No.

VP-1004

SMALL
VACUUM
PUMPS
C ATA L O G

Creating the possibilities of vacuum pump technology

www.ulvac-kiko.com/en
 ULVAC KIKO
Serves a Wide Variety of Industries
We ULVAC KIKO provide vacuum pumping
solutions for various industries and
applications. We manufacture, sell and
provide customer support of small vacuum
pumps with high-performance, high-reliability
and high-quality. We are one of the member of
world' leading vacuum technology group,
"ULVAC GROUP"

Head Office & Factory (Miyazaki Japan)

EXPERTISE
developed by firm reliability
achieved through working
in the consumer business.

As a Manufacturer
Specializing in
CUSTOMER Small Size Vacuum Pumps
SATISFACTION
through our wide variety of
products and reliable support.
TOTAL SUPPORT
by ULVAC GROUP

Units conversion table

Temperature Pressure units Dimensions
°C °F Pa mbar Torr mm Inches Inches
0 32 1 10-2 7.5 × 10 -3 3.1750 1/8 0.1250
10 50 100 1 0.75 6.3500 1/4 0.2500
民生事業で培った
9.5250 3/8 0.3750
20 68 133 1.33 1
確かな信頼性による
30 86 1.33 × 104 133 100 12.70000 1/2 0.50000
40 104 4.0 × 104 400 300 技術力 19.0500 3/4 0.7500
50 122 1.013 × 105 1.013 × 103 760 25.4000 1/1 1.0000
60 140
70 158
Pumping speed units
80 176 L/min m3/h cfm
90 194 L/min = L × min-1
1.0 0.06 0.035
m3/h = m3 × h-1 16.67 1.0 0.589
小型真空ポンプの
100 212
cfm = cubic feet/min 28.32 1.699 1.0

専門メーカーとして
豊富な品 えと
きめ細かな対応による アルバックグループの
2| SMALL VACUUM PUMPS CATALOG
顧客満足 総合力による
C O N T
Diaphragm Type
Dry
DAP-6D····································6
Vacuum
Pumps DAP-12S··································6
DA-30D···································7
DA-60S····································7
DAT-50D··································7
DAT-100S·································7
DA-20D···································8
DA-40S····································8
DA-41D···································8
DA-81S····································8
DA-60D···································9
DA-120S··································9
DA-121D·································9
DA-241S··································9
High Vacuum Type
DAU-20··································10
DTU-20···································10
Anti-corrosive Type
DTC-22···································11
DTC-41···································11
DTC-60···································11
Rocking Piston Type
DOP-40D································12
DOP-80S·································12
DOP-80SP·······························12
DOP-300SA····························13
DOP-420SA····························13
Scroll Type
DIS-90····································14
DIS-251··································14
DIS-501··································14
DISL-101·································15
DISL-502·································15
Standard Type
Direct Drive
GLD-040·································16
Oil-Sealed
Rotary GLD-136A·······························16
Vacuum GLD-136C·······························16
Pumps GLD-201A·······························17
GLD-201B·······························17
GLD-280A·······························17
GLD-280B·······························17
GHD-031································18
Mechanical Booster Pump
MBS-051·································18
Anti-corrosive Type
GCD-051X······························19
GCD-136X······························19
GCD-201X······························19
E N T S
Hight Speed Vacuum coater
System
VPC-1100·······························20
Vacuum coater "DEPOX"
VFR-200M/ERH·······················21
VWR-400M/ERH·····················21
VTR-350M/ERH·······················21
VTS-350M/ERH·······················21
Sputtering System
RFS-200··································22
"SCOTT-C3" VTR-150M/SRF····23
Attachment of Oil Rotary Vacuum
Optional
Pump Optional parts··············24
Parts
Fore-line Trap························25
Vacuum Pump Suction and
Exhaust Filter······················25
Vacuum Pump Oil·················26
Oil-mist Trap·························26
In-line Trap ··························26
Adapter for Trap···················26
Oil-mist Separator·················26
Clamp··································27
Centerring····························27
Blank Flange·························27
Nozzle·································27
Nipple·································27
Elbow···································27
Tee······································27
Cross···································27
Reducer································27
KF Flange·····························27
VCR Adapters·······················28
Gauge port··························28
Leak port······························28
Flexible tube·························28
Rubber Vacuum Hose············28
Suction and Exhaust Pipes for
Oil Rotary Vacuum Pumps·······29
Dry pump·····························30
Outline Oil pump······························33
Drawing
System·································35
3
 Pump Selecting Process
Below calculation and Pumping speed curves are available for selecting suitable pump

1. Calculation of Pumping time and

Pumping speed. V Tank Volume
(L) P1 First pressure
( Pa )
t = × 2.303 log
( min ) S
Pumping time Pumping speed
( L/min ) P2 Ultimate pressure
( Pa )

t0 = t1 + t2 + t3 + ……
50Hz

140
example 1 We want to decrease pressure from atmospheric pressure (100kPa) to 10kPa in 50 liter of
tank within
120 5 minutes.
Which pump is suitable?
100

80

DA-121D
60
DA-60D
40 DAT-50D From calculation, more than 23 L/min pumping
DA-30D speed is required, select faster pumping speed
20
DA-20D more than DA-30D pump.
(L/min)

Please allow safe rate with considering pipe

conductance7 and leak.
4
0 1×10 2 3 4 5 6 7.6
Pa

V 50 P1 100000
S = × 2.303 log
t 5 P2 10000

S 23 L /min (at 10000Pa)

example 2 How long does it take to decrease

pressure from atmospheric pressure v P1 First pressure
S= × 2.303Log
t P2 Ultimate pressure
(100kPa) to 13kPa in 80 liter of tank?
DA-121D is used at this case. Atmospheric 80 101324
pressure 90kPa S1=124L/min t1= 124 2.303 log
90000
=0.08

90kPa × 80kPa S2=123L/min t2= 80 2.303 log

90000
=0.08
123 80000
80kPa × 70kPa S3=122L/min t3= 80 80000
(L/min) 50Hz
2.303 log =0.09
140 122 70000
DA-121D 70kPa × 60kPa S4=120L/min t4= 80 2.303 log
70000
=0.10
120 120 60000
100 60kPa × 50kPa S5=116L/min t5= 80 2.303 log
60000
=0.13
116 50000
Pumping Speed

80 50kPa × 40kPa S6=111L/min t6= 80 2.303 log

50000
=0.16
111 40000
40kPa × 30kPa S7=108L/min t7= 80 40000
60
2.303 log =0.21
108 30000
40
30kPa × 20kPa S8=96L/min t8= 80 2.303 log
30000
=0.34
20
96 20000
20kPa × 13kPa S9=86L/min t9= 80 2.303 log
20000
=0.40
86 13000
0 1 2 3 4 5 6 7 8 9 10
×10kPa
Pressure L/min t0 = t1 + t2 ~ + t9 = 1.59min

4| SMALL VACUUM PUMPS CATALOG

 Last process of suction
(Bottom dead center)
Diaphragm Retainer
Exhaust Valve
Suction Valve

Movement Principles for Each Type of Vacuum Pumps

• Diaphragm Type Dry Vacuum Pumps Diaphragm • Rocking Piston Type Exhaust Suction
Dry Vacuum Pumps port port
Suction Valve completely opens.
Last process of suction Exhaust valve keep closed.
(Bottom dead center)
Diaphragm Retainer Piston
Exhaust Valve Last process of exhaust
(Top dead center)
Suction Valve

Diaphragm
Suction Valve keeps closed
Suction Valve completely opens.
as pressed.
Exhaust valve keep closed.
Exhaust valve completely open Rotary axis
as pressed. center
Last process of exhaust
(Top dead center)
• Scroll Type Dry Vacuum Pumps • Oil-Sealed Rotary Pumps

gas exhaust valve suction port

Compression Suction port
space Orbiting Scroll Exhaust port

Suction Valve keeps closed Suction process

as pressed. Exhaust process
Exhaust valve completely open
Fixed scroll Pressure process
as pressed.
(a) Suction completion (b) suction compression 1 compression 2 exhaust

Exhaust process of exhaust suction

2 stage Oil-Sealed valve port

Rotary Pumps

(d) (c)

A Guide to Our Catalog

Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing Type of Pump
CE marked Diaphragm Type Dry Vacuum Pumps

TUV marked DAP Series DAP-6D DAP-12S DAP-12S

Features Applications
CSA marked Diaphragm type pump creates vacuum by reciprocate movement of • Vacuum chucks, wafer and tip handling devices.
rubber diaphragms. • Vacuum tweezers, medical appliances.
Pump structure make Oil-free environment and maintenance easy. • Printing equipment. Actual pumping speed
cTUVus marked DAP series is the smallest diaphragm pump from our product ranges and • Automatic packing machines.
offers pumping speed at 6L and 12 L/min at 50Hz. • Optical appliances.
• Sterilizer. The numbers show
(compliance to U.S. and Canadian National Standards) the actual pumping
speed at 50 Hz.
※ cTUVus is equivalent to UL/CSA standard.
The number will
increase 20% with
Indicates the actual pumping speed in 60 Hz.
atmospheric pressure. Some other DAP-6D DAP-12S

companies show the number of nominal Specifications

pumping speed. In that case you can Model DAP-6D DAP-12S

compare the speed by increasing our rate

Unit 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 6 7 12 14

20 %.
Ultimate pressure Pa 6.65 × 103 24.0 × 103
Motor Single phase, 100V, 10W, 4P, Capacitor run Single phase , 100V, 10W, 4P, Capacitor run
Full load current A 0.5 0.5
Weight kg 1.9 1.9

When the pump achieves this ultimate Inlet, outlet pipe

diameter
mm (Rc 1/8) (Rc 1/8)

pressure the pumping speed becomes 0. Ambient temperature

Overall dimensions
℃
mm
0 – 40
93(W) × 163(L) × 100.6(H)
0 – 40
93(W) × 163(L) × 100.6(H)

Indicates the motor rating. Corresponding voltage and Certificate Pumping speed curves
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked (L/min)
50Hz
40
Single phase, 100V Standard — — —

Basic machine weight including the power DAP-6D

Single phase, 115V
Single phase, 200V
— —
—
—
—
—
—

cord. Single phase, 220—240V

Single phase, 100V Standard
—
—
—
—
—
—
30

Single phase, 115V — — — —

DAP-12S
Pumping Speed

Single phase, 200V — — —

Indicates the standard inlet, outlet diameter. Single phase, 220—240V — — — 20

DAP-12S

For request on different sizes, please

contact us.
10
DAP-6D

Use the pump within this atmospheric 0 1 2 3 4 5

Pressure
6 7 8 9 10
(×10kPa)

temperature range. ※ Further details can be refered to our website. Outside drawing appears in Page 30.

6| SMALL VACUUM PUMPS CATALOG

Corresponding voltage and Certificate

5
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Diaphragm Type Dry Vacuum Pumps

DAP Series DAP-6D DAP-12S

Features Applications
Diaphragm type pump creates vacuum by reciprocate movement of • Vacuum chucks, wafer and tip handling devices.
rubber diaphragms. • Vacuum tweezers, medical appliances.
Pump structure make Oil-free environment and maintenance easy. • Printing equipment.
DAP series is the smallest diaphragm pump from our product ranges and • Automatic packing machines.
offers pumping speed at 6L and 12 L/min at 50Hz. • Optical appliances.
• Sterilizer.

