Documente Academic
Documente Profesional
Documente Cultură
Georgia Tech
Disciplines
ECE
Electrical Design Electrostatic Field Control Electrical behavior and limits of materials and material systems Using defects for our electrical advantage Effects of strain and stress on device reliability Designing a better device, circuit, system
Material Science
Structural Classification of Materials: Crystal Structure Formation and control of defects, impurity diffusion Strain and Stresses materials Materials interactions (alloys, annealing) Phase transformations
Chemistry
Bonding Classification of Materials Etching and deposition chemistry Chemical cleaning
Physics
Quantum transport Solid state descriptions of carrier motion
Mechanical Engineering
Heat transfer Micro-machines-Micro ElectroMechanical Machines (MEMS) Fatigue/fracture, (especially for packaging) etc... Mechanical stresses during processing (polishing, thermal cycles, etc)
Georgia Tech
Disciplines
ECE
Electrical Design Electrostatic Field Control Electrical behavior and Interested limits of materials and material systems in the uses Usingthese for our of defects electrical advantage
Material Science
Structural Classification of Interested Materials: Crystal Structure Formation and control of defects, impurity diffusion Strain and Stresses materials Materials interactions (alloys, annealing) Phase transformations
Chemistry
Bonding Classification of Materials
Physics
Quantum transport
Solid state in the fundamental process descriptions of Etching and carrier motion deposition chemistry Chemical cleaning
processes
Mechanical Engineering
Heat transfer
Effects of strain and stress on device reliability Designing a better device, circuit, system
processes
Georgia Tech
Process
Epitaxial Growth Diffusion
Electrical Engineer/Scientist
forming the basic building blocks of a device
Contact anneals
may be looking to lower rectifying barrier, improve adhesion or lower contact resistance ability to form an insulator, maximizing transistor/capacitor speed, controlling threshold voltages or reduce recombination of electron-hole pairs at the semiconductor surface
Si/SiO2 interface
Georgia Tech
Transistors in the above image are only a few microns (m or 1e-6 meters) on a side. Modern devices have lateral dimensions that are only fractions of a micron (~0.1 m) and vertical dimensions that may be only a few atoms tall.
Georgia Tech ECE 6450 - Dr. Alan Doolittle
Famous Last Words: I only want to design computers. I do not need to know about atoms and electrons . --- A Doomed Computer Engineer
Intel Develops World's Smallest, Fastest CMOS Transistor SANTA CLARA, Calif., Dec. 11, 2000 - Intel Corporation researchers have achieved a significant breakthrough by building the world's smallest and fastest CMOS transistor. This breakthrough will allow Intel within the next five to 10 years to build microprocessors containing more than 400 million transistors, running at 10 gigahertz (10 billion cycles per second) and operating at less than one volt. The transistors feature structures just 30 nanometers in size and three atomic layers thick. (Note: A nanometer is onebillionth of a meter). Smaller transistors are faster, and fast transistors are the key building block for fast microprocessors, the brains of computers and countless other smart devices. These new transistors, which act like switches controlling the flow of electrons inside a microchip, could complete 400 million calculations in the blink an eye or finish two million calculations in the time it takes a speeding bullet to travel one inch. Scientists expect such powerful microprocessors to allow applications popular in science-fiction stories -- such as instantaneous, real-time voice translation -- to become an everyday reality. Researchers from Intel Labs are disclosing the details of this advance today in San Francisco at the International Electron Devices Meeting, the premier technical conference for semiconductor engineers and scientists. "This breakthrough will allow Intel to continue increasing the performance and reducing the cost of microprocessors well into the future," said Dr. Sunlin Chou, vice president and general manager of Intel's Technology and Manufacturing Group. "As our researchers venture into uncharted areas beyond the previously expected limits of silicon scaling, they find Moore's Law still intact." Intel researchers were able to build these ultra-small transistors by aggressively reducing all of their dimensions. The gate oxides used to build these transistors are just three atomic layers thick. More than 100,000 of these gates would need to be stacked to achieve the thickness of a sheet of paper. Also significant is that these experimental transistors, while featuring capabilities that are generations beyond the most advanced technologies used in manufacturing today, were built using the same physical structure as in today's computer chips. "Many experts thought it would be impossible to build CMOS transistors this small because of electrical leakage problems," noted Dr. Gerald Marcyk, director of Intel's Components Research Lab, Technology and Manufacturing Group. "Our research proves that these smaller transistors behave in the same way as today's devices and shows there are no fundamental barriers to producing these devices in high volume in the future. The most important thing about these 30 nanometer transistors is that they are simultaneously small and fast, and work at low voltage. Typically you can achieve two of the three, but delivering on all facets is a significant accomplishment." It's discoveries like these that make me excited about the future," added Chou. "It's one thing to achieve a great technological breakthrough. It's another to have one that is practical and will change everyone's lives. With Intel's 30 nanometer transistor, we have both." For more information on Intel Silicon Technology Research, please reference Intel's new Silicon Showcase at www.intel.com/research/silicon. Intel, the world's largest chip maker, is also a leading manufacturer of computer, networking and communications products. Additional information about Intel is available at www.intel.com/pressroom. Source: Intel Web Page. Georgia Tech ECE 6450 - Dr. Alan Doolittle
Control of Conductivity is the Key to Modern Electronic Devices Conductivity, , is the ease with which a given material conducts electricity. Ohms Law: V=IR or J=E where J is current density and E is electric field. Metals: High conductivity Insulators: Low Conductivity Semiconductors: Conductivity can be varied by several orders of magnitude. It is the ability to control conductivity that make semiconductors useful as current/voltage control elements. Current/Voltage control is the key to switches (digital logic including microprocessors etc), amplifiers, LEDs, LASERs, photodetectors, etc...
