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Mass Flow Rate Measurement Through Rectangular Microchannels for Large

Knudsen Number Range

Conference Paper · January 2011

DOI: 10.1115/ICNMM2011-58167

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 Proceedings of the ASME 2011 International Conference on Nanochannels, Microchannels,
and Minichannels
ICNMM2011
June 19-22, 2011, Edmonton, Canada

ICNMM2011-58167

DRAFT: MASS FLOW RATE MEASUREMENT THROUGH RECTANGULAR

MICROCHANNELS FOR LARGE KNUDSEN NUMBER RANGE

M. Hadj Nacer⇤, Pierre Perrier and Irina Graur

Université de Provence- Ecole Polytechnique Universitaire de Marseille,

Département de Mécanique Energétique, UMR CNRS 6595, 5 rue Enrico Fermi,
13453 Marseille cedex 13, France
Email: mustafa.hadjnacer@polytech.univ-mrs.fr, irina.graour@polytech.univ-mrs.fr
pierre.perrier@polytech.univ-mrs.fr

KEY WORDS NOMENCLATURE

Gas flows, mass flow rate, pressure measurements, accom- a Pressure slope [Pa/s]
modation coefficients. G Dimensionless mass flow rate
H Hight of the microchannel [m]
ABSTRACT K Corrective coefficient taking into account the lateral walls
The mass flow rate through microchannels with rectangular influence
cross section is measured for the wide Knudsen number range Kn Knudsen number
(0.0025 26.2) in isothermal steady conditions. The experi- L Length of the microchannel [m]
mental technique called ’Constant Volume Method’ is used for Ṁ Mass flow rate [kg/s]
the measurements. This method consists of measuring the small m Mass of the gas [kg]
pressure variations in the tanks upstream and downstream of P Pressure [Pa]
the microchannel. The measurements of the mass flow rate are Qm Mass flow rate [kg/s]
carried out for three gases (Helium, Nitrogen and Argon). The Qs Slip correction term
microchannel internal surfaces are covered with a thin layer of
R Specific gas constant [J/kg.K]
gold with mean roughness Ra = 0.87nm (RMS). The continuum
Ra Roughness of the surface microchannel [m]
approach (Navier-Stokes equations) with first order velocity slip
S Non-dimensional mass flow rate
boundary condition was used in the slip regime (Knudsen num-
T Temperature [K]
ber varies from 0.0025 to 0.1) to obtain the experimental velocity
slip and accommodation coefficients associated to the Maxwell V Volume of the tanks [m3 ]
kinetic boundary condition. In the transitional and near free w Width of the microchannel [m]
molecular regimes the linearized kinetic BGK model was used a Accommodation coefficient
to calculate numerically the mass flow rate. From the compari- d Rarefaction parameter
son of the numerical and measured values of the mass flow rate e Specific relative error due to isothermal assumption
the accommodation coefficient was also deduced. l Molecular mean free path [m]
µ Viscosity coefficient [Ns/m2 ]
s p Slip coefficient
⇤ Address all correspondence to this author.
1 Copyright c 2011 by ASME
t Experimental time length [s]
n Dimensionless local pressure gradient