DAP-6D DAP-12S

Specifications
Model DAP-6D DAP-12S
Unit 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 6 7 12 14
Ultimate pressure Pa 6.65 × 103 24.0 × 103
Motor Single phase, 100V, 10W, 4P, Capacitor run Single phase , 100V, 10W, 4P, Capacitor run
Full load current A 0.5 0.5
Weight kg 1.9 1.9
Inlet, outlet pipe
mm (Rc 1/8) (Rc 1/8)
diameter
Ambient temperature ℃ 0 – 40 0 – 40
Overall dimensions mm 93(W) × 163(L) × 100.6(H) 93(W) × 163(L) × 100.6(H)

Corresponding voltage and Certificate Pumping speed curves

Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked (L/min)
50Hz
40
Single phase, 100V Standard — — —
Single phase, 115V — — — —
DAP-6D
Single phase, 200V — — —
Single phase, 220—240V — — —
30
Single phase, 100V Standard — — —
Single phase, 115V — — — —
DAP-12S
Pumping Speed

Single phase, 200V — — —

Single phase, 220—240V — — — 20

DAP-12S

10
DAP-6D

0 1 2 3 4 5 6 7 8 9 10
(×10kPa)
Pressure

※ Further details can be refered to our website. Outside drawing appears in Page 30.

6| SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Diaphragm Type Dry Vacuum Pumps

DA / DAT Series DA-30D DA-60S DAT-50D DAT-100S

Features Applications
Diaphragm type pump creates vacuum by reciprocate movement of • Vacuum chucks, wafer and tip handling devices.
rubber diaphragms. • Vacuum tweezers, medical appliances.
Pump structure makes Oil-free environment and maintenance easy. • Printing equipment.
Various pumping speed and two/single stages are selectable depends on • Automatic packing machines.
your required pressure and pumping volume. • Optical appliances.
• Semiconductor industry.
• Injection molding machine

DA-30D DA-60S DAT-50D DAT-100S

Specifications
Model DA-30D DA-60S DAT-50D DAT-100S
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 30 36 60 72 50 55 100 110
Ultimate pressure Pa 6.7 × 103 21.3 × 103 3.3 × 103 13.3 × 103
Single phase, 100V, 200W, 4P, Single phase, 100V, 200W, 4P, Single phase, 100V, 200W, 4P, Single phase, 100V, 200W, 4P,
Motor
Split phase starting Split phase starting Split phase starting Split phase starting
Full load current A 5.6 5.0 5.6 5.0 5.6 5.0 5.6 5.0
Weight kg 11.0 11.0 11.0 11.0
Inlet, outlet pipe O.D. dia.9 × I.D. dia.5 O.D. dia.9 × I.D. dia.5 O.D. dia.12 × I.D. dia.8.5 O.D. dia.12 × I.D. dia.8.5
mm
diameter (Rc 1/4) (Rc 1/4) (Rc 1/4) (Rc 1/4)
Ambient temperature ℃ 7 – 40 7 – 40 7 – 40 7 – 40
Overall dimensions mm 212(W) × 278(L) × 224.5(H) 212(W) × 278(L) × 224.5(H) 150(W) × 232(L) × 305(H) 150(W) × 232(L) × 305(H)

Corresponding voltage and Certificate Pumping speed curves

Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked (L/min) 50Hz
140
Single phase, 100V Standard — — — DAT-100S
Single phase, 115V — — —
DA-30D 120
Single phase, 200V — — —
Single phase, 220V — — —
Single phase, 100V Standard — — — 100
Single phase, 115V — — —
DA-60S
Single phase, 200V — — —
Pumping Speed

80 DA-60S
Single phase, 220V — — —
Single phase, 100V Standard — — —
60
Single phase, 115V — — — DAT-50D
DAT-50D Single phase, 200V — — — DA-30D
40
Single phase, 220V — — —
Three phase, 200—220V
Single phase, 100V Standard — — — 20

Single phase, 115V — — —

DAT-100S Single phase, 200V — — —
0 1 2 3 4 5 6 7 8 9 10
Single phase, 220V — — — (×10kPa)
Three phase, 200—220V Pressure

※ Further details can be refered to our website. Outside drawing appears in Page 30.

7
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Diaphragm Type Dry Vacuum Pumps

DA Series DA-20D DA-40S DA-41D DA-81S

Features Applications
Diaphragm type pump creates vacuum by reciprocate movement of • Vacuum chucks, wafer and tip handling devices.
rubber diaphragms. • Vacuum tweezers, medical appliances.
Pump structure makes Oil-free environment and maintenance easy. • Printing equipment.
Various pumping speed and two/single stages are selectable depends on • Automatic packing machines.
your required pressure and pumping volume. • Optical appliances.

DA-20D DA-40S DA-41D DA-81S

Specifications
Model DA-20D DA-40S DA-41D DA-81S
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 20 24 40 46 40 46 75 85
Ultimate pressure Pa 5.33 × 103 19.9 × 103 3.3 × 103 13.3 × 103
Single phase,100V, 60W, 4P, Single phase, 100V, 60W, 4P, Single phase, 100V, 100W, 4P, Single phase, 100V, 100W, 4P,
Motor
Capacitor run Capacitor run Capacitor run Capacitor run
Full load current A 1.6 1.6 2.5 2.7 2.5 2.7
Weight kg 7.2 7.2 10.3 10.3
Inlet, outlet pipe
mm O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.12 × I.D. dia.8 (G1/4) O.D. dia.12 × I.D. dia.8 (G1/4)
diameter
Ambient temperature ℃ 7 – 40 7 – 40 0 – 40 0 – 40
Overall dimensions mm 118(W) × 240(L) × 178(H) 128(W) × 240(L) × 178(H) 157(W) × 336.5(L) × 217(H) 181(W) × 336.5(L) × 217(H)

Corresponding voltage and Certificate Pumping speed curves

(L/min)
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked 50Hz
100
Single phase, 100V Standard —
Single phase, 115V —
DA-20D
Single phase, 200V — — —
Single phase, 220V — 80 DA-81S
Single phase, 100V Standard —
Single phase, 115V —
DA-40S
Single phase, 200V — — — 60
Pumping Speed

Single phase, 220V — DA-40S

Single phase, 100V Standard — — —
DA-41D
Single phase, 115V — — —
DA-41D 40
Single phase, 200V — — —
Single phase, 220V — — —
Single phase, 100V Standard — — — DA-20D
Single phase, 115V — — — 20
DA-81S
Single phase, 200V — — —
Single phase, 220V — — —

0 1 2 3 4 5 6 7 8 9 10
(×10kPa)
Pressure

※ Further details can be refered to our website. Outside drawing appears in Page 30—31.

8| SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Diaphragm Type Dry Vacuum Pumps

DA Series DA-60D DA-120S DA-121D DA-241S

Features Applications
Diaphragm type pump creates vacuum by reciprocate movement of • Vacuum chucks, wafer and tip handling devices.
rubber diaphragms. • Vacuum tweezers, medical appliances.
Pump structure makes Oil-free environment and maintenance easy. • Printing equipment.
Various pumping speed and two/single stages are selectable depends on • Automatic packing machines.
your required pressure and pumping volume. • Optical appliances.
• Semiconductor industry.

DA-60D DA-120S DA-121D DA-241S

Specifications
Model DA-60D DA-120S DA-121D DA-241S
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 60 72 120 144 120 145 240 260
Ultimate pressure Pa 3.32 × 103※ 13.3 × 103※ 3.3 × 103 16.0 × 103
Single phase, 100V, 200W, 4P, Single phase, 100V, 200W, 4P, Single phase, 100V, 400W, 4P, Single phase, 100V, 400W, 4P,
Motor
Capacitor run Capacitor run Capacitor run Capacitor run
Full load current A 5.0 5.0 4.8 5.8 5.2 6.2
Weight kg 19.0 19.0 26.0 26.0
Inlet, outlet pipe
mm O.D. dia.14 × I.D. dia.9 (G3/8) O.D. dia.14 × I.D. dia.9 (G3/8) O.D. dia.16 × I.D. dia.12 (G1/2) O.D. dia.16 × I.D. dia.12 (G1/2)
diameter
Ambient temperature ℃ 7 – 40 7 – 40 0 – 40 0 – 40
Overall dimensions mm 156(W) × 358(L) × 238(H) 162(W) × 358(L) × 238(H) 193.5(W) × 411(L) × 285(H) 207(W) × 411(L) × 285(H)
※ With built-in Unloader valve.

Corresponding voltage and Certificate Pumping speed curves

(L/min)
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked 50Hz
240
Single phase, 100V Standard — — —
Single phase, 115V — — — DA-241S
DA-60D
Single phase, 200V — — — 200
Single phase, 220V — — —
Single phase, 100V Standard — — —
Single phase, 115V — — — 160
DA-120S
Single phase, 200V — — —
Pumping Speed

Single phase, 220V — — —

Single phase, 100V Standard DA-121D
120
Single phase, 115V
DA-121D DA-120S
Single phase, 200V
Single phase, 220—230V 80

Single phase, 100V Standard

Single phase, 115V DA-60D
DA-241S
Single phase, 200V 40

Single phase, 220—230V

0 1 2 3 4 5 6 7 8 9 10
(×10kPa)
Pressure

※ Further details can be refered to our website. Outside drawing appears in Page 31.

9
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Diaphragm Type Dry Vacuum Pumps

DAU/DTU Series DAU-20 DTU-20

Features Applications
• High vacuum type diaphragm pump. • Backing pump for TMP. • Gas charging.
• Low vibration. • Analytical equipment. • Vacuum drying systems.
• High corrosion resistant. (DTU-20) • Biochemical analysis. • Evaporators etc.

DAU-20 DTU-20

Specifications
Model DAU-20 DTU-20
Unit 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 20 23 20 23
Ultimate pressure Pa 200 200
Motor Single phase, 100V, 80W, 4P, Capacitor run Single phase, 100V, 80W, 4P, Capacitor run
Full load current A 1.46 1.46
Weight kg 7.5 7.5
Inlet, outlet pipe
mm O.D. dia.10 × I.D. dia.6 (Rc 1/8) O.D. dia.10 × I.D. dia.6 (Rc 1/8)
diameter
Ambient temperature ℃ 5 – 40 5 – 40
Overall dimensions mm 161(W) × 327(L) × 217(H) 161(W) × 327(L) × 217(H)

Corresponding voltage and Certificate Pumping speed curves

Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked (L/min) 50Hz
50
Single phase, 100V Standard
Single phase, 115V
DAU-20 Single phase, 200V
Single phase, 22­0V 40

Single phase, 230V

Single phase, 100V Standard
Single phase, 115V
Pumping Speed

30
DTU-20 Single phase, 200V
Single phase, 22­0V DAU-20
Single phase, 230V DTU-20
20

10

0 1 2 3 4 5 6 7 8 9 10
(×10kPa)
Pressure

※ Further details can be refered to our website. Outside drawing appears in Page 31.

