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Objective
The objective of the module is to introduce micro- and nano electromechanical systems to two year community college students with special emphasis on the development, processing, applications, and materials that are currently in use to produce MEMS/NEMS.
Topics
Introduction Brief History Electromechanical Systems MEMS Current Applications NEMS and Nanotechnology Impact of Miniaturization Challenges and Possibilities References
Introduction
Figure 5.1: Drive gear chain and linkages, with a grain of pollen (top right) and coagulated red blood cells (lower right, top left) to demonstrate scale. 4
Introduction, Continued
Introduction, Continued
Definition and Terms
MST - Microsystems Technology (European) MEMS - Microelectromechanical Systems (U.S.) Manmade devices created using compatible microfabrication techniques that are capable of Converting physical stimuli, events and parameters to electrical, mechanical & optical signals Performing actuation, sensing and other functions
Introduction, Continued
Brief History
1962 1967 1967 1972 1979 1982 1982 1983 1983 1983 1985 1987 1993 1994 1999 Silicon Integrated piezo actuators BY O.N. Tufte et al. Anisotropic deep silicon etching H.A. Waggener The resonant gate transistor by H. Nathanson, et.al National Semiconductor - Pressure Sensor Thermal inkjet technology is invented at HP laboratories Silicon as a Mechanical Material K. Peterson Liga Process (KFIK, Germany) Infinitesimal Machinery R. Feynman Silicon Micromechanical devices J.B.Angel etc. Integrated Pressure Sensor Honeywell Airbag Crash Sensor Dr. Hornbeck Digital Micromirror Device or DMD (DLP by Texas Instruments) Later in 1990s micromachining begins leveraging microelectronics industry Accelerometer integrated with electronics Analog devices DRIE Etching (Bosch process is patented) Optical network switch - Lucent
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Electromechanical Systems
Functional Block Diagram
MEMS
Microstructure Fabrication
Materials
Crystallography Forms of Silicon Amorphous Polycrystalline Crystalline Miller Planes
MEMS, Continued
Microstructure Fabrication, Continued
-Structural layer -Sacrificial layer
deposit
pattern
Pattern definition Photolithography Deposition Oxidation, chemical-vapor deposition, ion implantation Removal Etching, evaporation
etch
MEMS, Continued
Microstructure Fabrication, Continued
Processing Techniques
Deep Reactive Ion Etching (DRIE) Surface Micromachining LIGA process Lithography / Electroplating / Molding SUMMIT process
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MEMS, Continued
MEMS Advantages
The advantages of MEMS devices include Size
High sensitivity
Low noise Reduced cost Batch Processing The applications for MEMS are so far reaching that a multi-billion dollar market is forecast. Key industry applications include transportation, telecommunications and healthcare.
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MEMS, Continued
MEMS Economy
Worldwide MEMS Markets (in Millions of $) Microfluidics Optical MEMS RF MEMS Other actuators Inertial sensors Pressure sensors Other sensors Total
Current Applications
Accelerometers Micro Optical Electro Mechanical Systems (MOEMS) Digital Mirror Devices (DMD) used in Projection Devices Deformable mirrors
Optical Switches
Inkjet Print heads (Microfluidics) Pressure Sensors Gyrometers Magnetic RW heads for hard drives Seismic Activities - Thermal transfer
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Retina/Cochlear Implants
Micro Needles ChemLab Micro Fluidic Pumps - Insulin Pump (drug delivery)
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IBM Millipede storage system AFM tip writes data bit by melting a depression into polymer mediaum and reads data by sensing depressions.
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Nanomaterials
Started with carbon. Behavior depends on morphology.
Figure 5.8: Eight allotropes of carbon: Diamond, graphite, lonsdaleite, C60, C540, C70, amorphous carbon and carbon nanotube 18
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cantilever
Reacting compound
Impact of Miniaturization
Potential Positive Impacts Reduction of disease. Job opportunities in new fields. Low-cost energy. Cost reductions with improved efficiencies. Improved product and building materials. Transportation improvements Potential Negative Impacts Material toxicity Non-biodegradable materials. Unanticipated consequences. Job losses due to increased manufacturing efficiencies.
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Molecular manufacturing
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References
Gad-el-Hak, M. MEMS, Design and Fabrication, Second Edition. (2005) Lyshevski, S., MEMS and NEMS, CRC Press LLC. (2002) Maluf, N. and Williams, K., An Introduction to Micromechanical Systems Engineering, Second Edition, Artechouse, Inc. (2004) Microsytems, Same-Tec 2005 Preconference Workshop, July 25 &26, 2005. Taylor and Francis, MEMS Introductory Course, Sandia National Laboratories, June 13-15, 2006. What is MEMS technology? MEMS and Nanotechnology Clearinghouse. http://www.memsnet.org/mems/what-is.html.
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