1 INTRODUCTION
The application of the Micro-Electro-Mechanical-Systems
(MEMS) grows year by year in the different fields such as med-
ical, chemical and other high technological fields. The flow of
the fluid through a channel represent very often a essential part
of such micro-devices. This is why a number of the experimen-
tal studies of the microflows properties in channel geometries
apeared in the last ten years [1–5]. These studies were limited
essentially to the slip flow regime.
Two main experimental techniques were proposed in the lit-
erature for the mass flow rate measurements in microchannels:
the liquid drop method [1], [3], [5–8] and the constant volume
technique [1] [8–10]. The both techniques were realised for the
isothermal flow conditions. The tangential momentum accom-
modation coefficient which characterizes the gas/wall interaction
was deduced from the measurements. The values of this ac-
commodation coefficient found in the literature are in the range
[0.8 1] [8–11]. These values depend on the surface condition
(roughness and cleanliness) and the wall material [12].
The aim of this paper is an experimental study of an interac-
tion between the nobles gases and a gold covered silicon surface.
This study is effectuated by measuring the mass flow rate through
rectangular microchannel with a gold deposit on the interior sur-
face. The constant volume technique is used for the measure-
ments and the microchannel has an aspect ratio (Height/width)
equal to H/w = 0.53. The working gases are Helium, Argon and
Nitrogen. The Knudsen number range investigated in this work
[0.0025 26] covers all flow regimes, from the hydrodynamic to
near free molecular regimes. The analytical and numerical cal-
culations of the mass flow rate using the Stokes equation in the
hydrodynamic and slip regimes are performed. The simulations
based on the numerical solution of the linearized kinetic model
BGK equation in the transitional and near free molecular regimes
are fulfilled. The slip and accommodation coefficients were de-
duced by comparing the experimental data of the mass flow rate
to the numerical results.
2 EXPERIMENTS
The experimental setup is represented schematically in Fig.
1. The methodology used in measuring the mass flow rate in-
volves the use of two constant volume tanks connected by mi-
crochannel and is called "constant volume technique". The two
volumes have to be much greater than the volume of the mi-
crochannel in order to ensure that the microflow parameters are
independent of time but remain detectable. The variation of the
pressure and temperature during the experiments is measured and
the mass flow rate is deduced from the equation of state. The
FIGURE 1. SCHEMATIC OF THE EXPERIMENTAL SETUP
mass variations occurring in the tanks during the experiments do
not call into question the stationary assumption. The experimen-
tal setup shown in the Fig.1 takes into account these constraints.
The experimental methodology is the following: first, the
experimental loop (Fig. 1) is vacuumed using the vacuum pump
VP by opening all the valves of the experimental set up during a
time period (from one to two hours). Then, the valve V4 is closed
and the system is filled with the working gas from the hight pres-
sure tank until having the desired inlet pressure value (pin ). After
that, the valves V1 and V2 are closed and the valve V4 is opened
again to decrease the pressure in the outlet tank until obtaining
the desired value (pout ). Finally, the valves V3 and V4 are closed
and the acquisition of the temperature and pressure in both tanks
can be started. The duration of the data acquisition depends on
the flow rate, few minutes for hight mass flow rate (10 8 kg/s)
and about 250 s for low mass flow rate (10 13 kg/s).
The registration of the pressure pin and pout is carried out
using two pressure transducers C1 and C2 (see Fig. 1) chosen ac-
cording to their pressure range and connected to the upstream and
downstream tanks, respectively. The technical characteristics of
the pressure transducers are given in Table 1. The temperature of
the gas is measured and it is equal to the room temperature.
The microchannels used in the experiments are fabricated
from silicon with a gold deposit on the interior surfaces. The
height of the microchannel is important to be measured with
good precision because this value is set to the power three and
used in the analytical expression of the mass flow rate. The
dimensions of the microchannel are measured using an optical
microscope and are: Height H = 27.84 ± 0.2µm, width w =
52.23 ± 0.2µm and length L = 15.07 ± 0.01mm. The roughness
of the microchannel is 0.87nm RMS (Roughness Mean Square).
Three gases used in the experiments are Helium, Nitrogen
and Argon.

2 Copyright c 2011 by ASME

TABLE 1. TECHNICAL DATA FOR THE PRESSURE TRANS- If we consider an isothermal flow between two tanks main-
DUCERS (CDG CAPACITANCE DIAPHRAGM GAUGES) tained at pressure pin and pout , respectively, close to constant
values with a small variation of 1%, so the flow may be consid-
Detector (A, B, C and D)
ered as steady flow. To determine the mass flow rate, we use the
Full Scale FS (Pa) 133,322.0 (A) registered data of the pressure pi at different instants ti . The sta-
13,332.2 (B) tionary assumption can justify physically the implementation of
the polynomial expression of first order in ti
1,333.22 (C)
133.32 (D) dp
p(ti ) = ati + b, a= . (5)
Accuracy O.20% of reading t
Temperature effect on zero 0.0050 FS/K To determine the coefficients a and b, we have used a least
Temperature effect on span 0.01% of reading/k squares method. The number of the measured pressure values
varies between 40 and 2000 depending on the tank pressure. The
Resolution 0.0015% FS
standard deviation of the coefficient a is calculated following the
method used in [8], it is found to be less than 0.5%. Therefore,
the uncertainty on the measurement of the mass flow rate is cal-
3 MASS FLOW RATE CALCULATION culated from
Using the constant volume technique, the mass flow rate can
be calculated from the ideal gas equation of state DQm DV DT Da
= + + (6)
Qm V T a
pV = mRT, (1)
and is less than ±4.1% (DV /V = ±1.6%, DT /T = ±2%, Da/a =
0.5%).
where V represents the tank volume and R is the specific gas
constant. P, T and m are the pressure, temperature and mass of
the gas, respectively. The equation (1) can be transformed into 4 BACKGROUND THEORY
✓ ◆ The Knudsen number, calculated from the mean pressure
dm d pV between two tanks, ranges from 0.0025 to 26. This variation
= . (2)
dt dt RT covers all regimes: from hydrodynamic flow regime to near free
molecular regime. Many different theoretical and numerical ap-
As it was shown in [2], [8], the previous relation may be written proaches were used to study the flow between two parallel plates
as follows [13–16] but only a few for rectangular microchannels [17]. Brief
presentation of the theoretical approach used for the comparison
dm V dp dT /T of the measured and the theoretical values of the mass flow rate
= (1 e), e= . (3) is be given below.
dt RT dt d p/p