10 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Diaphragm Type Dry Vacuum Pumps

DTC Series DTC-22 DTC-41 DTC-60

Features Applications
• All contacted parts of the gas are made of PTFE and FPM. • Rotary evaporator. • Vacuum drying systems.
• Suitable for pumping out corrosive gas or organic solvent. • Evaporating system. • Laser-gas circulation.
• High vacuum down to 1000Pa. • Vacuum Concentrator. • Centrifuge.
• Compact. • Vacuum filtration. • Medical/Pharmaceutical equip-
• Exhaust of gas-transfer tube. ments.
• Analysis/scientific equipments.

DTC-22 DTC-41 DTC-60

Specifications
Model DTC-22 DTC-41 DTC-60
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 20 24 40 46 60 70
Ultimate pressure Pa 1.0 × 103 1.0 × 103 1.0 × 103
Single phase, 100V, 50W, 4P, Single phase, 100V, 100W, 4P, Single phase, 100V, 200W, 4P,
Motor
Capacitor run Capacitor run Capacitor run
Full load current A 1.3 2.2 2.3 3.6 3.7
Weight kg 7.1 10.3 18.0
Inlet, outlet pipe
mm O.D. dia.10 × I.D. dia.6 (G1/4) O.D. dia.10 × I.D. dia.6 (G1/4) O.D. dia.14 × I.D. dia.9 (G3/8)
diameter
Ambient temperature ℃ 0 – 40 0 – 40 0 – 40
Overall dimensions mm 142(W) × 288.5(L) × 202(H) 155(W) × 336.5(L) × 217(H) 158(W) × 340(L) × 242(H)

Corresponding voltage and Certificate Pumping speed curves

Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked (L/min) 50Hz
100
Single phase, 100V Standard — — —
Single phase, 115V
DTC-22 Single phase, 200V — — —
Single phase, 22­0V 80
Single phase, 230V DTC-60
Single phase, 100V Standard — —
Single phase, 115V — — —
60
Pumping Speed

DTC-41 Single phase, 200V — — —

Single phase, 22­0V — — —
Single phase, 230V (50Hz) — — DTC-41
Single phase, 100V Standard — — — 40

Single phase, 115V (50Hz) — — —

DTC-60
Single phase, 200V — — —
Single phase, 22­0V — — — DTC-22
20

0 1 2 3 4 5 6 7 8 9 10
(×10kPa)
Pressure

※ Further details can be refered to our website. Outside drawing appears in Page 32.

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 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Rocking Piston Type Dry Vacuum Pumps

DOP Series DOP-40D DOP-80S DOP-80SP

Features Applications
Rocking type piston vacuum pump creates (Vacuum) (Pressure)
vacuum by reciprocal motion of cup packing • Vacuum chuck, vacuum tweezers. • Pressure source for automatic
inside the cylinder. Pressurized type is available • Absorption and transfer of automat- machines.
for DOP-80S which can be used as a small ic machines. • Air pressure unit.
compressor. (DOP-80SP) • Vacuum packing printing machines. • Printing machine.
• Tip mounter. • Otorhinolaryngology, dental unit.
• Medical equipments. • Air pressure meter.
• Oxygen generator.

DOP-40D DOP-80S DOP-80SP

Specifications
Model DOP-40D DOP-80S DOP-80SP
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 40 44 80 88 80 84
Ultimate pressure Pa 1.2 × 103 5.33 × 103 Only for pressure
Maximum pressure MPa – – 0.5
Single phase, 100V, 210W, 4P, Single phase, 100V, 210W, 4P, Single phase, 100V, 300W, 4P,
Motor
Capacitor run Capacitor run Capacitor run
Full load current A 3.2 3.9 3.2 3.9 5.0 5.5
Weight kg 7.0 7.0 9.0
Inlet, outlet pipe
mm O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.9 × I.D. dia.5 (Rc 1/4)
diameter
Ambient temperature ℃ 7 – 40 7 – 40 7 – 40
Overall dimensions mm 160(W) × 270(L) × 179(H) 160(W) × 270(L) × 179(H) 167.5(W) × 288(L) × 181(H)

Corresponding voltage and Certificate Pumping speed curves

Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked (L/min) 50Hz

Single phase, 100V Standard — — — 90

Single phase, 115V — — — DOP-80S DOP-80SP

80
DOP-40D
Single phase, 200V — — —
70
Single phase, 22­0V — — —
Single phase, 100V Standard — — — 60
Pumping Speed

Single phase, 115V — — —

DOP-80S 50
Single phase, 200V — — — DOP-40D
Single phase, 22­0V — — — 40

Single phase, 100V Standard — — —

30
Single phase, 115V — — — —
DOP-80SP
Single phase, 200V — — — 20

Single phase, 22­0V — — —

10

0 1 2 3 4 5 6 7 8 9 10 0 1 2 3 4 5
(×10kPa) (×10-1MPa)
Pressure

※ Further details can be refered to our website. Outside drawing appears in Page 32.

12 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Rocking Piston Type Dry Vacuum Pumps

DOP Series DOP-300SA DOP-420SA

Features Applications
Rocking type piston vacuum pump creates • Vacuum chuck, vacuum tweezers. • Printing machine.
vacuum by reciprocal motion of cup packing • Semiconductor industry. (Handler, • Injection molding.
inside the cylinder. Bigger volume of pumping Mounter) • Adsorption and transfer.
speed with increased number of pump heads. • FPD industry. (Bonder)

DOP-300SA DOP-420SA

Specifications
Model DOP-300SA DOP-420SA
Unit 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 300 330 420 460
Ultimate pressure Pa 8.0 × 103 17.3 × 103
Motor Three phase, 200V, 400W, 4P Three phase, 200V, 550W, 4P
Full load current A 2.5 2.3 3.5 3.1
Weight kg 20.0 33.0
Inlet, outlet pipe
mm O.D. dia.16 × I.D. dia.12 (Rc 1/2) O.D. dia.26 × I.D. dia.20 (Rc 3/4)
diameter
Ambient temperature ℃ 0 – 40 0 – 40
Overall dimensions mm 315(W) × 443(L) × 231(H) 310(W) × 523(L) × 253(H)

Corresponding voltage and Certificate Pumping speed curves

(L/min)
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked 50Hz
500
DOP-300SA Three phase, 200V Standard — —
DOP-300SB Three phase, 200–220V 450
DOP-420SA
DOP-420SA Three phase, 200V Standard —
400

350
DOP-300SA
300
Pumping Speed

250

200

150

100

50

0 1 2 3 4 5 6 7 8 9 10
(×10kPa)
Pressure

※ Further details can be refered to our website. Outside drawing appears in Page 32.

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 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Scroll Type Dry Vacuum Pumps

DIS Series Double wrap DIS-90 DIS-251 DIS-501

Features Applications
• Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls. • Analytical equipment.
• Operation from atmospheric pressure is possible. • Gas recovery system.
• High ultimate pressure level is attainable • Coating equipment.
• Low vibration and low noise. • Back pump for TMP.
• Maintenance cycle can be controlled by hour meter. • Helium leak detector.
• Manufacturing process for semiconductor.

DIS-90 DIS-251 DIS-501

Specifications
Model DIS-90 DIS-251 DIS-501
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Nominal pumping speed L/min 90 108 250 300 500 600
Ultimate pressure Pa 5.0 1.6 1.0
Single phase, 100/115/200/230V, Single phase, 100/115/200/230V, Single phase, 100/115/200/230V,
Single phase
150W, 4P, Capacitor start & run 400W, 4P, Capacitor start & run 600W, 4P, Capacitor start & run
Motor
Three phase, Three phase,
Three phase –
200/208/230/380/400/415/460V, 400W, 4P 200/208/230/380/400/415/460V, 600W, 4P
2.6/1.3/1.6 2.1/2.2/1.1/1.1 4.8/2.6/2.4 4.8/4.3/2.8/2.4 8.5/4.3/3.9 10.0/8.6/4.8/4.0
Single phase
Full load (100/200/230V) (100/115/200/230V) (100/200/230V) (100/115/200/230V) (100/200/230V) (100/115/200/230V)
A
current 1.6/0.9/0.9/1.0 1.9/1.9/1.8/1.0 2.7/1.57/1.57/1.63 2.8/2.6/2.5/1.47
Three phase – –
(200/380/400/415V) (200/208/230/460V) (200/380/400/415V) (200/208/230/460V)
Single phase 14.0 25.0 44.0
Weight kg
Three phase – 23.0 38.0
Inlet, outlet pipe diameter Inlet pipe KF-25 Outlet pipe KF-16 Inlet pipe KF-25 Outlet pipe KF-16 Inlet pipe KF-40 Outlet pipe KF-25
Ambient temperature ℃ 5 – 40 5 – 40 5 – 40
Water vapor handling g/day ≤ 5 (AF open) ≤ 25 (AF open) ≤ 25 (AF open)
Overall Single phase 214(W) × 308(L) × 225(H) 252(W) × 400(L) × 336(H) 290(W) × 443(L) × 397(H)
mm
dimensions Three phase – 252(W) × 370(L) × 336(H) 292(W) × 372(L) × 397(H)
AF = Air flush

Corresponding voltage and Certificate Pumping speed curves

(L/min) 50Hz
Model Voltage Applicable Volt CE Marked CSA Marked 1000
Single phase, 100V Standard
DIS-90 Single phase, 115V (60Hz) Standard DIS-501
Single phase, 200—230V Standard
Single phase, 100V Standard DIS-251
Single phase, 115V (60Hz) Standard
Single phase, 200—230V Standard 100
DIS-90
Three phase, 200V Standard
Pumping Speed

Three phase, 208V (60Hz) Standard

DIS-251
Three phase, 230V (60Hz) Standard
Three phase, 380V (50Hz) Standard
Three phase, 400V (50Hz) Standard
Three phase, 415V (50Hz) Standard 10
Three phase, 460V (60Hz) Standard
Single phase, 100V Standard
Single phase, 115V (60Hz) Standard
Single phase, 200—230V Standard
Three phase, 200V Standard
Three phase, 208V (60Hz) Standard
DIS-501 1
Three phase, 230V (60Hz) Standard 1 10 102 103 104 105
Pressure (Pa)
Three phase, 380V (50Hz) Standard
Three phase, 400V (50Hz) Standard
Three phase, 415V (50Hz) Standard
Three phase, 460V (60Hz) Standard

※ Further details can be refered to our website. Outside drawing appears in Page 33.

14 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Scroll Type Dry Vacuum Pumps

DISL Series Single wrap DISL-101 DISL-502

Features Applications
Single wrap type scroll which consists of each 1 orbiting and fixed scroll. • Pick and transfer system.
Tough type scroll pump than DIS series against incoming particles and • Cleaning and drying.
suitable for industrial use. • Degassing / deforming.
• Packaging.

