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  • Book of Abstracts, COST MP1402 Scientific Workshop, "ALD and Related Ultra-Thin Film Processes For Advanced Devices" Belgrade, Serbia, August 29-30, 2017

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    Olga Jakšić
    22 vizualizări48 pagini
    Centre of Microelectronic Technologies (CMT), Institute of Chemistry, Technology and Metallurgy, University of Belgrade organizes the Workshop "ALD and related ultra-thin film processes for advanced devices", with the support of European Cooperation in Science and Technology in the frame of COST Action MP 1402 HERALD. The workshop was held in the building of the Serbian Academy of Sciences and Arts, Belgrade, Serbia, on August 29th and 30th, 2017. www.nanosys.ihtm.bg.ac.rs/Herald2017

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    Book of abstracts, COST MP1402 Scientific Workshop, "ALD and related ultra-thin film processes for advanced devices" Belgrade, Serbia, August 29-30, 2017

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    Centre of Microelectronic Technologies (CMT), Institute of Chemistry, Technology and Metallurgy, University of Belgrade organizes the Workshop "ALD and related ultra-thin film processes for advanced devices", with the support of European Cooperation in Science and Technology in the frame of COST Action MP 1402 HERALD. The workshop was held in the building of the Serbian Academy of Sciences and Arts, Belgrade, Serbia, on August 29th and 30th, 2017. www.nanosys.ihtm.bg.ac.rs/Herald2017

    Drepturi de autor:

    © All Rights Reserved
    Descărcați ca PDF, TXT sau citiți online pe Scribd
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    22 vizualizări48 pagini

    Book of Abstracts, COST MP1402 Scientific Workshop, "ALD and Related Ultra-Thin Film Processes For Advanced Devices" Belgrade, Serbia, August 29-30, 2017

    Încărcat de

    Olga Jakšić
    Centre of Microelectronic Technologies (CMT), Institute of Chemistry, Technology and Metallurgy, University of Belgrade organizes the Workshop "ALD and related ultra-thin film processes for advanced devices", with the support of European Cooperation in Science and Technology in the frame of COST Action MP 1402 HERALD. The workshop was held in the building of the Serbian Academy of Sciences and Arts, Belgrade, Serbia, on August 29th and 30th, 2017. www.nanosys.ihtm.bg.ac.rs/Herald2017

    Drepturi de autor:

    © All Rights Reserved
    Descărcați ca PDF, TXT sau citiți online pe Scribd
    Indicator pentru conținut neadecvat
    din 48

    U N I V E R S I T Y O F B E L G R A D E

    I nsti tu te of Chemi str y, Te ch nol o g y a n d M etallur g y


    Centre of Microelectronic Technologies

    Book of Abstracts

    COST MP1402 SCIENTIFIC WORKSHOP

    ALD and related ultra-thin film


    processes for advanced devices

    29 30 August 2017, Belgrade, Serbia


    ISBN 978-86-81405-22-2

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