If e is small compared to 1, than dm/dt can be considered as 4.1 Hydrodynamic and slip regimes
the mass flow rate Qm through the microsystem. The constant The mass flow rate through a rectangular microchannel ob-
volume method requires a high-thermal stability. The deviation tained from the Navier Stokes equations with first order velocity
of the temperature from the initial value is smaller than 0.5K. slip condition reads:
The relative variation of the temperature dT /T is in order of 2 ⇥
10 4 against 10 2 for the relative variation of the pressure d p/p, H 3 w(1 K)Dppm
e is clearly less than 2 ⇥ 10 2 . Thus, the mass flow rate Qm can Ṁ = (1 + 6AKnm ), (7)
12µRT L
be written in the following form
where Dp = pin pout , Knm is the mean Knudsen number, based
V dp on the mean pressure pm = 0.5(pin + pout ). In this theoretical
Qm = . (4)
RT t frame, the coefficient A may be presented in the form:

This measurement is affected by a specific relative error of 2 ⇥ 2s p Qs

A= p , (8)
10 2 due to the variation of the temperature. p(1 K)

3 Copyright c 2011 by ASME

 TABLE 2. EXPERIMENTAL CONDITIONS TABLE 3. EXPERIMENTAL COEFFICIENTS Aexp OBTAINED
FROM THE FIRST ORDER POLYNOMIAL FITTING.
Quantity Min Max Gas Molar mass [g/mol] Aexp sr r2
Mass flow rate (10 13 kgs 1 ) 0.91 161 000 He 4.00 10.13 ± 0.12 0.024 0.994
Inlet pressure (Pa) 53.3 131 866 N2 28.02 10.20 ± 0.08 0.017 0.997
Outlet pressure (Pa) 11.1 88 220 Ar 39.95 9.17 ± 0.13 0.027 0.991
Average Knudsen number Knm 0.0025 26.2
Pressure ratio 1.54 4.9

is always small for any pressure ratio Pin /Pout . This assumption
allows us to linearize the BGK kinetic model equation. Then, the
where s p is the velocity slip coefficient and K is the corrective dimensionless mass flow rate
coefficient taking into account the influence of the lateral walls
[17] which may be calculated using the following expression p
2RT
Q= Ṁ (13)
µ
Hwpv
H 1 nw
K = 192 Â
w i=0 n5
tanh(
2H
), n = p(2i + 1). (9)
depends mainly on the rarefaction parameter d

Qs is the slip correction term, which depends on the ratio (H/w).

pH p
Furthermore, the non-dimensional mass flow rate may be de- d= , nm = 2RT . (14)
duced from (7): µnm

H 3 w(1 K)Dppm In order to obtain the dimensionless mass flow rate Q

S = Ṁ/ = 1 + 6AKnm . (10)
12µRT L the linearized BGK kinetic model equation subjected Maxwell
specular-diffuse boundary condition is solved using the discrete
Equation (10) may be rewritten in the more compact form: velocity method. This mass flow rate through the channel cross
section Q is calculated from the bulk velocity

