www.equilibar.

com

Precision
Vacuum Regulating Valves

EVR Vacuum Series

Pressure stability across widely varying flow
rates

• Pressure range: 0.4 to 30 inHg

• Absolute and vacuum-to-positive available
• Standard Body Materials: SS316, PVC
• Diaphragms: PTFE or Viton
• Sizes 1/4” through 4”
3” PVC Vacuum Regulating Valve
shown with manual set-point regulator

Manual Adjustment
• Uses sensitive manual regulator on top
Computer Automated Control
• Uses electronic pressure regulator to provide set-point

Automated Vacuum Control

1” GS8 SS316 vacuum regulator Manual Vacuum Control
with electronic set-point regulator 1/2” EVR-4 SS316 vacuum regulator

Unique Diaphragm Regulator Technology:

• 5X more Precise than standard Pressure Regulators • Elegant friction-less design
• Dome loaded: for Manual or Automated control • Suitable for ultra-pure, and aggressive chemicals

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EVR Series
Incredibly stable pressure control Precision Vacuum Regulator
Equilibar introduces a new type of vacuum regulator
with more than 5X the flow stability of traditional
spring regulators. That means that your vacuum
process can remain stable even as gas flow rate
changes over wide ranges.
• Can be used with manual set-point adjustment or
computer automation
• Is installed between your vacuum pump and your
process
• Does not allow air into your vacuum system*
• Controls in range 0.4 - 30 inHg
• Available sizes 1/4” through 3”
• Available in Stainless Steel, PVC, or other materials

1/2” EVR-4 with PVC body

Incredibly stable pressure control
This chart below shows the excellent vacuum stability
through various flow rates and pressure ranges.
Traditional vacuum regulators have much larger
Restricts flow to your vacuum pump
pressure variability with increasing flow rates. Unlike common vacuum breakers or vacuum relief
valves, the Equilibar vacuum regulating valve re-
stricts flow to your vacuum pump in order to hold
EVR-4 Vacuum Performance
Vacuum Supply 20-25 inHg
your process at the right vacuum pressure.
Air Flow, normal LPM Simply connect the Outlet of the Equilibar to your
0 50 100 150 200 250
16
vacuum supply, and the Inlet to your process.
50
14
Inlet Pressure,-inHg

Inlet Pressure,-kPa(g)

12 40

10 Manual
30 Adjustment
8 Knob
vac
6 20

4 Process I O
10
2
Equilibar • • Vacuum
0 0 Precision
0 2 4 6 8 10 Vacuum
Supply
Air Flow, SCFM Regulator

Non-relieving
The Equilibar vacuum regulator is a non-relieving
*
The base regulators do not allow any air into the regulator. In order to lower the vacuum pressure in
process. However, both the manual and electronic your process, there will need to be at least a small
set-point regulators function by allowing a very in-flow of gas. Fortunately, most processes have at
small amount of air into the process. least a small gas flow or in-leakage. .

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Vacuum Regulators 1/4” through 1”

Regulators w/ Integrated Set-Point Kit

For manually adjusted applications, our

integrated set-point kit provides for
maximum convenience. A sensitive 20-
turn set-point regulator is provided for
easy installation and adjustment.

Dome-loaded regulator only

(computer automation) Reference
For computer automated applications, or for Port
remote manual adjustment, the dome-loaded
vacuum regulator can be purchased separately.
The set-point pressure is applied to the refer- B Inlet Outlet
ence port from a manual or electronic regula-
tor.
A
Metallic Vacuum Regulators 1” and smaller
Integrated Dome Loaded Inlet /Outlet Standard Body Cv Range Available End
Reference Port Dim A Dim B
Set-Point Kit Regulator Only Port Materials (precision) Fittings
DRAWN
jjennings 2/1
Model Number (Dome loaded) (inch) Min1 Max Std Available
CHECKED

EVR-2 GS2 1/4” 3.0 1.3 1E-3 1.0 QA

Vacuum
MFG
EVR-3 GS3 3/8” SS316 (std) 3.5 1.4 1E-3 1.8 Flange
APPROVED
EVR-4 GS4 1/2” 1/8” 4.5 1.6 1E-3 3.0 NPT
carbon steel BSP
EVR-6 GS6 3/4” (black oxide) 6.0 2.0 1E-2 6.2 VCO style
VCR style
EVR-8 GS8 1” 7.0 2.6 1E-2 9.9

Polymeric EVR Regulators 1” and smaller

Manual Computer Inlet/Outlet Standard Body Cv Range Available End
Reference Port Dim A Dim B
Adjust Adjust Port Materials (precision) Fittings

