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semiconductor devices
Cite as: AIP Advances 9, 025102 (2019); https://doi.org/10.1063/1.5045090
Submitted: 16 June 2018 . Accepted: 02 January 2019 . Published Online: 04 February 2019
Electron tunneling properties of Al2O3 tunnel barrier made using atomic layer deposition in
multilayer devices
AIP Advances 9, 025018 (2019); https://doi.org/10.1063/1.5052163
© 2019 Author(s).
AIP Advances ARTICLE scitation.org/journal/adv
AFFILIATIONS
1
University of Siegen, Department of Electrical Engineering and Computer Science, Hölderlinstr. 3, 57076 Siegen, Germany
2
IEK5-Photovoltaik, Forschungszentrum Jülich, D-52425 Jülich, Germany
a)
email: stephanie.reidt@student.uni-siegen.de
ABSTRACT
An analytical model for illuminated p-i-n structures such as Solar Cells and related devices has been developed. Starting from
the semiconductor equations in their most general form, and introducing assumptions for the recombination and electrical field
functions, it is aimed at modelling not only the collection of photogenerated carriers but all transport mechanisms such as carrier
drift and diffusion. Using this model, the behaviour of thin film cells which is observed in operation is described in detail. This
includes the dependencies of I/V curves on temperature, insolation and spectral effects, and electronic materials properties. The
modeling of recombination effects results in a voltage dependent photocurrent where the carrier collection efficiency depends
on the bias voltage. This model allows for relatively fast calculation of I/V curves as it is computationally less extensive than full
device numerical simulations. Therefore it may be applicable for compact models i.e. in solar cell performance modelling.
© 2019 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license
(http://creativecommons.org/licenses/by/4.0/). https://doi.org/10.1063/1.5045090
a negative direction relative to the x axis. Curve (B) shows a where G0 = Generation rate at the surface of the cell. G0 is
uniform electrical field which has often been used in analyti- proportional to the insolation intensity and to the absorption
cal modelling such as in Refs. 3 and 10, as a constant function coefficient α.
greatly simplifies the handling of the semiconductor equa-
tions. It will also be employed for some simulations in this C. The recombination function
work. Curve (C) depicts an approximation of (A). Both the uni-
Next, for recombination a suitable function of the carrier
form as well as the hyperbolic approximation will be used in
concentrations needs to be chosen that represents the recom-
this work. The area below the respective curve equals the
bination mechanisms well. Furthermore, it has to be consid-
voltage drop across the i-layer, V i . For V i we write
ered that the chosen function will influence the form of the
Vi = Vbi − V, resulting differential equations, and possibly, their solvability.
Fundamental considerations lead to a Shockley-Read type
where V is terminal voltage of the cell, and V bi is the built-in of recombination function:12,13
potential.
In this work we will solve the semiconductor transport n(x) · p(x) − ni2
R = R(x) =
equations within the i-layer. The adjacent p and n-layers are τp · n(x) + τn · p(x)
accounted for through boundary conditions for the charge where τ n , τ p are the (average) carrier lifetimes.
carrier concentrations at the edges of the i-layer. The complexity of this function however would compli-
Also in this figure, the generation function G(x) is shown. cate the solution of the resulting differential equations. A lin-
G(x) is derived from the Lambert-Beer attenuation law and ear law has been proposed by Refs. 14 and 15, relating to the
therefore is represented by a decaying exponential function. recombination behavior of dangling bonds:
Relations).
Equations (3a) and (3b) are coupled via the recombina-
tion rate R that depends on carrier concentrations as well as
via E(x). G(x) also occurs in both equations, as it effects elec-
trons and holes in the same manner but irrespective of carrier
FIG. 3. Recombination rate profile according to the ASA simulations compared to
concentrations:
linear recombination law, at a forward bias of 0.5V and under STC illumination
G(x) = G0 e−αx , G0 = G0 (α), α = α(λ) (1000 W/m2 , AM1,5).
A. Parametrization
For calculating I/V characteristics the model needs to be
parametrized. The required parameters are listed in Table I.
The electrical field function in the i-layer is a function of
the voltage over the i-layer V i . In case of the uniform field the
electric field is simply Ei = V i /d (d: thickness of the i layer),
in case the electric field is non-uniform, the function needs
to be scaled such that that its integral over the i-layer equals
V i , see for example, Appendix A 2 b with a hyperbolic field
function. The built-in Voltage usually has a value of approx.