Stheo = 1 + Atheo Knm , (11) Z w/H Z 1/2

where Atheo = 6A. The mass flow rate calculated using the an-
alytical expression (10) will be compared with the appropriate
experimental measured values.
4.2 Transition and free molecular regime
In the transitional flow regime, the kinetic theory based on
the resolution of the Boltzmann equation must be used to calcu-
late the mass flow rate through a rectangular microchannel. Here
the linearized BGK equation is used to reduce the important com-
putational efforts required to solve the Boltzmann equation.
We consider a channel with a width greater than a height
(w H) and with length L essentially larger than its width (L >>
w). For this kind of channels the end effect can be neglected. In
this case the local pressure gradient, defined as follows
H
Q=2 u(x, y)dxdy. (15)
w w/H 1/2
The linearized BGK equation is solved for a large range of the
rarefaction parameter d (0.01 20) and for accommodation co-
efficient a equals 0.6, 0.8, 1.0 and the values of dimensionless
mass flow rate as a function of the rarefaction parameter is ob-
tained Q(d ).
It is difficult to use directly the expression (13) to calcu-
late the mass flow rate for the measured values of the pressures
in the tanks because the local pressure and the local rarefaction
parameters are unknown. Using the technique proposed in [14]
we can obtain the mass flow rate based on the pressure values in
both tanks by integrating the local mass flow rate in the following
manner

p
H dp L 2RT
n= << 1. (12) G= Ṁ (16)
p dx H 2 w(pin pout )

4 Copyright c 2011 by ASME

 TABLE 4. EXPERIMENTAL ACCOMMODATION AND SLIP COEFFICIENTS
Present work Porodnov et al [11]
Gas Molar mass [g/mol] sp a sp a
He 4.00 1.300 ± 0.016 0.870 ± 0.007 1.320 ± 0.01 0.862 ± 0.006
N2 28.02 1.336 ± 0.011 0.855 ± 0.004 - -
Ar 39.95 1.299 ± 0.017 0.870 ± 0.007 1.294± 0.02 0.872 ± 0.010

with the theoretical (10), (11) and the experimental (18) mass flow
rate, coefficient A (8) may be expressed in this form:
dout
Z
1 2s p Qs
G(din , dout ) = Q(d )dd . (17) A= p = Aexp /6. (19)
dout din p(1 K)
din

The experimental coefficients Aexp for three gases are given in

As noted in [17], G which is the mean value of Q along the chan-
nels does not depend on the local pressure gradient, but only on
its mean value. The relation (16) and (17) is used to calculate
numerically the dimensionless mass flow rate G(din , dout ) from
the table of Q(d ).
5 RESULTS AND DISCUSSION
The flows of Argon, Nitrogen and Helium have been stud-
ied for different flow regimes: from the hydrodynamic to near
free molecular regime. The mean Knudsen number ranges from
0.0025 to 26. The pressure ratio pin /pout was maintained con-
stant in the hydrodynamic and slip regimes around 1.55. In the
transitional and near free molecular regimes this ratio was in-
creased until ⇠ 5 in order to increase the mass flow rate. The ex-
perimental conditions are summarized in the Table 2. The large
Knudsen number range (0.0025 26) investigated in this study
was split in two parts. We consider the first part of this range be-
low 0.1. It was shown in [8, 9] that the first order slip flow model
is valid for Knudsen number less than 0.1.
the Table 3.
The influence of the lateral walls is taken into account by the
coefficient K. The experimental estimation of the velocity slip
coefficient is given in Table 4. These values are calculated us-
ing the first order fitting for the Knudsen range [0 0.1]. These
values are different from those obtained theoretically using the
BGK and the full accommodation assumption of the molecule at
the wall in [18] (s p = 1.012) and in [13] (s p = 1.016), therefore
the accommodation is not comptete in our experimental condi-
tions.
The method used to calculate the accommodation coefficient
is proposed in [19] taking into account the Knudsen layer influ-
ence. The authors calculated the values of the slip coefficient
using the BGK kinetic model and the Maxwell diffuse-specular
scattering kernel over the whole range of values of accommoda-
tion coefficient a; a simple "modified" expression associating the
slip coefficient and the accommodation coefficients is proposed
2 a
s p (a) = (s p (1) 0.1211(1 a)), (20)
a

