA 12 40 55 90 SY
to an inferior quality of air under SUP S at P2 = 0.5 MPa B → EB 11 36 45 77
pressure applied, carbon powders and Note 1) Set within the operating pressure range of solenoid valve. SV
oil wastes in the compressed air will be Note 2) Synthesized effective area with solenoid valve 2 position single type.
accumulated in the clearance of the Note 3) • Operate an interface regulator only by applying pressure from the “P” port of the base, except
spool and sleeve and can cause the when using it as a reverse pressure valve. SYJ
• To combine a pressure center valve and the A and B port pressure reduction of an interface
spool to adhere to the valve. regulator, use the ARBF3000, 4000, or 5000 model.
The remedy for this case is to check • To combine a reverse pressure valve and an interface regulator, use the ARBF3000, 4000, or 5000 SZ
the compressor lubrication oil and find model. Furthermore, the P port pressure reduction cannot be used for the reverse pressure valve.
• When combining a double check valve and an interface regulator, use a manifold or sub-plate as a
out the least oxidizing compressor
basis, and stack them in the following order; the perfect spacer → the interface regulator → the valve. VP4
lubrication oil. • When a closed center valve is combined with the interface regulator's A, B port regulation, note
Meanwhile, a high filtration Mist
Separator (Series AM) installed on the
that it cannot be used for intermediate stops of a cylinder because there is leakage from relief port
on the regulator.
S0700
back of regular filter (Series AF) can Flow Characteristics (P → A) (Conditions: Inlet pressure 0.7 MPa. when 2 position solenoid
prevent foreign particles from entering
valve is mounted.) VQ
into the valve. ARBF2000-00-P
JIS Symbol
Besides, as lubricant for compressors, Inlet pressure 0.7 MPa
VQ4
Outlet pressure (MPa)
Faircoal A-80 (Nippon Mitsubishi Oil
Corp.), Dafney CSS55, CS49 (Idemitsu VQ5
Kosan Co., Ltd), etc. are commercially
available on the market.
2. When disassembling and re- B port
VQC
assembling, please ensure that all regulation
P port
components are in proper positions. regulation A port
VQZ
Prevent gaskets from slipping, and regulation Flow rate (l/min (ANR))
clamp bolts down equally.
ARBF3050-00-P ARBF3050-00-A
SQ
Use torques listed below when
Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa
mounting pilot valve assemblies and VFS
solenoid valve bodies.

VFR
Pilot Valve Assembly: SF4--
Holding screw
VQ7
Proper tightening torque (N·m)
M3 0.45 to 0.6
Solenoid Valve Body Flow rate (l/min (ANR)) Flow rate (l/min (ANR))
Holding screw Proper tightening torque (N·m)
ARBF4050-00-P ARBF4050-00-A
M3 0.8 to 1.2
Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa
M4 1.4 to 2.5
M5 2.8 to 5
How to Calculate the Flow Rate

