V21 Version

Preloaded Piezo Actuators

Preloaded Piezo Actuators

Preloaded piezo actuators

are with casings and load pre-
tightening of piezo stacks, which
can not only output the performance of
piezo stacks, but also protect them
and make them suitable for
dynamic applications.
 Piezo·Nano·Motion

Preloaded Piezo Actuators

Preloaded Piezo Actuators

Preloaded piezo actuators offer nanometer resolution with stroke up to 260μm, microsecond response time. The high internal
mechanical preload force is suitable for high load, high dynamic applications. The blocking force is up to 50,000 N, making it
ideal for machine tools, active vibration insulation or adaptive mechanics. The small size and high resonant frequency of them
make it ideal for applications such as scanning microscopy, laser tuning, beam deflection, patch clamp or microlithography.

Structure Heat management “Thermostable”

Moving part
It can increase 2~3 times
power and realize high-
Preload mechanical frequency motion.
structure

Stainless steel casing

Piezo ceramic

Coaxial Cable

Product customization

Screw base(fixed end)

Adapter

Plane Sphere Internal thread External thread Withstand torque Bottom lead Add the cooling

Series

Models Mechanism Features Voltage Page

Max displacement to 190μm

Max blocking force to 25000N
Low voltage 0~150V 003
Open/closed loop
Low temperature, vacuum version optional

Max displacement to 114μm

Direct Open/closed loop
External-thread 0~150V 006
Driving Low temperature version optional
Various sizes are available

Max stroke to 260μm

High voltage Driving voltage: 1000V 0~1000V 008
Max load to 70000N

001
 Applications
Preloaded Piezo Actuators

Stiffness Test

Phased Array Antenna

Cavity Tuning

Fiber End Inspection

002
 Piezo·Nano·Motion

Low Voltge Preloaded Piezo Actuators

Preloaded Piezo Actuators

Features
• Nanoscale resolution • could withstand the pulling force • Max displacement 190μm • Max blocking force 25000N

Closed loop and Open loop

Packaged piezoceramic actuators are available in open loop (no position feedback sensor) and closed loop (integrated
position feedback sensor) versions. About open loop, the resolution is infinitely high, limited only by the noise of the control
device, but due to the hysteresis and creep characteristics of the piezo ceramic, the repeatability and stability are low. The
closed-loop version eliminates hysteresis and creep to make it linear.

Large OD, Greater Blocking force Higher Height, Larger Displacement

Min 9mm Max 45mm

Large height corresponds to
large displacement
Max. displacement 190μm
Max 199mm

Large OD corresponding
to large blocking force
Min 19mm

Max. blocking force

25000N

Open Loop Closed loop

Displacement [μm]

100
(μm) S
90

80

70
Closed
60
loop
50 Open
ΔS
loop
40

ΔE E(V) 30

20

10
Hysteresis Creep 0
0 1 2 3 4 5 6 7 8 9 10 Voltge[V]

Notes: Amendment nonlinearity used closed-loop sensor. Closed-loop linearity 0.1%F.S., Repeatability 0.05%F.S.

Recommend Controllers LEMO sensors connector

E01 E53 E63.C

1~9 channels 1 channel

1 channel
Computer software, Computer software,
Open loop
Analog input, Rotary knob Analog input
Computer software
Open/closed loop Open/closed loop
Bandwidth：700Hz（-3dB）
Ave. current: 291/58mA Ave. current: 58mA