Model Number (Dome loaded) (inch) 1 Max Std Available

Min
EVR-2 GS2 1/4” 3.25 1.5 1E-3 1.0
PVC (std)
EVR-3 GS3 3/8” 3.75 1.6 1E-3 1.8 BSP
PTFE
EVR-4 GS4 1/2” 1/4” 4.75 1.8 1E-3 3.0 NPT Pipe Flange
CPVC
(PVC, CPVC)
EVR-6 GS6 3/4” PVDF 6.25 2.25 1E-2 6.2
Acetal
EVR-8 GS8 1” 7.25 2.9 1E-2 9.9

Available Diaphragms • Based on 2-piece GS Series back pressure regulators

Material
• Two wetted components (Body + Diaphragm)
• No wetted o-rings
PTFE • Two plugged access ports on back side
Viton (reinforced) • 1Minimum Cv dependant on diaphragm and set-point pressure
• Dimensions and Cv values subject to change

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Vacuum Regulators 1.5” and larger

Regulators w/ Integrated Set-Point Kit
For manually adjusted applications, our 3.0
integrated set-point kit provides for maximum
convenience. A sensitive 20-turn set-point
regulator is provided for easy installation and
B
adjustment.

Dome-loaded regulator only

(computer automation)
For computer automated applications, or for
remote manual adjustment, the dome-loaded
vacuum regulator can be purchased separately.
The set-point pressure is applied to the reference
port from a manual or electronic regulator.

Metallic Vacuum Regulators 1.5” and larger

Integrated Dome-Loaded Inlet /Outlet Standard Body Cv Range Available End
Reference Port Dim A Dim B
Set-Point Kit Regulator Only Port Materials (precision) Fittings

Model Number (Dome-loaded) Min1 Max Std Available

EVR-12 NLB12 1 1/2” 9.5 3.9 1E-2 14.3
1/8” SS316 (std) Vacuum
EVR-16 NLB16 2” 11 4.1 3E-2 30.2 Flange
NPT
EVR-24 NLB24 3” carbon steel 15 6.1 6E-1 60
1/4” (black oxide) BSP
EVR-32 NLB32 4” 20 8.1 1.5 160

Polymeric EVR Regulators 1.5” and larger

Integrated Dome-Loaded Inlet /Outlet Standard Body Cv Range Available End
Reference Port Dim A Dim B
Set-Point Kit Regulator Only Port Materials (precision) Fittings

(Dome-loaded) (inch) Min1 Max Std Available

EVR-12 NLB12 1 1/2” 9 4.3 1E-2 14.3
EVR-16 NLB16 2” 1/8 or 1/4” 11 5.1 1E-2 30
PVC BSP
EVR-20 NLB20 2 1/2” 13 7.1 1E-2 34 NPT
CPVC Pipe Flange
EVR-24 NLB24 3” 15 8.8 6E-1 60
1/4”
EVR-32 NLB32 4” 20 9.6 1.5 160

• Based on NLB back pressure regulators with welded

Available Diaphragms external elbows.
Material • Two Viton wetted o-rings
• 1Minimum Cv dependant on diaphragm and set-point
PTFE
pressure
Viton (reinforced)
• Dimensions and Cv values subject to change

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EVR Series
Precision Vacuum Regulator
1/2" Equilibar® EVR-4 vs. Fairchild Model 16
Vacuum Flow Stability Curve

Dramatic stability improvement 25

Vacuum Pressure, in Hg
This chart shows the superior flow stability of the 20
1/2” Equilibar® over a traditional 1/2” vacuum
breaker. 15
Note that works by bleeding air into the vacuum
system rather than directly modulating the gas flow, 10 Competitive 1/2” 16
Fairchild Model Regulator
(1/2")

explaining the opposite slope. Equilibar

Equilibar1/2” EVR-4
EVR-4
5

0
0 2 4 6 8
Selecting the right size Air Flow, SCFM

This chart at right shows the projected vacuum per- EVR Flow Sizing Chart
(10 inHg)
formance at various regulator body sizes. For a given
3.5
regulator size, as flow increases past a critical point,
‘droop’ increases. Droop is defined as the reduction 3
1/4"
in vacuum pressure due to friction in the regulator. 1/2" 1" 2"
Vacuum Droop, inHG

2.5
3/8" 3/4" 1 1/2"
In order to select the optimum size for your applica- 2
tion, find the smallest regulator that has acceptable
1.5
pressure variance in your flow range.
1
For example, for flow rates between 5 and 20 SCFM,
the 3/4” shows only 0.25 inHg variance and would 0.5

be acceptable for most applications. The 1” regula- 0

tor shows virtually no variance in this range. 1 10 100

Air Flow, SCFM

If you don’t know your flow rates, you can select the
Equilibar Vacuum Regulator to match your existing
Effect of Vacuum Supply
pipe size.
3/8" EVR-3, 1 SCFH flow rate