Georgia Tech ECE 6450 - Dr. Alan Doolittle
Electrical/Computer engineers like to classify materials based on electrical behavior (insulating, semi-insulating, and metals).
Chemists or Materials Engineers/Scientists classify materials based on bond type (covalent, ionic, metallic, or van der Waals), or structure (crystalline, polycrystalline, amorphous, etc...).
In 20-50 years, EEs may not be using semiconductors at all!! Polymers or bio-electronics may replace them! However the materials science will be the same!
Georgia Tech
For metals, the electrons can jump from the valence orbits (outermost core energy levels of the atom) to any position within the crystal (free to move throughout the crystal) with no extra energy needed to be supplied For insulators, it is VERY DIFFICULT for the electrons to jump from the valence orbits and requires a huge amount of energy to free the electron from the atomic core. For semiconductors, the electrons can jump from the valence orbits but does require a small amount of energy to free the electron from the atomic core.
Georgia Tech ECE 6450 - Dr. Alan Doolittle
Semiconductor materials are a sub-class of materials distinguished by the existence of a range of disallowed energies between the energies of the valence electrons (outermost core electrons) and the energies of electrons free to move throughout the material. The energy difference (energy gap or bandgap) between the states in which the electron is bound to the atom and when it is free to conduct throughout the crystal is related to the bonding strength of the material, its density, the degree of ionicity of the bond, and the chemistry related to the valence of bonding. High bond strength materials (diamond, SiC, AlN, GaN etc...) tend to have large energy bandgaps. Lower bond strength materials (Si, Ge, etc...) tend to have smaller energy bandgaps.
Georgia Tech ECE 6450 - Dr. Alan Doolittle
0.91/3.56 Angstroms 1.46/5.43 Angstroms 1.52/5.65 Angstroms 1.72/6.49 Angstroms 1.81/** Angstroms
*Only has a measurable bandgap near 0K **Different bonding/Crystal Structure due to unfilled higher orbital states
Georgia Tech
Georgia Tech
s or ct du ct
rs
ct
or
or s M et al s
ECE 6450 - Dr. Alan Doolittle
to
du
on
su
on
ic
ic
In
Se
Se
ym
ol
eP
So
Georgia Tech
Se
ic
on
du
ct
or
er
Se
ic
on
la
du
Georgia Tech
Material Classifications based on Crystal Structure Amorphous Materials No discernible long range atomic order (no detectable crystal structure). Examples are silicon dioxide (SiO2), amorphous-Si, silicon nitride (Si3N4), and others. Though usually thought of as less perfect than crystalline materials, this class of materials is extremely useful. Polycrystalline Materials Material consisting of several domains of crystalline material. Each domain can be oriented differently than other domains. However, within a single domain, the material is crystalline. The size of the domains may range from cubic nanometers to several cubic centimeters. Many semiconductors are polycrystalline as are most metals. Crystalline Materials Crystalline materials are characterized by an atomic symmetry that repeats spatially. The shape of the unit cell depends on the bonding of the material. The most common unit cell structures are diamond, zincblende (a derivative of the diamond structure), hexagonal, and rock salt (simple cubic).
Georgia Tech ECE 6450 - Dr. Alan Doolittle
Georgia Tech
Georgia Tech
k=
Impurities like Al, kAl=0.002 prefers the liquid whereas B, kB=0.8 have very little preference. Refer to Table 2.1 in your book for more ks
Georgia Tech
Good for Solar cells, power electronic devices that use the entire volume of the wafer not just a thin surface layer, etc
Georgia Tech
Georgia Tech
Georgia Tech
Gate
Gate
N+ P
N+
N+
N Depletion Transistor
N+ P
Enhancement Transistor
Source Drain
Source Drain
Enhancement Mode: Normally Off (have to do something to get it to conduct electricity) Depletion Mode: Normally On (have to do something to get it to stop conducting electricity)
Georgia Tech ECE 6450 - Dr. Alan Doolittle
Following initial cleaning, a thin epitaxial region is grown via chemical vapor deposition followed by a SiO2 layer thermally grown on the silicon substrate. A Si3N4 layer is then deposited by LPCVD. Photoresist is spun on the wafer to prepare for the first masking operation. P-
P+
Disciplines Used: ECE (choice of p-type layers and doping concentrations), Chemistry (CVD), MSE (solid solutions of dopants), Physics (small devices) Materials polymers
Georgia Tech
Used:
Crystalline
Semiconductors,
amorphous
dielectrics,
ECE 6450 - Dr. Alan Doolittle
Photoresist Si3N4-x
SiO2
Mask #1 patterns the photoresist. The Si3N4 layer is removed where it is not protected by the photoresist by dry etching.