003
 Drawings
Preloaded Piezo Actuators

Ø9
VS9 L
Ø9
3 3±0.5 6 Ø3 Ø9
M2 SW2mm Ø3 SR1 Ø3

M34

Ø3
Ø9
6±0.5 4±0.5
2 3±0.5

M23
External thread Sphere Plane

VS10 L Ø10
3 4±0.5 8 Ø4 Ø10
Ø10
M3 SW3mm Ø4 SR1.5 Ø4
M34

Ø10
Ø4
6±0.5 5±0.5
2 4±0.5
M34

External thread Sphere Plane

L
VS12 3 4±0.5
10 Ø12
Ø5 Ø12
Ø12
M4 SW4mm Ø5 SR1.5 Ø5
M44

Ø12
Ø5

7±0.5 5±0.5
2 4±0.5
M34

SW 4mm

External thread Sphere Plane

L
3 4±0.5 13
VS15 Ø15
Ø6 Ø15
Ø15
M4 Ø6
M44

SW5mm SR2 Ø6
Ø15
Ø6

7±0.5 5±0.5
2 4±0.5
M44

SW 5mm

External thread Sphere Plane

L
VS20 5 4±0.5
17

Ø20
Ø8 Ø20
Ø20
M5 Ø8
M87

Ø20

SW6mm SR3 Ø8
M55
Ø8

8±0.5 6±0.5
3 4±0.5

SW 6mm
External thread Sphere Plane

L
VS25 5 4±0.5 22

Ø25
Ø10 Ø25
Ø25
M6 Ø10
M87

M66

SR3
Ø10
Ø25

SW8mm Ø10

8±0.5 6±0.5
3 4±0.5

SW 8mm External thread Sphere Plane

Notes: Cable length: 1.5m; Connector: LEMO; Optional processing: heat sink, Thermal stability, open/closed loop.(VS9 is only
open loop vision). Standard adapter is internal thread

004
 Piezo·Nano·Motion

Technical data

Stroke Stiffness Push/pull force El.capacitance Resonant frequency Length L

Preloaded Piezo Actuators

Model
[μm]±10%* [N/μm]±20% [N] [μF]±20% [kHz] [mm]±0.3
PSt150/4/7 VS9 9 25 200/30 0.17 40 19
PSt150/4/20 VS9 19 12 200/30 0.34 30 28
PSt150/5/7 VS10 9 50 550/100 0.35 40 19
PSt150/5/20 VS10 19 25 550/100 0.8 30 28
PSt150/5/40 VS10 38 12 550/100 1.6 20 46
PSt150/5/60 VS10 57 8 550/100 2.4 15 64
PSt150/5/80 VS10 76 6 550/100 3.2 12 82
PSt150/5/100 VS10 95 5 550/100 4 10 100
PSt150/7/7 VS12 9 120 1200/200 0.7 40 19
PSt150/7/20 VS12 19 60 1200/200 1.8 30 28
PSt150/7/40 VS12 38 25 1200/200 3.6 20 46
PSt150/7/60 VS12 57 15 1200/200 5.4 15 64
PSt150/7/80 VS12 76 12 1200/200 7.2 12 82
PSt150/7/100 VS12 95 10 1200/200 9 10 100
PSt150/7/120 VS12 114 8 1200/200 11 8 118
PSt150/7/140 VS12 133 7 1200/200 13 6 136
PSt150/7/160 VS12 152 6 1200/200 15 5 154
PSt150/10/7 VS15 9 240 2300/500 1.8 40 19
PSt150/10/20 VS15 19 120 2300/250 3.6 30 28
PSt150/10/40 VS15 38 60 2300/250 7.2 20 46
PSt150/10/60 VS15 57 35 2300/250 11 14 64
PSt150/10/80 VS15 76 25 2300/250 14 12 82
PSt150/10/100 VS15 95 20 2300/250 18 10 100
PSt150/10/120 VS15 114 15 2300/250 21 8 118
PSt150/10/140 VS15 133 14 2300/250 25 7 136
PSt150/10/160 VS15 152 13 2300/250 28 6 154
PSt150/10/180 VS15 171 11 2300/250 33 5 172
PSt150/10/200 VS15 190 10 2300/250 37 4 190
PSt150/14/7 VS20 9 350 4700/700 3.6 40 26
PSt150/14/20 VS20 19 250 4700/700 7 30 35
PSt150/14/40 VS20 38 120 4700/700 14 20 53
PSt150/14/60 VS20 57 70 4700/700 22 14 71
PSt150/14/80 VS20 76 50 4700/700 30 12 89
PSt150/14/100 VS20 95 40 4700/700 39 10 107
PSt150/14/120 VS20 114 35 4700/700 47 8 125
PSt150/14/140 VS20 133 30 4700/700 55 7 143
PSt150/14/160 VS20 152 25 4700/700 63 6 161
PSt150/14/180 VS20 171 22 4700/700 71 5 179
PSt150/14/200 VS20 190 20 4700/700 80 4 197
PSt150/20/20 VS25 19 500 7300/1000 14.5 28 37
PSt150/20/40 VS25 38 250 7300/1000 29 18 55
PSt150/20/60 VS25 57 160 7300/1000 43.5 13 73
PSt150/20/80 VS25 76 100 7300/1000 58 11 91
PSt150/20/100 VS25 95 80 7300/1000 72.5 9 109
PSt150/20/120 VS25 114 65 7300/1000 87 7 127
PSt150/20/140 VS25 133 55 7300/1000 101.5 6 145
PSt150/20/160 VS25 152 50 7300/1000 116 5 163
PSt150/20/180 VS25 171 45 7300/1000 130.5 4 181
PSt150/20/200 VS25 190 40 7300/1000 145 3 199

