10th International Symposium on Measurement and Quality Control 2010, September 5-9
AUTOCOLLIMATOR CHARACTERIZATION AND CALIBRATION
AT THE PTB: CURRENT STATUS AND FUTURE PROGRESS
Ralf D. Geckeler, Andreas Just, Michael Krause, and Harald Bosse
Physikalisch-Technische Bundesanstalt, Bundesallee 100,
D-38116 Braunschweig, Germany, Ralf.Geckeler@ptb.de
Abstract:
The form measurement of optical surfaces has been greatly
advanced by the development of a new generation of highly
accurate surface profilometers which are based on angle
measurement. Commercial autocollimators, optical devices
for the accurate, contactless measurement of the tilt angle of
reflecting surfaces, have been successfully deployed for this
purpose. An overview of the current status of autocollimator
characterization and traceable calibration at the
Physikalisch-Technische Bundesanstalt (PTB), the National
Metrology Institute of Germany, and its implications for
their optimal application are provided, as well as
information on current and future challenges and expected
progress. We will present information on the challenges to
angle metrology, e.g., posed by the autocollimator itself,
especially when it is operating at small apertures, by its
changing measuring conditions in the profilometer, by
characteristics of the optical surface, and by the limits of
currently available calibration facilities. Information on a
Key Comparison with 26 international participants on angle
metrology with autocollimators, headed by the PTB as a
pilot laboratory, is provided.
Keywords: Autocollimator, angle, angle calibration,
topography measurement, precision metrology, traceability.
1. INTRODUTION
Through research and development in the field of angle
metrology and by the calibration of angle measuring
systems, the PTB creates optimum conditions for the wide
application of these systems in industry and in research. Our
broad spectrum of activities covers basic research on new
measurement procedures and mathematic algorithms, the
improvement of the design of angle measuring instruments,
the application-oriented experimental characterization and
precise calibration of various types of angle measuring
systems such as angle encoders and autocollimators, and the
development of new calibration facilities for these purposes.
2. TRACEABILITY OF ANGLE CALIBRATIONS
2.1 The primary angle standard WMT 220
By definition, the Système international d’unités (SI) unit of
the plane angle, the radian (rad), is a measurand which is
derived from the base unit ‘metre’ by the division of two
lengths (the arc and the radius of a circle, respectively). In
practice, however, the full circle can be utilised as a natural
and error-free angular standard of 2π rad which can be
further subdivided by suitable methods to generate smaller
angles.
F1-055-1
At the PTB, the traceability of angle artefacts
(e.g. polygons, angle gauge blocks, and prisms) or angle
measuring instruments (e.g. autocollimators and encoders)
to the radian is realised by the Heidenhain WMT 220 or
WMT 905 angle comparators, with the WMT 220 [1]
serving as the primary standard for the most accurate
calibrations [2]. The WMT 220, see Figure 1, is mounted on
a massive granite plate in a clean-room facility which
provides excellent environmental conditions with high
temperature stability (ΔT < 0.05 K), a constant laminar air
flow, and minimal floor vibrations. Radial air bearing stages
and two independent drive systems, including a non-contact
electromagnetic tangential drive, allow the top of the
standard to be rotated precisely.
Figure 1. The primary angle standard of the PTB, the
Heidenhain WMT 220 angle comparator. Its calibration
uncertainty is u = 0.001 arcsec (5 nrad).
The comparator is equipped with an interferential
angle measuring system which consists of a radial phase
grating 400 mm in diameter with 217 grating lines and eight
photoelectric scanning heads distributed at 45° intervals.
The sinusoidal signals with twice the graduation frequency
are digitally interpolated to achieve a final resolution of
approx. 0.0012 arcsec per scanning head. For calibration
purposes, the comparator has been equipped with eight
additional scanning heads and an ERO 725 angle measuring
system which are integral components of the comparator
(see Section 2.2). The relative angular orientation between
the ERO 725 and the primary angle measuring system can
be rotated automatically.
2.2 Calibration of the primary standard
The full circle (the full plane angle) can be utilised as a
natural and error-free standard of 2π rad by means of
 10th International Symposium on Measurement and Quality Control 2010, September 5-9

suitable calibration methods which are based on the agreement of ± 0.005 arcsec of the independent calibration
subdivision of the full circle and circle closure. results, also fully consistent with the stated uncertainties.

