Report: ResDeptUtilization.

rpt Run Date: 4/1/2011

Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

JEOL 200cx STEM JEOL 200cx STEM
Castracane Castracane

Dunn
Dunn

Eisenbraun

Eisenbraun

Metrology Staff
Metrology
Staff

Department Utilization by Count Utilization by Hours

Castracane 1 0.1% 4.0 0.2%
Dunn 4 0.5% 6.8 0.3%
Eisenbraun 1 0.1% 2.0 0.1%
Metrology Staff 25 3.4% 72.3 3.1%
JEOL 200cx STEM 31 4.3% 85.0 3.6%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

XPS ThetaProbe XPS ThetaProbe
Ventrice Ventrice

Metrology
Metrology Staff
Staff

Denbeaux Denbeaux

Eisenbraun Eisenbraun

Efstathiadis Efstathiadis

Department Utilization by Count Utilization by Hours

Denbeaux 19 2.6% 172.5 7.3%
Efstathiadis 3 0.4% 20.0 0.8%
Eisenbraun 3 0.4% 39.0 1.7%
Metrology Staff 7 1.0% 55.8 2.4%
Ventrice 2 0.3% 24.0 1.0%
XPS ThetaProbe 34 4.7% 311.3 13.2%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

FEI Dualbeam 600 FEI Dualbeam 600
Ventrice Ventrice
Atotech Atotech
Oktyabrsky
Oktyabrsky

Metrology
Metrology Staff
Staff
Cady
Cady

Eisenbraun Eisenbraun

Dunn Dunn

Department Utilization by Count Utilization by Hours

Atotech 14 1.9% 45.8 1.9%
Cady 9 1.2% 32.8 1.4%
Dunn 24 3.3% 87.3 3.7%
Eisenbraun 7 1.0% 19.3 0.8%
Metrology Staff 9 1.2% 35.0 1.5%
Oktyabrsky 6 0.8% 8.5 0.4%
Ventrice 6 0.8% 32.0 1.4%
FEI Dualbeam 600 75 10.3% 260.5 11.0%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

FEI E SEM 600 FEI E SEM 600
Bergkvist Bergkvist
Xie Carpenter
Xie Carpenter

Hartley

Hartley

Lee
Thiel
Thiel
Lee Metrology
Staff
Metrology Staff

Department Utilization by Count Utilization by Hours

Bergkvist 1 0.1% 2.0 0.1%
Carpenter 3 0.4% 6.0 0.3%
Hartley 9 1.2% 21.8 0.9%
Lee 1 0.1% 2.0 0.1%
Metrology Staff 3 0.4% 11.0 0.5%
Thiel 14 1.9% 41.8 1.8%
Xie 5 0.7% 13.0 0.6%
FEI E SEM 600 36 4.9% 97.5 4.1%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

AES660 AES660
Metrology Staff Efstathiadis Efstathiadis
Metrology
Staff
Haldar

Haldar

Eisenbraun
Eisenbraun

Department Utilization by Count Utilization by Hours

Efstathiadis 4 0.5% 37.0 1.6%
Eisenbraun 23 3.2% 128.0 5.4%
Haldar 2 0.3% 9.5 0.4%
Metrology Staff 4 0.5% 66.5 2.8%
AES660 33 4.5% 241.0 10.2%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Gatan Ilion+ Gatan Ilion+

Atotech Atotech

Metrology
Metrology Staff
Staff

Department Utilization by Count Utilization by Hours

Atotech 1 0.1% 3.0 0.1%
Metrology Staff 2 0.3% 6.0 0.3%
Gatan Ilion+ 3 0.4% 9.0 0.4%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Olympus Lext OLS4000 Metrology
Olympus Lext OLS4000
Metrology Staff Staff

Atotech Atotech

Department Utilization by Count Utilization by Hours

Atotech 15 2.1% 52.8 2.2%
Metrology Staff 1 0.1% 1.0 0.0%
Olympus Lext OLS4000 16 2.2% 53.8 2.3%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Leo1550 Leo1550
Yu Bergkvist
Cady
Yu Bergkvist
Ventrice Cady
Ventrice Castracane Shahedipour-Sandvik Castracane
Shahedipour-Sandvik
Oktyabrsky
Oktyabrsky
Dunn Dunn

Efstathiadis Efstathiadis

Metrology Staff
Metrology
Staff

Lee
Eisenbraun
Eisenbraun Lee
Huang

Hartley Huang
Hartley
Elter Elter

Department Utilization by Count Utilization by Hours

Bergkvist 5 0.7% 15.0 0.6%
Cady 1 0.1% 2.0 0.1%
Castracane 9 1.2% 14.8 0.6%
Dunn 1 0.1% 0.3 0.0%
Efstathiadis 6 0.8% 13.8 0.6%
Eisenbraun 28 3.8% 49.0 2.1%
Elter 11 1.5% 22.5 1.0%
Hartley 1 0.1% 0.5 0.0%
Huang 7 1.0% 14.0 0.6%
Lee 6 0.8% 9.8 0.4%
Metrology Staff 14 1.9% 41.0 1.7%
Oktyabrsky 1 0.1% 1.5 0.1%
Shahedipour-Sandvik 3 0.4% 7.0 0.3%
Ventrice 3 0.4% 7.5 0.3%
Yu 8 1.1% 12.5 0.5%
Leo1550 104 14.3% 211.0 8.9%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