*Nominal Stroke corresponding drive voltage 0-150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Closed-loop linearity and repeatability are better.

005
 External-thread Preloaded Piezo Actuators
Preloaded Piezo Actuators

M14 external thread preloaded piezo actuator is a threaded piezoel actuator outside the mechanical package coating. It
is easy to install and fix with external mechanical structure. It is mainly used for beam deflection, optical adjustment, lens
adjustment, angular motion applications, etc. For got max stiffness, the piezo actuator uses lock nut.

Features
• External-thread piezo actuators • Max blocking force to 1200N • Max displacement to 114μm
• Quick response • Linear nano meter motion • Customezed is available

External Thread Locknut

The thread size on the outer casing is M14×1 and the There is a standard locknut with a external thread preloaded
thread length is 20mm. The size can be customized. piezo actuator to increase the stiffness.

Motion Regulation

M14 has two motion adjustment modes, one is the position

Adapter adjustment (coarse adjustment) through the external thread;

Plane, sphere, internal thread, external thread are optional the other is the ultra-precise adjustment of the position of

and customiezd is available. the internal piezo stacks by voltage signal control , when
the voltage is applied, the piezo actuator can follow the
voltage signal to generate an elongation, contraction and
Voltage VS Displacement reciprocating motion.

FPSt150/7/20M14
21 Customized
18
Displacement [μm]

The size, connection, displacement, voltage are custom

15
manufactured to your specifications.
12

0
0 1 2 3 4 5 6 7 8 9 10

Input voltage[V]

006
 Piezo·Nano·Motion

Drawings

Preloaded Piezo Actuators

L 3
20 7±0.5 4±0.5 4±0.5

M3x 4
4±0.5

M4
Ø5

Ø5

Ø5
Ø5
2 SW 4mm SW 4mm

SR
M14×1
Ø13

1.
SW12 1

5
SW18 External thread Plane Internal thread

Applications

Light beam deflection, Light Adjustment, Shock absorption and vibration reduction, Precision Machining

Technical data

Stroke Stiffness Push/pull force El. capacitance Resonant frequency Length L

Models
[μm]±10%* [N/μm]±20%* [N] [μF]±10% [kHz]±20% [mm]±0.3

FPSt150/7/7 M14 9 120 1200/200 0.7 40 19

FPSt150/7/20 M14 19 60 1200/200 1.8 30 28

FPSt150/7/40 M14 38 25 1200/200 3.6 20 46

FPSt150/7/60 M14 57 15 1200/200 5.4 15 64

FPSt150/7/80 M14 76 12 1200/200 7.2 12 82

FPSt150/7/100 M14 95 10 1200/200 9 10 100

FPSt150/7/120 M14 114 8 1200/200 11 8 118

*Nominal Stroke corresponding drive voltage 0-150V , Recommended voltage 0~120V for long-term operation to extend
lifetime.
Customized is available.

