Comprenhensive Audit on Ontrack

Item # Area Action Item

Chemical
Checking chemical supply tank condition
Supply Tank

Fluid Impurities Chemical

(Liquid/gas) Supply Tank & Ensure all fittings at chemical supply tank doesn’t contaminate the chemical
Tubings

Exhaust Checking the effictiveness of exhaust in Ontrack

System - Must be able to suck fumes in Ontrack

Corrosion
Complete checking on the corrosion inside the tools and the entire line
inside the tools

Tools Impurities
Verify if any contact exist between wafers and inside parts at tools
Parts inside the
- Checking transfer condition of wafers at chemical bath
tools
- Checking transfer condition of wafers at dryer and unloading area

Check the wafers condition after processing on

Wafers condition Unloading - dryness
- abnormal condition
 Pictures Due Date Status Remarks

Open

the chemical Fittings!A1 Closed

Open

ntire line Corrosion part'!A1 Open

ols
Contact pt'!A1 Open
area

Wfrs '!A1 The wafers is completely dry and

Closed
no visual of abnormalty found
Ontrack!A1

Findings

Label Area Picture Condition

The pump and the unit

1 SC1 Chemical supply Unit is clean

The pump is dirty and

2 SC2 Chemical supply Unit getting rusted

The surface area is

3 SC2 Chemical supply Unit dirty

4 SC2 Chemical supply Unit The screw is rusted

The tank surface is

5 SC2 Chemical supply Unit dirty

SC1 Chemical supply Unit

6 The partition is clean
(Supply Tank)
 SC1 Chemical supply Unit
6 (Supply Tank) The partition is clean

SC2 Chemical supply Unit

7 Dirty and rusted
(Supply Tank)

The Exhaust
8 The CDU System malfunction

Ontrack Brush Box Sc1, Check and verify the

9 SC2 ventilation exhaust
Findings
Commit
PIC Status Action Plan Remark
Date

- - -

Madavan 25-Jul Closed Clean the pump with IPA

Madavan 25-Jul Closed Clean the surface with IPA

Muz 26-Jul Closed Change the screw

Madavan 26-Jul Closed Clean the surface with IPA

- - -
 - - -

Madavan 26-Jul Closed Clean the surface with IPA

The suction will be normal once

Muz the scrubber start operating in
2 weeks time

The suction will be normal once

Muz the scrubber start operating in `
2 weeks time
Ontrack!A1

Findings

Label Area Picture Condition

The chemical fittings is

1 CDU Fittings clean is CDU unit

The chemical fittings is

2 Outside CDU units clean is CDU unit

Heater tank outside The chemical fittings is

3 Ontrack clean is CDU unit

Heater tank outside The chemical fittings is

4 Ontrack clean is CDU unit

Tube connecting chemicals The tube is fit and

5 at Ontrack clean

6
6
Action Plan Remark
Ontrack!A1

Findings

Label Area Picture Problem Statement

1 Front of tool Edge of tool corroded

Need
2 Beside loading area greasing/lubricant

White spot
3 Beside loading area contamination

Brownish powder
4 Beside processing area contamination

Brownish powder
5 Beside dryer contamination
 Brownish powder
5 Beside dryer contamination

Brownish powder
6 Beside dryer contamination

Brownish powder
7 Beside dryer contamination

The part changed to

8 Unloading area brown color

The part changed to

9 Unloading area brown color

The part changed to

10 Unloading area brown color
Findings

Action Plan PIC Commit Date Status Remark

Facilities will conduct PM Facilities will conduct PM on CR100.

on CR100. Area of focus Muz 26/7/13 Closed Area of focus will be Ontrack and
will be Ontrack and exhaust system
exhaust system

This will be done Lubricant is cannot be use in the

internally and need help JY 2/8/13 Open linear guide. Change to new bar.
from vendor to unlock the Waiting for vendor quotation
panel

Weekly wiping by CR100 Madavan 17/7/13 Closed

Tech

Weekly wiping by CR100 Madavan 17/7/13 Closed

Tech

Weekly wiping by CR100 Madavan 17/7/13 Closed

Tech
Weekly wiping by CR100 Madavan 17/7/13 Closed
Tech

Weekly wiping by CR100 Madavan 17/7/13 Closed

Tech

Weekly wiping by CR100 Madavan 17/7/13 Closed

Tech

Weekly wiping by CR100 Madavan 17/7/13 Closed

Tech

Weekly wiping by CR100 Madavan 17/7/13 Closed

Tech

Weekly wiping by CR100 Madavan 17/7/13 Closed

Tech
Ontrack!A1

Findings

Label Area Picture Condition

1 Loading Area Screws is rusted

The wafers didn’t have

2 SC2 bath any rough contact with
brush

The grip of roller is

3 SC2 bath firm and steady
rotation applied

The gap between the

4 SC1 bath brush sufficient

The grip of roller is not

5 SC1 bath straight but firm and
steady rotation applied

The flat sensor wyre is

6 SC1 bath not coated with PFA
 The flat sensor wyre is
6 SC1 bath not coated with PFA

The flat sensor

posistion is exactly at
middle. During DIW
7 SC1 bath high flow, the water
dripped from sensor to
the wafers surface

The screw at dryer is

8 Dryer rusted
Findings
Commit
PIC Status Action Plan Remark
Date

Change with hexalon screw

JY 2-Aug (vendor suggest - in the process Already Clean - no rusty part
of confirming the suitability)

- - -

- - -

- - -

- - -

JY 2-Aug Coat the wyre with PFA tube

JY 2-Aug Coat the wyre with PFA tube

Checked the materila of the

JY 2-Aug sensor and coat with PFA/Teflon

JY 2-Aug Change with teflon screw

Ontrack!A1

Findings

Wafers Picture Condition

Clean and no
1 abnormalities

Clean and no
2 abnormalities
Remark