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Article

Journal of Intelligent Material Systems


and Structures
0(0) 1–8
Improved strain distribution of Ó The Author(s) 2013
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DOI: 10.1177/1045389X13476150

harvesting devices using H-shaped jim.sagepub.com

proof masses

Qing C Guan1, Bin Ju2, Jia W Xu2, Yong B Liu2 and Zhi H Feng2

Abstract
This article proposes a cantilever piezoelectric energy harvester consisted of an ordinary rectangular beam and an
H-shaped proof mass. The H-shaped proof mass comprises two detached metal blocks that can provide large rotary
inertia. A uniform strain distribution along the composite cantilever could be obtained by selecting an appropriate mass
ratio between the detached metal blocks and vibration mode. We also fabricated a prototype H-shaped energy harvest-
ing device. The result of the experiment done on the device is identical with both the theoretical and finite element
analyses.

Keywords
Energy harvesting, piezoelectric, smart sensors

Introduction rectifier, a power converter for conditioning, and load.


The cantilever beam has drawn significant interest
Low-power wireless sensors and portable electronics because of its simple mechanism in coupling the vibra-
have become widely used over the past decades. These tion source to the piezoelectric material (Cook-
electronics use electrochemical batteries as power Chennault et al., 2008; Goldschmidtboeing and Woias,
sources. Self-powered supply devices have drawn more 2008; Lee et al., 2009; Roundy et al., 2005; Roundy
and more interest as the environment has been sub- and Wright, 2004; Shen et al., 2006; Wood et al., 2005).
jected to unused ambient vibration energy. In addition, The most commonly used geometric configuration in
batteries exhibit disadvantages such as limited life span, piezoelectric energy harvesting is the rectangular canti-
limited energy density, and environmental damage lever beam (Figure 1(a)).
(Anton and Sodano, 2007). Numerous studies on the However, existing cantilever beam-based schemes do
use of ambient vibration as power source have been not produce a uniform strain distribution (with
conducted in recent years. maximum tolerable strain value) along the beam.
Mechanical vibrations can be converted into electri- Consequently, these schemes do not use the piezoelec-
cal energy by electromagnetic (Arnold, 2007; Poulin tric material to its fullest potential. A simple method to
et al., 2004), electrostatic (Mitcheson et al., 2004), and improve the strain distribution is to employ a nonpie-
piezoelectric (Priya, 2007; Sodano et al., 2004; Wood zoelectric extension (Shen et al., 2006). In this mechan-
et al., 2005) energy harvesting. Piezoelectric energy har- ism, the length of the substrate is longer than that of
vesting has received the most attention among the the piezoelectric material. Strain in the piezoelectric
aforementioned methods because of its structural sim-
plicity, high-voltage generation, and potential to oper- 1
Beijing Automation Control Equipment Institute, Beijing, China
ate without additional electrical power sources (Anton 2
Department of Precision Machinery and Precision Instrumentation,
and Sodano, 2007; Cook-Chennault et al., 2008). University of Science and Technology of China, Hefei, China
Direct connection between the load and the piezo-
electric material is not recommended in piezoelectric Corresponding author:
Yong B Liu, Department of Precision Machinery and Precision
energy harvesting. An efficient energy harvesting Instrumentation, University of Science and Technology of China, West
mechanism consists of a piezoelectric material bonded USTC Campus, Huangshan Road, Hefei, 230027, China.
to a cantilever beam, a voltage inversion circuitry, a Email: lyb@ustc.edu.cn

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2 Journal of Intelligent Material Systems and Structures 0(0)

Figure 1. Diagrams of (a) the classical cantilever and (b) the


curved L-shaped mass structure.
PZT: lead zirconate titanate.