Refer to front matters 44 to 47 for How to
Calculate the Flow Rate.
Flow rate (l/min (ANR)) Flow rate (l/min (ANR))
ARBF5050-00-P ARBF5050-00-A
Flow rate (l/min (ANR)) Flow rate (l/min (ANR))
1225
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1226
Series VFS
Caution
Lead Wire Connection Manifold/Plug-in
Type 01 Insert Plug with Lead Wire Type 01 with Terminal Block
Series VFS2000 (Insert plug with lead wire is not available for Series VF3000, 4000, and 5000.) Series VFS2000
How to remove junction cover (Type 01) How to Use Insert Plug • Remove junction cover of manifold,
Turn the knob (2) of junction cover (1) on the • When removing insert plug (1) from exposing terminal block attached to the
manifold block side by hand or slotted manifold base, push the lever area (2) of manifold block. Lead wires from solenoid
screwdriver to the C → O direction inset plug downward with thumb and pull valve are connected with the terminals on
(counterclockwise) 90°. While holding the it together with the lead wire (3) outward. upper side of terminal block. (On the
knob and upper part of junction cover, pull terminal block, lead wire is connected with
outward to remove junction cover. both A and B sides of solenoid valve in
When reassembling, do the opposite. accordance with the corresponding
markings A and B on the block.) Connect
each lead wire of power side
(2) corresponding to respective solenoid valve
(2) on the lower terminal block.
VFS2000 has the marking + COM on the
(1)
(1) block board, but – COM specification is
also available.
Terminal block marking
Model A COM B
VFS2100 A side COM
VFS2200 A side COM B side
(3)
VFS2 34 00 A side COM B side
• Applicable terminal: 1.25-3, 1.25-3S,
Wiring • When placing the inset plug (1) into the 1.25Y-3N, 1.25Y-3S
The insert plug (1) is attached to the manifold base, push the lever area of • Plugging COM bridge (part no. AXT625-73:
manifold block and lead wire is plugged in inset plug with thumb and plug it in its 5 stations) in between each + COM on the
with valve side as shown in the following list. place in the receptacle housing (4) block board will make the specifications of
horizontally. all the stations + COM and enables you to
(Single solenoid: AXT624-52A-S-1
Double solenoid: AXT624-52A-D-1 ( After plugging, pull lead wire out a little bit
to ensure that insert plug is secure.
understand the wiring process.
Connect with corresponding power side. • There is no polarity.
• Tightening torque for terminal: 0.6 N·m
Power supply Valve model Solenoid A Solenoid B
AC Single solenoid Red, Black —
DC Double solenoid Red, Black Brown, White
(4)
∗ There is no polarity. Connection
∗ Lead wire length is 1 m. Marking
(1)
(1)
Series VFS3000
Model A COM B
VFS3100 A side COM
VFS3200 A side COM B side
3
VFS3 4 00 A side COM B side
1.25-3.5M, 1.25Y-3L, 1.25-3M
• VFS 3000 has the marking + COM on the
block board, but – COM specification is
also available.
Series VFS4000/5000
Model A+ A– B+ B–
VFS 45 100 A side A side
VFS 45 200 A side A side B side B side
VFS4 34 00
A side A side B side B side
VFS5 34 00
1.25-3.5M, 1.25Y-3L, 1.25Y-3M
1226
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1227
Series VFS
Caution
Lead Wire Connection Manifold/Plug-in
Type 01C Circular Connector Type 01F D-sub Connector
Series VFS2000/3000/4000/5000 Series VFS2000/3000/4000/5000

• Wire connection specifications • Wire connection specifications SJ
Lead wire for both solenoid A and B sides in manifold are Lead wire for both solenoid A and B sides in manifold are
connected to connector terminal as COM specifications. connected to connector terminal as COM specifications.
(n) SY
(3) (n)
Fig. (1) U side (2) (3)
(1) Fig. (2) U side (2)
(1)
SV
Station
Station
SYJ
D side
D side SZ
Applicable plug assembly (Option) Applicable plug assembly (Option)
VP4
S0700
Internal Wiring of Manifold Internal Wiring of Manifold
Standard
Connector terminal
Wiring with control unit
Connector terminal
Standard Wiring with control unit VQ
Connector terminal Connector terminal
Air release valve
D-sub connector
Multi-connector 1 Air release valve VQ4
Control unit
1 station station 1
Control unit
1 station station
Pressure switch
2 station
2 Connector
terminal no.
Pressure switch VQ5
station 2
2 station station
VQC
3 station 3 station
3 station 3 station
VQZ
4 station 4 station 4 station 4 station
SQ
Connector terminal no. 5 station 5 station 5 station 5 station
VFS
6 station 6 station
6 station 6 station
VFR
7 station
7 station 7 station 7 station
VQ7
Max. Max.
Max. Max. 8 stations 8 stations
8 stations 8 stations
Note 1) Maximum stations are 8. Note 1) Maximum stations are 8.