5.1 Hydrodynamic and slip regimes
In order to estimate the velocity slip coefficient the measured
mass flow rate was fitted with a first order polynomial form of
Knm
Sexp = 1 + Aexp Knm ,
by using the least square method detailed in [3]. The coefficient
Aexp is obtained by applying the non-linear square Marquard-
Levenberg algorithm to the measured values of the mass flow rate
normalized according to (10). The uncertainty on this coefficient
was estimated using the standard error. From the comparison of
where s p (1) the slip coefficient for a = 1 equals 1.016 [13]. The
accommodation coefficients calculated from the slip coefficient
using (20) are given in Table 4.
We compare our results for the slip coefficient with the ex-
perimental values obtained in [11]. The authors of [11] measured
the mass flow rates of various monoathomic gases through a rect-
(18)
angular microchannel with a smooth glass surface with an aver-
age roughness of 50 nm, or 0.055% of channel height. The sur-
face of the microchannel used in our experiments is very smooth
and has a roughness of 0.87 nm, i.e. the relative value is less
than 0.0032% of the channel height. The values of the slip co-
efficient found in [11] are represented in the Table 4. There is
good agreement between both results. Almost the same value of

5 Copyright c 2011 by ASME

the slip and accommodation coefficients a are obtained for both
gases He and Ar.
5.2 Transitional and free molecular regimes
The measured values of the mass flow rate in the transi-
tional and near free molecular regimes are given in Fig. 2 in
non-dimensional form according to equation (16) for three gases
(Helium, Nitrogen and Argon). The results were plotted as func-
tion of the rarefaction parameter dm (14) which is calculated from
the mean pressure of the two tanks. The solution of the linearized
BGK equation for two values of the accommodation coefficient
(0.8 and 1.0) are obtained numerically for the experimetal mi-
crochannel aspect ratio H/w = 0.53. These two curves are plot-
ted also in Fig. 2.
From visual comparison of the experimental and the theoret-
ical curves, we notice that the same value of the accommodation
coefficient can be attribuated for all gases. The same observation
was done in the slip regime. The value of the accommodation
coefficient is between 0.8 and 1.0 for all gases, but the exact
value can not be obtained from simple visual comparison. Other
methods have to be developed.
From the Fig. 2 one can see that the minimum value of the
rarefaction parameter reached experimentally is 0.1 for Helium
and 0.5 for Argon and Nitrogen. This difference comes from the
reason that for the same value of the pressure the rarefaction pa-
rameter for Helium is 5 times smaller than for two other gases
FIGURE 2. EXPERIMENTAL DIMENSIONLESS MASS FLOW
RATE CALCULATED ACCORDING TO (16) COMPARED WITH
THE NUMERICAL SOLUTION FULFILLED BY THE AUTHORS
FORa = 1, 0.8
6 Copyright c 2011 by ASME
due to the difference in the molar mass: the molar mass of Ar-
gon and Nitrogen is about ten times greater than that of Helium,
therefore, for the same pressure the rarefaction parameter is ap-
proximately three times smaller for Helium.
In Fig. 2 we can also remark small discrepancy of the exper-
imental points N2 and Ar at the value of the rarefaction parame-
ter d less than 1. This is due to the difficulty to do appropriate
measure of the pressure at very hight level of rarefaction (small
values of pressure), the fluctuations of the pressure become im-
portant and the leaks become relatively large compared to the
mass flow rate 10 13 kg/s.
6 CONCLUSIONS
Experimental and numerical investigations on the flow
through rectangular microchannel are presented. The constant
volume technique was used to measure the mass flow rate
through rectangular microchannel which have gold deposits on
the interior surfaces. The continuum approach (Navier-Stokes
equations) with a first order velocity slip boundary conditions
was used in the slip regime to obtain the experimental velocity
slip and accommodation coefficients associated to the Maxwell
kinetic boundary condition. In the transitional and near free
molecular regimes the linearized kinetic BGK model was used
to calculate numerically the mass flow rate. This mass flow rate
was compared with the measured values and the accommodation
coefficient was also deduced.
The results of the slip and accommodation coefficients show
a good agreement with the results found by other authors. The
value of the accommodation coefficients were found to be the
same for all gases which means that it don’t depends on the molar
mass of the gas but only on the surface material (gold). Further
experiments have to be performed with larger microchannels to
highlight the influence of the lateral walls and to confirm these
first results.
ACKNOWLEDGEMENTS
The research leading to these results has received fund-
ing from the European Community’s Seventh Framework
Programme (ITN - FP7/2007-2013) under grant agreement
n 215504.
Acknowledgment to Femto st for providing the microchan-
nels.
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