JEOL 2010F JEOL 2010F
Wang Wang Cady
Thiel Cady Thiel

CNSE

CNSE

Metrology Staff Metrology

Staff

Dunn

Dunn

Department Utilization by Count Utilization by Hours

Cady 5 0.7% 14.5 0.6%
CNSE 14 1.9% 43.0 1.8%
Dunn 4 0.5% 20.5 0.9%
Metrology Staff 20 2.7% 77.8 3.3%
Thiel 4 0.5% 14.0 0.6%
Wang 1 0.1% 3.5 0.1%
JEOL 2010F 48 6.6% 173.3 7.3%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Acid Bench Acid Bench

Bergkvist
Bergkvist

Haldar

Haldar

Castracane
Castracane

Department Utilization by Count Utilization by Hours

Bergkvist 1 0.1% 1.0 0.0%
Castracane 1 0.1% 0.5 0.0%
Haldar 2 0.3% 2.0 0.1%
Acid Bench 4 0.5% 3.5 0.1%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Contact Aligner Academic
Contact Aligner
Shahedipour-Sandvik
Academic ESG ESG
Shahedipour-Sandvik
Bakhru
Bakhru

Cady
Oktyabrsky
Oktyabrsky

Cady

Haldar

Haldar

Castracane
Castracane

Department Utilization by Count Utilization by Hours

Academic ESG 3 0.4% 3.0 0.1%
Bakhru 5 0.7% 6.8 0.3%
Cady 5 0.7% 7.5 0.3%
Castracane 18 2.5% 41.5 1.8%
Haldar 4 0.5% 5.0 0.2%
Oktyabrsky 15 2.1% 24.8 1.0%
Shahedipour-Sandvik 1 0.1% 2.0 0.1%
Contact Aligner 51 7.0% 90.5 3.8%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

PlasmaTherm Academic
PlasmaTherm
Academic ESG Hartley ESG
Hartley

Eisenbraun

Eisenbraun

Castracane
Castracane

Department Utilization by Count Utilization by Hours

Academic ESG 3 0.4% 4.5 0.2%
Castracane 24 3.3% 68.0 2.9%
Eisenbraun 2 0.3% 10.0 0.4%
Hartley 5 0.7% 8.3 0.3%
PlasmaTherm 34 4.7% 90.8 3.8%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Profilometer Profilometer

Academic
ESG

Hartley Academic ESG

Hartley

Department Utilization by Count Utilization by Hours

Academic ESG 1 0.1% 0.5 0.0%
Hartley 1 0.1% 2.0 0.1%
Profilometer 2 0.3% 2.5 0.1%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Solvent Bench Solvent Bench
LaBella LaBella
Cady Cady

Hartley

Castracane

Hartley
Haldar

Castracane

Haldar

Department Utilization by Count Utilization by Hours

Cady 5 0.7% 8.5 0.4%
Castracane 12 1.6% 33.0 1.4%
Haldar 2 0.3% 2.0 0.1%
Hartley 19 2.6% 14.3 0.6%
LaBella 3 0.4% 6.0 0.3%
Solvent Bench 41 5.6% 63.8 2.7%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Spin Coater Academic
Spin Coater
Academic ESG
Oktyabrsky Lee ESG
Oktyabrsky
Bakhru
Lee LaBella Brainard
Bakhru
LaBella
Hartley Cady
Brainard

Cady Eisenbraun

Hartley

Eisenbraun

Castracane Castracane

Department Utilization by Count Utilization by Hours

Academic ESG 1 0.1% 0.5 0.0%
Bakhru 5 0.7% 2.8 0.1%
Brainard 1 0.1% 1.0 0.0%
Cady 5 0.7% 8.3 0.3%
Castracane 17 2.3% 37.5 1.6%
Eisenbraun 1 0.1% 1.0 0.0%
Hartley 10 1.4% 9.0 0.4%
LaBella 2 0.3% 1.0 0.0%
Lee 3 0.4% 3.0 0.1%
Oktyabrsky 1 0.1% 0.3 0.0%
Spin Coater 46 6.3% 64.3 2.7%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Wire Bonder Wire Bonder

LaBella LaBella

Department Utilization by Count Utilization by Hours

LaBella 10 1.4% 10.0 0.4%
Wire Bonder 10 1.4% 10.0 0.4%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Dimension SPM Dimension SPM
Yu Yu

Shahedipour-Sandvik

Shahedipour-Sandvik Geer

Lee
Geer

Lee

Department Utilization by Count Utilization by Hours

Geer 5 0.7% 19.5 0.8%
Lee 3 0.4% 5.0 0.2%
Shahedipour-Sandvik 3 0.4% 6.0 0.3%
Yu 1 0.1% 1.0 0.0%
Dimension SPM 12 1.6% 31.5 1.3%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