DISL-101 DISL-502

Specifications
Model DISL-101 DISL-502
Unit 50Hz 60Hz 50Hz 60Hz
Nominal pumping speed L/min 100 120 430 520
Ultimate pressure Pa 20.0 30.0
Single phase, 100/115/200/230V, 300W, 2P, Three phase, Three phase,
Motor
Capacitor start & run 200/380/400/415V, 900W, 2P 200/208/230/460V, 1100W, 2P
3.2/1.6/2.0 3.7/3.4/1.8/1.7 3.6/1.9/1.9/1.8 4.2/4.1/3.9/1.95
Full load current A
(100/200/230V) (100/115/200/230V) (200/380/400/415V) (200/208/230/460V)
Weight kg 15.0 36.0
Inlet, outlet pipe
Inlet pipe KF-25 Outlet pipe KF-16 KF-25
diameter
Ambient temperature ℃ 5 – 40 5 – 40
Water vapor handling g/day ≤ 100 (AF open) ≤ 250 (AF open)
Overall dimensions mm 210(W) × 358(L) × 215(H) 317(W) × 491(L) × 280(H)
AF = Air flush

Corresponding voltage and Certificate Pumping speed curves

(L/min)
Model Voltage Applicable Volt CE Marked CSA Marked 50Hz
1000
Single phase, 100V Standard
DISL-101 Single phase, 115V (60Hz) Standard DISL-502
Single phase, 200—230V Standard
Three phase, 200V Standard
Three phase, 208V (60Hz) Standard 100
DISL-101
Three phase, 230V (60Hz) Standard
Pumping Speed

DISL-502 Three phase, 380V (50Hz) Standard

Three phase, 400V (50Hz) Standard
Three phase, 415V (50Hz) Standard
Three phase, 460V (60Hz) Standard
10

1
1 101 102 103 104 105
(Pa)
Pressure

※ Further details can be refered to our website. Outside drawing appears in Page 33.

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 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Oil-Sealed Rotary Vacuum Pumps

GLD Series GLD-040 GLD-136A GLD-136C

Features Applications
GLD series features high performance, low vibration and noise • Chemical, science experiment, Analyzer and Laser system.
and several functions such as gas ballast valve, oil-back-flow • Backing pumps for the electronic microscope.
prevention mechanism, and large sized oil level gauge. This • Semiconductor equipments, sputtering equipment, vacuum
series equips multi-voltage motor and correspondent to evaporation equipment.
international standard. • Vacuum dryer, freeze dryer.

GLD-040 GLD-136A GLD-136C

Specifications
Model GLD-040 GLD-136A GLD-136C
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 40 48 135 162 135 162
G.V. Closed : 0.67 G.V. Closed : 0.67 G.V. Closed : 0.67
Ultimate pressure※ Pa
G.V. Open : 6.7 G.V. Open : 6.7 G.V. Open : 6.7
Single phase, 200W, 4P, Three phase, 400W, 4P, Single phase, 400W, 4P,
Motor Multiple-range motor Multiple-range motor Multiple-range motor
Capacitor start & run, 100 – 120V/200 – 240V 200 – 240V/380 – 460V Capacitor start & run, 100 – 120V/200 – 240V
4.20 (100V), 4.40 (110V) 3.60 (100V), 3.40 (110V) 2.10 (200V), 2.20 (220V) 2.00 (200V), 1.90 (220V)
4.60 (115V), 5.05 (120V) 3.40 (115V), 3.60 (120V) 2.30 (230V), 2.50 (240V) 1.90 (230V), 2.00 (240V) 6.8 (100 – 120V) 5.8 (100 – 120V)
Full load current A
2.10 (200V), 2.20 (220V) 1.80 (200V), 1.70 (220V) 1.30 (380V), 1.30 (400V) 1.10 (380V), 1.10 (400V) 3.5 (200 – 240V) 2.9 (200 – 240V)
2.30 (230V), 2.60 (240V) 1.70 (230V), 1.80 (240V) 1.40 (415V) 1.15 (440V), 1.20 (460V)
Oil capacity mL 550 – 800 1,000 1,000
Recommended oil R-2 SMR-100 SMR-100
Weight kg 16.0 23.0 27.0
Inlet port diameter mm KF-25 KF-25 KF-25
Ambient temperature ℃ 7 – 40 7 – 40 7 – 40
Overall dimensions mm 150(W) × 427(L) × 228.5(H) 170(W) × 485.5(L) × 240(H) 170(W) × 487.5(L) × 249.5(H)
※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)

Corresponding voltage and Certificate Pumping speed curves

(L/min)
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked 1000
50Hz

Single phase, 100—120V Standard —

GLD-040
Single phase, 200—240V Standard
Three phase, 200—240V Standard
GLD-136A
Three phase, 380—460V Standard
Single phase, 100—120V Standard
GLD-136C
Single phase, 200—240V Standard
—
—
— GLD-136A
— GLD-136C
— 100
Pumping Speed

GLD-040

10

1
10-2 10-1 1 101 102 103 104 105
(Pa)
Pressure Gas ballast valve open

※ Further details can be refered to our website. Outside drawing appears in Page 33.

16 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Oil-Sealed Rotary Vacuum Pumps

GLD Series GLD-201A GLD-201B GLD-280A GLD-280B

Features Applications
GLD series features high performance, low vibration and noise • Chemical science experiment, Analyzer and Laser system.
and several functions such as gas ballast valve, oil-back-flow • Vacuum pumping system.
prevention mechanism, and large sized oil level gauge. This • Back pump for SEM.
series equips multi-voltage motor and correspondent to • Semiconductor equipments, sputtering equipment, vacuum
international standard. evaporation equipment.
• Vacuum dryer, freeze dryer.

GLD-201A GLD-201B GLD-280A GLD-280B

This picture is GLD-280A
Specifications
Model GLD-201A GLD-201B GLD-280A GLD-280B
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 200 240 200 240 280 336 280 336
G.V. Closed : 0.67 G.V. Closed : 0.67 G.V. Closed : 0.67 G.V. Closed : 0.67
Ultimate pressure ※ Pa
G.V. Open : 6.7 G.V. Open : 6.7 G.V. Open : 6.7 G.V. Open : 6.7
Three phase, 550W, 4P, Single phase, 550W, 4P, Three phase, 750W, 4P, Single phase, 750/900W, 4P,
Motor Multiple-range motor Multiple-range motor Multiple-range motor Multiple-range motor
200 – 240V/380 – 460V Capacitor start & run, 100 – 120V/200 – 240V
200 – 240V/380 – 460V Capacitor start & run, 115V/200 – 240V
3.00 (200V), 3.10 (220V) 2.70 (200V), 2.70 (220V) 3.60 (200V), 3.70 (220V) 3.30 (200V), 3.20 (220V)
11.4 (115V), 5.90 (200V) 12.3 (115V), 6.40 (200V)
3.30 (230V), 3.60 (240V) 2.70 (230V), 2.80 (240V) 8.2 (100-120V) 7.9 (100-120V) 4.00 (230V), 4.20 (240V) 3.20 (230V), 3.20 (240V)
Full load current A 5.80 (220V), 5.70 (230V) 6.30 (220V), 6.20 (230V)
1.80 (380V), 1.90 (400V) 1.50 (380V), 1.60 (400V) 4.1 (200-240V) 3.9 (200-240V) 2.10 (380V), 2.30 (400V) 1.90 (380V), 1.90 (400V)
6.80 (240V) 5.70 (240V)
2.00 (415V) 1.70 (440V), 1.70 (460V) 2.40 (415V) 1.90 (440V), 2.00 (460V)
Oil capacity mL 1,100 1,100 700 – 1,100 700 – 1,100
Recommended oil SMR-100 SMR-100 R-7 R-7
Weight kg 26.0 29.0 34.0 42.0
Inlet port diameter mm KF-25 KF-25 KF-25 KF-25
Ambient temperature ℃ 7 – 40 7 – 40 7 – 40 7 – 40
Overall dimensions mm 170(W) × 513.5(L) × 240(H) 170(W) × 515.5(L) × 249.5(H) 181(W) × 536(L) × 269(H) 182(W) × 585(L) × 271(H)
※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)

Corresponding voltage and Certificate Pumping speed curves

Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked (L/min) 50Hz
Three phase, 200—240V Standard — 1000
GLD-201A
Three phase, 380—460V Standard —
Single phase, 100—120V Standard — GLD-280A
GLD-201B GLD-280B
Single phase, 200—240V Standard —
Three phase, 200—240V Standard —
GLD-280A GLD-201A
Three phase, 380—460V Standard — GLD-201B
100
Single phase, 115V Standard —
GLD-280B
Pumping Speed

Single phase, 200—240V Standard —

10

1
10-2 10-1 1 101 102 103 104 105
(Pa)
Pressure Gas ballast valve open

※ Further details can be refered to our website. Outside drawing appears in Page 34.

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 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Oil-Sealed Rotary Vacuum Pumps Mechanical Booster Pump

GHD Series GHD-031 MBS Series MBS-051

Features Features
• Wide range voltage motor and correspond to CE, cTUVus. • Lower power consumption.
• Magnet coupling for no oil leakage from shaft seal and realized • No oil leakage by adoption of magnet coupling.
longer lifetime. • Compact size and light weight.
• Integrated check valve below the inlet port for backflow • Pumping can be started from atmospheric pressure.
prevention.

Applications Applications
• Helium leak detector. • Ideal main pump to support pumping speed of backing pump.
• Analytical equipment. (GC/MS, ICP/MS, LC/MS)
• Laboratory experiment.

MBS-051
GHD-031

Specifications Specifications
Model GHD-031 Model MBS-051
Unit
Unit 50Hz 60Hz Actual pumping speed※1 m3/h 50
Actual pumping speed L/min 30 36 Ultimate pressure※2 Pa 4.0 × 10-2
Ultimate pressure※ Pa 0.67 Motor DC Brushless motor, 200W
Motor Single phase, 100 – 120V, 100W, 2P, Capacitor run Power supply Single phase, 100 – 120V / 200 – 240V (50/60Hz)
Full load current A 2.0 (100 – 120V) 1.8 (100 – 120V) Motor speed r/min 3500
Oil capacity mL 370 1.1 (100V)/0.7 (200V) (At ultimate pressure)
Current A
Recommended oil R-2 4.33 (100V)/2.54 (200V) (At maximum load)
Weight kg 9.3 50 (At ultimate pressure)
Power consumption W
Inlet port diameter mm KF-16 250 (At maximum load)
Ambient temperature ℃ 7 – 40 Oil capacity mL 50
Overall dimensions mm 120(W) × 288.5(L) × 163(H) Recommended oil SMR-200
Weight kg 11.0
※ : Ultimate pressure is measured by Pirani gauge.
Inlet pipe diameter JIS VG-40
(In case of macleod gauge, the rate is one digit smaller than this rate.)
Outlet pipe diameter JIS VF-40
Backing pump Oil rotary vacuum pump 130 – 200L/min
Pumping speed curve Ambient temperature ℃ 0 – 40
(L/min) 50Hz
1000 Overall dimensions mm 167(W) × 410(L) × 130(H)
※ 1 : Pumping speed varies depends on pumping speed of backing pump.
※ 2 : Measured by ionization vacuum gauge.

Pumping speed curve

(m3/h) (W)
70 280
100
Oil-Sealed Rotary
Pumping Speed

Vacuum Pumps
60 240
GHD-031 (200L/min)

50 200

Pumping
10
Speed
Power consumption
Pumping Speed

40 160

30 120
Power
consumption
1 20 80

10-1 1 101 102 103 104 105

Pressure (Pa)
10 40

Corresponding voltage and Certificate

0 0
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked 1 × 10-2 1 × 10-1 1 × 100 1 × 101 1 × 102 1 × 103 1 × 104 1 × 105
(Pa)
Inlet Pressure
Single phase, 100—120V Standard —
GHD-031 ※ : Significantly increases pumping speed in a pressure range where pumping
Single phase, 200—240V —
speed of backing pump often drops.