1.0-1.2V, depending on the material properties.20
1. Boundary conditions
Whereas the above parameters are inserted into the dif-
ferential equations prior to their solving, the following four
parameters are boundary values that adjust the charge carrier
FIG. 4. Fitted charge carrier lifetimes as functions of the terminal voltage. concentrations of majority and minority carriers at the edges
TABLE I. Parameter list for the analytical p-i-n model and the corresponding values we use.
of the i-layer, and therefore serve to determine the integration Under illumination, the minority carrier concentrations
constants in the solutions for the auxiliary functions q and m. significantly increase as is expected, for example under
Reasonable assumptions need to be made. The carrier concen- 1000W/m2 AM1.5 spectrum insolation at a terminal voltage of
trations at the boundaries may either be directly obtained by 0V:
fitting experimental results or we may use values from our ASA electron concentration (minority carriers) at p-i interface
simulations. We use results from the ASA simulations as these n(xpi ) = 1e17m-3 = n0pi
are readily available to us. Table II lists the effective doping hole concentration (minority carriers) at i-n interface
and carrier concentrations at the p-i and i-n interfaces from p(xin ) = 2.4e17m-3 = p0in
the ASA simulations.
Since amorphous silicon material is considered here, For our simulations, we interpolate these values linearly
these effective doping values correlate with free charge car- with the insolation power from their respective equilibrium
rier concentrations that are several orders of magnitude values up to the ASA values at 1000 W/m2 , as real cells exhibit
lower. Hydrogenated amorphous silicon material possesses an almost linear dependence of photocurrent on insolation.
high densities of localized states in the mobility gap.21 Large Semiconductor theory predicts that under illumination, a sec-
amounts of charge carriers are trapped in localized states ond term needs to be superimposed that is proportional to
qV
in the band gap and thus cannot contribute to current exp 2kT , which is expectable for a high injection situation,
transport. and has a prefactor of ñi = 1e11m-3 . These results are consistent
Under non-equilibrium conditions, semiconductor theory with ASA findings.
indicates that the majority concentrations almost stay at their So we get for the boundary values:
equilibrium levels, which is the case in dark forward opera- !
tion mode, but also under realistic illumination levels up to G G qV
n(xpi ) = n0pi · + ñi · · exp
1000 W/m2 . Likewise ASA predicts only a very slight increase GAM1.5 GAM1.5 2kT
compared with the dark case. We use the majority carrier !
concentrations given in Table II for all simulations. G G qV
p(xin ) = p0in · + ñi · · exp
For the minority carriers, the situation is fundamentally GAM1.5 GAM1.5 2kT
different. In dark forward operation of the solar cell diode,
basic semiconductor theory indicates that these boundary val- B. I/ V characteristics
qV
ues are proportional to exp kT , V being the terminal volt- Appendix B details the calculation procedure for a speci-
age, which is well in accordance with ASA results so that this fied working point. On the basis of this procedure, the follow-
relationship will be used for our simulations. ing simulations have been carried out:
1. Simulations with uniform electrical field
TABLE II. Doping and equilibrium carrier concentrations at the p-i and i-n interfaces For the calculation of I/V characteristics two types of
according to the ASA simulations electrical field function have been chosen for investigation:
A uniform field for the third-order differential equation and
Parameter Value
a uniform or a hyperbolic function for the second-order
effective doping concentration, p-layer 1.19e25 m-3 differential equation.
effective doping concentration, n-layer 1.1e24 m-3 The insolation is accounted for in the form of the
Lambert-Beer attenuation law (Appendix A 1) or, alternatively
p-i interface
if it simplifies the mathematical evaluation, as a converging
hole concentration (majority carriers) 1.37e19 m-3
electron concentration (minority carriers) 6.7e3 m-3 Taylor series expansion of the exponential function. Losses
and gains resulting from refraction and reflection at the front
i-n interface
surface of the cell or at the back contact are not considered.
hole concentration (minority carriers) 52 m-3
Fig. 5 shows I/V characteristics of the illuminated cell for
electron concentration (majority carriers) 1.8e21 m-3
temperature variation:
FIG. 5. Variation of temperature in illuminated I/V characteristics, 2nd or 3rd order FIG. 7. Variation of parameter κ −1 proportional to the holes’ lifetime under constant
DE, uniform electrical field. illumination - 3rd order differential equation compared to 2nd order DE.
The I/V curves in Figs. 5 and 6 show the basically that the short circuit current and the fill factor of the curves
expected behavior when varying the cell temperature or the are lower, due to the comprehensive recombination influ-
illumination power, as is observed in practice. ences that the 3rd order equations include.