Cross-calibration: The classic cross-calibration method is 3. AUTOCOLLIMATORS

based on the comparison of two angle encoders in n relative
angular positions 360°/n from which the angle deviations of 3.1 Novel autocollimator applications
both encoders can be derived [3]. In the case of our primary Autocollimators are optical devices for the precise and
standard WMT 220, this method can be implemented by use contactless measurement of the tilt angles of reflecting
of the integrated ERO 725 angle measuring system or by an surfaces. They are well suited for a broad range of
external system. applications in metrology and industrial manufacturing, e.g.,
angle adjustment, measurement of straightness, parallelism
Equal Division Average (EDA): This advanced method and rectangularity of machine tools, etc.
allows an abbreviated cross-calibration of angle encoders
which needs less than n uniformly distributed angular
orientations between the two encoders [4-6]. For example,
measurements obtained at 5, 7 and 11 (5+7+11 = 23)
relative angular positions of two angle encoders allow to
determine the harmonic components of their deviations up
to an order of (5×7×11) - 1 = 384.

Self-calibration: Self-calibration methods do not rely on the

use of an auxiliary external angle encoder; instead,
measurements of the angle deviation of the radial grating of
a single encoder by its multiple reading heads (located at
different angular orientations) are utilized. For example,
with the WMT 220 primary standard, in addition to the eight
main reading heads at relative angular positions of 45°,
another eight reading heads are arranged to provide further
angle intervals. All reading heads are arranged in
diametrically opposed pairs to cover the angle intervals Figure 2. Schematic set-up of an angle-based profilometer.
360°/2n with 1 ≤ n ≤ 7, with the smallest interval being 2.81° By means of a movable pentaprism, the autocollimator beam
[7]. A Fourier-based analysis, relying on the shift theorem, is deflected by 90° towards the optical surface. The beam’s
of the multiple readouts of the radial grating by the footprint is defined by an aperture stop. For scanning, the
encoder’s reading heads delivers the grating’s angle pentaprism and the aperture stop are moved synchronously.
deviations [8, 9]. Compared to cross-calibration methods,
the self-calibration is fast (minutes). Currently, we are During the last decade, the topography
investigating mathematical approaches to include further measurement of demanding optical surfaces has been greatly
parameters (e.g., the angular orientations of the reading advanced by the development of a new generation of highly
heads, their systematic measuring errors) in the analysis of accurate, autocollimator-based surface profilometers, see
the highly redundant self-calibration data. Figure 2. (To avoid extensive citations with respect to the
developments summarised in this paragraph, we refer to our
2.3 Calibration methods in comparison publications [11-13] which provide an overview of the
current state of this development from the viewpoint of
For testing the reliability of the different calibration
angle metrology.) These systems are able to tackle the three
approaches, several comparisons of calibrations within PTB
main challenges to classical interferometry, namely, they are
and with international partners were performed. With the
able (a) to cost-effectively measure very large optical
WMT 220 primary standard, the systematic difference
surfaces, (b) to measure topographies with high dynamical
between the result of the EDA calibration (by means of a
ranges and gradients, and (c) to perform absolute form
Heidenhain ERP 880 angle encoder) and the self-calibration
measurement without the need for calibrated reference
method is of the order of 0.0008 arcsec rms. It is included in
surfaces of matched topography.
the uncertainty budget of the calibration of the primary
Problems (a) and (b) are especially important to
standard, which is currently u = 0.001 arcsec [10]. Using a
the metrology of optics in synchrotron beamlines where the
Heidenhain ERP 880 angle comparator as a transfer
quality of the beam-shaping optical surfaces is crucial for
standard (and by application of the EDA method on part of
achieving small focusing spots. They are generally of large
the PTB), a comparison with an industrial partner resulted in
(metre) size and often possess highly dynamic aspherical
an agreement within ± 0.002 arcsec of the independent
topographies which deviate strongly from either flat or
calibration results of both parties in consistency with their
spherical shapes. Currently, the form measurement limits the
expanded measurement uncertainties [10]. Using a
fabrication of these optical surfaces. Therefore, the
Heidenhain RON 905 angle comparator as a transfer
development of optics for the next generation of
standard, a comparison with an independent National
synchrotrons and Free Electron Laser (FEL) X-ray light
Metrology Institute and an industrial partner resulted in an

F1-055-2
 10th International Symposium on Measurement and Quality Control 2010, September 5-9
sources necessitates the further improvement of the angle
metrology with autocollimators in the profilometer set-up.