FIB200 FIB200

Dunn
Yu Dunn

Yu

Oktyabrsky

Metrology
Staff
Haldar

Huang
Oktyabrsky
Haldar
Metrology Staff Huang

Department Utilization by Count Utilization by Hours

Dunn 3 0.4% 9.0 0.4%
Haldar 3 0.4% 12.0 0.5%
Huang 1 0.1% 2.0 0.1%
Metrology Staff 1 0.1% 2.0 0.1%
Oktyabrsky 1 0.1% 1.0 0.0%
Yu 5 0.7% 8.5 0.4%
FIB200 14 1.9% 34.5 1.5%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

E-beam Evaporator Academic
E-beam Evaporator
Academic ESG ESG
Bergkvist Bergkvist

Yu Cady
Cady Yu

Dunn Dunn

Eisenbraun
Eisenbraun
Shahedipour-Sandvik

Shahedipour-Sandvik

Hartley

Hartley

Oktyabrsky
Oktyabrsky LaBella
Lee Lee LaBella

Department Utilization by Count Utilization by Hours

Academic ESG 3 0.4% 13.0 0.6%
Bergkvist 4 0.5% 12.5 0.5%
Cady 5 0.7% 21.8 0.9%
Dunn 2 0.3% 14.0 0.6%
Eisenbraun 3 0.4% 12.0 0.5%
Hartley 10 1.4% 53.0 2.2%
LaBella 2 0.3% 7.0 0.3%
Lee 3 0.4% 13.0 0.6%
Oktyabrsky 19 2.6% 53.0 2.2%
Shahedipour-Sandvik 1 0.1% 4.0 0.2%
Yu 17 2.3% 79.0 3.3%
E-beam Evaporator 69 9.5% 282.3 12.0%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

He Leakchecker He Leakchecker

Efstathiadis

Efstathiadis

Lee

Lee

Department Utilization by Count Utilization by Hours

Efstathiadis 1 0.1% 1.0 0.0%
Lee 2 0.3% 3.0 0.1%
He Leakchecker 3 0.4% 4.0 0.2%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

RTA RTA

Oktyabrsky Oktyabrsky

Department Utilization by Count Utilization by Hours

Oktyabrsky 1 0.1% 1.0 0.0%
RTA 1 0.1% 1.0 0.0%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

4mm Jig 4mm Jig

Bergkvist Bergkvist

Department Utilization by Count Utilization by Hours

Bergkvist 4 0.5% 13.5 0.6%
4mm Jig 4 0.5% 13.5 0.6%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Pull Tester Pull Tester
Bergkvist

Bergkvist

Castracane

Castracane

Department Utilization by Count Utilization by Hours

Bergkvist 1 0.1% 1.0 0.0%
Castracane 3 0.4% 19.0 0.8%
Pull Tester 4 0.5% 20.0 0.8%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Ionmill (Left) Ionmill (Left)

Metrology Staff Metrology

Staff

Department Utilization by Count Utilization by Hours

Metrology Staff 1 0.1% 3.0 0.1%
Ionmill (Left) 1 0.1% 3.0 0.1%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

JEOL 200cx JEOL 200cx
Eisenbraun
Eisenbraun

Metrology Staff
Metrology
Staff

Department Utilization by Count Utilization by Hours

Eisenbraun 1 0.1% 2.0 0.1%
Metrology Staff 4 0.5% 16.0 0.7%
JEOL 200cx 5 0.7% 18.0 0.8%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Leica Confocal Leica Confocal
Academic
Tenenbaum Academic ESG Tenenbaum ESG

Cady
Cady

Castracane Castracane

Department Utilization by Count Utilization by Hours

Academic ESG 3 0.4% 15.0 0.6%
Cady 14 1.9% 53.0 2.2%
Castracane 21 2.9% 75.5 3.2%
Tenenbaum 3 0.4% 15.8 0.7%
Leica Confocal 41 5.6% 159.3 6.7%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Raman Raman

Diebold Diebold

Department Utilization by Count Utilization by Hours

Diebold 4 0.5% 17.0 0.7%
Raman 4 0.5% 17.0 0.7%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Lateral Furnace Lateral Furnace

Efstathiadis Efstathiadis

Department Utilization by Count Utilization by Hours

Efstathiadis 1 0.1% 5.0 0.2%
Lateral Furnace 1 0.1% 5.0 0.2%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Scintag Scintag

Cady Cady

Department Utilization by Count Utilization by Hours

Cady 1 0.1% 3.0 0.1%
Scintag 1 0.1% 3.0 0.1%

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Report: ResDeptUtilization.rpt Run Date: 4/1/2011
Resource Utilization by
Scope: All Resources Run Time: 8:27:37AM
Department
Range: 03/01/2011 - 03/31/2011 User Name: Warfield, Steven

Total - All Resources : 728 Bookings 2,359.5 Hours

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