material varies from a maximum value to a minimum


value (which is not zero any more but a rather large
value proportional to the length of the nonpiezoelectric
part). The longer the nonpiezoelectric extension, the
smoother the strain distribution. The strain distribution
becomes uniform only when the extension is infinitely
long.
Several studies focused on uniform strain distribu-
tion by optimizing the geometry of the piezoelectric
beam such as trapezoidal beam (Baker et al., 2005) and
nonconstant thickness beam (Mehraeen et al., 2010).
The strain distribution of the trapezoidal beam struc- Figure 2. (a) Outline, (b) top view, and (c) front view of the
ture has been improved to a certain extent. However, H-shaped mass structure.
the tapered beam (nonconstant thickness beam) suffers PZT: lead zirconate titanate.
from complicated manufacturing and low mechanical–
electrical coupling factor.
Structure evaluation
Xu et al. (2010) proposed a right-angle piezoelectric
cantilever with which a uniform strain distribution in Figure 2 illustrates an H-shaped mass piezoelectric
piezoelectric element can be obtained. Li et al. (2010) energy harvester, which comprises a rectangular com-
proposed a method that uses a curved L-shaped mass posite cantilever and an H-shaped proof mass. The
to improve power density (Figure 1(b)). This proposal composite cantilever is formed by bonding a piezoelec-
is anchored on rotary inertia to smoothen strain distri- tric plate to a titanium substrate layer. The H-shaped
bution. However, the structure is not optimal. proof mass uses two light and thin titanium plates to
This study presents a method of optimizing proof link two detached metal blocks. All titanium plates are
mass using rotary inertia to attain a uniform strain dis- characterized by the same thickness hs, and the thick-
tribution on the cantilever piezoelectric energy har- ness of the piezoelectric plate is represented by hp. The
vester. An H-shaped proof mass can generate a H-shaped structure has large rotary inertia for a given
bending moment at the tip of the cantilever by choos- mass. Therefore, the H-shaped proof mass can produce
ing an appropriate mass ratio between the detached an alternate bending moment at the tip of the compo-
metal blocks, thus improving significantly the strain site cantilever.
distribution along the cantilever. The proposed struc- Improved performance can be expected when all
ture, which can be miniaturized, is demonstrated by piezoelectric elements on the cantilever possess the same
theoretical calculation, finite element method (FEM), strain. The H-shaped mass piezoelectric energy har-
and experiments. vester, which is based on the curved L-shaped proof

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Guan et al. 3

mass cantilever structure, is proposed. This H-shaped


structure can achieve a uniform strain distribution. The
optimized shape of the proof mass, which is called the
H-shaped proof mass, applies pure rotary moment at
the end of the cantilever and results in a uniform strain
distribution in the composite cantilever and its piezo-
electric layer.

Modeling and theoretical analysis


This section presents the development of a mathemati-
cal model. The following discussion is based on the fol-
lowing assumptions: (1) The prototype is considered a
composite Euler–Bernoulli beam, (2) the lead zirconate
titanate (PZT) layer is perfectly bonded to the substrate
layer, and (3) the mass of the composite cantilever beam
is disregarded during the theoretical analysis.
Figure 3(a) shows the diagram of the simplified
model. y(x,t) represents the vertical deflection at loca-
tion x and time t in the coordinate system xoz located
on the base. Damping is disregarded to simplify the
analysis. The length of the ideal bar between the two
mass blocks is l2. The masses of the two mass blocks
are denoted as m1 and m2, and the length of the beam
is l1. This model is a two-order system.
According to the vibration theory of the beam, the
vertical deflection y(x,t) can be expressed as (Brissaud
et al., 2003)

