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Ortiz, MIT-DMSE
I
LECTURE 22: THEORETICAL ASPECTS OF
NANOINDENTATION
Outline :
REVIEW LECTURE #21 : EXPERIMENTAL SINGLE MACROMOLECULE ELASTICITY........................ 2
NANOINDENTATION .............................................................................................................................3-7
Introduction ............................................................................................................................. 3
Indenter Geometries................................................................................................................ 4
Types of Deformation .............................................................................................................. 5
Oliver-Pharr Analysis : Geometric Set-Up .............................................................................. 6
Oliver-Pharr Analysis :Mathematical Formulation.................................................................... 7
APPENDIX ............................................................................................................................................8-13
Detailed Geometry of Indenters..........................................................................................8-10
Berkovich Contact Area ......................................................................................................... 11
Oliver-Pharr Citations ............................................................................................................ 12
Nanoindentor Instruments ..................................................................................................... 13
Objectives: To understand general theoretical formulations for reducing material properties from
nanoindentation experiments
Readings: Course Reader Documents 45 (one of the most cited papers in Materials Science)-46,
Additional Historical Ref: Sneddon 1965 Int. J. Engng. 3,
47-57.
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3.052 Nanomechanics of Materials and Biomaterials Tuesday 05/08/07 Prof. C. Ortiz, MIT-DMSE
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3.052 Nanomechanics of Materials and Biomaterials Tuesday 05/08/07 Prof. C. Ortiz, MIT-DMSE
INTRODUCTION TO NANOINDENTATION
Definition : Controlled compression and decompression of a Pmax
probe tip into a sample surface while measuring force (load, indenter
P) versus indentation displacement or depth, h (nm-scale)
continuously initial
→ probe tip is relatively rigid compared to the sample surface
→ can measure mechanical properties (e.g. modulus, hardness)
a hmax
on areas nm-μm scale; e.g. thin films and small volume structures surface profile
→ called "nano" since the indentation depth is of nanometer scale, at Pmax
however lateral contact areas and forces can be > nanoscale
-multiaxial deformation
AFM-based Indentation Instrumented or Depth-Sensing Indentation (DSI)
Pmax
loading
Force, F (nN)
loading
jump-to-contact unloading
Load, P
0
surface
forces
unloading adhesion
contact
forces 0
hmax
Tip-Sample Indentation Depth Indentation Depth, h
or Separation Distance, D (nm) (Hysitron, Micromaterials, Appendix→extension of
-e.g. silicon or silicon nitride indenter probe on a cantilever conventional hardness testing to smaller length scale)
force transducer - diamond indenter
-cantilever oriented at an angle to the surface (~11°) - indenter oriented perpendicular to the surface
-indenter geometries, e.g. pyramidal (less well defined) - variable indenter geometries; Berkovich, cube corner,
-load range ~ nN-mN, smaller contact radii ~ 10s of nm etc. - load range ~ μN-mN, larger contact radii ~ μm
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3.052 Nanomechanics of Materials and Biomaterials Tuesday 05/08/07 Prof. C. Ortiz, MIT-DMSE
End radius
b c 71º
< 15 nm
contact
radius
~ 60 nm
Nanomechanically
mapped region
2 μm 45º
50 μm
Cube Corner
Silicon tetrahedral probe tip indenter (k~ 56 N/m)
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3.052 Nanomechanics of Materials and Biomaterials Tuesday 05/08/07 Prof. C. Ortiz, MIT-DMSE
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3.052 Nanomechanics of Materials and Biomaterials Tuesday 05/08/07 Prof. C. Ortiz, MIT-DMSE
hf
Courtesy of George M. Pharr and Journal of Materials Research. Used with permission.
⎛ 1 - ν2 ⎞ ⎛ 1 - νi 2 ⎞
P = applied load, Pmax= peak applied load Er = reduced modulus = ⎜
-1
⎟ +⎜ ⎟
h = indentation depth (at Pmax; h= hmax maximum depth) ⎝ E ⎠sample ⎝ Ei ⎠indenter
a = radius of contact circle (i.e. two springs in series)
hc= contact depth, vertical distance along which contact is made E = modulus
between sample and tip ν = Poisson's ratio
hs = displacement of the surface at the perimeter of contact hf = residual final depth (indicates inelasticity; e.g.
From geometry : h = hc + hs viscoelasticity, plasticity)
A(hc) = contact (projected) area at hc
S = contact ( initial unloading ) stiffness = ⎛⎜ ⎞⎟
dP
⎝ dh ⎠ Pmax
(typically evalulated between 95% and 20% of Pmax )
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3.052 Nanomechanics of Materials and Biomaterials Tuesday 05/08/07 Prof. C. Ortiz, MIT-DMSE
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3.052 Nanomechanics of Materials and Biomaterials Tuesday 05/08/07 Prof. C. Ortiz, MIT-DMSE