The improvement of angle metrology for synchrotron
applications is a major driver of the demand for lower
uncertainty in angle measurement, especially with
autocollimators.
Problem (c), how to perform absolute topography
measurements, is an especially pressing problem to National
Metrology Institutes (NMI). They are supposed to provide
calibration services for reference surfaces which are then
used to calibrate interferometers in industrial environments
and to achieve traceability of interferometric measurements
to national standards of highest accuracy. Even though
absolute interferometric techniques exist, such as the
classical three-plate test or its numerous advancements,
factors as cost, effort, and demands on the stability of the
set-up increase strongly with the dimensions of the surface
under test. Autocollimator-based profilometers provide an
effective alternative. One example in this field is the unique
Extended Shear Angle Difference (ESAD) shearing
deflectometer of PTB.
3.2 The angle response of autocollimators
The measuring beam of the autocollimator not only provides
the propagation of light as a natural straightness standard,
but also enables one to measure surface shape without any
recourse to material straightness artefacts by tracing back
the angle measurement to primary standards via calibration.
Therefore, the precise characterization and calibration of the
autocollimators which are used for angle metrology in the
profilometers is central to making full use of their potential.
The angle response of an autocollimator is
influenced by its measuring conditions, such as the
reflectance of the measured optical surface, its curvature
[13], its distance to the autocollimator (i.e., the path length
of the measuring beam) [12], and - in the case of an aperture
stop used to limit the beam size - the aperture’s diameter and
shape, its position along the autocollimator’s optical axis
and perpendicular to it [11]. (Note that an autocollimator‘s
calibration is only valid for the parameters given during the
calibration and changes in these parameters during its use
lead to additional angle measurement errors.)
Moreover, factors which depend on the internal
autocollimator design are influencing its angle response,
such as aberrations of its optical components (e.g.,
objective, reticle, illumination, beam splitter) and their
alignment, as well as characteristics of the detector used to
pick up the reticle’s image and of the software algorithms
used for the sub-pixel interpolation of its position [13]. For
example, in the case of a CCD detector, variations of
properties between pixels (e.g., quantum efficiency, dark
current, location and dimension), of the read-out (e.g., gain,
bias, charge transfer efficiency) as well as within single
pixels, such as quantum efficiency patterns, are relevant
factors.
3.3 Current challenges and developments
We have identified several source clusters from which the
current limits of angle metrology with autocollimators
originate, especially with respect to their application in
F1-055-3
profilometers which guide our activities to meet these
challenges.
Commercial autocollimators have been optimized
for industrial applications where large (cm) aperture sizes
are acceptable. In contrast, in profilometers, to achieve a
high lateral resolution of the measured surface form, small
(mm-sized) apertures are needed. Effects due to diffraction
and interference are degrading the reticle’s image on the
detector substantially [14, 15]. To counter these effects,
novel phase shifting reticles have been proposed by the PTB
[16] which are currently realised in collaboration with an
autocollimator manufacturer. The interaction of
characteristics of the CCD detector and of the image
analysis algorithms (see Section 3.2) is also an important
issue, especially when the autocollimator is operating at
small apertures. Therefore, research to optimise the
algorithms is highly promising, too.
The measuring conditions of the autocollimator in
the profilometer set-up are changing, especially the path
length of the autocollimator beam varies substantially when
large (metre-sized) optical surfaces are scanned. In the case
of different distances between the autocollimator and the
reflecting mirror, the beam returning to the autocollimator
follows different paths through its optics. In conjunction
with aberrations of the optical components and errors in
their alignment (and that of the CCD detector), angle
deviations are introduced which are varying as a function of
the distance to the mirror. This topic is an active area of
ongoing research at the PTB [12, 17] and it is currently
augmented by the modelling of autocollimators by ray-
tracing.
