Operation of Miccro Fluid

Microfluidics 1: Effects & Phenomena
What?
Lab tour
When?
.
February 10th 2012

10:00 am
Where?
101 - SR 01-009/13
www.imtek.de/anwendungen
MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 1
Microfluidics 1: Effects & Phenomena

01 Introduction to Microfluidics
02 Fluid Properties
03 Fluid Dynamics 04 Diffusion
05 Surface Tension
06 Heat-Phenomena 07 Electrokinetics
08 Design & Analysis

09 Basic Fluidic Elements
Control of fluid flow

Control of fluids by valves
Flow rectifier Electrical equivalent diode
Transport of fluids by pumps

Composed of valves and actuation unit
Against external forces / fields

Gravity Pressure gradient Viscosity
Microvalve MegaMic Series HSG-IMIT Hoerbiger-Origa
etc.
Gehuse
housing
Micro implies
small device size or control of small volumes
Auslass Entlftung port outlet Keramik ceramics
pressure port Druckanschluss
Valve classifications
Passive valves
valve seat
flow channel silicon
controlled by hydrodynamic pressure
(p1 p2) built up by flow itself
valve membrane
Active Valves
Flow control elements with actuators Control of fluid flow in binary or continuous
fashion
Binary switch (open and close position) Continuous control (adjustment of flow rate
membrane
actuator
Anschlu 1
Anschlu 2
between open and close)

www.imtek.de/anwendungen MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 4
0,5 mm
No external actuation Interplay with geometrical structure Fluid flow

9.1 Valves
9.1.1 Valves without moving parts
9.1.2 Check valves 9.1.3 Active valves
Passive Valves
9.2 Pumps 9.3 Mixing 9.4 Separating 9.5 Useful microfluidic structures
Valves without moving parts

Special form of passive valves also known as fixed geometry valves
Single use valve

Hydrophobic barriers see chapter 5. surface tension
Multi use valves

Diffuser/nozzle valves
Tesla valves
Basic working principle of multi use valves
Difference in flow resistance (~ 10%) between flow direction

forward backward
for high flow rates (Re > 1)

Diffuser-nozzle valves (1)

Transfer of kinetic energy (i.e.
velocity) into potential energy (i.e. pressure)
A. Olson; Valveless Diffuser Micropumps; Stockholm 1998
Flow IV through constriction

IV = const
Static rectification efficiency e as a

general number of merit of a passive valve
: pressure drop coefficient
nozzle e diffuser
Optimum working range for
Q = 5-20 e: 3.6 @ Q = 5
Diffuser-nozzle valves (2)

Advantages
Simple structure Compact size
A. Olson; Valveless Diffuser Micropumps; Stockholm 1998
Drawbacks
Low forward-backward ratio High leakage rate
Nozzle direction
Rdiffuser < Rnozzle Diffuser direction No flow rectifier for small Re

Tesla valve (1)

Bypass with deviating angles
Asymmetric flow resistance Flow different in both

directions due to inertia effects caused by high flow rates (high kinetic energy)
Rforward < Rbackward
forward
backwards
Tesla valve (2)

Advantages:
Simple structure Compact size
Drawbacks:
Low forward-backward ratio High leakage rate
Difference in flow resistance ~ 10%

can be improved by serial connection of fixed geometry valves
backwards
Franais, Bendib, ESIEE

9.1 Valves
Passive Valves
9.2 Pumps
9.3 Mixing 9.4 Separating
9.5 Useful Microfluidic Structures
Check valves
Passive valves (with movable parts)
Controlled by hydrodynamic
pressure (p1 p2)
Built up by flow itself Interplay with geometrical structure
valve seat
flow channel
silicon
Flow rate governed by

Fluidic resistance of constriction Fluidic capacity of moving part
p2
Frequency (typical 10-100 Hz) Risk of clogging by particles

valve membrane
p1
0,5 m m
Characteristics
Delayed response of membrane moving
to pressure gradient
Electrical equivalent
Flow through constriction Membrane acts as capacitance
Valve act as low-pass filter

valve seat flow channel silicon
At high frequencies (~ kHz range)

Only motion of valve membrane
p2
No net flow (net flow would have to go
through the resistance)

valve membrane
p1
0, 5 m m
Valve types membrane valves

Building blocks
Membrane fixed in the periphery Central orifice Sealing area
Advantages:
High actuation forces due to large
effective area for pressure (F = pA) Large flow rate
valve seat
flow channel silicon
Drawbacks:
Large size Large capacitance Low resonance frequency Large dead volume
valve membrane
0,5m m
Valve types flap valves

