APPLIED MATERIALS 0010-29990 VHP ROBOT HUB TEST FIXTURE 0020-56988 0041-

01869-003 AMAT

Unit's Specifics
Make: Applied Materials (AMAT)
Model: 0010-29990/ 0020-56988/ 0041-01869-003
Type: VHP Robot Hub Test Fixture

Tests and Observations

 Unit rotates as shown (watch video)

 Magnet is present as shown (watch video)

Note: You will receive the actual unit shown

Description
This unit is used and in overall good physical condition as shown with tests and observations
listed above. As we do not have the technical expertise to further test the unit, we are selling it on
an "AS IS BASIS".

Pneumatic valves are one of an array of components responsible for controlling the pressure,
rate, and amount of air as it moves through a pneumatic system.

A solenoid valve is an electromechanical device in which the solenoid uses an electric current to
generate a magnetic field and thereby operate a mechanism which regulates the opening of fluid
flow in a valve.
Electronic Valve Function: Valve function outlines the number of flow paths a valve has as well
as the positions of a valve. The flow paths or ports are referred to as ways in the valve function.
The number of positions is how many different positions that valve can be in. A 2-way 2 position
valve is known as a 2/2 valve. A 3-way 2 position valve is known as a 3/2 valve. A 4-way 2 position
valve is known as a 4/2 etc.

An isolation valve is a valve in a fluid handling system that stops the flow of process media to a
given location, usually for maintenance or safety purposes.

Throttling valves are a type of valve that can be used to start, stop and regulate the flow of fluid
through a rotodynamic pump. With the throttling valve control method, the pump runs
continuously, and a valve in the pump discharge line is opened or closed to adjust the flow to the
required value.

Slit Valves. Series XGT slit valve is suitable for the partition valve between the load lock
chamber and the transfer chamber, and between the transfer chamber and the process chamber
in semiconductor manufacturing equipment, etc.

A mass flow controller (MFC) is a device used to measure and control the flow
of liquids and gases.[1] A mass flow controller is designed and calibrated to control a specific type
of liquid or gas at a particular range of flow rates. The MFC can be given a setpoint from 0 to
100% of its full scale range but is typically operated in the 10 to 90% of full scale where the best
accuracy is achieved. The device will then control the rate of flow to the given setpoint. MFCs can
be either analog or digital. A digital flow controller is usually able to control more than one type of
fluid whereas an analog controller is limited to the fluid for which it was calibrated.
Safety Interlock Switches. Our Safety Interlock Switches are a means of safeguarding that
monitors the position of a guard or gate. You can use them to shut off power, control personnel
access and prevent a machine from starting when the guard is open.

 An interlock is a feature that makes the state of two mechanisms or functions mutually
dependent. It may be used to prevent undesired states in a finite-state machine, and may
consist of any electrical, electronic, or mechanical devices or systems. In most
applications, an interlock is used to help prevent a machine from harming its operator or
damaging itself by preventing one element from changing state due to the state of another
element, and vice versa. Elevators are equipped with an interlock that prevents the
moving elevator from opening its doors, and prevents the stationary elevator (with open
doors) from moving.

A gas panel is a term of art in the semiconductor equipment (tool) and semiconductor
processing industry. Engineers refer to the box that controls the gases to
a semiconductor processing chamber as a “gas panel.” One way to think about it is to consider
a system's gas panel to be its “control panel” for the gases.

Baratron® Capacitance Manometer: Baratron® capacitance manometers are usually stand-

alone transducers typically requiring a ±15 volt power supply and deliver a 0-10 volt pressure
signal that is directly proportional to pressure.

Baratron capacitance manometers measure true pressure (defined as force/unit area). This
means that the measurement is insensitive to the type of gas being mea sured. Other gauges,
such as Pirani, thermocouple and ion gauges, do not measure true pressure and therefore
their readings will be gas-type sensitive.