The fill factors of the 2nd order DE characteristics are rel- Appendix C details simulations with non-uniform electri-
atively high due to the fact that the 2nd order DE neglects a cal field and spectral effects on the shape of simulated I/V
part of the recombination processes in the cell, as the terms curves.
comprising the factors a and b in Eqs. (A4a) or (A5b), resp.
are neglected. On these grounds the curves closely resem- 2. Effects of material degradation
ble the Shockley exponential diode function, and therefore the The 2nd order DE (see Appendix A) does not account for
behavior of solar cells of low defect materials which possess a recombination in the same way as the 3rd order DE does (as
smaller density of states in the bandgap that can be active as the influence of the parameters a, b or the coupling κ, see
recombination centers. Appendix A 1 and A 2 respectively has been neglected). Inves-
I/V characteristics calculated by means of the 3rd order tigating more closely the effect of the coupling κ via the 3rd
DE also show the expected behavior concerning cell temper- order DE leads to the result that its value has a strong impact
ature and insolation power (Figs. 5 and 6). Compared to the on the fill factor, and at the same time, on short circuit current
characteristics calculated from the 2nd order DE, it is obvious and on the open circuit voltage as shown in Fig. 7.
The basic relation of carrier lifetimes to the fill factor has
been shown before.15 , 22
µ τ
An increasing value for κ or a decreasing κ −1 = µnp τpn means
that the carrier mobility and lifetime product becomes more
asymmetrical with the holes being the carriers with shorter
lifetime.
An identical reduction of both lifetimes, that of electrons
and holes, leads to a less lowered fill factor but to a signifi-
cant reduction of both short circuit current and open circuit
voltage.
and the tendencies the model shows are very well consistent x √ √ √
√ = x1 → dx = µn1 τn dx1 , E1 µn1 τn = E2 , α µn1 τn = α1
with the behavior of real cells. µn1 τn
The model presented above is capable of calculat-
ing charge carrier concentration profiles and current den- Thus the factor √µ 1 τn appears in almost all terms in the
n1
sity components for both drift and diffusion transport differential equations
This form suggests to expand the system by µn1 τn . The differ- κn1 + p1 = q
ential equations then become
and
d2 n d τn a = 1 − κ,
+ (E2 · n) − n − p = −G0 τn e−α1 x1
dx1 2 dx1 τp
b = 1 + κ.
d2 p d µ µ τn µ τn The system of equations may now be rewritten as
− (E2 · p) − n1 n − n1 p = −G0 n1 e−α1 x1 .
dx1 2 dx1 µp1 µp1 τp µp1
m00 + (E2 q)0 = 0 (A2a)
Next, the charge carrier concentrations are scaled with the
q00 + (E2 m)0 − a · m − b · q = −G1 e−α1 x1 , (A2b)
lifetimes τn , τp .
where 2κ G0 = G1 .
c. 3rd transformation The next step will be made with the objective of merg-
ing the above system of equations into only one differential
n = n1 · τn ,
equation with only one variable.
p = p1 · τp Equation (A2a) can be formally integrated and solved for
m‘ and m, respectively:
d2 n1 d τn
τn + τn (E2 · n1 ) − τn n1 − τp p1 = −G0 τn e−α1 x1 m0 + E2 q = KA ,
dx1 2 dx1 τp
KA : integration constant
d2 p1 d µ µ τn µ τn
τp − τp (E2 · p1 ) − τn n1 n1 − τp n1 p1 = −G0 n1 e−α1 x1
dx1 2 dx1 µp1 µp1 τp µp1 m0 = KA − E2 q (A3a)
r r
the electrical field varies only slightly and can therefore be 4P 1 Q −27 + π +
λ3 = − − · cos* · arccos*− −
assumed as almost constant. From this point of view, it makes 3 3 P3 - 3 -
, 2
sense to investigate the solutions of the problem with uniform
,
electrical field in the first step. Therefore the solution of the homogeneous differential equa-
With E2 = const. equations (A2a) and (A2b) become tion
qH (x1 ) = C1 eλ1 x1 + C2 eλ2 x1 + C3 eλ3 x1
m00 + E2 q0 = 0 (A5a) is influenced by the parameters E2 and κ and depends on the
q00 + E2 m0 − a · m − b · q = −G1 e−α1 x1 (A5b) actual operating point/cell voltage.
