Bi2Te3-Based Flexible Micro

Thermoelectric Generator With

Optimized Design
Presentation by
K.RUPA BLESSINA
RA1512011010009

INTRODUCTION
The research field of power MEMS is searching
solutions to provide electrical energy to autonomous
microsystems, by bulky batteries.
Micro thermoelectric generators (TEGs) based on
the Seebeck effect.
A number of thermocouples (TCs) are connected
electrically in series and thermally in parallel.

REVIEW
1) Type Alateral/lateral: generators with a lateral
heat flow and laterally fabricated TCs [Fig. 1(a)].
2) Type Bvertical/lateral: generators with a
vertical heat flow achieved by assembly or
arrangement of laterally fabricated TCs [Fig. 1(b)].
3) Type Cvertical/vertical: generators with
vertical heat flow and vertically fabricated TCs
[Fig. 1(c)].

CONTD..
TE efficiency factor is de- fined as
the output power of the device P0
normalized to its area AG and the
temperature difference over the
devices T squared.

= P0/ (AG T^2)

FABRICATION
Length of the TCs should be in the range
between 100 and 300 m for maximum
performance.
The TCs of the TEG are formed by subse
The Cu legs are formed by galvanostatic pulse
platingquent ECD.
The Ni legs are plated potentiostatically .

 Optimisation in deposition rate is obtained.

Fabrication low cost-batch compatible
MEMS standard process is used.
Silicon wafer is used for handling purposeyhis can be recycled.
The TCs are interconnected by Cu(20 micro
m).
Yields robust mechanical strength and low
ohmic contacts.

 Enhances thermal coupling through

heat source and sink.
This lead to improved performance.
Two different TC layouts are
discussed
1)90TCs;Av=7.01
2)253 TCs; Av=1.62
This shows that the one with SU8substrate providesc stability and
flexibility of the device.

TEG WITH Bi2Te3 TCs

TC material is substituted to achieve
better performance.
The process flow remains same
except for ECD for TCs.
For ECD new method was developed
using controlled stoichiometry.

 Exact control of composition

throughout the layer is difficult but is
done to obtain desired thermoelectric
behaviour.
When stoichiometric variation occurs
the seebeck coefficient becomes
negative.

RESULTS AND DISCUSSION

A)FLEXIBILITY MEASUREMENT
are attached to poly cylinders of
differefnt radius and their internal
resistance is measureed.
4wire resistance measurement::
TEGs

Injected curent:: 100mA

Source - Keithley 2400 source meter.
Voltage drop - keithley 2000 multimeter.
Measuring period 10ms.

 No significant change of resistance between

radius which shows complete flexibility.
B)PEFORMENCE OF NiCu TEGs::
3 FUNCTIONAL COMPONENTS::
Temperature control
Measurement of hot side
Measurement of cold side
Power measurement of generator.

 The efficiency of the generator

depends on the dt.
High thermal conductivity but non
uniform thermal contact between
heat source and sink.
The optimal length of TC is beyond
limits.

 PERFORMANCE OF Bi2Te3 TEGs::

The substitution of TC material with Bi2Te3
increases the perfomence factor by 20.
Before annealing it is more than 20.
High Av gives higher output with NiCu.
Low Av but more advantageous than Bi2 Te3.

FUTURE WORK
TC material until now is not
optimised with respect to
thermoelectric properties.
Specific contact resistance has
worsened by almost two orders of
magnitude.
Both are crucial.

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