Building blocks
Unilaterally fixed flap Opening underneath end of flap
Advantages:
Compact size Low capacitance Moderate dead volume High resonance frequency
Ventilklappe flap Silizium silicon
Drawbacks:
Low actuation force
due to low effective area (F = pA) Small flow rate
Klappenauflage valve plate

9.1 Valves
Passive Valves
9.2 Pumps 9.3 Mixing 9.4 Separating 9.5 Useful microfluidic structures
Active valves
Valves with actuators, for independent control of flow from flow parameters
(pressure and/or flow)
Sub-Categories (classification)
Binary switch open and close position
Continuous control continuous adjustment of flow rate from open to close

closed open
Anschlu 1
port 1
port 2
Anschlu 2
Anschlu 1
port 1
port 2
Anschlu 2
Overview on microvalve actuation principles

Thermal actuators
Piezoelectric actuation Electrostatic actuation Electromagnetic actuation Pneumatic actuation Hydrogel actuators Osmotic pumping Vapor pressure
Phase change

9.1 Valves
9.2 Pumps
9.2.1 Microdisplacement pumps
9.3 Mixing 9.4 Separating 9.5 Useful microfluidic structures
Microdisplacement pumps
Pump effect results from complex
coupling between
Mechanical displacer Rectifier, e.g. valve
pump cycle
supply mode
underpressure
Actuation of (passive) check valves by

pressure within pump chamber
External controllability
Limited to membrane (displacer) Valves react on pressure gradients
pump mode
Motion of displacer governed by

Actuator Inner pressure etc.
overpressure
Design issues
Market requirements
High pump rate against high backpressure Fail-safe pump

FhG-IFT: 1996
Bubble-tolerance & self priming
Trapped gas bubbles in pump chamber are highly

compressible
Malfunctioning of displacement principle Solution: high compression ratios

Clogging
Forschungszentrum Karlsruhe
Particles carried by liquid

Solution: prefiltering of liquids
High viscosity fluids
IMM-Mainz
Evolution of microdisplacement pumps
Milestones in evolution of microdisplacement pumps
18 90 p rsat s h ei t l i peristalticc e Vr r n ep p ed g r u displacementme
pumps
Peristaltic micromembrane pump

J.G. Smits; MESA; 1983
Piezoelectric micropump for peristaltic fluid displacement; Patent NL 8302860
3 active displacers (microvalves) Piezoelectric actuation
Milestones
pumps
1988 Verdrngerpumpe displacement pumps with mit Rckschlagventilen check valves
Displacement pump with check valves

H. van Lintel et al.; MESA, 1988 A piezoelectric micropump based on
micromachining of silicon
Piezoelectric actuated displacer Two membrane valves
Characteristics of membrane pumps (diaphragm pumps)
increasing pumprate
capacity of valve dominates
flow [L/min]
flow [L/min]
frequency [Hz]
back pressure [mbar = cm H2O]
Milestones
pumps
1993 ventillose Verdrngerpumpe valve less displacement pumps
Fixed-geometry valves diffuser/nozzle

G. Stemme et al.; KTH; Stockholm, 1993 A novel piezoelectric valve-less
fluid pump
Piezoelectric actuated displacer Diffuser / nozzle as rectifier
diffuser/nozzle element
Piezoaktor piezo
membrane Membran
inlet
outlet
Fixed geometry valve Tesla valve

F. Forster et al.; University of Washington; 1998
Piezoelectric actuated displacer Bypass-valves (TESLA-valve) as rectifier
Milestones
1995 Verdrngerpumpe mit bidirectional displacement Vorwrts- & Rckwrtsgang pumps

pumps
1993 ventillose Verdrngerpumpe valve less displacement pumps
Bidirectional MDP
R. Zengerle et al; FhG-IFT, 1995
A bidirectional silicon micropump Electrostatic actuation Flap valves
Change in pump direction at approx. 1000 Hz
Phase shift between movement

of flap-valve and membrane actuation
pump rate IV [L/min]
Frequency [Hz]
Economical issues
Micropumps
High fabrication costs Low production numbers
microfuel cell
In the past
Development of high performance micro pumps Applications were missing
Today
Micropumps become more and more important due to
Micro fuel cells, Medical applications (e.g. drug delivery), consumer applications
Main pumping mechanism

peristaltic pumps valves with pump effects single actuation pumps

9.1 Valves
9.2 Pumps
9.3 Mixing
9.3.1 Liquid-Liquid Mixing (9.3.2 Gas-Liquid Mixing)
9.4 Separating 9.5 Useful microfluidic structures
What is Mixing?
distinguish between mixing and diffusion!
diffusion is a basic transport phenomena diffusion is always co-existent mixing is a (engineering) measure to assist diffusion
diffusion
mixing on molecular level
phase A - phase B
mixing
homogenization of concentrations
in liquid-volume or flow basically: generation of interfacial area between two phases
Challenge of Mixing in Microdomain

laminar flow regime (Re << 2200)
no turbulences no chaotic mixing
uchar lchar Re
mixing via diffusion only micromixer: generation interfacial area

e.g. generation of multilaminar flow with thin lamellae
A B
15+15 lamellae
IMM, Mainz Interdigital Mixer


