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Assignment 14
Solution
(Autumn Semester 2010)
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Assignment 14
1.0E+00
1.0E-01
1.0E-02
1.0E-03
1.0E-04
C(x,t)/Cs
1.0E-05
1.0E-06
1.0E-07
1.0E-08
1.0E-09
1.0E-10
0 2 4 6 8 10
x/Sqrt(Dt)
Solution: To solve this problem the use of the plot between C(x,t)/Cs and
x / Dt can be made. From the problem definition, surface concentration Cs
=2 1020 cm-3 As the dopant impurity diffuses their concentration decreases,
thus the C(x,t) at which the dopant concentration will become the base
concentration, the point at which junction will form is equal to 1 1016 cm-3.
Thus,
C(x,t)/Cs = 1 1016 / 2 1020 = 0.5 10-4. It can seen from the complimentary error
function plot of Error! Reference source not found.(b), at C(x,t)/Cs = 0.5 10-4
the x-axis value i.e. x / 2 Dt 5
Also it is required that junction would form at 0.5 μm, x=0.5 μm. Therefore
Thus the product of Dt should be 6.25 (μm)2. One can go one step forward and
calculate the temperature and time of the diffusion. Note that there can be
several combination of the D and t would be possible that would give us the
same junction depth. The D contains the information about the temperature of
E
kT
the diffusion, which can be written in the following form; D Doe as given
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Assignment 14
in Eq. 7-4. If we know the Do (frequency factor) and the activation energy, E,
diffusion coefficient for given dopant at a given temperature can be obtained.
Example: In above example, consider the Do for P in Si 3.85 cm2/s and activation
energy, E, of P in Si is 3.076 eV. If the temperature of diffusion is fixed at 860oC,
what should be the time of diffusion in minutes in order to obtain the junction
depth of 0.5 μm.
Solution: It is given that Do=3.85 cm2/s and E=3. 076 eV, T=860+273 =1133 K.
E
kT
These values can be used in D Doe for calculation of diffusion coefficient.
We know that k, the Boltzmann constant is 1.3806 10-23 J/K or 8.617 10-5 eV/K.
3.076
8.617*10 5*1133
D 3.85 * e 8 10-14 cm2/s
Now from the last example we know that Dt = 0.0025 (μm)2=0.0025 (10-4)2 cm2.
Using the calculated value of D, we get the time t of diffusion in seconds = 1250
seconds.
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Assignment 14
isolation is done using plasma etching. ARC is done using PECVD where in SiH4
with NH3is used as precursor gas. Metal contact deposition is done using screen
printing. In order to diffuse the metal contact through ARC layer and form BSF at
the rear side, contact firing is done at the end. Firing temperature ranges in 700
to 800oC.
Following discussion in industrial solar cell process, introduction to thin film
technology is made. Particularly advantages of thin film technologies with Si
wafer based technologies are discussed. Thin film technologies usage less
material and can be cost effective. Thin film solar cell requires supporting
substrate, processes can be done at low temperature, cell can be monolithically
integrated, there is no limitation on the size of solar cells or modules, it is only
limited by the size of the tools.
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