Documente Academic
Documente Profesional
Documente Cultură
6-Aug-13
JRRS-359-859
1784.15 151.97 < 5057.69 126.01 < 55.8
195.72 151.15 < 5235.58 183.11 < 124.28
1681.32 150.27 < 5173.88 171.22 < 115.34
JRRS-359-829
1496.11 150.09 < 4922.76 140.43 < 64.56
202.52 148.67 < 5166.41 178.08 < 147.33
500 wafers 1372.3 143.7 < 5137.12 192.25 < 170.02
(Total=750
wafers) JRRS-358-110
189.57 139.88 < 4455.03 114.77 < 86.22
194.07 149.52 < 4774.3 191.23 < 103.59
1606.62 148.81 < 4807.55 196.81 < 136.93
JRRS-357-532
199.04 150.55 < 4706.58 559.42 < 47.31
216.85 159.62 < 4910.24 600.67 < 80.21
1734.13 144.12 < 4523.54 543.74 < 76.87
7-Aug-13
JRRS-359-934
209.51 151.27 711.59 4989.53 118.49 < 106.4
193.86 145.89 565.9 4849.7 165.94 < 81.21
250 wafers 1104.37 144.54 519.73 5056.2 163.17 < 121.1
(Total=1000
wafers) JRRS-358-076
1792.87 144.31 634.7 4249.15 499.19 < 60.52
250 wafers
(Total=1000
wafers)
20-Aug-13
JRRS-254-077
1364.46 129.15 < 3560.2 78.15 < <
173.07 133.86 < 4453.74 85 < 82.47
1386.04 138.86 < 4520.36 107.08 < 67.02
JRRS-254-816
500 wafers 211.48 142.25 < 3804.42 81.04 < <
(Total=1500 177.19 142.46 < 4344.45 103.54 < 32.28
wafers) 995.32 141.95 < 4557.98 127.73 < 73.27
JRRS-254-618
218.44 140.35 < 4068.29 415.2 < <
190.35 139.96 < 4234.06 452 < 17.72
1493.99 146.32 < 4399.43 472.59 < 23.77
27-Aug-13
JRRS-357-523
233.96 145.31 < 4188.87 119.13 < 3.77
189.21 143.87 < 4618.01 150.81 < 6.41
300 wafers 1661.71 140.97 < 4488.94 159.47 < 5.44
(Total=1800
wafers) JRRS-357-281
159.9 131.11 < 3669.08 305.96 < <
163.42 133.41 < 3902.26 332.64 < 31.06
371.04 130.09 < 3808.55 327.64 < 19.76
28-Aug-13
JRRS-254-667
175.14 142.2 < 3735.72 106.67 < 7.34
173.29 138.32 < 4377.86 98.74 < 80.49
314.88 139.53 < 4554.48 111.89 < 28.05
JRRS-254-669
500 wafers 239.11 133.88 < 3463.46 92.27 < 4.06
(Total=2300
wafers) 169.05 138.74 < 4455.09 114.64 < 82.94
670.68 134.34 < 4214.04 100.88 < 30.5
JRRS-254-674
176.31 125.38 < 3290.62 233.71 < 4.34
168.15 130.83 < 3898.44 282.46 < 133.63
981.77 131.21 < 3725.3 281.43 < 14.14
29-Aug-13
JRRS-253-953
166.89 133.68 < 3952.7 106.58 < 76.52
175.87 132.91 213.51 4544.05 96.21 < 94.83
150 wafers 1540.69 134.06 < 4652.06 82.42 < 87.61
(Total=2450
wafers) JRRS-254-036
187.99 140.57 < 4108.23 191.1 < 63.47
182.85 146.12 < 4267.16 234.52 < 48.47
1496.34 147.88 < 4375.82 235.64 < 86.54
5-Sep-13
JRRS-360-300
175.06 136.13 < 3860.71 247.59 < <
182.52 135.53 < 3692.13 302.86 < <
1586.44 133.62 < 3721.99 292.67 < <
JRRS-360-040
100 wafers 284.65 139.09 < 3573.69 82.62 < <
(Total=2550
wafers) 159.65 134.12 < 3760.99 96.96 < <
456.96 141.15 < 3898.71 102.52 < <
JRRS-360-289
232.17 137.49 < 3834.84 91.23 < <
174.75 137.65 < 4568 97.94 < <
1578.42 133.94 < 4061.69 106.48 < <
Ti-Ka Cr-Ka Mn-Ka Fe-Ka Ni-Ka Cu-Ka Zn-Ka
E10 E10 E10 E10 E10 E10 E10
30-Jul-13
6-Aug-13
7-Aug-13
20-Aug-13
27-Aug-13
28-Aug-13
29-Aug-13
5-Sep-13
Al P S Cl Ca Mn Fe Ni
x y cps E10A/cm2 E10A/cm2 E10A/cm2 E10A/cm2 E10A/cm2 E10A/cm2 E10A/cm2
0 0 144.31 634.7 4249.15 499.19 60.52 ND 3.78 1.39
26 26 148.55 532.58 3986.65 578.92 60.09 ND 1.92 1.1
-26 -26 146.31 543.08 4404.92 499.84 69.23 0.99 2.45 1.67
Average 146.392 570.118 4213.571 525.984 63.28 0.33 2.717 1.389
Sigma 2.121 56.173 211.394 45.847 5.154 0.571 0.956 0.284
R(%) 2.896 17.912 9.927 15.158 14.431 300 68.344 40.911
C.V.(%) 1.449 9.853 5.017 8.716 8.144 173.205 35.193 20.456
NDlevel 22.91 14.4 8.32 2.28 0.4 0.3 0.25
<5 <5 <5 <5 <5 <5
Ti-Ka Cr-Ka Mn-Ka Fe-Ka Ni-Ka Cu-Ka Zn-Ka
E10 E10 E10 E10 E10 E10 E10
ND 3.78 1.39 1.09
ND 1.92 1.1 1.14
0.99 2.45 1.67 2.69
Zn *W-Lb
E10A/cm2 cps
1.09 1792.87
1.14 192.07
2.69 1670.42
1.642 1218.451
0.912 890.979
97.84 131.38
55.53 73.124
0.34