The electronics are located adjacent to the sensor. The signal conditioning circuitry is very
stable and produces a high level output. The electronics consist of a precision sine -wave
oscillator that drives the bridge circuit. An imbalance in the sensor electrode capacitance
produces a difference output that is amplified by the buffer. The offset, gain and linearity of
the output are adjusted by the zero, span and linearity potentiometers.
Adjustment pots are provided for zero, span and linearity. The span and linearity pots are
covered and should only be adjusted by trained operators when performing a calibration
where the transducer can be compared to a reference standard.

Scaling: A typical capacitance manometer's signal conditioning electronics will provide an

output varying from 0 to 10 volts with a linear relationship between output voltage and
pressure. As shown below, capacitance manometers are described by their Full Scale
pressure, that is, the pressure corresponding to 10 volts.

1000 Torr Full Scale 1 Torr Full Scale

10 V 1000 T 10 V 1T

1V 100 T 1V 0.1 T

0.1 V 10 T 0.1 V 0.01 T

From this it is apparent that, at pressures significantly below the Full Scale pressure, the
output voltage will fall to very low values. As a consequence of this, there is a resolution limit
which is typically 1 part in 100,000. Thus the resolution of a 1000 Torr Full Scale manometer
is 0.01 Torr, corresponding to an output of 0.1 mV.

Zeroing Procedure Preparation

Allow adequate warm up time noting the varying requirements for non-temperature regulated,
heated and low range transducers. If using a breakout connector, install the connector before
the warm up.

Ensure that the manometer is under vacuum and the pressure is at or below the maximum
zeroing pressure when actually making the zero adjustment (below).

Proper Zeroing Pressure?

0.1 Torr <1 x 10-6 Torr
1.0 Torr <1 x 10-5 Torr
10.0 Torr <1 x 10-4 Torr
100.0 Torr <1 x 10-3 Torr
1000.0 Torr <1 x 10-2 Torr

An MKS Baratron capacitance manometer may be zeroed using a power supply/display unit,
a Digital Volt Meter and breakout connector, or from the process tool's controller.

It is a good idea to log zero data to capture long-term performance of each unit.

Between the Baratron capacitance manometer's Full Scale rating and its resolution, we
define two pressure ranges over which the manometer will provide a useful (accurate and
repeatable) output:

 A Reading Range typically of 3.5 to 4 decades (depending on the model) where the
manometer is used for measurement (see chart)
 A Control Range typically of 2.5 decades (depending on the model) when the
manometer is used in a pressure control system with 50 mV minimum into the control
system. This narrower range helps to assure immunity from system noise.

Convectron Gauge:

The 275 Granville Phillips convectron pressure measurement gauge tube sensor is the
industry standard convection-enhanced Pirani gauge. The Granville Phillips 275
measures vacuum pressure from atmosphere to 1x10-4 Torr and are ideal for roughing
and foreline pressure measurement. It provides reliable fast response measurement, in
milliseconds rather than seconds as in the case with thermocouple-type gauges.
ION Gauge:
The hot-filament ionization gauge, sometimes called a hot-filament gauge or hot-cathode gauge,
is the most widely used low-pressure (vacuum) measuring device for the region from 10−3 to 10−10 Torr.
It is a triode, with the filament being the cathode.
A regulated electron current (typically 10 mA) is emitted from a heated filament. The electrons are
attracted to the helical grid by a DC potential of about +150 V. Most of the electrons pass through
the grid and collide with gas molecules in the enclosed volume, causing a fraction of them to be
ionized. The gas ions formed by the electron collisions are attracted to the central ion collector wire
by the negative voltage on the collector (typically −30 V). Ion currents are on the order of 1 mA/Pa.
This current is amplified and displayed by a high-gain differential amplifier/electrometer.
This ion current differs for different gases at the same pressure; that is, a hot-filament ionization
gauge is composition-dependent. Over a wide range of moleculardensity, however, the ion current
from a gas of constant composition is directly proportional to the molecular density of the gas in the
gauge.