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Advantages of Microsystem
Products
Less material usage
Lower power requirements
Greater functionality per unit space
Accessibility to regions that are forbidden
to larger products
In most cases, smaller products should
mean lower prices because less material
is used
Outline
Introduction of microactuators
Piezoelectric microactuators
Magnetic microactuators
Electrostatic microactuator
Thermal microactuators
others
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Introduction
Core components in MEMS:
Sensors, actuators, transduction unit /control logic
Power
supply
Power
supply
supply
Microsensing
element
Transduction
unit
Transduction
unit
Output
signal
MEMS as microsensor
Microactuation
element
Output
Output
signal
signal
MEMS as microactuator
Microactuators
Categorized by principle
Thermal forces;
Piezoelectric forces;
Electromagnetic forces;
Electrostatic forces;
Other forces, such as shape
memory alloy, magnetrostrictive
force, ultrasonic force;
Applications
Micropump, micromirror,
micromotor, microvalve,
microrelay, microgripper,
optical switch, etc.
Piezoelectric effect
Principle: piezoelectric crystals produce electrical charge
with applied mechanical stress; the converse applies too:
an applied voltage generates deformation of crystals.
Polarization:
Induced mechanical
deformation
Mechanical forces
Mechanical-force-induced
electric voltage
Applied
voltage V
Electric-voltage-induced
mechanical deformation
Piezoelectric actuators
Piezoelectric effect with E-field and stress is
D d
d E
i
Electromagnetic microactuators
The electromagnetic force can be generated with one or two
magnets or coils.
High power consumption and heat dissipation, not suitable
for miniaturization.
Widely used in focusing system of optical storage disk and
magnetic head positioner of hard disk.
Thermal microactuators
Thermal actuation is widely used for actuation cantilever or
membrane structures.
The thermal deformation is generated by the distinct thermal
expansion coefficient in different materials.
The strain caused by the temperature change is
dT T
Th
Tl
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Electrostatic microactuators
Principle: electrostatic force (attraction) generated between
moving and fixed plate as voltage applied.
Two major configurations: (a). parallel-plate capacitors (outof-plane), (b) interdigitated fingers /comb drive (in-plane)
Pros: simplicity, low power, fast response, low cost
Cons: non-linear dependence of force on gap, contamination,
sticking instability
Applications: micromotors, accelerometers, optical switches,
micromirrors, comb-drive microactuators
Parallel-plate
capacitor
Comb drive
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Electrostatic microactuators
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Fabrication method:
Bulk-micromachining
e.g.., deep reactive ion etching and wafer bonding
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Thank You !
PRESENTED BYZAINAB
HASEEB
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