※ Further details can be refered to our website. Outside drawing appears in Page 34.

18 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Oil-Sealed Rotary Vacuum Pumps

GCD Series GCD-051X GCD-136X GCD-201X

Features Applications
GCD Series, direct drive, oil rotary vacuum pump is corrosion resistant for • Semiconductor industry.
toxic and corrosive gases which is ideal for chemical, pharmaceutical • Chemical industry.
applications. • Post chemical-treatment drying.
Surface of gas contacted parts are coated with hard plating. Three • Pharmaceutical industry.
different sizes are available from 50L to 200L/min

GCD-051X GCD-136X GCD-201X

Specifications
Model GCD-051X GCD-136X GCD-201X
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 50 60 135 162 200 240
※ G.V. Closed : 0.67 G.V. Closed : 0.67 G.V. Closed : 0.67
Ultimate pressure Pa
G.V. Open : 6.7 G.V. Open : 6.7 G.V. Open : 6.7
Single phase, 100V, 200W, 4P Single phase, 100V, 400W, 4P
Motor Three phase, 200V, 750W, 4P
Split phase starting Capacitor start & run
Full load current A 5.6 4.8 7.7 6.1 3.6 3.3
Oil capacity mL 500 – 800 1,000 1,100
Recommended oil SO-M SO-M SO-M
Weight kg 14.1 25.4 26.6
Inlet port diameter mm KF-25 KF-25 KF-25
Ambient temperature ℃ 7 – 40 7 – 40 7 – 40
Overall dimensions mm 165.5(W) × 419(L) × 222.7(H) 170(W) × 493(L) × 241.1(H) 170(W) × 509.5(L) × 241.1(H)
※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)

Corresponding voltage and Certificate Pumping speed curves

Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
(L/min) 50Hz
Single phase, 100V Standard — — — 1000
Single phase, 200V — — —
GCD-051X Single phase, 22­0V — — —
Single phase, 23­0V — — —
Single phase, 100V Standard — — — GCD-201X
Single phase, 200V — — — GCD-136X
GCD-136X
Single phase, 22­0V — — — 100
Three phase, 20­0V — — — GCD-051X
Pumping Speed

Single phase, 100V — — —

GCD-201X Single phase, 22­0V — — —
Three phase, 20­0V Standard — — —

10

1
10-2 10-1 1 101 102 103 104 105
(Pa)

Pressure Gas ballast valve open

※ Further details can be refered to our website. Outside drawing appears in Page 34—35.

19
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

High Speed Vacuum Coater

VPC Series VPC-1100

Features Applications
1. Effective system with high pumping down performance. • Basic R&D for Electronic material, Semiconductor,
• 10-4Pa from atmospheric pressure in 10 minutes. solar cell.
• Cooling water can be stopped after 15 minutes from the system is shut • R&D of thin film for layer and organic EL.
down.
2. Scalable functions with various options.
• Multi-layer deposition and co-deposition are available with additional
evaporation power supply.
3. Compact and easy mobilibity.
4. EB Deposition is available as optional.

※ Optional Parts
Standard Specifications
• Conflat flange Model VPC-1100
UFC070 Adapter
-4
Ultimate pressure 1.3 × 10 Pa (with LN2)

※ Optional Parts
Evacuation time 10min to 10-4Pa from atmospheric pressure (with LN2)
• Ionization vacuum gauge Belljar size dia.390mm × 350mm(H)
• Deposition controller
Evaporation electrode structure 3 points switch (source length : 100mm)
• System rack
Evaporation power supply 0 – 10V 150A (Max)
Oil diffusion pump (Water cooling) 1100L/sec
Vacuum system Oil rotary vacuum pump 200L/min × 2
Liquid Nitrogen trap
Control system Manual control
Vacuum gauge Pirani vacuum gauge “GP-1G”
Three phase 200V 5.0 kVA
Power required
Single phase 100V 1.0 kVA
1.5L/min (Water temperature : 20 – 25 degrees C,
Water requirement
Water pressure : 200 kPa)
Weight 313kg
Overall dimensions (W) × (D) × (H) 1235mm × 850mm × 2155mm
Three phase 200V Cable 4m
Accessories
Single phase 100V Cable 4m
※ Optional parts in the picture are not equipped.
※ Optional Parts
• Side panel
VPC-1100 Feedthrough collar
6 4 5
8

4 4
Optional Parts
12
6
Special components Evaporation Electrode SEREM “PSE-150C” 6
Deposition Controller “CRTM-6000G” “CRTM-9000G” 25 25
Film thickness sensor “CRTS-4” 3
3
Ionization vacuum gauge “GI-M2”
260

Electron beam evaporation source “EGK-3M” dia.

80

120
Special parts Deposition shield plate
Electrode partition
Water cooling metal bell-jar
UFC070 flange
Oil mist trap (“OMI-200” “OMT-200A”) 7 4
Sample holder 160
Side/back panel
Additional shutter 4 4
Evaporation source/power supply for EB
Flow switch, Substrate heating device 9
11
10 4
Gas introduction port for service port
System rack, Carbon electrode
Electrode structure Evaporation electrode 1 point + 2 points switch 1 Plate 7 Shutter
options 2 points + 2 points switch 2 Filter 8 Electrode COM
2 points + 3 points switch 3 Service port (L) 9 Electrode 1
4 Service port (S) 10 Electrode 2
5 Gauge port.1 11 Electrode 3
6 Hermetic seal port.3 pcs. 12 Prop

※ Further details can be refered to our website. Outside drawing appears in Page 35.

20 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Vacuum Coater

DEPOX Series VFR-200M/ERH VWR-400M/ERH

VTR-350M/ERH VTS-350M/ERH

Features Applications
1. Deposition system for metal and organic material. • Basic R&D for Electronic material, Semiconductor,
2. Variable combination is available for pumping unit. solar cell.
3. High scalable functions. • R&D of thin film for layer and organic EL.
4. Enhanced safeness and reliability.
5. Multi-layer deposition and co-deposition(Max: 4 layers) are available
with additional evaporation power supply and electrode.
6. Easy viewable through glass bell jar and easy maintenance.

VFR-200M / ERH VWR-400M / ERH VTR-350M / ERH VTS-350M / ERH

Specifications
Model VFR-200M / ERH VWR-400M / ERH VTR-350M / ERH VTS-350M / ERH
8.0 × 10-4Pa 4.0 × 10-4Pa 4.0 × 10-4Pa 4.0 × 10-4Pa
Ultimate pressure ※ ※
(6.0 × 10-4Pa LN2) (3.0 × 10-4Pa LN2) (2.0 × 10-4Pa LN2) 1 (2.0 × 10-4Pa LN2) 1
4.0 × 10-3Pa/15min 4.0 × 10-3Pa/10min -3
4.0 × 10 Pa/10min -3
4.0 × 10 Pa/10min
Evacuation time ※ ※
(3.0 × 10-3Pa/15min LN2) (3.0 × 10-3Pa/10min LN2) (3.0 × 10-3Pa/10min LN2) 1 (3.0 × 10-3Pa/10min LN2) 1
Belljar size dia.300mm × 300mm(H) dia.300mm × 300mm(H) dia.300mm × 300mm(H) dia.300mm × 300mm(H)
Evaporation electrode structure
1 point (100mm) 1 point (100mm) 1 point (100mm) 1 point (100mm)
(source length)
Evaporation power supply 0 – 10V 150A (Max) 0 – 10V 150A (Max) 0 – 10V 150A (Max) 0 – 10V 150A (Max)
Oil diffusion pump (Air cooling) Oil diffusion pump (Water cooling) Turbo molecular pump Turbo molecular pump
Main pump
200L/sec 400L/sec 345L/sec 345L/sec
Backing pump Oil rotary pump 100L/min Oil rotary pump 200L/min Oil rotary pump 200L/min Scroll pump 250L/min
In-line trap OMI-100 OMI-200 OMI-200 −
Pirani vacuum gauge GP-1G GP-1G GP-1G GP-1G
Ionization vacuum gauge GI-M2 GI-M2 GI-M2 GI-M2
Weight 145kg 148kg 165kg 160kg
Overall dimensions (Body) 730mm × 603mm × 1161mm 730mm × 709mm × 1161mm 730mm × 584mm × 1161mm 730mm × 584mm × 1161mm
(W) × (D) × (H) (Power supply) 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm
(Body) Single phase 100V 1.4kVA Single phase 100V 1.6kVA Single phase 100V 1.4kVA Single phase 100V 0.9kVA
Power required
(Power supply) Single phase 200V 1.5kVA Single phase 200V 1.5kVA Single phase 200V 1.5kVA Single phase 200V 1.5kVA
※1 : LN2trap is optional.

Optional Parts Feedthrough collar

6 1 Service port
Electrode 2 points switch 1 point + 2 points switch
structure 2 points simultaneously 2 points switch + 2 points switch 1 2 2 Gauge port
options 3 points switch 2 points switch + 1 point + 1 point Hermetic seal
3
3 points simultaneously 6 port
Feed through 4 Shutter
20 ports (Side 16, Bottom 4) (300 x 100H) 3 5
collar 5 Electrode
Vacuum Bell jar holder Metal Bell jar Spare port for
chamber Bell jar cover 1
6
electrode
Accessories Sample holder UFC070 Adapter 80 7 Prop
for inner Adhesion shield plate KF-25 Adapter
. 90
dia

vacuum Electrode partition Gas introduction port

6
chamber Gauge port set Carbon electrode set
Hermetic port set Substrate heating device 7
Sealing flange set 350 degrees C
System Elevating device Control panel
exterior Side panel, Back panel Side panel for control panel 4
Deposition controller Back panel for control panel 5
Pumping Automatic leak valve for Oir rotary vacuum pump
system (VFR-200M/ERH, VWR-400M/ERH) 1 1

※ Further details can be refered to our website. Outside drawing appears in Page 35.

21
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

High frequency Sputtering System

RFS Series RFS-200

Features Applications
1. Compact and easy mobilibity. • Basic R&D for basic material, high melting material,
2. High speed pumping is attainable with TMP. insulating material and semiconductor material.
3. Introduction gas can be controlled continuously with flow control valve.
4. Suitable for pre-sputtering.
5. Automatic matching control is available.
6. High accurate thin film.

Specifications
Model RFS-200
Standard target dia.80 1 – 5t
200mm(W) × 250mm(D) × 150mm(H)
Vacuum chamber
SUS-304 Front door
Substrate electrode dia.80mm Cu attached heating system
Cathode dia.80mm Cu Water cooling
Shutter dia.95mm × 1 Manual
RF power supply 200W 13.56MHz
Power supply for substrate heating Digital controller Max 350 degrees C
Oil diffusion pump (Water cooling) 150L/sec
Vacuum system
Oil rotary vacuum pump G-101D 100L/min
Overall dimensions (W) × (D) × (H) 800mm × 725mm × 1635mm
Weight 200kg
Power required Single phase 100V 1.3kVA
Power required for RF Single phase 100V 0.5kVA
5 L/min
Water requirement
(Water temperature : 25 degrees C, Water pressure : 200-300 kPa)

Performance
Ultimate pressure 6.6 × 10−4Pa
Evacuation time 5min to 10-3Pa
RFS-200 Sputtering pressure 10−1Pa (at Ar)

Optional Parts Feedthrough collar

Liquid Nitrogen trap
1 6
Ionization vacuum gauge 7
2
Magnetron 8
3
In line trap (OMI-100)
Turbo molecular pump 4

DC power supply 5 9
Introduction gas (2,3 lines)
Automatic leak valve for oil rotary pump
dia.64

8
10
11
241

1 System rack 5 Viewport 9 Shutter

2 Sample holder 6 Substrate electrode 10 Backing plate
3 Front door 7 Gauge port 11 Target electrode
4 Target 8 Service port

※ Further details can be refered to our website. Outside drawing appears in Page 35.