9.1 Valves
9.2 Pumps
9.3 Mixing
9.3.1 Liquid-Liquid Mixing (9.3.2 Gas-Liquid Mixing)
9.4 Separating 9.5 Useful Microfluidic Structures
Classification
types of liquid-liquid mixers
characteristic mixer properties
characteristic mixing time retention time throughput mixing-ratio

Optimum Characteristics Depend on Application!

reactive micromixing
mixing time relevant yield, by-products, retention time important = time for reaction micro process engineering
dilution of substance
mixing time less relevant

(adds to overall process time)
retention time less relevant high homogeneity desired analytical applications

(lab-on-a-chip)
www.wikipedia.com
Reactive Micromixing
mixing of two reactants
chemical reaction
www.wikipedia.com
synthesis of product
two consecutive processes:

1. generation of homogeneous mixture
time critical step (macroscopic time scales) large interfacial area to enhance diffusion
l tD D
[AB] kAB[A][B] t
2. mixing / reacting on molecular level

depends on reaction kinetics (kAB)
Throughput of Micromixers

usually: pressure-driven flow (PDF) law of Hagen-Poisseuille volume flow IV
IV
d
IV 16 d 2
A2 d4 IV l l
reduced throughput in microchannels!
Numbering-Up Concept
many micromixers in parallel microchannel with diameter 1/N
! =
N 4 channels in parallel to achieve same throughput!
16
The Numbering-Up Concept

higher throughput: more mixing elements
same conditions in single mixer
IMM, Mainz
faster / more reliable step from

lab-scale to industrial production
but: distribution channels required

flow-splitting of single feed-stream
uniformity problem
highest flow rate in channel with smallest
flow resistance (cp. electric network) non-uniformity of resistances - fabrication tolerances - flow patterns in flow splitter - backpressures caused by air pockets, different conditions in mixers
mixers
Examples of Micromixers
many different micromixers and mixing-principles exist!
here: typical examples for the different classes of micromixers best mixer depends on the requirements of the application!
3 1 2 4
Batch: mixing of discrete volume Continuous: in-flow mixing Active: external energy input Passive: no external energy input
1. Active Batch Micromixer

surface Acoustic Waves (SAW)
piezoelectric material (RF filters in cell-phones)
electric actuation modes of elastic energy propagate at the surface of a solid body
(nano-earthquake)
www.advalytix.de
1. Active Batch Micromixer

mixing chamber
SAW on one side-wall generation of micro-turbulences
mixing!
advantage: no moving parts
www.advalytix.de
2. Passive Batch Micromixer

every microfluidic chamber acts as a passive batch micromixer
mixing via diffusion only slow
example: droplet-based microfluidics

droplet movement by
electrowetting-effect two droplets of different liquids are merged additional movement of merged droplet to assist (slow) diffusion still a passive micromixer?
www.ee.duke.edu/research/microfluidics/
More on droplet-based microfluidics in summer-semester SS12 lecture: Microfluidic Platforms
3. Active Continuous Micromixer

pulsed mixing:
K. Sugano et al. Proc. of IEEE MEMS 2006, pp. 546-549, 2006.
two piezoelectric micropumps (ch1 & ch2) Y-shaped connection of channels switching between the two pumps serial segmentation
ch1
serial segmentation
ch2 ch1
ch2
3. Active Continuous Micromixer

pulsed mixing:
K. Sugano et al. Proc. of IEEE MEMS 2006, pp. 546-549, 2006.
two piezoelectric micropumps (ch1 & ch2)

Y-shaped connection of channels switching between the two pumps serial segmentation expansion after junction thin vertical lamellae (taylor dispersion) application: production of gold nanoparticles
micropump ch2
switch
ch1 micropump
Au particles
4. Passive Continuous Micromixer

see also chapter 4: Diffusion
Advection Multilamination
advection Principles
Micro-channel
hydrodynamic actuated example: Dean mixer

multilamination Principles
down-scaled diffusion length Dean-Mixer
generation of thin phase-lamella
example: Split and Recombine example: Interdigital mixer
IMTEK
Split and Recombine
Interdigital Mixer
Continuous & Batch: Mixing in Droplet

continuous generation of droplets
injection of two miscible phases (w1 & w2) into single droplet immersed in
immiscible phase (oil)
mixing within droplet (batch) along channel

