Capacitive sensors for displacement,

distance and position

Capacitive measurement
system and sensors with
micrometer resolution for
linear measurement of
displacement, distance
and position ideal for
insulators and
semiconductors
Non-contact capacitive sensors also known as
oszillation sensors, flatness sensor, position
sensor, dislocation sensor, displacement sensor,
distance sensor, heat resistant, stable, robust,
industry sensor, measurement system for layer
thickness, thickness measurement, gap,
compact measurement system for elongation,
also for customer-specific OEM sensors
 capaNCDT 6019
Technical specifications
Measuring principle
The operating principle of non-contact capacitive displace-
ment measurement used by the capaNCDT system (capaci-
tive Non-Contact Displacement Transducer) is based on the
ideal parallel plate capacitor. The two plate electrodes are
formed by the sensor and the target opposite. If an AC
current with constant amplitude flows through the sensor
capacitor, the amplitude of the AC voltage on the sensor is
proportional to the distance between the capacitor electro-
des; an adjustable compensating voltage is simultaneously
generated in the amplifier electronics. After demodulation of
both AC voltages the difference is amplified and output as an
analog signal.
Electrical conductors as targets
The linear characteristic of the measurement signal is
achieved without extra electronic linearization when measu-
ring against targets made of electrically-conductive materials
(metals). Changes in the conductivity do not affect sensitivity
or linearity.
Linearization and calibration
capaNCDT 6019 system is factory-calibrated for metallic
targets (output 0-10 Volt). In critical sensor mounting
conditions, the rated range of the output characteristic can
be adjusted and optimized, through the use of the zero and
gain potentiometers.
Tri-Electrode technology with active guarding
Due to the unique design of the MICRO-EPISLON Tri-
Electrode sensor probes in conjunction with the active
guarding technology the capaNCDT 6019 system enables
extreme signal stability and immunity.
Active guarding for stable measuring results
MICRO-EPSILON capaNCDT sensor
measuring electrode ground
guard ring electrode homogeneous
measuring field
guard field
For machine integration
The non-contact capacitive displacement measuring system
capaNCDT 6019 is developed for machine and facility
integration. The compact design, the special performed
technical data and the low cost prices make the system
ideally suited for OEM applications. The capacitive principle
allows to measure against any conductive target -
furthermore, it ensures very stable and very accurate
measuring results. Typical applications can be found in
positioning, wear measurements, gap measurements,
displacement, roundness and other.
Instant sensor swap within 5 seconds!
Replace any capaNCDT controller and any capaNCDT sensor
within seconds without recalibration !
controller
Instant sensor swap without recalibration
The unique MICRO-EPSILON capacitive technology allows
changing any capaNCDT sensor in seconds! Replacing
sensors with different measuring ranges and any capaNCDT
controller without recalibration. A sensor swap with
capaNCDT needs no more than 5 seconds, while other
capacitive systems are not designed for replacing compo-
nents without the need of individual calibration and lineariza-
tion.
Common capacitive sensor
measuring electrodes
ground
erratic
measuring
field
Technical data

capaNCDT 6019: single channel system (SMD-model with integral sensor connecting cable)
Model S601-0.2 S600-0.5 S600-1 CS2 CS3 CS5 CS10
Measuring range 0.2 mm 0.5 mm 1 mm 2 mm 3 mm 5 mm 10 mm
Resolution (static) ? 0.01% FSO
Linearity ? 1% FSO
Frequency response 500 Hz (-3dB)
Active measuring area (diameter) 2.3 mm 3.9 mm 5.5 mm 7.9 mm 9.8 mm 12.6 mm 17.8 mm
Guard ring width 1 mm 1.4 mm 1.5 mm 4 mm 8.1 mm 11.8 mm 18.1 mm
Sensor connecting cable 120mm, triax angle connector
Storage temperature -10°C to 70°C
Operation temperature 10 °C to 50 °C
Air humidity 5% to 95% r.H., non-condensing
Min. load resistance 2 kOhm
Output 0 to 10V (within measuring range)
Power supply ± 15V DC
Max. permissible power supply voltage ± 18V DC
Min. required power supply voltage ± 12V DC
Current consumption (±15V) max. -7 mA / +10 mA (end of measuring range)
Voltage output short circuit proof
Temperature stability ? 0.05% FSO / °C (+10°C to +50°C)
Sensors 2g 4g 8g 48 g 65 g 95 g 180 g
Weigth
Controller 60g
Measuring target any conductive target
FSO = Full scale output
Technical specifications are valid for electrical conductors (metal) as reference material at 20 °C (68 °F) ambient temperature
and for the standard length (0,12 m) of the sensor cable.

The high linearity is in the measuring principle Sensor installation

The capaNCDT system evaluates the reactance Xc of the All sensors can be installed free-standing or flush and are
capacitor which changes strictly in proportion to the secured by clamping or with a chuck.
distance:
Xc =
1
j wC
capacitance C = er e0 area
distance Clamping ring mounted Grub screw mounted
(plastics)
Xc = constant distance

This theoretical relationship is put into practice by

constructing the sensors as guard ring capacitors.
capaNCDT 6019 Sensors and Controller - dimensions in mm (rounded inch), not to scale

S 601-0.2 S 600-0.5 S 600-1 Dimension Fit tolerance (µm)

7 h7 0 -15
7 f7 - 13 -28
Ø 6e7 (0.12)
Ø 6 (0.24)

8 h7 0 -15

Ø 10f7 (0.39)
Ø 8h7 (0.31)
5 (0.20) 12 (0.47)
21 (0.83) 20 h7 0 -21
12 (0.47)
6 f7 - 10 -22
6 e7 - 20 -32
10 f7 - 13 -28

CS2 CS3 CS5 CS10

Ø 20h7 (0.79)

ø20h7 (0.78)

ø30h7 (1.17)

ø20h7 (0.78)
ø20h7 (0.78)

ø40h7 (1.56)

ø60h7 (2.34)
24 (0.94)
16.5 (0.65)
16.5 (0.65)
24 (0.94)
24 (0.94)
= connector
16.5 (0.65)
24 (0.94)

DT6019-B with angle connector for sensors S 600-1 - CS10 DT6019-C with angle connector for sensors S 601-0.2 and 600-0.5
ø9 (0.35)

ø2.2 (0.09)

ø4 (0.16)

ø24.4 (0.96)
16 (0.63)
8 (0.31)
13.1 (0.67)
16.9 (0.67)

ø6 (0.24)
30.6 (1.20)

ø5.4 (0.21)
ø10 (0.39)
10 (0.39)

17.5 (0.69)

DT6019 Single-Channel-Controller 8.2 (0.32)

21 (0.83)
40 (1.57)
24 (0.94)
6.5 (0.26)

10 (0.39)

4 mounting holes M3
3 (0.12)

1x45°

terminal block
8 (0.31)

66 (2.60) 3.25 (0.13)

72.5 (2.85)

MICRO-EPSILON
info@micro-epsilon.com info@micro-epsilon.co.uk info@micro-epsilon.us certified DIN EN ISO 9001 : 2000
www.micro-epsilon.com www.micro-epsilon.co.uk www.micro-epsilon.us modifications reserved / Y9761169-A010075MLO