22 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

High frequency magnetron Sputtering System

SCOTT Series VTR-150M/SRF

Features Applications
1. Parallel-plate type RF magnetron discharge method. • Basic R&D for basic material, high melting material,
2. Turbo molecular pump is used for main pumping. insulating material and semiconductor material.
3. Multiple deposition is available by dia.2 inch , 3 cathodes.
4. All gauges are installed in the rack.
5. Sputtering speed 30nm/min (SiO2) is available by magnetron sputtering.
6. Easy handling for substrate exchange and maintenance from top cover
open style.
7. Reactive sputtering is available as optional.

Specifications
Model VTR-150M/SRF
Substrate size dia.2 inch (dia.50.8mm) × t 1mm, 1unit
Cathode 2 inch, 3 ways
Effective area of sputtering dia.25 mm
RF power supply Max 300W (Variable from 40 – 300W)
Sputtering speed SiO2, More than 30nm/min at deposition
Film thickness distribution SiO2, within ±10% at dia.25mm
Ultimate pressure 6.6 × 10-4 Pa
Evacuation time Within 5 min to 6.6 × 10-3 Pa from atmospheric pressure
Max 350 degrees C
Substrate heating temperature
(Without substrate water cooling function)
3 positions, index turn (Approx 300 degree turn) by manual
Substrate turning range
operation
Substrate electrode distance 50mm – 90mm (Variable : Half fixed)
Overall dimensions
1150mm × 750.5mm × 1070mm
(W) × (D) × (H)
Weight 400kg
Power required Single phase 100V (50/60Hz) 3.0 kVA
SCOTT-C3
2L/min (Water temperature : Less than 25 degrees C,
Water requirement
Water pressure : 200kPa)

Optional Parts Feedthrough collar

5
Etching function (cleaning) 1 10
Substrate heating 600 degrees C 3
(Water cooling chamber)
3 10
Mass flow controller
In line trap (OMI-100)
4 inch, 1 way
2
DC power supply
3
Introduction gas (2,3 lines)
o

Automatic leak valve for oil rotary pump

9
8

dia.64 7
4 5 6

1 Trigger electrode 5 Sealing flange 9 Vent valve

2 Electrode partition 6 Viewport 10 Gauge port
3 Cathode 7 Shutter handle
4 Gas introduction 8 Shutter

※ Further details can be refered to our website. Outside drawing appears in Page 35.

23
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Attachment of Oil Rotary Vacuum Pump Optional parts

Suction and Exhaust Trap Suction and Exhaust Pipe

GLD-136C+OMT-200A GLD-136C+Selectable Suction pipe GLD-136C+Selectable Suction pipe
OMT-200A Hose port Hose port Suction pipe
Suction pipe dia.12 dia.15
dia.27
KF-25
Suction
pipe

O-ring

+
50 mm sq adapter
Standard
Exhaust Cap

GLD-136C+OMT-200A+OFI-200V
OFI-200V
OMT-200A

Standard
Suction pipe

Standard
Suction pipe

Standard
Exhaust Cap KF Flange Attachment Process
Standard Composition
GCD-136X+OMC-200
KF Flange

After
OMC-200 Clamp
Attachment

Centerring

KF Flange

GLD-136C+OMI-200+KF-25 Exhaust pipe

Hose port KF-25
Exhaust pipe Exhaust pipe Unnecessary case of Centering

KF Flange

O-ring
KF-25 Clamp
Suction pipe
with attached o-ring

OMI-200

Standard
Exhaust Cap

OMI-200
Cap

24 | SMALL VACUUM PUMPS CATALOG

Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Optional Parts

Accessories for Oil Rotary Vacuum Pumps

Fore-line Trap (Inlet filter)

Units: mm.

Models Applications Applicable models A B C

※OFI-050C Prevent counter flow of oil diffusion 50L/min or less 74 114 KF-25
※OFI-200C Prevent counter flow of oil diffusion 200L/min or less 102 150 KF-25
※OFI-050V Prevent particles or liquid into vacuum pumps 50L/min or less 74 114 KF-25
※OFI-200V Prevent particles or liquid into vacuum pumps 200L/min or less 102 150 KF-25
KF-25 clamp needed for installation.
※ : Filters are non-replaceable due to closed type.
: Pumping speed of applicable models is at 50Hz.

A
C

C OFI-050 OFI-200

Vacuum Pump Suction and Exhaust Filter

This filter can trap acidic gas, oil mist effectively by using ion-exchanged resin fiber. Filter can be placed both vacuum and
exhaust side and filter can be replaceable.

Applicable Pressure Ambient

Models Filter system Ambient humidity Suction port Exhaust port Height
models range temperature
SGT-100 500L/min 85% KF-25 KF-25 154mm
Out · In · Pass 0.1MPa 7 – 40℃
SGT-200 or less (non condensing) KF-40 KF-40 234mm

Suction port
19

H
16

Exhaust
port
dia. 89.1
SGT-200 SGT-100

25
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Optional Parts

Vacuum Pump Oil

SMR-100 SO-M R-2/R-7
SO-M 4L

R-7
R-2

SO-M 1L

Models Can size Models Can size Models Can size

1 L (2 × 500ml cans) 1L can 1L can
SMR-100 SO-M ULVOIL R-2 4L can
4L can 4L can
Mineral oil Synthetic oil Synthetic oil
18L can 18L can 20L can
2.2L can
ULVOIL R-7 8L can
Synthetic oil
20L can

Oil-mist Trap Units: mm. B

Models Applicable models A B C

OMT-050A GLD-040, GHD-031 G3/4 dia.65 93
C
OMT-100A – G1 dia.113 135
GLD-136A, GLD-136C
OMT-200A G1 dia.113 135
OMT-100A OMT-200A
GLD-201A, GLD-201B
: Filter replaceable A OMT-050A

In-line Trap (Piping connection type oil-mist trap) B

E
Units: mm.

Models Applicable models A B C D E

OMI-100 ※ GLD-040, GHD-031 G1 dia.94 166 177 G1
C D
GLD-136A, GLD-136C
OMI-200 ※ G1 dia.116 166 178 G1
GLD-201A, GLD-201B
: Filter replaceable ※ : In-line type : Adapter for trap is necessary.
A OMI-100 OMI-200

Adapter for Trap

This Adapter is required to adjust screw diameter from G3/4 to G1.

Type of Adapter Applicable models Adaptive oil-mist traps

OMI-100
G 3/4 male × G1 female GLD-040, GHD-031
OMT-100A

E
Oil-mist Separator (Anti-corrosive type) Units: mm.
B
A
Models Applicable models A B C D E
GCD-051X
OMC-050 KF-25 dia.66 116 148 dia.74
(Anti-corrosive)
GCD-136X, GCD-201X
OMC-200 KF-25 dia.90 140.5 173 dia.99 C D
(Anti-corrosive)
: Chemical type (KF-25 clamp needed for installation)

Drain port
(PT1/8) A OMC-050 OMC-200

26 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Optional Parts Accessories for Oil Rotary Vacuum Pumps

units : mm.

Clamp (Material : Aluminium) Centerring (Material : SUS304)

Standard SCK-1016 SCK-1025 SCK-1040 Standard SCK-2016 SCK-2025 SCK-2040
Flange size KF-16 KF-25 KF-40 Flange size KF-16 KF-25 KF-40
A 45 55 70 dia.A 17 26 41
B 61 72 90 dia.B 16 24 39
C 16 16 16 C 3.9 3.9 3.9
.D
dia
dia.D 22 32 47 dia. A
D 8 8 8
B dia. B

C D
A C

Blank Flange (Material : SUS304) Nozzle (Material : SUS304)

Standard SCK-4016 SCK-4025 SCK-4040 Standard SCK-2512 SCK-2518
Flange size KF-16 KF-25 KF-40 Flange size KF-25 KF-25
dia.A 30 40 55 dia.A 40 40
dia.B 17.2 26.2 41.2 B 6 6
C 6 6 6 dia.D C 35 35

dia.A dia.D 12 18
dia.B
C

C B

dia.A

Nipple (Material : SUS304) Elbow (Material : SUS304)

dia. A
dia. B
Standard SCK-5016 SCK-5025 SCK-5040 Standard SCK-6016 SCK-6025 SCK-6040
dia. C Flange size KF-16 KF-25 KF-40 Flange size KF-16 KF-25 KF-40
dia.A 30 40 55
dia.A 30 40 55
D

dia.B 20 27.2 42.7

dia.B 20 27.2 42.7
dia.C 16 24 39
D
dia.A dia.C 16 24 39
D 60 100 100
D 40 50 65
D dia.B
dia.A

dia.B

dia.C

dia.C

Tee (Material : SUS304) Cross (Material : SUS304)

Standard SCK-7016 SCK-7025 SCK-7040 Standard SCK-8016 SCK-8025
Flange size KF-16 KF-25 KF-40 Flange size KF-16 KF-25
dia.A 30 40 55 dia.A 30 40
dia.B 20 27.2 42.7 dia.B 20 27.2
dia.C 16 24 39 dia.A dia.C 16 24
D 40 50 65 dia. B D 40 50
dia. C
dia. B
dia.A

dia. C

D
D

D D

Reducer (Material : SUS304) KF Flange (Material : SUS304)

Standard SCK-9025 SCK-9040 Standard SCK-3016 SCK-3025 SCK-3040

Flange size KF-16/25 KF-25/40 Flange size KF-16 KF-25 KF-40

Type a Type b
dia.A 30 40 dia.A 30 40 55

dia.B 40 55 dia.B 17.2 26.2 41.2

dia.B
dia.C 20 27.2 dia.A Connected dia.20 20A 32A
E
dia.B pipe t=2 10S 10S
dia. C
dia.D 16 24
dia.C 16 24 39
E
40

dia. B

dia. C
dia. D
dia. A

dia. D dia.D 20 27.2 42,7

dia.C
D

dia.D
E 10 20 20
dia.A

27
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Optional Parts Accessories for Oil Rotary Vacuum Pumps

units : mm.