Note 2) There is no polarity. Note 2) There is no polarity.
Note 3) Indication of stations are one station from D side regardless of the Note 3) Indication of stations are one station from D side regardless of the
connector mounting side, D or U. connector mounting side, D or U.
Applicable Plug Assembly (Option) Applicable Plug Assembly (Option)
Assembly part no. Cable length Component parts Assembly part no. Cable length Component parts
VVFS2000-30A-1 1.5 m VVZS3000-21A-1 1.5 m
VVFS2000-30A-2 3m Plug 206837-1 1 pc. VVZS3000-21A-2 3m
VVFS2000-30A-3 5m Cable clamp 206138-1 1 pc. VVZS3000-21A-3 5m Plug: MIL standard D type
VVFS2000-30A-4 ∗ 7m Socket 66101-2 24 pcs. VVZS3000-21A-4 ∗ 8m connector
VVFS2000-30A-5 ∗ 10 m Cable VCTF 24 cores x 0.75 mm2 VVZS3000-21A-5 ∗ 10 m 25 terminals
VVFS2000-30A-6 ∗ 15 m made by Tyco Electronics AMP K.K. VVZS3000-21A-6 ∗ 15 m Cable: 25 cores wire x 0.3 mm2
VVFS2000-30A-7 ∗ 20 m VVZS3000-21A-7 ∗ 30 m
∗ Option VVZS3000-21A-8 ∗ 20 m
∗ Option
Cable Color List of Each Terminal No. Cable Color List of Each Terminal No.
Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13
Lead wire color Orange Orange Black Black Green Green Red Red Blue Blue Yellow Yellow Lead wire color Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange
Dot marking — Yes — Yes — Yes — Yes — Yes — Yes Dot marking — — — — — — — White Black Black Red Red Red
Terminal no. 13 14 15 16 17 18 19 20 21 22 23 24 Terminal no. 14 15 16 17 18 19 20 21 22 23 24 25

Lead wire color Brown Brown White White Pink Pink Gray Gray Sky blue Sky blue Light green Light green Lead wire color Yellow Pink Blue Purple Gray Orange Red Brown Pink Gray Black White
Dot marking — Yes — Yes — Yes — Yes — Yes — Yes Dot marking Black Black White — — Black White White Red Red White —
1227
2.66 S O L E N O I D V A LV E S
S E R I E S NVFS
S E R I E S NVFS 2000, 3000, 4000, 5000, 6000
5 P O R T P I L O T O P E R AT E D
B A S E -M O U N T E D / P L U G -I N T Y P E
Large Flow Capacity
Low Power Consumption
Long Life
Ease Maintenance
M a n y Va r i a t i o n s Av a i l a b l e
For further information, consult SMC Customer Service
M O D E L
NVFS2000 S Y M B O L S
Position Number Of Type Port Size Cv Response

Solenoid Plug-In (NPTF) Factor Time (ms)
Single NVFS2100 1/8 0.7 15 or less
2 Position 1/4 0.83
Double NVFS2200 1/8 0.7 13 or less
1/4 0.83
Closed NVFS2300 1/8 0.65 20 or less
Center 1/4 0.67
Exhaust NVFS2400 1/8 0.65 20 or less
3 Position Center 1/4 0.67
Pressure NVFS2500 1/8 0.65 20 or less
Center 1/4 0.67
Perfect NVFS2600 1/8 0.4 25 or less
(Double Check) 1/4 0.4
TECHNICAL TECHNICAL
SPECIFICATIONS SPECIFICATIONS
STANDARD OPTIONAL
Fluid Air and Inert Gas Pilot Type External Pilot Type
Max Operating Pressure 150 PSI (1MPa) Manual Override Pilot Operator Non Locking Push Type (Extended),
Min Operating 2 Position 15 PSI (0.1MPa) Lock Type (Tool), Lock Type (Lever)
Pressure 3 Position 22 PSI (0.15MPa) Voltage AC 100V50/60Hz, 200V50/60Hz
Valve Ambient & Fluid Temperature 14~140ºF (-10~60ºC) DC 6V, 48V, 100V
Lubrication Not Required Porting Bottom Ported Subplate
Pilot Operator Manual Override Non Locking Push Type (Flush) Option W/Indicator Light & Surge
Protection Construction Dust Proof Voltage Suppressor
Electrical Rated AC 110VAC50/60Hz, 220V50/60Hz, 24V50/60Hz
Voltage DC 12V, 24V
Allowable Voltage Range -15 ~ 10% Rated Voltage
Coil Insulation Class B or Equivalent
Apparent Power AC InRush 5.0VA/60Hz, 5.6VA/50Hz
(Power Consumption) Holding 2.3VA(1.5W)/60Hz, 3.4VA(2.1W)/50Hz
Power Consumption DC 1.8W
Electrical Entry Plug In Conduit Terminal (Base Access)
FOR FURTHER TECHNICAL