yðx, tÞ = Y ð xÞb sinðvt + uÞ ð1Þ

Y ð xÞ = c1 cosðbxÞ + c2 sinðbxÞ
ð2Þ
+ c3 chðbxÞ + c4 shðbxÞ

where Y(x) is the principal mode, and b sin (vt + u) is


a vibration component of time. The constants b, c1, c2,
c3, and c4 are defined in terms of the amplitude of
the response to the excitation; v is the frequency of the
vibration; and u is the phase difference between the Figure 3. Diagrams of (a) the simplified model, (b) the first
vibration mode, and (c) the second mode.
excitation and the vibration response. b is given by
the relation b4 = (m=EIeq )v2 , where m is the mass per
unit length of the composite cantilever beam and EIeq
is the flexural rigidity of the beam. 
∂2 yðx, tÞ 
The boundary conditions at the fixed end of the can- EI
tilever are shown as ∂x2  x = l1
 2  
∂2 yðx, tÞ 2 ∂ ∂yðx, tÞ 
Y ð0Þ = Y 9ð0Þ = 0 ð3Þ = m2 l2 + m2 l2 2  x = l1 ð5Þ
∂t2 ∂t ∂x
The boundary conditions at the other end of the can- where u = ∂y(x, t)=∂x is the angular deflection of the
tilever are expressed as composite cantilever. Substituting equation (1) into
  equations (4) and (5) simplifies the conditions men-
∂ ∂2 yðx, tÞ  tioned earlier as
EI x=l
∂x ∂x2 1
 
2
∂ yðx, tÞ ∂2 ðl2 sin u  yðx, tÞÞ  EIY 90ðl1 Þ =v2 ðm1  lm2 ÞY ðl1 Þ ð6Þ
= m1  m2  x = l1 ð4Þ
∂t2 ∂t2
EIY 0ðl1 Þ = v2 m2 l2 ½Y ðl1 Þ  l2 Y 9ðl1 Þ ð7Þ

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4 Journal of Intelligent Material Systems and Structures 0(0)

Table 1. Parameters of the model

l0 (mm) b0 (mm) lbend (mm) lbase (mm) b (mm) lmass (mm) hp (mm) hs (mm) m1 (g) m2 (g)

81 20 45 15 14 8 0.5 0.8 36.9 18.8

where l = (l2 Y 9(l1 )=Y (l1 ))  1. The frequency equation Table 2. Properties of the materials
and the principal mode can be obtained with the
boundary conditions (3), (6), and (7). However, to get PZT Piezoelectric coefficient, e33 14.1 C/m2
Piezoelectric coefficient, e31 –4.1 C/m2
the resolution entails complicated calculations. Thus, Dielectric constant, e33/e0 659.7
only part of the calculation is presented in Appendix 1. Young’s modulus, cE11 7.9 3 1010 N/m2
The frequency of the first mode is calculated by theore- Density, rp 7500 kg/m3
tical analysis for comparison with the result obtained Titanium Young’s modulus, Es 10.24 3 1010 N/m2
using FEM analysis. Poisson ratio, sti 0.3
Density, rti 4500 kg/m3
According to the first vibration mode, the model is Copper Young’s modulus, Ec 11 3 1010 N/m2
further simplified as a cantilever beam with the mass Poisson ratio, sc 0.343
M = m1 + m2 at the end. The model can be treated as Density, rc 8930 kg/m3
a single-degree-of-freedom system, and the frequency
PZT: lead zirconate titanate.
can be calculated by
rffiffiffiffiffiffiffiffiffiffiffi The mass of block A was initially 1.55 times larger
1 3EIeq
fn = ð8Þ than the mass of block B according to the parameters
2p l3 M
lmass and lbend. However, a nonuniform strain distribu-
where EIeq and l represent the flexural rigidity of the tion along the piezoelectric plate was observed at this
composite cantilever and the length of the beam, respec- mass ratio. A uniform strain distribution was obtained
tively. The flexural rigidity is expressed as (Erturk and only when the proof mass A was 1.96 times larger than
Inman, 2008) the proof mass B. This design is based on the L-shaped
proof mass structure.
1 The modes of the structure can be obtained based
EIeq = bEs ðh3s  3z0 h2s + 3z0 2 hs Þ
3 on modal analysis. The first mode is the reciprocating
1 rotation motion used to obtain a uniform stress distri-
+ bcE11 ðh3p + 3z0 h2p + 3z0 2 hp Þ ð9Þ
3 bution. The first resonance frequency f1 is 38.9 Hz. A
where b denotes the width of the cantilever; cE11 and Es certain degree of error exists between f1 and the theore-
are the elastic constant of the piezoelectric material and tical result fn because the model was simplified during
Young’s modulus of the substrate, respectively; hp, hs, the theoretical analysis. Figure 4 illustrates the first two
and z0 represent the thickness of the PZT layer, the vibration modes (Figure 3(b) and (c)).
thickness of the substrate layer, and the distance Given acceleration a(t) = am3sin(2pf1t) for the device
between the lower surface of the PZT and the neutral (i.e. am = 0.25 g, f1 = 38.9 Hz in this study), the strain
plane of composite cantilever, respectively (Brissaud and the stress data of the lower surface of the beam can
et al., 2003). The distance z0 can be expressed as be determined. These data are acquired on the surface
opposite to that where the PZT plate is attached.
Es h2s  cE11 h2p Figure 5 illustrates the stress distribution of the
z0 =  ð10Þ structure on one surface of the beam. The trend of
2 Es hs + cE11 hp
stress distribution on the surface of the beam is similar
Substituting the interrelated parameters and proper- to that of the PZT layer. The strain of the H-shaped
ties in Tables 1 and 2 into equations (8) to (10) yields structure from the surface ranges from 76 to 84 me,
fn = 58.72 Hz, EIeq=0.23032 N m2, and Z0 = 4.606 3 excluding the edge effect. The curve in Figure 5 reveals
1024 m, respectively. that the stress distribution of the H-shaped structure
tends to be uniform, which is more efficient than that
of the classical cantilever.
FEM analysis
The model was established and analyzed with ANSYS anal-
Experiment
ysis software. The parameters of the model are outlined in
Table 1. The dimension parameters of the model shown in A prototype of the H-shaped mass piezoelectric energy
Figure 1 are listed in Table 1. The properties of the materials harvester (Figure 6) was manufactured according to the
used in the FEM simulation are shown in Table 2. dimensions specified in Table 1. The dimensions of the

