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New calculation method on PC

Technical Report()
Report's Title
New calculation method on PC

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Department TAZMO VIET NAM Reporter Tran Trung Nguyen Report Date 2011/06/16 Attached 0 Classification Number Code Purpose New method of aligners calculation algorithm on PC Content 1.

Overview:

Figure1: WHS003 PC software overview 2. Calculation algorithm:

Calculation Output

Inpu t
Theta encoder Hardware setting

Edge Data

Rising/falling edge if the notch Calculate the angle of the notch Calculate the average value of CCD sensor data Calculate the agari pulse Specify the radius of the wafer Draw the edge image Calculate the wafer center by OpenCV library (X, Y) TAZMO CO., LTD. Calculate the Theta value

ORIFULA_ICHI_X ORIFULA_ICHI_Y

T_mokuteki_pls L6_DATA

New calculation method on PC

2.1

Rising/ falling edge detection: The same way as

2.2

Calculate the angle of the notch

2.3

Calculate the average value of CCD sensor data: While calculate the average value of CCD data, the CCD data of the notch are removed Heikin= (S1+S2)/(sample-origin_cnt)

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New calculation method on PC

Figure5: The way to calculate average value of CCD data

2.4

Specify the radius of the wafer

The wafer size is estimated according to the go_y_pls, heikin, CCD_radius. WK = - (go_y_pls - (heikin - CCD_radius)/Y_STEP) WKmm = WK*0.002 In the special case, when the wafers center, CCDs center and ORG point are on the same line (Figure 6), the formula can be reduced like the bellow formula: WK = - go_y_pls

Figure 6: The way to specify the radius of the wafer

For the large type, which is supported 6, 8, 12 inch wafers. The ORG_CCD is 150mm. _ WKmm > -10 & WKmm < 10 _ WKmm > 40 & WKmm < 60 _ WKmm > 65 & WKmm < 85 => hankei =150 (12 inch wafer) => hankei =100 (8 inch wafer) => hankei =75 (6 inch wafer

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New calculation method on PC

For the small type, which is supported 8, 6, 5, 4, 3 inch wafers. The ORG_CCD is 100mm. _ WKmm > -10 & WKmm < 10 _ WKmm > 15 & WKmm < 32 _ WKmm 32=& WKmm < 44 _ WKmm 44 & WKmm < 56 _ WKmm 56 & WKmm < 70 => hankei =100 (8 inch wafer) => hankei =75 (6 inch wafer) => hankei =62.5 (6 inch wafer) => hankei =50 (5 inch wafer) => hankei =38.1 (4 inch wafer)

2.5

Shift the _encoder[] and CCD[] so that the rising point is the first element of the data array

_The y_work_tbl is calculated by the bellow formula: y_work_tbl = hankei + (data_tbl heikin)

Figure 7: Calculate the y_work_tbl from data_tbl

_The y_work_tbl and theta_encoder is shifted right, so that the rising point is located at the first element

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New calculation method on PC

Figure 8: shift the data so that the rising point is at the first element

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New calculation method on PC

2.6

Calculate the agari pulse: // Right position of orientation flat data_agari = (y_wok_tbl[2] + y_wok_tbl[3] + y_wok_tbl[4]) / 3; j = sampling - origin_cnt; // Left position of orientation flat data_sagari = (y_wok_tbl[j - 2] + y_wok_tbl[j - 3] + y_wok_tbl[j - 4]) / 3;

wok1 = (double)(data_agari - data_sagari) / origin_cnt; ww = sampling - origin_cnt; wok3 = wok4 = 0; if(turn_wok_tbl[ww] > turn_wok_tbl[0]) { for(i = 1; i < origin_cnt; i++) { ww1 = ww + i; if(turn_wok_tbl[ww1] < 25000 ) { wok2 = (double)(turn_wok_tbl[ww1] + TURN_PLS); wok3 = wok3 + (wok2 * (((double)data_sagari + (wok1 * i)) y_wok_tbl[ww1])); wok4 = wok4 + (((double)data_sagari + (wok1 * i)) - y_wok_tbl[ww1]); } else { wok3 = wok3 + ((double)turn_wok_tbl[ww1] * (( (double)data_sagari + (wok1 * i)) - y_wok_tbl[ww1])); wok4 = wok4 + (( (double)data_sagari + (wok1 * i)) - y_wok_tbl[ww1]); } } } else { for (i = 1; i < origin_cnt; i++) { ww1 = ww + i; wok3 = wok3 + ((double)turn_wok_tbl[ww1] * (((double)data_sagari + (wok1 * i)) - y_wok_tbl[ww1])); wok4 = wok4 + (((double)data_sagari + (wok1 * i)) - y_wok_tbl[ww1]);
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New calculation method on PC

} } pls_agari = (long)(wok3 / wok4) % TURN_PLS; notch center position // theta pulse count at

where: work4 = S1 + S2

Figure 9: Calculate the agari_pulse

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New calculation method on PC

2.7

Calculate the length of the notch:

Where:

Figure 10: Calculate the notchs length and Origin kakudo 2.8 Calculate the X, Y, Theta value:

+ The X,Y, Theta data will be calculated 3 times, base on the offset coordinate. The origin coordinate is turn 230, 280 and 330 to calculate. + How to calculate the X, Y value for each coordinate: _

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New calculation method on PC

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New calculation method on PC

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New calculation method on PC

Figure 11: Calculate X, Y and theta + ORIFULA_ICHI_X, ORIFULA_ICHI_Y is calculated 3 times. The average value of 2 nearest value is set as the result of the calculation. + (T_KAITEN = T_REVISION = 0)
Consideration 1. The methods may improve the precious of the aligner: 1.1 Change the way to calculate the CCD average value:

1.2 Another way to filter the CCD data (this method need check on real system):

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New calculation method on PC

1.3 The kijun_kakudo is calculated 3 times on base on the offset coordinate (230, 280 and 330). The result value is the average of 2 nearest values also.

1.4 Call the kaiten routine 3 times. After the calculation is finished, adjust the rough CCD data then calculate again. If the condition of the film is too bad, this method may have a good effect

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New calculation method on PC

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