Basics of Vacuum Technology

Nanophotonics Lab
Chonnam National University

Presented By: Mr. Aadil Waseem

VACUUM

The word vacuum comes from the Greek word vacua, which means empty.

Vacuum is an enclosed space from Actually, in nature, there is no totally

which matter, especially air, has empty space ideal vacuum, but
been partially removed so that the vacuum has levels.
matter or gas remaining in the
space exerts less pressure than the
atmosphere.

A vacuum is defined as less than 1 Atmosphere of pressure.

(1 Atm = 105 Pa = 103 mbar = 760 Torr = 14.5 psi)
Vacuum Levels

There are three levels of vacuum

Rough Vacuum: 103 to 10-3 mbar

High Vacuum: 10-3 to 10-8 mbar
Ultra High Vacuum: 10-7 to 10-12 mbar
 Main Types of Vacuum Pumps

Many different kinds of vacuum pumps exist, each with their own application.
Here I will discuss some of the more common types of vacuum pumps.

Rotary Pump (RP) RP achieves rough vacuum

Oil Diffusion Pump (ODP) ODP achieves rough to high vacuum
Turbo Molecular Pump (TMP) TMP achieves Ultra-high Vacuum
Method of Operation

Mechanical pumps: Mechanical Pumps such as the rotary pump, roots pump, or
turbo-molecular pumps use rotating parts to reach vacuum.

Vapour Pump: These pumps, such as diffusion and oil ejection pumps use a
stream of liquid or vapour to create the vacuum.

Entrainment Pumps: These pumps, such as sorption pump create surfaces onto
which vapour and gas molecules will stick by condensation, adsorption or other
mechanisms.
 Rotary Pump
Pump Construction
Working Principle: A rotary pump is
a positive displacement pump that
consists of vanes mounted to a rotor
that rotates inside of a cavity.
Oil Difussion Pump
Pump Construction
Oil Difussion Pump
First state vapours are seperated from others
 Turbomolecular Pump

Working Principle: These pumps

work on the principle that gas
molecules can be given momentum
in a desired direction by repeated
collision with a moving solid Molecule V
surface.

Moving Wall with Speed V

Principle of the Turbomolecular Pump
Turbomolecular Pump
Pump Construction
INLET FLANGE ROTOR BODY

STATOR BLADES

HIGH PUMPING SPEED

HIGH COMPRESSION

BEARING

EXHAUST TO
BACKING PUMP

HIGH FREQ. MOTOR

BEARING
Vacuum System Use
9
8
1 Vacuum Chamber
1
7
2 High Vac. Pump
8 3 Roughing Pump
4 Hi-Vac. Valve
5 Roughing Valve
5
4 6 Foreline Valve
7 7 Vent Valve
8 Roughing Gauge
2
9 High Vac. Gauge
6

3
 EBARA (A25S)
Multistage Dry Vacuum
Pump (MOCVD)
Turbo-molecular
Vacuum Pump
(e-beam)
OTHER VACUUM PUMPS
Properties of
Pumps
Instructions for Vacuum Equipment
Operation
Causes of faults where the desired ultimate pressure is not achieved or is
achieved too slowly

If the desired ultimate pressure not If the desired ultimate pressure is

reached then: reached only after a very long running
The apparatus may be leaky or time, then:
dirty, The apparatus may be dirty,
The pump may be dirty or The pumping line may be restricted,
damaged, The pump may be dirty or of too small
The vacuum gauge may be capacity,
defective. The pumping speed may be restricted
due to other causes.
Thanks!
!
Any questions?