Recommand Controllers

Application Frame deflection structure

E53.A E63.A E63.C

tilt range

fix holder
coarse adjust by fine pitch thread

piezo cartridge
reset spring

tilt plate bearing

1 channel 1 channel 1 channel

Open loop Open loop Open loop
Analog input Analog input Cpmputer software
Ave. current 60mA Ave. current 20mA Ave. current 2mA

007
 High Voltge Preloaded Piezo Actuators
Preloaded Piezo Actuators

High-voltage piezo actuator is piezo stack with driving voltage of 1000V and preloaded mechanical actuator. It could
withstand certain amount of tension, built-in large output piezo stacks, blocking force is up to 50000N, mainly used for
dynamic applications of large loads.

Features

• Driving voltage: 1000V • Max stroke to 260μm • Max load to 70000N • Low electric capacitance
• Parameters could be customized • Open/closed loop version is optional • OD: Ø18mm，Ø25mm，Ø35mm，Ø45mm

Applications
Shock wave generation, stabilization, testing and acceleration sensors, active vibration damping, fuel injection, active engine
mounting, and various positioning tasks require high loads and/or extreme acceleration.

Large blocking force High dynamic

Blocking force is proportional to CSA. Larger outer diameter, El. capacitance is relatively small, the operating frequency is

greater blocking force. The blocking force of VS45 series relatively high. More suitable for high dynamic use.

could reach 50,000 N and the load could reach 70,000 N.

60000

50000
Blocking force[N]

40000

30000

20000

10000
High voltage
0 Operating frequency
0 10 20 30 40 50 Low voltage
Outer diameter [mm]
Thermo-stable

High voltage 50000[N]

piezo actuator CoreMorrow could
Blocking
force[N] provide "thermo-stable"
10000 20000 30000 40000 50000 60000
Low voltage 25000[N]
for dynamic operation.
piezo actuator
Heat could be efficiently
transferred from ceramic
Open/closed loop version
to housing. Thermo-stable
High-voltage piezo actuators are available in open-loop and housing material is highly efficient thermally conductive
closed-loop versions. Open-loop version has fast response, metal.
but has the hysteresis and creep characteristics of piezo Thermo-stable does not change the size of piezo actuator,
ceramics. Closed-loop version has closed-loop sensor that and the power could be increased by 2~3 times.
allows the control voltage and displacement to a linear E.g.: PSt1000/16/150VS25 heating stability and heat sink,
relationship that eliminates hysteresis and creep. the frequency can be up to 500Hz at max displacement.

008
 Piezo·Nano·Motion

Recommend piezo controller

High-voltage preloaded piezo actuator is driven by high-voltage controller, and CoreMorrow E00/E01 series high-voltage

Preloaded Piezo Actuators

piezo controller could output voltage to 0~1000V.

E01.D1 E00.D3

Drawings

VS18 L
M55

5 4±0.5
18
15
8 18
18
M5 8 SR3
Ø18

SW6mm 8
Ø8

8±0.5 6±0.5 4±0.5

SW 6mm M55

3
External thread Sphere Plane
M66

L
VS25 5 4±0.5
22
25
10 25
25
M6 SW8mm 10 SR3 10
Ø10
Ø25

8±0.5 6±0.5 4±0.5

3

M87
SW 8mm
External thread Sphere Plane

L 30
VS35
M88

8 8±0.5
35
14 35
35
M8 SW12mm 14 SR4 14
Ø14
Ø35

14±0.5 11±0.5 8±0.5

6

SW 12mm M88 External thread Sphere Plane

L
40
8 8±0.5
VS45 45
45
M88

20 45
M8 SW17mm 20 SR5 20
Ø20
Ø45

14±0.5 11±0.5 8±0.5

6

M88 External thread Sphere Plane

SW 17mm

Notes: Cable length: 1.5m; Connector: LEMO; Optional processing: heat sink, Thermal stability, open/closed loop. Standard
adapter is internal thread