DETAILS ON THIS
PRODUCT, REQUEST
CATALOG REFERENCE
N233
S O L E N O I D V A LV E S 2.67
S E R I E S NVFS
HOW TO
O R D E R
NVFS2000
NVFS 2 00 F
PORT SIZE
POSITION - ……Without Subplate
1 ……2 Position Single 01T …1/8 NPTF
2 ……2 Position Double 02T …1/4 NPTF
3 ……3 Position Closed Center * Bottom Ported
4 ……3 Position Exhaust Center 1/8 NPTF Only
5 ……3 Position P re s s u re C e n t e r
6 ……3 Position Perfect
PORTING
- ……Side
*B …Bottom
Note) *1/8 NPTF Only
BODY TYPE
0 … … P l u g - I n Ty p e
P I L O T O P E R AT O R MANUAL OVERRIDE
- ……Internal - … … N o n L o c k i n g P u s h Ty p e ( F l u s h )
R … … E x t e r n a l ( S p e c i a l O rd e r ) * A … N o n L o c k i n g P u s h Ty p e ( E x t e n d e d )
B … … L o c k Ty p e ( S c re w Ty p e )
* C … L o c k Ty p e ( L e v e r )
V O LTA G E
1 … … 1 0 0 VA C ( S p e c i a l O rd e r ) N o t e ) * S p e c i a l O rd e r
2 … … 2 0 0 VA C ( S p e c i a l O rd e r )
3 … … 1 1 0 VA C
4 … … 2 2 0 VA c
OPTIONS
5 ……24VDC - ……None
6 ……12VDC Z ……With Indicator Light and
9 … … O t h e r s ( S p e c i a l O rd e r ) ELECTRICAL ENTRY S u r g e Vo l t a g e S u p p re s s o r
F … … T h ro u g h B a s e
HOW TO
O R D E R
MANIFOLD
SEE INSIDE FRONT COVER FOR FOR FURTHER TECHNICAL

DETAILS ON THIS
DETAILS OF YOUR LOCAL SALES OFFICE PRODUCT, REQUEST
CATALOG REFERENCE
N233
S E R I E S NVFS
HOW TO
O R D E R
MANIFOLD / OPTION PARTS A S S E M B LY

DETAILS ON THIS
PRODUCT, REQUEST
CATALOG REFERENCE
N233
S E R I E S NVFS
M O D E L

2 Position 3/8 2
3/8 2
Center 3/8 2
3 Position Center 3/8 2
Center 3/8 2
TECHNICAL TECHNICAL
STANDARD OPTIONAL
Max Operating Pressure 150 PSI (1MPa) Manual Override Main Valve Direct Manual Override Type
Min Operating Pressure 22 PSI (0.15MPa) Pilot Operator Non Locking Push Type (Extended),
Valve Ambient & Fluid Temperature 14~140ºF (-10~60ºC) Lock Type (Tool), Lock Type (Lever)
Lubrication Not Required Voltage AC 100V50/60Hz, 200V50/60Hz
Pilot Operator Manual Override Non Locking Push Type (Flush) DC 6V, 48V, 100V
Protection Construction Dust Proof Porting Bottom Ported Subplate
Rated AC 110VAC50/60Hz, 220V50/60Hz, 24V50/60Hz Option W/Indicator Light & Surge
Voltage DC 12V, 24V Voltage Suppressor
Electrical Apparent Power AC InRush 5.0VA/60Hz, 5.6VA/50Hz

DETAILS ON THIS
CATALOG REFERENCE
N233
S E R I E S NVFS
HOW TO
O R D E R
NVFS3000
NVFS 3 0 F
POSITION
PORT SIZE
1 ……2 Position Single
2 ……2 Position Double - ……Without Subplate
3 ……3 Position Closed Center 02T …1/4 NPTF
4 ……3 Position Exhaust Center 03T …3/8 NPTF*
5 ……3 Position P re s s u re C e n t e r * Not available for
6 ……3 Position Perfect Bottom Ported
PORTING
- ……Side
BODY TYPE *B …Bottom
0 … … P l u g - I n Ty p e Note) *1/8 NPTF Only
MANUAL OPTION
0 … … S t a n d a rd
1 … … S t d & D i re c t P I L O T O P E R AT O R MANUAL OVERRIDE
M a n u a l ( S p e c i a l O rd e r ) - ……Internal - … … N o n L o c k i n g P u s h Ty p e ( F l u s h )
V O LTA G E
3 … … 1 1 0 VA C
4 … … 2 2 0 VA c
OPTIONS
5 ……24VDC - ……None
HOW TO
O R D E R
MANIFOLD

