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10/12/2010
Devices and Systems. g nano-p g nano-p g Leading to nano-packaged devices and nano-packaged systems with highest functionality at lowest cost in smallest size
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W/S
Vo olume(cm3)
10000
Laptop
SINGLE FUNCTION
Digital
1000
100
MEGA-FUNCTION-Vision of GT PRC
all the above and 1000s sensors
1970
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1980
1990
2000
Full touch screen Camera Speaker Bluetooth Play music Take photos Schedule appts Read text messages Make video calls
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108
107
106
Transistors/cm2
107
*Batteries (2011-)105
106
104
105
103
104
102
50 103 1971 PTH 1980 SMT 1990 MCM 1995 2020 Sources: IBM, Intel 10
EMBEDDED COMPONENTS
DIGITAL SOP
THERMAL SOP
INTERCONNECTIONS
EBG & Isolation
MEMS PACKAGING
MEMS
Waveguide NANOMAGNETICS
Bio-Sensor
3D CAPACITORS
3D ICs
THERMAL
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NanoNano-Packaging Requirements
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Power
High-density capacitors and inductors High Super-capacitors Super Thin film batteries
RF
Capacitors Inductors Antennas
Digital
Capacitors
Thermal
TIM (Thermal Interface Materials)
Interconnections
Bonding layers: Adhesives and nanoparticle bonding layers Nanoscale interconnections
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Chemical Processing
Electrical Structures
Components
Microstructures
Properties
Systems
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NanoNano-packaging Strategy
Function
Power Components
Component
High density capacitors High density inductor Supercapacitors Batteries
Goal
High surface area Thinner dielectrics or electrolytes Low-loss and high-frequency magnetic materials High K and Low loss Low TCC Thinner dielectrics High permittivity Low melting point Enhanced strength and fatigue resistance Moisture resistance Biocompatibility Hermeticity High thermal conductivity Low CTE
RF Components
Capacitors Inductors Antennas Decoupling capacitors Bump Bonding layers Barriers Hermetic coatings Encapsulants Adhesives Molding compounds
Digital Interconnections
Reliability
Thermal Structure
TIM
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Goal:
Voltage conversion:
Approach:
High-surface-area electrodes High-surface Conformal dielectrics
Properties:
50-100 uF/cm2 50uF/cm 20 V 1 uA/uF leakage uA/ Integration in package
BOTTOM COPPER SILICON
Capacitance density: 30 uF/cm2 ; Withstands 30 V; (GT-PRC)
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Goal:
Inductors for Power convertors
Approach:
Nano-layered or Nanonanocomposite magnetic core for suppressed loses Permalloy wires in polymer matrix
Properties:
1 mH/mm2 mH/mm 50-100 micron device 50 10-100 MHz 10-
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Nanoscale Supercapacitors
Goal:
Miniaturized components for:
Approach:
High surface area oxide or CNT networks for volumetric efficiency Novel designs and fabrication routes to eliminate the need for separator Reduce the electrolyte thickness by 1010-100X for faster charge and discharge
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Capacitance Density F/cc
104
Properties:
103
500-1000 F/g 500 100 mF/cm2 for 100um thickness Stable charge-discharge after charge500,000 cycles 14 | NMDC
0.1 10-6
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Batteries
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Goal: Thin film power source integrated in the package Approach: Lithium intercalation with higher active surface area for fast electrode kinetics Shorter diffusion lengths for rapid transport with Advanced electrolytes Thin film packaging compatible for battery integration Properties: Thin film and nano-batteries nanowith 1 mAhr/cm2 mm at 3 V mAhr/cm (equivalent to 30,000 W hr/liter) 1000-2000 mAhr/g 1000mAhr/g
Nano SnO2
Si-decorated CNT
RF Components
Capacitors Inductors Antennas
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RF Inductors
Goal:
High Q and high-density highinductors for: for:
Inductor design
Approach:
Multilayered design for high Q Materials: Low loss dielectrics Low-Cost Multilayered processes LowLowdrilling, Low-cost drilling wet metallization Thin form factors
RF Inductor demo.