009
 Technical data
Resonant
Preloaded Piezo Actuators

Max/Stroke Length L El.capacitance Stiffness Push/pull force

Model frequency
[μm]±15%* [mm]±0.3 [nF]±20% [N/μm]±20% [N]
[kHz]
PSt1000/10/7 VS18 12/7 24 20 300 40 4000/700

PSt1000/10/20 VS18 27/20 33 45 150 35 4000/700

PSt1000/10/25 VS18 35/25 42 85 100 30 4000/700

PSt1000/10/40 VS18 55/40 51 110 75 27 4000/700

PSt1000/10/60 VS18 80/60 69 170 50 23 4000/700

PSt1000/10/80 VS18 105/80 87 220 35 20 4000/700

PSt1000/10/100 VS18 130/100 105 270 30 15 4000/700

PSt1000/10/125 VS18 160/125 125 330 25 10 4000/700

PSt1000/10/150 VS18 220/150 145 390 17 5 4000/700

PSt1000/10/200 VS18 260/200 185 510 10 3 4000/700

PSt1000/16/7 VS25 12/7 29 60 800 40 12000/1500

PSt1000/16/20 VS25 27/20 35 150 400 35 12000/1500

PSt1000/16/40 VS25 55/40 53 360 200 30 12000/1500

PSt1000/16/60 VS25 80/60 71 540 120 27 12000/1500

PSt1000/16/80 VS25 105/80 89 720 90 23 12000/1500

PSt1000/16/100 VS25 130/100 107 900 75 20 12000/1500

PSt1000/16/125 VS25 160/125 127 1100 60 15 12000/1500

PSt1000/16/150 VS25 200/150 147 1400 50 7 12000/1500

PSt1000/16/200 VS25 260/200 187 1900 35 4 12000/1500

PSt1000/25/7 VS35 12/7 33 140 1800 40 25000/4000

PSt1000/25/20 VS35 27/20 42 350 900 35 25000/4000

PSt1000/25/40 VS35 55/40 60 800 450 30 25000/4000

PSt1000/25/60 VS35 80/60 78 1250 300 27 25000/4000

PSt1000/25/80 VS35 105/80 96 1700 200 23 25000/4000

PSt1000/25/100 VS35 130/100 114 2150 180 20 25000/4000

PSt1000/25/125 VS35 160/125 134 2500 150 15 25000/4000

PSt1000/25/150 VS35 200/150 154 3200 120 7 25000/4000

PSt1000/25/200 VS35 260/200 194 3700 90 5 25000/4000

PSt1000/35/7 VS45 12/7 33 300 4000 37 50000/6000

PSt1000/35/20 VS45 27/20 42 800 2000 33 50000/6000

PSt1000/35/40 VS45 55/40 60 1600 1000 28 50000/6000

PSt1000/35/60 VS45 80/60 78 2500 600 25 50000/6000

PSt1000/35/80 VS45 105/80 96 3300 450 21 50000/6000

PSt1000/35/100 VS45 130/100 114 4100 350 18 50000/6000

PSt1000/35/125 VS45 160/125 134 4900 300 14 50000/6000

PSt1000/35/150 VS45 200/150 154 5700 220 7 50000/6000

PSt1000/35/200 VS45 260/200 194 6500 150 4 50000/6000

*Nominal Stroke corresponding drive voltage 0-1000V, max stroke drive voltage -200V~1000V. Recommended voltage 0~800V for
long-term operation to extend lifetime. Closed-loop linearity and repeatability are better.

010
Harbin Core Tomorrow Science & Technology Co., Ltd.
Tel：0451-86268790
Fax：0451-86267847
Postcode：150080
Email：info@coremorrow.com
Web：www.coremorrow.com
Address：6F, No.41 Hanguang Street Nangang Distric,Harbin Wechat