The angle response of autocollimators is strongly
influenced by characteristics of the optical surface which is
measured, e.g., its reflectivity and curvature. The latter point
is of special importance to the measurement of optics for
synchrotron applications as they are not only strongly
curved but the curvature also changes locally. We will
address this issue by ray-tracing modelling of
autocollimators and by experiments. Up to now, we have
investigated the influence of small flatness deviations of the
reflecting mirror only. In the case of two mirrors with
different flatness deviations of 4 nm and 20 nm (root-mean-
square), systematic changes in the angle response of a few
0.01 arcsec were found [13].
Another property of the optical surface which
affects the angle measurement with the autocollimator is its
sagittal slope which causes a beam deflection perpendicular
to the main angle measuring plane [13]. Especially in the
case of the measurement of highly aspherical synchrotron
beamline mirrors (but also in the case of other
autocollimator applications), the sagittal deflection of the
measuring beam in cross-axis direction can not be avoided
in general. Therefore, errors in the autocollimator’s angle
measurement due to the non-perpendicularity of its two
measuring axes, the cross-talk between them (e.g., owing to
imperfections of the reticles), and due to optical aberrations
do occur. Autocollimator calibration thus can not restrict
itself to the plane angle (1D case) where only a single
autocollimator measuring axis is utilized, instead, it must be
generalized to the 2D case. Therefore, we are currently
 10th International Symposium on Measurement and Quality Control 2010, September 5-9
developing a novel system for the two-dimensional
calibration of autocollimators in a limited solid angle range
(4000 arcsec x 4000 arcsec) at the PTB. In addition to
tackling the problem of 2D calibrations, this device will also
expand several limits posed by the currently available
calibration facilities, such as calibration speed (to obtain a
calibration over the full measurement range with a
sufficiently high sampling in limited time) and automated
calibrations at different distances (to calibrate the effects of
the varying optical path length between the autocollimator
and the optical surface).
4. KEY COMPARISON
As part of our research on angle metrology with
autocollimators, an international Key Comparison on
autocollimator calibration was initiated by the European
Association of National Metrology Institutes (EURAMET)
with 26 international participants and is headed by the PTB
(EURAMET.L-K3.2009‚ Autocollimator Calibration‘, see
[18]). Its aim is to provide information on the capabilities
and limits of independent calibration methods and devices.
The Technical Protocol was already distributed and the
circulation of the standard has started. The data acquisition
phase of the comparison is scheduled to occur between
December 2010 and July 2012.
For this comparison, an electronic autocollimator
type Elcomat 3000 by Möller-Wedel Optical GmbH
(MWO), Wedel, Germany, has been made available by the
manufacturer [19]. It is a two-axis electronic autocollimator
(the comparison will be performed on the horizontal x-axis
only) with a measuring range of 2000 arcsec x 2000 arcsec
(up to 2.5 m distance to the reflector) with a maximum
resolution of 0.001 arcsec. Its focal length is 300 mm and
the full illuminated aperture of 32 mm (tube diameter:
65 mm) will be used for the comparison with the aid of a
fully reflecting reference mirror.
The measurement deviations of autocollimators
cover a wide range of angular scales, extending from a few
arcseconds (connected to the pixels of the autocollimator’s
CCD detector) to the full measurement range (due to
aberrations in the autocollimator’s optical elements and
detector misalignment). Therefore, to appropriately sample
the angle deviations on both short and long angular scales,
two different measurement ranges (± 1000 arcsec in steps of
10 arcsec and ± 10 arcsec in steps of 0.1 arcsec) are used.
5. CONCLUSION
One of the main research areas of the PTB in the field of
angle metrology is the improvement of its primary angle
standard for the traceable calibration of angle measuring
instruments and artefacts. It includes the development of
novel self-calibration approaches to the calibration of angle
encoders and the use and advancement of classic cross-
calibration methods. The other area is especially motivated
by the worldwide proliferation of a new generation of highly
accurate surface profilometers which are based on angle
measurement with commercially available autocollimators.
