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Fabrication
CONTENTS
IC Fabrication
What is IC ?
An integrated circuit-also called a microchip-semiconductor
formed during same time-it is light, has low power consumption, and is used to
STEP 2-------->MASKING
● To protect some area--when working on another area--called photolithography
● includes application of a photoresist film is applied on the wafer. The wafer is aligned to a mask using photo aligner.
● Then--exposed to UV CAUTION Before that the wafer must be aligned with the mask.
STEP 3------->ETCHING
● Removes material selectively from the surface of wafer to create patterns.
● Etching mask defines pattern -- protect material .
● Etching :
○ isotropic ::
■ In all directions
■ Generally wet etching
■ Time control difficult
■ liquid solvents for removing materials
○ anisotropic ::
■ In one direction
■ Generally Dry etching.
■ Use gases to remove materials
■ Faster
STEP 4------->
DOPING
● Atom with one less electron than silicon such as boron and wiith one electron greater such as phosphorous are introduced
● The P-type (boron) and N-type (phosphorous) are created to reflect their conducting characteristics
ATOMIC DIFFUSION
● p and n regions are created by adding dopants into the wafer -- heated at 1500-2200°F .
● Inert gas carries dopant chemical -- Dopant and gas passed through wafers and dopant get deposited on the wafer
ION IMPLANTATION
● dopant gas (phosphine or boron trichloride) ionized -- it provides a beam of high energy dopant ions to the specified regions of
wafer. It will penetrate the wafer.
● By altering the beam energy, it is possible to control the depth of penetration of dopants into the wafer. The beam current and
time of exposure is used to control the amount of dopant.
STEP 5------->
METALLIZATION
● create contact with silicon and to make interconnections on chip
● Thin layer of aluminum deposited over the whole wafer. Aluminium is selected -- good conductor, good mechanical bond with
silicon, low resistance contact and can be applied and patterned with single deposition and etching process.
● Between components, silicon dioxide used as insulator. ( chemical vapor deposition)--make contact pads, aluminum deposited.
● It is possible to fabricate PNP and NPN transistor in the same silicon substrate. To avoid damage and contamination of circuit,
final dielectric layer (passivation) is deposited. After that, the individual IC will be tested for electrical function.
What is BJT
The Bipolar junction transistor is a solid state device and in the BJTs the current flow in
two terminals, they are emitter and collector and the amount of current controlled by the
third terminal i.e. base terminal.
Advantages of BJT
● High driving capability
● High frequency operation
● Digital logic family has an emitter coupled logic used in BJTs as a digital switch
Application
Step 1 - IMPLANTATION OF BURIED LAYER(on
p-substrate)
SUBMITTED BY-
● BHAVYA KAPOOR
● BHAVIK MOHINDROO
● CHARANPREET SINGH