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Guan et al. 5

two titanium sheets connecting proof masses A and B


were 81 mm 3 8 mm 3 0.8 mm. Proof masses A and B
were made of copper. The mass of A was 1.96 times
larger than that of B. The PZT and titanium substrate
layers were bonded as a unimorph using DP460 (epoxy
glue) at 60°C for 3 h. The length, width, and thickness
of the PZT plate were 43, 14, and 0.5 mm, respectively.
The experimental setup is schematically shown in
Figure 7.
The H-shaped structure was subjected to sinusoidal
vibration of 0.25g (root mean square (RMS)). The
probe of the oscilloscope Agilent 10076A was used to
obtain the peak-to-peak voltage UPP across the load
resistance. This probe exhibited an internal resistance
of 63 MO and a capacitance of 3 pF, which had negligi-
ble influence on the output of the piezoelectric element.

Frequency response and load resistance


The frequency response curves of the two cases for open
Figure 4. First two vibration modes of the proposed H-shaped circuit and best-matched load are presented in Figure 8.
structure by simulation. The open-circuit voltage was 77.6 V, and the fundamen-
tal frequency was 35.7 Hz when the device was mea-
sured in an open circuit. The load voltage was 32.0 V,
and the fundamental frequency was 35.6 Hz when the
device was connected with a best-matched load.
The frequency drifting from 35.7 to 35.6 Hz resulted
from the additional load. Figure 9 illustrates the power
versus load resistance curve. The power output Wout is
calculated by
2
Vload
Wout = ð11Þ
Rload
where Vload is the amplitude of voltage across Rload.
Subsequently, the matched resistance R is obtained
when the output power is at its maximum. R is 2.3 MO,
as shown in Figure 9.