16
14
Vacuum Inlet Pressure, inHg

Stability with varying Vacuum Supply

12
The inlet pressure of most vacuum regulators vary 10
significantly with changes in vacuum supply
8
pressure.
6
The chart at right shows how the EVR holds process
vacuum stable even through widely varying sup- 4
ply pressures. Such supply pressure variations are 2
typical where multiple machines share the same 0
vacuum pump or vacuum header. 10 15 20 25
Vacuum Supply Presure, inHg .

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EVR Series
How it works Precision Vacuum Regulator
Our new vacuum regulator uses the same patented Manual control schematic
technology as the Equilibar® Precision Back Pressure
Regulator, with unmatched precision across varying
flow rates.
Manual
Vacuum
The base units are actually dome-loaded back pres- Set-Point
sure regulator. They match your process (Inlet) pres- Regulator
vac
sure 1:1 to a pilot set-point pressure. They work to
restrict flow between your process and the vacuum Process
pump in order to keep your process very closely
EQUILIBAR Vacuum
matched to the pilot setpoint pressure. Precision Vacuum Supply
For manual applications, a sensitive 20-turn vacuum Regulator
regulator is used to supply the set-point (see above
right). For computer automation, an electro-pneu-
Computer automation schematic
matic regulator is used to provide the set-point
signal. Set-Point
4-20 mA or
Visit our website to learn more about how our 0-10 mA
unique vacuum regulator technology works. Electronic
E/P Pressure
Regulator
vac

Process

Dome-Loaded Vacuum
Unique Direct-Sealing Back Pressure Supply
Regulator
Diaphragm Technology
The key to the incredible performance of the
Equilibar vacuum valve is the unique direct sealing
diaphragm technology used in the back pressure
regulator. It works like a fluid transistor by forming 2 Set-Point Options
a unique force balance on an flexible membrane Electro- Manual
Manual
between three separate pressures. Pneumatic Pressure
Vacuum
The fluid inlet pressure and the downstream outlet Regulator Regulator
Set-Point
Regulator
pressure exist on the wetted side of the membrane, vac
separated by a valve seat. The reference air pressure E/P
Process - OR -
exists on the non-wetted side.
Dome-Loaded Vacuum
The lower pressure of the outlet tries to hold the Back Pressure Supply
membrane in a leak-tight seal with the valve seat. Pilot
Regulator
However, any slight excess between the fluid inlet Diaphragm (Reference)
pressure and the reference pressure quickly over-
whelms these seating forces and pulls the mem-
brane away from the valve seat.
Flow is automatically controlled at a level that main-
tains pressure equilibrium between the Inlet and Inlet Outlet
Reference ports. .

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Contact our Engineers Other products from Equilibar

At Equilibar, your application’s unique requirements
will be carefully addressed by one of our trained
application engineers. Please contact us if you have
any questions or special requirements.
Web: www. equilibar.com
Email: inquiry@equilibar.com
Telephone: (828)650-6590
Fax: (801)504-4439
Address: Equilibar, LLC
320 Rutledge Road
Fletcher, NC 28732

About Equilibar Back Pressure Regulators

Equilibar, LLC manufacturers and markets our Our Equilibar® dome-loaded back pressure regula-
specialized products worldwide. Equilibar branded tors and back pressure valves are used from ultra
products are made in the USA, and protected by US low pressure applications (down to 0.02 psi, 0.14
and foreign patents. kPg) up to 5000 psig (35000 kPag).

All of our products are assembled, inspected and

tested by trained technicians in Fletcher, NC.

Application Engineering . . .
How we are different
Unlike mass-market regulator distributors, everything
about Equilibar is focused on you, the scientist or
engineer with a unique pressure control challenge.
We assign an Application Engineer to you, typi-
cally within moments of your call. We work with
you closely to identify the optimum model, trim,
and diaphragm to best meet your challenge. You
can stay in touch with your Application Engineer by Instrument Series BPRs
email, telephone, mobile phone, or fax. Our new Instrument Series dome loaded back pres-
sure regulators offer performance up to 5000 psig
After installation, if there are any unexpected issues, and temperatures up to 3270C with the use of SS316
your Application Engineer is still available to sup- diaphragms and Kalrez® FFKM o-rings.
port you with start-up information or (if needed)
expedited replacement parts.

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