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Presented By Sayyan.N.Shaikh
systems.
The fabrication of devices with at least some of their dimensions are in the micrometre range.
MEMS applications
Mechanical Applications
Pressure sensors Accelerometers (air bag sensors)
Optical Application
Other applications
Commercial
Biomedical sensors Drug delivery systems Neurological disorders Telecom optical fiber switching Monitoring structural health Automotive safety
Military
Biochemical warfare detection system Inertial systems for guidance and navigation
Surface chemistry
MEMS materials
Many microsystems use microelectronics materials such as silicon(si),and gallium arsenide(GaAs)for the sensing or actuating elements. These materials are chosen mainly because they are dimensionally stable and there microfabrication and packaging techniques are well established in microelectronics. Other materials such as quartz and Pyrex, polymers, plastics and ceramics are used for MEMS and microsystems and not for micro electronics.
Wafers
In semiconductor,the substrate is a single crystal cut in slices from a large piece called wafer. Wafer can be silicon or other single crystalline material such as quartz or gallium arsenide. There are two types of substrate materials used in microsystems: 1. Active substrate materials 2. Passive substrate materials The common substrate materials used in MEMS are silicon(si),germanium(Ge),and gallium arsenide(GaAs).
Material Applications
Crystal Growth Single Crystal Ingreding Crystal trimming and Diameter grinding Flat grinding Wafer slicing Wafer etching Polishing Wafer inspection
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