Format No.

: LP 01
Issue No. : 01
Issue Date : 05.05.06

EASWARI ENGINEERING COLLEGE

Department of Electronics and Instrumentation Engineering
LESSON PLAN (June 2014– November 2014)

Subject Code : ET 7014 Degree / Branch : M.E / CIE

Subject Name :Application Of MEMS Technology Year/Sem : II / III
Total No. of Hrs given in syllabus : 45
Faculty : Mrs.R.Praveena Tutorial : NIL
Lecture : 45
Practical : NIL
Grand Total : 45
OBJECTIVES:
 To give an introductory knowledge about the properties of materials, microstructure and
fabrication methods.
 To give basic knowledge about the design and modeling of Electrostatic sensors and actuators.
 To give basic knowledge about the design and modeling of Thermal sensors and actuators.
 To provide basic knowledge about the fundamentals of piezoelectric sensors and actuators.
 To give exposure to MEMS applications and NEMS devices.

Sl. Topic No. of

Text/ Page Nos.
No. Hrs
Ref.
Books
Unit I: MEMS: Micro-Fabrication, materials and Electromechanical concepts

Objective: To give an introductory knowledge about micro fabrication.

To provide basic information about the silicon and other material based
fabrication processes.
To give adequate knowledge about the Electrical and Mechanical concepts.

1. Overview of micro fabrication 1 R1 47-63

Silicon and other material based fabrication

2. 1 R1 63-72
processes

Conductivity of semiconductors – semiconductor

3. materials, charge carrier concentration, conductivity 1 R1 85-92
and resistivity

4. Crystal planes and orientation 1 R1 93-95

Stress and Strain – Definition, Internal force

5. 1 R1 96-105
analysis, stress strain relation

Flexural beam bending analysis – Longitudinal strain

6. 1 R1 107-114
under pure bending, Deflection of beam

7. Torsional deflections 1 R1 118-119

8. Intrinsic stress 1 R1 120-123

 Resonant frequency and quality factor
9. 1 R1 125-128

Outcome: Students will be able to understand the basic concepts of MEMS and its
fabrication methods.
Unit II: Electrostatic Sensors And Actuation
Objective: To gain adequate knowledge about electrostatic principle.
To know how to design and fabricate electrostatic sensor and actuator.
To provide more information about the application of sensor and actuators.

Principle and material of electrostatic sensors and

10. actuators 2 R1 141-143

Design and fabrication of parallel plate capacitors as

11. 2 R1 143-145
electrostatic sensors

Design and fabrication of parallel plate capacitors as

12. 1 R1 170-171
electrostatic actuators

Equilibrium position of electrostatic actuator under

13. 1 R1 146-148
bias

14. Pull – In effect of parallel plate actuators 1 R1 149-151

Applications – Inertia sensor – Parallel plate

15. 1 R1 154-158
Capacitance accelerometer

Applications – Pressure sensor – Membrane Parallel

16. 1 R1 160-163
plate pressure sensor
Outcome: Students can practically implement the design and fabrication of
electrostatic sensors and actuators.

Unit III: Thermal Sensing And Actuation

Objective: To give an introductory knowledge about Computer Control Systems.
To provide basic information about the design and fabrication of
thermocouples.
To gain basic knowledge on thermal sensors and actuators.
To provide more information about the application of sensor and actuators.

Principle and material – Thermal sensors and

17. actuators based on thermal transfer and thermal 1 R1 190-198
expansion

18. Design and fabrication of thermal couples 1 R1 207-210

Thermal bimorph sensors – Principle and thermal

19. actuators with a single material 2 R1 198-206

20. Thermal resistor sensors 1 R1 210-212

Applications – Inertia sensor – Accelerometer based
21. on thermal transfer principle 2 R1 213-214

Applications- Infrared sensor- Bimetallic structure

22. 2 R1 228-230
for Infrared sensing
 Outcome: Students can practically implement the design and fabrication of Thermal
sensors and actuators.

Unit IV: Piezoelectric Sensing And Actuation

Objective: To give an introductory knowledge about piezoelectric effect.
To provide basic information about the properties of piezoelectric materials.
To give adequate knowledge about modeling of piezoelectric actuator.
To gain knowledge about the applications of piezoelectric sensors and
actuators.

Piezoelectric effect – direct effect and Inverse effect

23. 1 R1 283-287
of piezoelectriciry

24. Cantilever piezo electric actuator model 1 R1 287-288

Properties of piezoelectric materials – Quartz, PZT,

25. 1 R1 290-298
PVDF, ZnO and other materials
Applications – Inertia sensors – Cantilever
26. piezoelectric accelerometer 2 R1 299-300

Applications – Acoustic sensors – PZT piezoelectric

27. 2 R1 303-304
acoustic sensor
Applications – Flow sensor – Piezoelectric flow rate
28. 2 R1 307-309
sensor

Outcome: Students can practically implement the design and fabrication of Thermal
sensors and actuators.

Unit V: Case Studies

Objective: To understand the basic concepts of piezoresistive sensors and magnetic
actuators.
To gain basic information about the microfluidics applications.
To provide adequate knowledge about the medical applications.
To gain knowledge about the optical MEMS and NEMS devices.

Piezoresistive sensors – materials, Application- 248-252

29. 2 R1
Metal piezoresistive flow rate sensor 274-275

Magnetic actuation – magnetization, Magnetic 317-321

30. 1 R1
motor 332-334

Micro fluidics applications – Gas chromatography

31. 1 R1 506-507
channels
Micro fluidics applications – Electrophoresis in
32. microchannels 1 R1 507-509

33. Medical applications – Blood Pressure sensor 1 R1 526-530

 Optical MEMS – Interferometric Accelerometer,
34. Cantilever with optical interference position sensing 2 R1 350-355

35. NEMS Devices 1 Notes

Outcome: Students will be able to understand the applications of MEMS in all fields.

Total Hours 45
Content beyond syllabus
S.
TOPIC
No
1. Unit I – Most commonly encountered Materials used in MEMS.

2. Unit II – Tunneling Accelerometer

3. Unit III – Polymer MEMS

4. Unit IV – MAP sensor

5. Unit V – Bio-MEMS

Assignments
S. Date of Date of Return of
TOPIC
No Announcement Submission script
1. Questions from Unit I & Unit II 21.07.2014 28.07.2014 30.07.2014

2. Questions from Unit III & Unit IV 20.08.2014 27.08.2014 01.09.2014

3. Questions from Unit V 22.09.2014 29.09.2014 30.09.2014

REFERENCES:
1. Chang Liu, “Foundations of MEMS”, Pearson International Edition, 2006.
2. Marc Madou , “Fundamentals of microfabrication”,CRC Press, 1997.
3. Boston , “Micromachined Transducers Sourcebook”,WCB McGraw Hill, 1998.
4. M.H.Bao “Micromechanical transducers :Pressure sensors, accelerometers and
gyroscopes”, Elsevier, Newyork, 2000.
5. P. RaiChoudry“ MEMS and MOEMS Technology and Applications”, PHI, 2012.
6. Stephen D. Senturia, “ Microsystem Design”, Springer International Edition, 2011.

Prepared by: Approved by:

(R.Praveena) ( HOD /EIE)