VCR Adapters (Material : Joint = SUS316, Flange = SUS304)

A
Female A
Male

dia.B
dia.B
Standard SCA-1614-F SCA-1638-F SCA-1612-F SCA-2514-F SCA-2538-F SCA-2512-F
Flange size KF-16 KF-16 KF-16 KF-25 KF-25 KF-25
Female Tube diameter 1/4 inch 3/8 inch 1/2 inch 1/4 inch 3/8 inch 1/2 inch
A 35.8 42.1 40.6 35.8 40.6 40.6
dia.B 3 7.1 10.2 4.6 7.1 10.2

Standard SCA-1614-M SCA-1638-M SCA-1612-M SCA-2514-M SCA-2538-M SCA-2512-M

Flange size KF-16 KF-16 KF-16 KF-25 KF-25 KF-25
Male Tube diameter 1/4 inch 3/8 inch 1/2 inch 1/4 inch 3/8 inch 1/2 inch
A 35.8 42.1 40.6 35.8 40.6 40.6
dia.B 3 7.1 10.2 4.6 7.1 10.2

Gauge port (Material : SUS304) Leak port (Material : SUS304)

A
A
dia. B

Standard SCO-1025 SCO-1040 Standard SCO-3016 SCO-3025

Flange size KF-25 KF-40 Flange size KF-16 KF-25
Pipe diameter dia.15 dia.15
A 65 66.5
A 74 58
dia.B 25 25

Standard SCO-2025 SCO-2040

Flange size KF-25 KF-40
Pipe diameter dia.18 dia.18
A 74 58
dia.B 28 28

Flexible tube (Material : SUS316) Rubber Vacuum Hose

Standard Flange size (mm)

STK-016-250 KF-16/250
Size (I.D. × O.D.) Adaptable hose port
STK-016-500 KF-16/500
6 × 18 dia.8
STK-016-1000 KF-16/1000
7.5 × 20 dia.9
STK-025-250 KF-25/250
9 × 24 dia.11, dia.12
STK-025-500 KF-25/500
12 × 30 dia.15
STK-025-1000 KF-25/1000
STK-040-250 KF-40/250 15 × 36 dia.16, dia.18
STK-040-500 KF-40/500 18 × 42 dia.20, dia.22
STK-040-1000 KF-40/1000 25 × 50 dia.27

28 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Optional Parts

Suction and Exhaust Pipes for Oil Rotary Vacuum Pumps

Suction Pipe
GLD-136A
GLD-136C
GLD-040 GLD-201A GLD-280A Photo
Type Products Material GHD-031
GCD-051X GLD-201B GLD-280B number
GCD-136X
GCD-201X
Hose port suction pipe (dia.8 × M20) BS + plate + 40 mm sq + 50 mm sq 1

Hose port suction pipe (dia.12 × M20) BS + plate + 40 mm sq + 50 mm sq 2

Hose port suction pipe (dia.15 × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 3

Hose port suction pipe (dia.18 × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 4

Hose port type
Hose port suction pipe (dia.22 × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 5

Hose port suction pipe (dia.27 × 40 mm sq) ZDC + plate

Hose port suction pipe (dia.27 × 50 mm sq) ZDC + plate 6

Hose port suction pipe (dia.30 × 50 mm sq) ZDC + plate 7

Hose port suction pipe for GHD-031 (dia.12) BS + plate

For
Hose port suction pipe for GHD-031 (dia.18) BS + plate
GHD-031 only
Suction pipe for GHD-031 (KF-16) BS + plate
KF-25 suction pipe (KF-25 × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 8

KF-25 type KF-25 suction pipe (KF-25 × 40 mm sq) PPS 9

KF-25 suction pipe (KF-25 × 50 mm sq) PPS 10

A-type suction pipe (R1/4-L20 Male × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 13

1/4 screw type B-type suction pipe (R1/4 Female × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 15

C-type suction pipe (R1/4-L10 Male × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 14

40 mm sq Adapter (M20 Female) ZDC 11

Adapter
50 mm sq Adapter (M20 Female) ZDC 12

: Standard type
: Replaceable (no Adapters necessary) + 40 mm sq : Replaceable (40 mm sq Adapter required) + 50 mm sq : Replaceable (50 mm sq Adapter required)

Suction Pipe Exhaust Pipe

8 5
7
4
6 3

2
1

10 13 14 17 16
9 12 15
11

Exhaust Pipe
GLD-136A
GLD-136C
GLD-201A GCD-136X Photo
Type Products Material GLD-040 GHD-031
GLD-201B
GCD-051X
GCD-201X number
GLD-280A
GLD-280B
Hose port exhaust pipe (dia.12 × G3/4) BS + plate

Hose port Hose port exhaust pipe (dia.15 × G3/4) BS + plate 16

type Hose port exhaust pipe (dia.18 × G3/4) BS + plate 17

※
Hose port exhaust pipe (dia.27 × G1) BS + plate
KF-25 exhaust pipes (KF-25 × G3/4) PPS
KF flange
KF-25 exhaust pipes (KF-25 × G1) PPS
type
KF-16 (G3/4) BS + plate

Exhaust Exhaust pipes Assy (G3/4) PA

pipe Exhaust pipes Assy (G1) PA
※

※ Remarks: Different anti-corrosive quality as standard exhaust pipes. : Equipped with vacuum pump : Replaceable (no Adapters necessary)

29
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Outline Drawing

Dry pump DAP-6D (see p.6) Dry pump DAP-12S (see p.6)
M4 Screw (EARTH) M4 Screw (EARTH)
OUT (163) (22) 67 (4)
(163) (22) 67 (4)
155 OUT 45 IN
155 45
IN
91
91 24
24

55.5
55.5

(100.6)
89.6
96.1
(100.6)
96.1
89.6

(94)
(94)

4
4
49 49 M3 Tap
4-Rubber legs M3 Tap 4-M4 Tap 4-Rubber legs
4-M4 Tap 57 57
M4 Tap 67±1 M4 Tap
4-M3 Tap 67±1 CCW 4-M3 Tap CCW
80±1 80±1

Dry pump DA-30D (see p.7) Dry pump DA-60S (see p.7)
OUT IN
212 278 212
278 167
27.5 IN 27.5 22.5
22.5

(30)
95
95
(30)

(165)
(165)

(200)
224.5
224.5
(200)

91
E
91

160 60 136

12
160 60 136
12

Rubber legs 4-M4 160

160 200
200 Rubber legs 4-M4

Dry pump DAT-50D (see p.7) Dry pump DAT-100S (see p.7)
173.8 173.8
Lead wire Circle Lead wire Circle
shaped terminals R1.25-5 dia.132 dia.132
shaped terminals R1.25-5

IN

IN OUT 54 54 OUT
305
305

144

144

4-M5 4-M5
130 Depth 10 120 130 Depth 10 120
10

10

232 Rubber legs 150 232 150

Rubber legs

Dry pump DA-20D (see p.8) Dry pump DA-40S (see p.8)
84 68 84
IN IN OUT
(70)

(70)

(178)
(178)

(165)
(165)

66.5
66.5

(11)
(11)

70 186
70 186
108 236
108 236
(240) (112) (240)
(112)
Rubber legs 4-M4
Rubber legs 4-M4

30 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

All size unit is mm

Dry pump DA-41D (see p.8) Dry pump DA-81S (see p.8)
(16.5) 320
161 157 (16.5) 320 181
OUT IN IN OUT
79.5

217
217

192
192

10.5
10.5

90
90
4-M4 Tap 230 133
4-M4 Tap 230 133

Dry pump DA-60D (see p.9) Dry pump DA-120S (see p.9)
OUT IN
(81)
IN (81) (81)
132 108 90
132 108 90 OUT
(96)
201.5

(96)
(238)
229

225

201.5
238
229

225
(92)

(92)
110
300 300 110
(9)

140
(9)

340 340 140

(5) 347 (6) (5) 347 (6)

Dry pump DA-121D(see p.9) Dry pump DA-241S (see p.9)

411

OUT IN 193.5 411

221
95 IN 207
OUT
272
285
270
272
285
270

354 120
13

354 120 360 144

13

360 144 402 180

402 180

Dry pump DAU-20 (see p.10) Dry pump DTU-20 (see p.10)
(84) 77
13
(84) 77
13 IN

IN
(72)
(72)

(217)
(217)

(72)
(72)

(25)
(25)

OUT 49.5 148 OUT 49.5 148

13 10 13 10
(97) (97)
103 (327) 103
(327)
Gas ballast valve Gas ballast valve

31
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Outline Drawing

Dry pump DTC-22 (see p.11) Dry pump DTC-41 (see p.11)
142 272 (16.5)
(16.5) 320 155
133
OUT IN OUT 161 IN 133

217
202

192
175.1

10.5
90
70 4-M4 Tap
10.6

4-M4 Tap 230 133

118 186

Dry pump DTC-60 (see p.11) Dry pump DOP-40D (see p.12)
340 158 (270)
94
OUT 185 IN (25.5) 219 (25.5) 16

OUT IN

179
(242)
228

162.5
(224)

66.5

7
15 15
89

1.5
(27) 192 (27)
4-M5 Tap 104
280 110 (246) 132
(14)

300 150
Earth screw
330 4-M4

Dry pump DOP-80S (see p.12) Dry pump DOP-80SP (see p.12)
(270)
94 (288) 94
(25.5) 219 (25.5) 16 (25.5) 237 (25.5) 16

IN
OUT
OUT IN
181
164.5
179
162.5

85
66.5
66.5

15 15 89
7

1.5

15 15 104
4-M5 Tap
1.5

89 (3.5)
(27) 192 (27) 32 132
4-M5 Tap 104 (27) 210 (27)
(246) 132 Earth screw
(264)
Earth screw

Dry pump DOP-300SA (see p.13) Dry pump DOP-420SA (see p.13)

Cable diameter dia.6-12mm 310 168

(443) (315) IN

180.5 180.5 82 (155) (160)

102.5
108

IN
253
108
(231)

107
19
100

OUT
18

OUT 195 48.5 119.5 149.5

M6 269
113.5 113.5 120 523
136.85 136.85

32 | SMALL VACUUM PUMPS CATALOG

 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

All size unit is mm

Dry pump DIS-90 (see p.14) Dry pump DIS-251 [Single phase] (see p.14)
91 123 308 252 400
IN 122 IN 96
85

336
225

(76)
(37)

73.5
23.5

38
154 (10) 112 52
136
97
180 90 140 180 Air flush port 121 130
4-dia. 11 OUT (Rc1/8) 101 170
OUT Air flush port (Rc1/8) 4-dia. 7

Dry pump DIS-501 [Three phase] (see p.14) Dry pump DISL-101 (see p.15)
Air flush port (Rc1/8)
372
292
IN 29 36 OUT 99 46 IN 120

215
177
397
373

110
372

20 140 (50) OUT 138 90 4-dia. 9

210 358

Air flush
42

288 42 310

Dry pump DISL-502 (see p.15) Oil pump GLD-040 (see p.16)
145 70 207
Gas ballast valve
14 (477) Oil inlet plug
IN Suction pipe
35 18
Oil level gauge 46 64 35 23.5 36.5

Exhaust
pipe
I
39

O
78.5
231
280

228.5

MAX
140

MIN
13
74

2-dia. 8.5
10

21 220 (76) OUT 144 252

18

317 491 20 110 20 81 17 206 17

150 427
Air flush Drain plug Rubber legs

Oil pump GLD-136A (see p.16) Oil pump GLD-136C (see p.16)
Oil level gauge Oil inlet plug Gas ballast valve Suction pipe
Oil inlet plug
Gas ballast valve Suction pipe Oil level gauge
181 83 212.5
181 83 214.5
37 33 Exhaust pipe 56 90 35 29 48 37 33 Exhaust pipe
56 90 35 29 48
39

49
39
dia. 60

dia. 60
88.5

88
(240)