(bended channel parts induce stretch and fold streams) s H. Song, M.R. Bringer, J.D. Tice, w2 C.J. Gerdts, R.F. Ismagilov w1
Applied Physics Letters, 83(22), pp. 4664-466, 2003.
oil

defined start of mixing within the droplet
separating stream (s) separates the two phases prior contact position along channel corresponds to mixing time
investigation of reaction kinetics in ms time-scale
s w1
w2
oil

examples: dosing of reagents
FeCl3
Fe(SCN)3
(NH4)(SCN)
The Centrifugal Micromixer

mixing in rotating microchannels
pumping via rotation:

centrifugal force Fn moves liquid through radial channels
two liquids A & B are injected into

separate reservoirs under rotation
injection of liquids A & B
liquid collection on stationary receiving vessel
mixing product
mixing channel
rotating disk
IMTEK MEMS Applications

mixing is induced by the Coriolis-Stirring effect
transversal Coriolis force FC on flowing liquid (velocity u) most pronounced in centre of the channel advection due deflection of transversal liquid movement
transversal advection (stirring)


mixing Performance
fluid A fluid B
micromixedness ratio a
= measure for mixing
high mixing quality at very

high volume throughput!
Coriolis-Stirring along channel
Split and Recombine Mixer

Mixing of Immiscible Liquids

emulsion = mixture of two immiscible liquid phases
every mixer can also be used to mix immiscible liquids the resulting emulsion has a certain droplet-size distribution micromixers can generate very monodisperse emulsions
(i.e. narrow size-distribution of droplets)
example: emulsification in out-off-plane

Interdigital Micromixer (IMM)
V. Haverkamp, W. Ehrfeld, K. Gebauer, V. Hessel, H. Lwe, R. Richter, C. Wille, Fresenius J. Anal. Chem., 364, pp. 617-624, 1999.
IMM Mainz out-of-plane multilamination
Emulsification in Interdigital Micromixer

two immiscible phases: Silicon-oil & water
300 ml/h 600 ml/h
critical parameters on droplet-size:

1200 ml/h
1. smaller droplets at higher volume flow

1:1 7:1 35:1
2. smaller droplets at higher flow-rate ratio

increased flow rate of stationary phase
40 m 20 m
3. smaller droplets at smaller channel widths


Operation of Miccro Fluid

Încărcat de

Informații document

Titlu original

Drepturi de autor

Formate disponibile

Partajați acest document

Partajați sau inserați document

Opțiuni de partajare

Vi se pare util acest document?

Este necorespunzător acest conținut?

Drepturi de autor:

Formate disponibile

Operation of Miccro Fluid

Încărcat de

Drepturi de autor:

Formate disponibile

Microfluidics 1: Effects & Phenomena

February 10th 2012

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 1

Microfluidics 1: Effects & Phenomena

08 Design & Analysis

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 2

Control of fluid flow

Transport of fluids by pumps

Against external forces / fields

Microvalve MegaMic Series HSG-IMIT Hoerbiger-Origa

pressure port Druckanschluss

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 3

controlled by hydrodynamic pressure

(p1 p2) built up by flow itself

between open and close)

No external actuation Interplay with geometrical structure Fluid flow

09 Basic Fluidic Elements

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 5

Valves without moving parts

Single use valve

Multi use valves

Basic working principle of multi use valves

Difference in flow resistance (~ 10%) between flow direction

for high flow rates (Re > 1)

Diffuser-nozzle valves (1)

Flow IV through constriction

Static rectification efficiency e as a

Optimum working range for

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 7

Diffuser-nozzle valves (2)

Rdiffuser < Rnozzle Diffuser direction No flow rectifier for small Re

Tesla valve (1)

Asymmetric flow resistance Flow different in both

Rforward < Rbackward

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 9

Tesla valve (2)

Difference in flow resistance ~ 10%

09 Basic Fluidic Elements

9.5 Useful Microfluidic Structures

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 11

Flow rate governed by

Frequency (typical 10-100 Hz) Risk of clogging by particles

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 12

Valve act as low-pass filter

At high frequencies (~ kHz range)

No net flow (net flow would have to go

through the resistance)

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 13

Valve types membrane valves

effective area for pressure (F = pA) Large flow rate

flow channel silicon

Valve types flap valves

due to low effective area (F = pA) Small flow rate

Klappenauflage valve plate

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 15

09 Basic Fluidic Elements

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 16

Binary switch open and close position

Continuous control continuous adjustment of flow rate from open to close

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 17

Overview on microvalve actuation principles

MF Effects & Phenomena: 09 Basic Fluidic Elements / slide 18

09 Basic Fluidic Elements