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Microelectromechanical Systems
University of Victoria
Dept. of Mechanical Engineering
Lecture 5:
Electrostatic Sensors and Actuators
Overview
Introduction to Electrostatics
Overview of Electrostatic Actuators and Sensors
Parallel Plate Capacitors
Electrostatic Interdigitated Finger Capacitors (Comb-Drives)
A
d
Electrostatic Micromotor
1 1 1
6 2 6 2 6 2
5 3 5 3 5 3
4 4 4 4 4 4
3 5 3 5 3 5
2 6 2 6 2 6
1 1 1
Electrostatic Comb-Drive
Micro-Mirror
Element (Pixel)
Micro-Mirror
Removed
Micro-Mirror
Compliant Hinge
Micro-Mirror
DLPTM Chip Actuator
A
Where: A - Overlap area of two plates
E d E - Electric Field
d - distance between the two plates
A dielectric material will occupy the space between the two plates:
A
E d
If the plates move along the axis normal to their surface, the
variable of displacement is d. Therefore:
Solving:
Diagram of Comb-Drive:
wt xo
One Side of Comb
Lo
Lc
t
Modeling of Comb-Drives
Mechanical Connection
Between Combs
Km
C
Cf
Km (x-axis)
Low Stiffness
δx
(a) (b)
Transverse Comb-Drive
y
Lo
x
xo x
Csr
Capacitance of
right side:
Csl
© N. Dechev, University of Victoria 22
Transverse Comb-Drive
Longitudinal Comb-Drive
y
Lo
x
yo
+y
Rotational Comb-Drives
Rotational Comb-Drive
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