DETAILS ON THIS
PRODUCT, REQUEST
CATALOG REFERENCE
N233
S E R I E S NVFS
HOW TO
O R D E R

DETAILS ON THIS
CATALOG REFERENCE
N233
S E R I E S NVFS
M O D E L

2 Position 1/2 6
1/2 3.6
Center 1/2 3
3 Position Center 1/2 3
Center 1/2 3.4
TECHNICAL TECHNICAL
STANDARD OPTIONAL
Min Operating 2 Position 15 PSI (0.1MPa) Pilot Operator Non Locking Push Type (Extended),
Pressure 3 Position 22 PSI (0.15MPa) Lock Type (Tool), Lock Type (Lever)
Valve Ambient & Fluid Temperature Note 1) 14~140ºF (-10~60ºC) Voltage AC 100V50/60Hz, 200V50/60Hz
Lubrication Note 2) Not Required DC 6V, 48V, 100V
Pilot Operator Manual Override Non Locking Push Type (Flush) Porting Bottom Ported Subplate
Protection Construction Dust Proof Option W/Indicator Light & Surge
Electrical Rated AC 110VAC50/60Hz, 220V50/60Hz, 24V50/60Hz Voltage Suppressor
Voltage DC 12V, 24V
Apparent Power AC InRush 5.0VA/60Hz, 5.6VA/50Hz
Note 1) Use Dry Air at Low Temperature

Note 2) Use Turbine Oil No 1 (ISOVG32), if lubricated

DETAILS ON THIS
PRODUCT, REQUEST
CATALOG REFERENCE
N233
S E R I E S NVFS
HOW TO
O R D E R
NVFS4000
NVFS 4 0 F
POSITION
PORT SIZE
1 ……2 Position Single
2 ……2 Position Double - ……Without Subplate
4 ……3 Position Exhaust Center * 0 4 T. . 1 / 2 N P T F
5 ……3 Position P re s s u re C e n t e r * EA, EB: 3/8 NPTF
6 ……3 Position Perfect Bottom Ported: 3/8 Only
PORTING
- ……Side
MANUAL OPTION
1 … … S t d & D i re c t P I L O T O P E R AT O R MANUAL OVERRIDE
M a n u a l ( S p e c i a l O rd e r )
- ……Internal - … … N o n L o c k i n g P u s h Ty p e ( F l u s h )
V O LTA G E
3 … … 1 1 0 VA C
4 … … 2 2 0 VA c
OPTIONS
5 ……24VDC - ……None
HOW TO
O R D E R
MANIFOLD

DETAILS ON THIS
CATALOG REFERENCE
N233
S E R I E S NVFS
HOW TO
O R D E R

DETAILS ON THIS
PRODUCT, REQUEST
CATALOG REFERENCE
N233
S E R I E S NVFS
M O D E L

3/8 4.4
3/4 5.7
2 Position 3/8 4.4
3/4 5.7
Closed 3/8 3.7
Center NVFS5300 1/2 4.6 55 or less
3/4 4.8
Exhaust 3/8 3.9
3 Position 3/4 5
Pressure 3/8 3.9
3/4 4.9
Perfect 3/8 2.2
(Double Check) NVFS5600 1/2 2.7 60 or less
3/4 2.8
TECHNICAL TECHNICAL
STANDARD OPTIONAL
Min Operating Pressure 15 PSI (0.15MPa) Pilot Operator Non Locking Push Type (Extended),
Valve Ambient & Fluid Temperature Note 1) 14~140ºF (-10~60ºC) Lock Type (Tool), Lock Type (Lever)
Lubrication Note 2) Not Required Voltage AC 100V50/60Hz, 200V50/60Hz
Pilot Operator Manual Override Non Locking Push Type (Flush) DC 6V, 48V, 100V
Protection Construction Dust Proof Porting Bottom Ported Subplate
Rated AC 110VAC50/60Hz, 220V50/60Hz, 24V50/60Hz Option W/Indicator Light & Surge
Voltage DC 12V, 24V Voltage Suppressor
Electrical Apparent Power AC InRush 5.0VA/60Hz, 5.6VA/50Hz
Note 1) Use Dry Air at Low Temperature