Next, the inhomogeneous differential equation needs to
By one-time differentiation of (A5b) and subsequent substitu- be solved:
tion of equations (A2a) solved for m00 and (A3a) solved for m0
into it the differentiated equation (A5b) it becomes q000 − (E2 2 + b)q0 + a · E2 q = a · KA + G1 α1 e−α1 x1
q000 − E2 2 q0 − b · q0 − a · (KA − E2 q) = G1 α1 e−α1 x1 The particular integral can be found by using an ansatz cor-
responding to the functional type of the source term which
or consists of a constant in addition to a term proportional to
q000 − E2 2 + b q0 + a · E2 q = a · KA + G1 α1 e−α1 x1 ,
(A5c) e−α1 x1 :
resp., with all source terms on the right side. qp = K1 + K2 e−α1 x1 → q0p = −α1 K2 e−α1 x1 , 3 −α1 x1
p = −α1 K2 e
q000
Thus, assuming an uniform electrical field, a linear
3rd order differential equation with constant coefficients is Substituting the derivatives into the inhomogeneous equation
obtained. This is a solvable problem. The homogeneous equa- yields
tion is
−α1 3 K2 e−α1 x1 − (E2 2 + b)(−α1 )K2 e−α1 x1 + a E2 (K1 + K2 e−α1 x1 )
q000 − E2 2 + b q0 + a · E2 q = 0
Q = a E2 . From the result for q(x) the function m(x) can be calculated:
resulting integrals may require a numerical or approximate and hence the homogeneous differential equation has the two
evaluation where needed, that is, usually at x1 =0 and x1 =D1 . solutions
In the following we will exemplify the solution of Eq. (A10) q1 (x1 ) = C1 eΦ(x1 ) = C1 x1 −A2
for a hyperbolic electric field distribution within the cell. For and
instance consider the function E(x) = A/x which corresponds q2 (x1 ) = C2 e−Φ(x1 ) = C2 x1 A2
to E2 (x) = A2 /x1 in transformed quantities. At the p-i interface The particular integral is
this function bears a resemblance to the E(x) function that can
A2 KA − KB 2g0 3/2g1 4/3g2
be expected in a real cell (see Fig. 2, curve C). qp (x1 ) = x1 + x1 2 + x1 3 + x1 4
The transformed exponential function G1 (x1 ) is approx- A2 2 − 1 A2 2 − 4 A2 2 − 9 A2 2 − 16
imated by the first three terms of its Taylor series: G1 (x1 ) and hence the complete solution is
= g0 + g1 x1 + g2 x1 2 so all functions involved here are power func-
tions which facilitates the integration. The power series need A2 KA − KB 2g0
q(x1 ) = C1 x1 −A2 + C2 x1 A2 + x1 + x1 2
to be chosen so that they converge well enough. A2 2 − 1 A2 2 − 4
For the given E(x) the function of the electrical potential, 3/2g1 3 4/3g2
Φ, is as follows: + 2 x1 + 2 x1 4 (A13)
A2 − 9 A2 − 16
A2
Φ(x1 ) = − dx1 = −A2 ln(x1 ) The constants C1 , C2 , KA , KB are calculated from
x1
A2 −1
xu −A2 x u A2 xu xu
2
A2 − 1 2
A2 − 1 q(x1u ) − P2 x1u 2 − P3 x1u 3 − P4 x1u 4
A2 −1 C1 2 3 4
x −A2
o xo A2
xo xo q(x1o ) − P2 x1o − P3 x1o − P4 x1o
2 2
A2 − 1 C2 A
A2 − 1
A2 2 · =
A2 − 2 KA −
2
(
· m(x1u ) − (g0 + 2P2 ) · x1u + (g1 /2 + 3P3 ) · x1u 2 + (g2 /3 + 4P4 ) · x1u 3
)
−A2 xu −A2 −1 A2 xu A2 −1 x1u
2 2
A2 − 1 A2 − 1 K A2 ( )
/2 2 + (g /3 + 4P ) · x 3
2 B − · m(x 1o ) − (g 0 + 2P 2 ) · x1o + (g 1 + 3P 3 ) · x 1o 2 4 1o
A2 A2 − 2 x1o
−A2 xo −A2 −1 A2 xo A2 −1 2 2
A2 − 1 A2 − 1
where Substitute eqs. (1a) and (1b) into eq. (A14a) we obtain
2g0 3/2g1 4/3g2 d2 d d2
P2 = P3 = P4 =
2
, 2
, 2 2
(Dn · n(x)) + µn (E(x) · n(x)) − 2 Dp · p(x)
A2 − 4 A2 − 9 A2 − 16 dx dx dx
d
and the boundary values for m are applied via equation (A9b) + µp (E(x) · p(x)) = 0
dx
in the form
Apply transformations 1 to 4 as introduced in chapter one:
E2 m = − G1 e−α1 x1 dx1 + KB − q0 .