Strain distribution
Figure 5. Stress distribution on one surface of the beam.
A traditional cantilever with a metal block on its tip
was manufactured for comparison. The materials of the
PZT plates and the substrates used in both the tradi-
tional cantilever and the H-shaped structure were the
same. The PZT plates and substrates of the two beams
were of the same size. The proof mass at the tip of the
traditional beam weighed 65.1 g. The fundamental fre-
quency of the traditional beam was 35.8 Hz, which is
very close to that of the proposed cantilever. The fre-
quency of the traditional beam was designed to be equal
to that of the proposed cantilever because the PZT
plates shared almost identical characteristics such as
equivalent resistance and capacitance.
Three metallic foil-type strain gauges were glued and
spaced equally on the lower surface of the beam used in
Figure 6. Prototype of the H-shaped mass device. H-shaped structure (Figure 7). These strain gauges were

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6 Journal of Intelligent Material Systems and Structures 0(0)

Figure 7. Diagram of the experimental setup.


PZT: lead zirconate titanate.

Figure 9. Output power versus load resistance of the device.

Figure 8. Frequency response of the device.

denoted as 1, 2, and 3 from the clamped side to the tip. Table 3. Strain distributions of the two cantilevers (me)
The output data of the strain gauges were obtained from
the strain amplifier circuit with no loads connected to Position 1 2 3
the piezoelectric element. The strain distribution on the Cantilever with an H-shaped mass 72 72 74
traditional beam was also measured as above-mentioned Traditional cantilever 74 57 37
procedure. The strain data are shown in Table 3. The
two beams were tuned with the same maximum strain
on the surfaces at each resonance frequency.
Conclusion
The phase differences among the three strain gauges
(1, 2, and 3) were approximately zero. Table 3 shows This study proposed a cantilever piezoelectric energy
that the strain distribution of the proposed cantilever harvester with an H-shaped proof mass. This design
tends to be uniform, which is preferable to that of the allows all infinitesimal electroactive elements to exhibit
traditional beam. In general, the result of the experi- equal strains for a given excitation. The proposed struc-
ment is the same as that of the FEM analysis. ture uses the H-shaped proof mass, which comprises two

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Guan et al. 7

detached metal blocks that can generate large rotary Mitcheson PD, Miao P, Stark BH, et al. (2004) MEMS elec-
inertia. The proposed structure can also smoothen the trostatic micro-power generator for low frequency opera-
strain distribution of the beam. A prototype of the H- tion. Sensors and Actuators A: Physical 115: 523–529.
shaped mass piezoelectric energy harvester was designed, Poulin G, Sarraute E and Costa F (2004) Generation of elec-
manufactured, and tested. When the mass ratio of the trical energy for portable devices, comparative study of an
electromagnetic and a piezoelectric system. Sensors and
two detached metal blocks in the H-shaped proof mass
Actuators A: Physical 116: 461–471.
reaches a certain value, the proposed device has a uni- Priya S (2007) Advances in energy harvesting using low pro-
form strain distribution in the direction of its extension. file piezoelectric transducers. Journal of Electroceramics
This result has been verified by FEM analysis and 19: 167–184.
experimental results. In addition, this structure can be Roundy S and Wright PK (2004) A piezoelectric vibration
miniaturized. The proposed method of optimizing proof based generator for wireless electronics. Smart Materials
mass can effectively improve material utilization and and Structures 13: 1131–1142.
miniaturize the energy harvesting structure. Roundy S, Leland ES, Baker J, et al. (2005) Improving power
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Funding Shen Z, Shih WY and Shih W-H (2006) Mass detection sensi-
This study was supported by the Fundamental Research tivity of piezoelectric cantilevers with a nonpiezoelectric
Funds for the Central Universities. extension. Review of Scientific Instruments 77: 065101.
Sodano HA, Inman DJ and Park G (2004) A review of power
harvesting from vibration using piezoelectric materials.
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Appendix 1
technical papers—The 3rd International Energy Conversion
Engineering Conference,15–18 August 2005, San Fran- The flexural rigidity of the composite cantilever is cal-
cisco, California. culated. The origin of the coordinate is located in the
Brissaud M, Ledren S and Gonnard P (2003) Modeling of a neutral plane of the composite cantilever. Here, hp, hs,
cantilever non-symmetric piezoelectric bimorph. Journal of hpc, hsc, z0, Txp, and Txs represent the thickness of the
Micromechanics and Microengineering 13: 832–844.
PZT layer, the thickness of the substrate layer, the dis-
Cook-Chennault KA, Thambi N and Sastry AM (2008)
tance between the neutral planes of the PZT layer and
Powering MEMS portable devices: a review of non-
regenerative and regenerative power supply systems with the composite cantilever, distance between the neutral
emphasis on piezoelectric energy harvesting systems. planes of the substrate layer and the composite cantile-
Smart Materials and Structures 17: 043001. ver, the distance between the lower surface of the PZT
Erturk A and Inman DJ (2008) A distributed parameter elec- and the neutral plane of the composite cantilever, stress
tromechanical model for cantilevered piezoelectric energy of the PZT layer along the x-axis, and stress of the sub-
harvesters. Journal of Vibration and Acoustics: Transac- strate along the x-axis, respectively. When the electrode
tions of the ASME 130: 041002. influence is neglected, the equation obtained is
Goldschmidtboeing F and Woias P (2008) Characterization
of different beam shapes for piezoelectric energy harvest- c E hc ð hc + hs Þ
ing. Journal of Micromechanics and Microengineering 18: hsc = 11 ð12Þ
2 Es hs + cE11 hc
104013.
Lee S, Youn BD and Jung BC (2009) Robust segment-type 
1 cE11 hp hp + hs
energy harvester and its application to a wireless sensor. hpc = hp + hs   ð13Þ
Smart Materials and Structures 18: 095021. 2 2 Es hs + cE11 hp
Li WG, He S and Yu S (2010) Improving power density of a
Es h2s  cE11 h2p
cantilever piezoelectric power harvesting through a curved z0 =  ð14Þ
L-shaped proof mass. IEEE Transactions on Industrial 2 Es hs + cE11 hp
Electronics 57: 868–876.
Mehraeen S, Jaqannathan S and Corzine KA (2010) Energy where cE11 and Es are the elastic constant of the piezo-
harvesting from vibration with alternate scavenging circui- electric material and Young’s modulus of the substrate,
try and tapered cantilever beam. IEEE Transactions on respectively. The flexural rigidity of the composite can-
Industrial Electronics 57: 820–830. tilever is expressed as (Erturk and Inman, 2008)