Disciplines Used: Chemistry (etching), Physics (optics/diffraction, plasma physics) Materials Used: Acids, bases, dry plasmas, Crystalline Semiconductors, amorphous dielectrics, polymers
Georgia Tech ECE 6450 - Dr. Alan Doolittle
Boron
Boron
Photoresist Si3N4-x
SiO2
P Implant
A boron implant prior to LOCOS oxidation increases the substrate doping locally under the field oxide to minimize field inversion problems.
Disciplines Used: ECE (electrical design of edge termination layers), Chemistry (choice of dopants), MSE (solid solutions of dopants), Physics (Ion bombardment) Materials polymers
Georgia Tech
Used:
Crystalline
Semiconductors,
amorphous
dielectrics,
ECE 6450 - Dr. Alan Doolittle
Si3N4-x P
SiO2 P
During the LOCOS oxidation, the boron implanted regions diffuse ahead of the growing oxide producing the P doped regions under the field oxide. The Si3N4 is stripped after the LOCOS process.
Disciplines Used: ECE (electrical design of isolation), Chemistry (oxidation reactions and barriers), MSE (solid solutions of dopants) Materials Used: Amorphous dielectrics, toxic/corrosive gases
Georgia Tech
As or Phos
Photoresist
N P
SiO2
Mask #2 is used for the the threshold shifting implant for the depletion transistors. An N type dopant is implanted.
Disciplines Used: ECE (electrical design of channel), Chemistry (choice of dopants), MSE (solid solutions of dopants), Physics (Ion bombardment) Materials Used: Crystalline polymers, and ions
Georgia Tech
Semiconductors,
amorphous
dielectrics,
B
Photoresist
P P
SiO2
Mask #3 is used to mask the threshold shifting implant for the enhancement transistors. A P type dopant is implanted.
Disciplines Used: ECE (electrical design of channel), Chemistry (choice of dopants), MSE (solid solutions of dopants), Physics (Ion bombardment) Materials Used: Crystalline polymers, and ions
Georgia Tech
Semiconductors,
amorphous
dielectrics,
P P
SiO2
After etching back the thin oxide to bare silicon, the gate oxide is grown for the MOS transistors.
Disciplines Used: ECE (electrical design of isolation, electrical reliability), Chemistry (oxidation reactions), MSE (solid solutions of dopants) Materials Used: Amorphous dielectrics, gases
Georgia Tech
Photoresist
P P
SiO2
Mask #4 is used to provide the buried contact. The gate oxide is etched where the poly needs to contact the silicon.
Disciplines Used: ECE (electrical design of source), Chemistry (choice of dopants), MSE (solid solutions of dopants), Physics (optics/diffraction) Materials Used: Crystalline polymers, and ions
Georgia Tech
Semiconductors,
amorphous
dielectrics,
P P
Poly-X N
SiO2
A layer of polysilicon is deposited. Ion implantation of an N type dopant follows the deposition to heavily dope the poly.
Disciplines Used: ECE (electrical design of source, reliability), Chemistry (CVD & choice of dopant for poly), MSE (alloy reactions) Materials Used: Crystalline amorphous dielectrics, gases
Georgia Tech
and
poly-crystalline
Semiconductors,
Photoresist Poly-X N
P P
SiO2
Photoresist is applied and mask #5 is used to define the regions where MOS gates are located. The polysilicon layer is then etched using plasma etching.
Georgia Tech
Arsenic
Poly-X
P P
N N+ Implant
SiO2
Arsenic is implanted to form the source and drain regions. Note that this can be unmasked because there are only NMOS transistors on the chip.
Georgia Tech
N+ P
N+
N+
Poly-X N
N+
SiO2
A final high temperature drive-in activates all the implanted dopants and diffuses junctions to their final depth. The N doping in the poly outdiffuses to provide the buried contact.
Georgia Tech
SiO2
N+ P
N+
N+
Poly-X N
N+
SiO2
Georgia Tech
Photoresist
N+ P
N+
N+
Poly-X N
SiO2
N+ P
Georgia Tech
Al, Cu/Al
N+ P
N+
N+
Poly-X N
SiO2
N+ P
Georgia Tech
N+ P
N+
N+
Poly-X N
SiO2
N+ P
Mask #7 is used to pattern the aluminum. After stripping the resist, the structure is finished to the point shown in the cross-section we started with. In actual practice an additional deposition of a final passivation layer and an additional mask (#8) would be needed to open up the regions over the bonding pads.
Georgia Tech
N+ P
N+
N+
Poly-X N
SiO2
N+ P
Enhancement Transistor
Depletion Transistor
Final environmental barrier deposited for encapsulating the device. Openings would be provided only at bond pads.
Georgia Tech