Properties:
10-100 nH/mm2 (50 microns) 10nH/mm Q of above 100 Frequency: 1-10 GHz 1Q >100 of RF inductors
GT-PRC
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Goals:
1-10 GHz (ex. WiFi and WiMAX) WiMAX) Size reduction by 10X Enhance bandwidth and gain
Size scales as/ rr
Approach:
Nanoscale magnetic composites
Standard FR-4
Magneto-dielectric
Properties:
Frequency: 1-10 GHz 1 Permeability: 10-100 10 Permittivity: 5-15 5Permeability
1.0E+07
1.0E+08
Frequency
(GT PRC))
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Goal:
Components for RF
Approach:
Nanocomposite dielectrics Oxides in Polymer matrix Polymer (5-10) um and inorganic (1um) (5 Precision tolerance for size and thickness
k/k at 25 C
Properties:
Ferroelec TCC ppm/C Perm. Loss 2000 500-1000 0.08
0.93 20
120
140
Temperature ( C)
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Digital Components
Decoupling Capacitors
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Decoupling Capacitors
Goals:
Noise-free power supply NoiseSupport high power ICs (higher current demands) Support high bandwidth I/Os Thin film capacitors integrated in organic build-up layers buildSilicon integration with trench structures and conformal coatings Design for low impedance Design to route high-density I/Os highHigh capacitance density> 2 mF/cm2 Low impedance (high Self-Resonance) Selfin the GHz frequencies BDV>20 V
Approach:
High K on organic packages; 300-400 nm, DuPont (left) and GTPRC (right)
Properties:
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Goals:
Metal wiring with low-cost printing lowtechnologies on flex and roll-to-roll roll-toprocess Organic compatible processing
Approach:
Suspensions of nanosilver (5(5-50 nm) Ink jet printing of nanosilver ink Sintering at organic or paper compatible t tibl temperatures t
Properties:
T < 250oC Conductivity close to bulk metal
Ink-jet printed antenna on low-cost LCP and PET Flex (Tentzeris, Georgia Tech)
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Interconnections
Conductive Adhesives Nanoscale Interconnections Nanoparticle Bonding
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Goals
Fine Pitch (30 micron) interconnections using NCF 10X reduction in pitch compared to flipchip 150 C assembly Embedding in organic packages
Approach:
Copper bumps g Bonding with NCF
Properties:
Contact resistance < 10 milliohms Reliable interconnections:
1400 cycles TST (-55 to 125) (125) 175 C, 72 hours HTS 192 hrs, HAST
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Goal:
Flipchip assembly for nextnextgeneration nano and 3D ICs
100
Sn-Pb solder
Approach:
Nanocopper bump Nanocomposite solders Advanced Barriers
Cr reep (% %)
60 40 20 0
80
Nancomposite solder 10
Hours
30
40
Properties:
Current handling 106 Amp/cm2 Enhanced creep and fatigue resistance Enhanced strength Fine pitch capability with WLP: 5050-100 microns
creep resistance for traditional solder vs nanocomposite solder Crack growth rate h (mm/cycle e) 10-3 10-4 10-5 10-6 Nano Cu 100 Micro Cu
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Goal:
3D IC assembly and i t ti ith interconnections with:
Pitch less than 20 microns T < 250 C SolderSolder-free for reliability, fine-pitch fineand low-cost process low Bonding at 250-300C
Approach
Patterning nanoparticles p Low-temperature Cu p -to-pad Lowpadpad to-p bonding
SILICON
Properties:
Sintering at T < 250oC Conductivity approaching that of bulk metals Flipchip infrastructure compatibility SILICON
Direct capturing of nanoparticles on bonding pads Bonding at low temperatures with gold, silver and copper nanoparticles
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Thermal Interfaces
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Goal:
Thermal management in:
250
50
10 1
Approach
Advanced thermal adhesives with nanoflakes
TIM Evolution
W/mK
p Properties:
Thermal resistance less than 0.01oC cm2/W Reliability with thin layers (<10 microns) CTE compatibility with Si and heat sink
Reliability
Nano-composite for Electronics Nano Packaging for Biocompatibility Nanomaterials for Bioelectronics
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Goal:
Enhance polymer composite properties for:
Adhesives Underfills Molding compounds, Encapsulants Coatings Superhydrophobic Surfaces Contact angle > 160; Low adhesion Nanostructured morphology (C P Wong, GT PRC)
Approach:
Hybrid organic-inorganic materials for organicimproving CTE, Tg and modulus (thermomechanical properties) Nanocomposites for low moisture permeability Surface modification for hydrophobicity for low moisture permeability f l i t bilit Process compatibility for 5-10 micron 5clearance and pitch CTE: 10-20 ppm/C; TG>250 C; 10- ppm/C; Contact angle > 160 160 Low moisture permeability
Properties:
Water permeability as function of filler content (Chugang Hu, Jangkyo kim, HUST)
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Goals:
Hermeticity in water or saline environment Biocompatibility with tissue interface
Approach:
Biocompatible polymers such as LCP and paralyne High-density packaging with Highhermetic metal-polymer metalinterfaces Hermetic coatings
Intraocular Camera 150m Retinal Prosthesis
Properties:
Sealing with low leak rates 1000 feedthroughs in 5 mm x 5 mm
1000 Channel Feedthrough Array with <10-9 leak rates
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Summary
3D ASSM is about highest functionality at lowest cost in y y smallestsmallest- size system, enabled by
Silicon for devices, packages and boards Components at nanoscale
Silicon interposers and packages underway to enable this vision with low cost panel-based Si panelNanoscale component research is underway for
Digital RF Power Thermal Encapsulation
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Thank You
Co Contributor: Dr. Raj Pulgurtha
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Goal:
Enhance stability of implanted electrodes to improve reliability and life-time life-
Approach:
Immobilize anti-inflammatory anticoatings on the electrode surface Coat with molecules which enable tissue integration
Anti-inflammatory Coating on silicon electrodes (Ravi Bellamkonda, GT )
Properties:
Suppress inflammation and tissue scar formation at the interfaces
Modulated Neural Interfaces Modulation of scarring around implanted electrodes using coating
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Georgia Tech-PRC Vision of 3D Systems Tech3D ICs Modules Power ICs Potonics Sensors MEMS
130nm 90nm 45nm 32nm 22nm? CMOS ICs, 300nm Wafer Fabs ICs
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