This research focuses on the investigation and calibration of
autocollimators to obtain a detailed understanding of the
F1-055-4
parameters influencing their angular response, such as small
apertures, the varying path length of the measuring beam,
the sagittal beam deflection, and the curvature of the
measured optical surface. In addition to calibrations, ray-
tracing models of autocollimators and a novel device for
autocollimator calibration in a limited solid angle range are
currently being implemented. The improvement of
autocollimator performance at small (mm-sized) apertures
by phase shifting reticles is also pursued.
REFERENCES
[1] R. Probst, R. Wittekopf, M. Krause, H. Dangschat, and A.
Ernst, ‘The new PTB angle comparator’, Meas. Sci.
Technol., 9, 1059-1066, 1998.
[2] A. Just, M. Krause, R. Probst, and R. Wittekopf, ‘Calibration of
high-resolution electronic autocollimators against an angle
comparator’, Metrologia, 40, 288-294, 2003.
[3] P.J. Sim, in ‘Modern Techniques in Metrology’, ed. P.L.
Hewitt, Singapore: World Scientific, 102-121, 1984.
[4] T. Masuda and M. Kajitani, ‘An automatic calibration system
for angular encoders’, Precis. Eng., 11, 95-100, 1989.
[5] T. Watanabe, H. Fujimoto, K. Nakayama, T. Masuda, and M.
Kajitani, ‘Automatic high precision calibration system for
angle encoders’, Proc. SPIE, 4401, 267-274, 2001.
[6] T. Watanabe, H. Fujimoto, K. Nakayama, T. Masuda, and M.
Kajitani, ‘Automatic high precision calibration system for
angle encoders (II)’, Proc. SPIE, 5190, 400-409, 2003.
[7] A. Ernst ‘Winkelmesseinrichtung’ patent 0440833B1, 1994
[8] R.D. Geckeler, A. Fricke, and C. Elster, ‘Calibration of angle
encoders using transfer functions’, Meas. Sci. Technol., 17
(10), 2811-2818, 2006.
[9] R. Probst, ‘Self-calibration of divided circles on the basis of a
prime factor algorithm’, Meas. Sci. Technol., 19, 015101, 1-
11, 2008.
[10] A. Just, M. Krause, R. Probst, H. Bosse, H. Haunerdinger, Ch.
Spaeth, G. Metz, and W. Israel, 'Comparison of angle
standards with the aid of a high-resolution angle encoder’,
Prec. Eng., 33, 530–533, 2009.
[11] R.D. Geckeler and A. Just, ‘Optimized use and calibration of
autocollimators in deflectometry’, Proc. SPIE, 6704, 670407,
1-12, 2007.
[12] R.D. Geckeler and A. Just, ‘Distance dependent influences on
angle metrology with autocollimators in deflectometry’,
Proc. SPIE, 7077, 70770B, 1-12, 2008.
[13] R.D. Geckeler, A. Just, M. Krause, and V.V. Yashchuk,
’Autocollimators for deflectometry: Current status and future
progress’, Nuclear Instruments and Methods in Physics
Research A, 616, 140–146, 2010.
[14] G. Fütterer, ‘Enhancement of high resolution electronic
autocollimators by application of phase grating technology’,
Proc. SPIE, 5856, 950-959, 2005.
[15] G. Fütterer, ‘Simulation of the detectors response of an
autocollimator’, Proc. SPIE, 6617, 661703, 1-8, 2007.
[16] G. Fütterer, ‘Autokollimationsfernrohr und Verfahren zur
Abbildung einer Messmarke hierfür’, patent
DE102005018983, 2006.
[17] V.V. Yashchuk, W.R. McKinney, T. Warwick, T. Noll, F.
Siewert, T. Zeschke, and R.D. Geckeler, ‘Proposal for a
universal test mirror for characterization of slope measuring
instruments’, Proc. SPIE, 6704, 67040A, 1-12, 2007.
[18] http://kcdb.bipm.org/AppendixB/appbresults/EURAMET.L-
K3.2009/EURAMET.L-K3.2009_Techical_Protocol.pdf
(accessed 2010-05-17)
[19] http://www.moeller-wedel-optical.com (accessed 2010-05-17)