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8 Journal of Intelligent Material Systems and Structures 0(0)

1  If equation (17) has nonzero solutions for c1 and c2 ,


EIeq = bEs h3s  3z0 h2s + 3z0 2 hs
3 then the coefficient determinant of the equations is
1

+ bcE11 h3p + 3z0 h2p + 3z0 2 hp ð15Þ zero. Subsequently
3  
 v2 m1 l2 B+EIb2 ðl2 bA  DÞ v2 m1 l2 A  EIb2 ðl2 bD+C Þ 
where b denotes the width of the cantilever.  
 v2 m2 l2 ðB+bl2 C Þ+EIb2 D v2 m2 l2 ðA  bl2 BÞ+EIb2 C  =0
First, suppose that
ð18Þ
8
>
> A = sin bl1  shbl1
< The frequency equation can be obtained from equa-
B = cos bl1  chbl1
ð16Þ tion (18)
>
> C = sin bl1  shbl1
:
D = cos bl1  chbl1 
v4 m1 m2bl2 AC + B2  v2 EIb 2
 ½2m1 ðBC  ADÞ2
2 2
Then, from the boundary conditions (3), (6), and (7) + m2 l2 b ðCD  ABÞ + l2 b A + 2BD +C
8 2 + ðBC  ADÞÞ  E2 I 2 b5 AC + D2 = 0 ð19Þ
>
> ½v m1 l2 B + EIb2 ðl2 bA  DÞc1
>
>
< + ½v2 m l A  EIb2 ðl bD + C Þc = 0
1 2 2 2
ð17Þ
>
>
2 2
½v m2 l2 ðB + bl2 C Þ + EIb Dc1
>
>
:
+ ½v2 m2 l2 ðA  bl2 BÞ + EIb2 Cc2 = 0

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