( 2
d2 n1
)
d −1 d p1 d
+ (E 2 · n1 ) − κ − (E 2 · p1 ) =0
c. Relevance and meaning of the constant KA dx1 2 dx1 dx1 2 dx1
In the following we illuminate the background of the con- or
n001 + (E2 n1 )0 − κ −1 p00 1 − (E2 p1 )0 = 0
( )
stant KA that has occurred in all solutions to our differential
equations. multiplying with κ yields
Starting from equations (3a) and (3b), the subtraction of
both yields (κ · n1 − p1 )00 + (E2 (κ n1 + p1 ))0 = 0
1 djn 1 djp
+ =0 (A14a) m00 + (E2 q)0 = 0 (A2a0 )
q dx q dx
and This is again equation (A2a) as derived before. The constant
djn djp KA ensues from formal integration and is proportional to the
=− ,
dx dx current density in the cell
respectively.
This is equivalent to continuity of the current density dn dp
J = qµn nE + qDn + qµp pE − qDp (A14c)
throughout the device as dx dx
which is (A14a) with (1a), (1b) substituted into it, then we apply
djn djp
!
+ dx =jn + jp = J = const. (A14b) transformations 1 to 3 which lead to the form of
dx dx ( ) J
n01 + E2 n1 − κ −1 p0 1 − E2 p1 = √
which is eq. (A14a) integrated with respect to x. q µn1 τn
1 1 1 q(0) − K2
e λ 1 D1 e λ 2 D1 e λ 3 D1 q(D ) − K e−α1 D1
1 2
E E E E
W4 = − 2 −
2
−
2
m(0) −
2
K2
λ1 λ2 λ3 α1
E2 λ1 D1 E2 λ2 D1 E2 λ3 D1 E2 −α1 D1
−
λ e − e − e m(D 1 ) − K 2 e
1 λ2 λ3 α1
APPENDIX B
1. Example: Calculation of charge carrier
concentrations in a specified working point
The following simulations have been carried out solving
the 3rd order DE and using the parameters as specified above.
For demonstration of the calculation process, we examine a
working point at V = 0.6V which is near the Maximum Power
Point (MPP) of the considered cell.
In a first step we calculate the auxiliary functions q(x1 ) and
m(x1 ) the results of which are shown in Fig. 9a. The auxiliary
functions then undergo reverse transformations back to n(x)
and p(x) quantities applying the inverse of transformations 4,
3 and 2 (Section A.1, Appendix A). In Fig. 9b we show the car-
rier concentrations corresponding to the auxiliary functions
in Fig. 9a. From the charge carrier concentrations, current
components are calculated both for both drift and diffusion
transport (Fig. 9c).
Figure 9c demonstrates that in every x position, the
total current density as the sum of all current components,
is constant. Though the individual components can assume
very high values, far out of the depicted range, all current
densities add to the same value at any location in the cell,
FIG. 9. (a) Auxiliary functions m, q as calculated by 3rd order DE. (b) carrier
which is required by current continuity (see Appendix A 2 c,
concentrations n(x), p(x). (c) Current Components.
eq. (A14b)).
APPENDIX C
1. Simulation with non-uniform electrical field:
Collection efficiency
The effect of a non-uniform electrical field may be
demonstrated using the 2nd order DE. We use the approach of
Appendix A 2 b/hyperbolic field function in combination with
the variation of constants method.
Fig. 10 demonstrates how the asymmetry of the electrical
field influences the charge carrier collection. In this example, a
small Emax /Emin ratio near 1 corresponds to an almost uniform
field function, whereas as the ratio increases, the function
assumes a more hyperbolical form with a pronounced peak at
the p-i interface:
The ratio of maximum and minimum field value was
obtained by shifting the field function in x direction, scal-
ing it on the whole by a proportionality factor as required by
the applied terminal voltage. Emax is the field value at the p-i FIG. 11. Variation of wavelength at constant irradiated power density, 3rd order DE.
interface whereas Emin is the electrical field value at the i-n
interface.
The short circuit current increases as generated charge
carriers near the p-i interface are influenced by a higher field
intensity and the collection efficiency of the generated charge
carriers increases in basically the same way as shown by other
authors.26
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