MAX
249.5

MAX
8

MIN MIN
86

86
14
18
14

18

20 130 20
20 130 20 9 72 20 260 20 170 9 72 20 260 20
170 485.5
487.5
Drain plug Rubber legs Drain plug Rubber legs

33
 Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

Outline Drawing

Oil pump GLD-201A (see p.17) Oil pump GLD-201B (see p.17)
Oil level gauge Oil inlet plug
Oil level gauge Oil inlet plug
Gas ballast valve Suction pipe
Gas ballast valve Suction pipe
209 83 212.5 209 83 214.5
Exhaust pipe
37 33 Exhaust pipe 84 90 35 29 48 37 33
84 90 35 29 48

49
39
39

dia. 60
dia.60
88.5

88
249.5
(240)

MAX

8
8

MIN

86
86

14
18
14
18

20 130 20
20 130 20 9 100 20 260 20 170 9 100 20 260 20
170 513.5
Drain plug
515.5
Drain plug Rubber legs
Rubber legs

Oil pump GLD-280A (see p.17) Oil pump GLD-280B (see p.17)
Gas ballast valve

225 83 228 Oil level gauge

Suction pipe 225 83 277
75 110 33 Gas ballast valve
43.5 31.5 Oil inlet plug Exhaust 20 14 75 110 33
Suction port
pipe 43.5 31.5 2014
36
32

36
32
124

124
269

271
86

86
29

25 29
23

20 130 20 20 260 20 134

174 295
175 116 300 120 2×2-dia.10
182 335
181 536 585

Oil level gauge Rubber legs

Oil pump GHD-031 (see p.18) Oil pump MBS-051 (see p.18)
Oil level gauge Suction pipe
135 40 106 23.5 Exhaust pipe
132.5 17 23 63.5 13.5 29 Oil
inlet plug 23.5 23

167
18

Oil inlet plug Inlet flange

83.5 83.5 386
36

dia.105 10.5 123.6 165 13.5

38
163

65
133

130

130
58

65

dia.105 Drain plug

13

Outlet flange
64
Rubber legs dia. 4-8 107 Oil level gauge
120
59.5 15 120 15 71.5 7.5
Drain plug
288.5

Oil pump GCD-051X (see p.19) Oil pump GCD-136X (see p.19)
Oil inlet plug
Oil inlet plug Exhaust pipe Gas ballast valve Suction pipe
Gas ballast valve 181 83 202
419 Suction pipe
175 70 145 29 37 33 Oil level gauge 56 90 35 29 48
36.5 23.5 35 Oil Exhaust
64 46 level gauge
35 18 pipe
18
40.4
39
39

dia. 60
88.5
78.5

241.1
222.7

MAX
8
13

MIN
86
74
10

14

20 110 20 Rubber legs

18.2

Rubber legs 17 206 17

18.2

15.5 150 20 130 20 (27) 72 20 260 20

240 76
165.5 170 493
Filtration joint(R3/8) Drain plug
Filtration joint Filtration joint (R3/8)
Drain plug (R3/8) Filtration joint (R3/8)

34 | SMALL VACUUM PUMPS CATALOG

Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

All size unit is mm

Oil pump GCD-201X (see p.19) System VPC-1100 (see p.20)

Gas ballast valve Suction pipe Oil inlet plug
Oil level gauge 209 83 190.5
37 33 84 90 35 29 48
Exhaust
pipe
40.4
39 dia. 60

377
88.5
241.1

2155
149
8 86
14

921
Rubber legs
18.2

20 130 20 (27) 100 20 260 20

170 509.5
Drain plug
Filtration joint(R3/8)
Filtration joint(R3/8)
(90) 1145 750 (40)

System VFR-200M/ERH (see p.21) System VWR-400M/ERH (see p.21)

1161
1161

Pa
760

760
MAX

MIN

730 (83) 520 730 (100) 520 (89)

System VTR-350M/ERH (see p.21) System VTS-350M/ERH (see p.21)

1161
1161

760
760

MAX

MIN

730 (64) 520 730 (64) 520

System RFS-200 (see p.22) System "SCOTT-C3" VTR-150M/SRF (see p.23)

800 (55) 630 (40)
(1635)
1625.5

1070
722

521 581
1102 704

35
Global Network

SMALL VACUUM PUMPS CATALOG

RUSSIA
GERMANY 26 SHENYANG
5 20
BEIJING KOREA
U.S.A. U.K. 12 13 14 23
21
4 25
SHANGHAI JAPAN
U.S.A. 6 22 1 2
3 24 TAIWAN
8 9 10 11
INDIA HONG KONG
19 7
MALAYSIA THAILAND
16 17 18
SINGAPORE
15

ULVAC KIKO, Inc. SINGAPORE

1 Sales Division (Overseas Division) 15 ULVAC SINGAPORE PTE LTD S M
1-10-4 Kitashinyokohama, Kohoku-ku, Yokohama City, Kanagawa 223-0059, Japan 30 Loyang Way, #7-10, JTC Building, Singapore 508769
TEL (81) 45-533-0206 FAX (81) 45-533-0204 TEL: (65) 6542-2700 FAX: (65) 6542-2755
MALAYSIA
16 ULVAC MALAYSIA SDN. BHD. KL FACTORY S M
ULVAC Group Global Network
No.8 Jalan Gitar 33/3, Elite Industrial Eatate, Off Jalan Bukit Kemuning 40350 Shan Alam, Seangor Darul Ehsan, Malaysia
JAPAN
TEL: (60) 3-5121 4700 FAX: (60) 3-5122 3755
2 ULVAC Inc. Head Office S M
17 ULVAC MALAYSIA SDN. BHD. Penang Branch S M
2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan
Unit 2, Lower Level 5, Hotel Equatorial Penang, No.1, Jalan Bukit Jambul, 11900 Penang, Malaysia
TEL: (81) 467-89-2033 FAX: (81) 467-82-9114
TEL: (60) 4-643-4700 FAX: (60) 4-644-3755
U.S.A.
THAILAND
3 ULVAC Technologies, Inc. Headquarters S M
18 ULVAC (THAILAND) LTD. S M
401 Griffin Brook Drive Methuen, MA 01844, U.S.A.
140/29 Moo 12 T. Rachathewa, A. Bangplee Samutprakarn 10540 Thailand
TEL: (1) 978-686-7550 FAX: (1) 978-689-6300
TEL: (66) 2-3124447 FAX: (66) 2-3124474
4 ULVAC Technologies, Inc. California Sales & Service Center S M
INDIA
4005 Clipper Court, Fremont, CA 94538, U.S.A.
19 ULVAC, Inc. India Branch S
TEL: (1) 510-226-0151 FAX: (1) 510-226-0167
301, Tara Tycoon 12-13-97, Tarnaka Secunderabad-500 017, India
GERMANY
TEL: (91) 40-27007006 FAX: (91) 40-27007005
5 ULVAC G.m.b.H. S M
Parkring 11, 85748 Garching(Munich), Germany
TEL: (49) 89-960909-0 FAX: (49) 89-960909-96 Distributor
CHINA CHINA
6 ULVAC (SHANGHAI) TRADING CO., LTD. S M 20 SKY Technology Development Co., Ltd. CAS S
No.1000 Qixin Rd, Shanghai, 201100, China No.1, Xinyuan Street, Hunnan Industrial Zone, Shenyang, 110168, China
TEL: (86) 21-6127-6618 FAX: (86) 21-61456821 TEL: (86) 24-23826865 FAX: (86) 24-23826800
7 HONG KONG ULVAC CO., LTD. S M 21 KYKM Beijing Zhongkekemei Vacuum Technology Co., Ltd. S M

Flat L, 9/F., Summit Building, 30 Man Yue Street, Hunghom, Kowloon, Hong Kong No.266 Cheng Fu Road, Zhongguancun, Haidian District, Beijing, 100080, China
TEL: (852) 2523-5940 FAX: (852) 3003-6256 TEL: (86) 10-62528994 FAX: (86) 10-62548842
TAIWAN 22 SHANGHAI WANLAI INDUSTRY LTD. S
8 ULVAC TAIWAN Inc. S Suite 601, Mansion Abbrebiation, No.888 YiShan Road, Shanghai, 200233, China
8F., No.5, Keji Rd., Hsinchu Science Park, Hsinchu City, 30078, Taiwan, R.O.C. TEL: (86) 21-64320612 FAX: (86) 21-64320072
TEL: (886) 3-579-5688 FAX: (886) 3-579-7688 KOREA
9 ULVAC TAIWAN Inc. Tainan Sales Division S 23 POONGIL COMMERCIAL CO., LTD S M

3F, No.27, Nanke 2nd Rd., Tainan Science Park, Sinshih Township, Tainan Country 74147, Taiwan, R.O.C. 4F Woori Bldg, 129-4, Namyoung-Dong, Youngsan-Gu, Seoul, Korea
TEL: (886) 6-505-3860 FAX: (886) 6-505-3680 TEL: (82) 2-765-1477 FAX: (82) 2-744-5507
10 ULTRA CLEAN PRECISION TECHNOLOGIES CORP. Taoyuan CIP Feb. M U.S.A.
No.19-2, Lane 54, Sec. 1, Minsheng N. Rd., Gueishan Township, Taoyuan Country 33391, Taiwan, R.O.C. 24 Kurt J. Lesker Company S M

TEL: (886) 3-358-5481 FAX: (886) 3-358-5286 PO Box 10, 1925 Route 51, Clairton, PA 15025, U.S.A.
11 ULTRA CLEAN PRECISION TECHNOLOGIES CORP. Southern Taiwan Science Park Feb. M TEL: (1) 412-387-9200 FAX: (1) 412-384-2745 Sales (US): 1-800-245-1656
No.27, Sec. 1, Huandong Rd., Southem Taiwan Science Park, Sinshih Township, Tainan Country 74146, Taiwan, R.O.C. U.K.
TEL: (886) 6-505-8888 FAX: (886) 6-505-8866 25 Kurt J. Lesker Company Ltd. S M

KOREA 15/16 Burgess Road, Hastings, East Sussex TN35 4NR, England
12 ULVAC KOREA, Ltd. Head Office S TEL: (44) 1424-458100 FAX: (44) 1424-458103
837-4, Hansan‐Ri, Chungbuk-Myeon, Pyongtaek, Kyonggi-Do, Korea 451-830 RUSSIA
TEL: (82) 31-683-2922 FAX: (82) 31-683-9033 26 Alwest-vacuum Ltd. S M
13 ULVAC KOREA, Ltd. Seoul Branch S Elektrodnaya yl., 11, Moscow, Russia
1338-23, 5F Cliford B/D, Seocho-Dong, Seocho-Ku, Seoul, Korea TEL: (7) 495-309-27-38 FAX: (7) 495-309-20-52
TEL: (82) 2-3473-2920 FAX: (82) 2-3473-0885
14 ULVAC KOREA, Ltd. Gumi Customer Service Center M
Jiwon-5Dong, 4F 401, 92-9 Imsoo-Dong, Gumi-City, Kyoung -Buk, Korea S = Sales
TEL: (82)54-471-3567~ 8 FAX: (82)54-471-3569 M = Maintenance

• The dimensions and specifications of the products listed in

this catalog are subject to change without prior notice for
improvement of their performance.
PRINTED WITH
SOY INK
10122000ADP
TM