Note 2) Use Turbine Oil No 1 (ISOVG32), if lubricated

DETAILS ON THIS
PRODUCT, REQUEST
CATALOG REFERENCE
N233
S E R I E S NVFS
HOW TO
O R D E R
NVFS5000
NVFS 5 0 F
POSITION PORT SIZE
1 ……2 Position Single - ……Without Subplate
2 ……2 Position Double 03T …3/8 NPTF
4 ……3 Position Exhaust Center 06T …3/4 NPTF
5 ……3 Position P re s s u re C e n t e r
6 ……3 Position Perfect
PORTING
- ……Side
MANUAL OPTION
1 … … S t d & D i re c t
P I L O T O P E R AT O R MANUAL OVERRIDE
M a n u a l ( S p e c i a l O rd e r ) - ……Internal - … … N o n L o c k i n g P u s h Ty p e ( F l u s h )
V O LTA G E
3 … … 1 1 0 VA C
4 … … 2 2 0 VA c
OPTIONS
5 ……24VDC - ……None
HOW TO
O R D E R
MANIFOLD

DETAILS ON THIS
PRODUCT, REQUEST
CATALOG REFERENCE
N233
S E R I E S NVFS
HOW TO
O R D E R

DETAILS ON THIS
PRODUCT, REQUEST
CATALOG REFERENCE
N233

5 Port Pilot Operated Solenoid Valve Series Variations and Specifications

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5 Port Pilot Operated Solenoid Valve Series Variations and Specifications

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P1111-P1228-E.qxd 08.9.

2 2:52 PM Page 1111

5 Port Pilot Operated Solenoid Valve

(P.1114) 2 position double • Conduit terminal (TZ)

Plug-in With light/surge voltage VQ4

(Standard) • DC: There is polarity. push type

VFS2000 (P.1146) (P.1146) (P.1146) (P.1146)

VFS3000 (P.1168) (P.1168) (P.1168)

VFS4000 (P.1188) (P.1188) (P.1188)

VFS5000 (P.1208) (P.1208) (P.1208)

Bar Base Plug-in With terminal block

Pilot common EXH

Grommet terminal DIN terminal

∗ Bottom piping is available as an option.

Manifold Option Manifold Option Parts

With control unit

SUP/EXH block disk

Double check spacer

Dripproof Manifold (Equivalent to IP65)

Note) Made to Order Specifications

5 Port Pilot Operated Solenoid Valve

Compact yet provides a Standard Specifications

2 position 0.1 MPa

5 Port Pilot Operated Solenoid Valve

How to Order Pilot Valve Assembly

Cylinder Speed Chart

Conditions ∗ It is when the cylinder is extending that is meter-out controlled by

Closed center 3 position closed center/exhaust center/pressure center

5 Port Pilot Operated Solenoid Valve

2 Position Single — Grommet, Grommet terminal, Conduit terminal, DIN terminal

(Locking type) SYJ

Conduit terminal: VFS1120-T/TZ

Applicable heavy-duty code ( ): Y, YZ

2 x ø4.5 mounting hole

151 (3 position: 155.5)

(Lead wire length)

Grommet terminal: VFS1220-E/EZ VFS1320-E/EZ DIN terminal : VFS1220-D/DZ/Y/YZ

Conduit terminal: VFS1220-T/TZ VFS1320-T/TZ

With light/surge voltage

Keeps environmental air Port Specifications

Base model VQZ

Pilot common EXH

How to Order Manifold Assembly [Example]

Type 20 Manifold — Pilot individual exhaust: VV5FS1-20- Station 1-01

3 position Double Single ≅300

Formula for manifold weight M = 0.049n + 0.059 (kg) n: Station

Grommet terminal: E/EZ Conduit terminal: T/TZ DIN terminal: D/DZ/Y/YZ

Applicable heavy-duty cord

(With light/surge voltage suppressor: 82.5)

5 Port Pilot Operated Solenoid Valve

Type 30 Manifold — Pilot common exhaust: VV5FS1-30- Station 1-01

3 position Double Single ≅300

Formula for manifold weight M = 0.079n + 0.093 (kg) n: Station VQC

Grommet terminal: E/EZ Conduit terminal: T/TZ DIN terminal: D/DZ/Y/YZ

Pilot EXH port

5 Port Pilot Operated Solenoid Valve

Single VFS2120 VFS2130 1200 22 or less 0.26

Exhaust 18 3.2 0.25 0.79 3.4 0.26 0.82

Compact yet provides a Standard Specifications

Maximum operating pressure 1.0 MPa

Coil rated voltage

5 Port Pilot Operated Solenoid Valve

Light/Surge voltage suppressor VP4