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Hla et al., Phys. Rev. B 67, 201402 (2003)
Atomic manipulation by STM
M.F. Crommie, C.P. Lutz, D.M. Eigler. Science 262, 218-220 (1993) 3
STM nano-patterning at IBM
M.F. Crommie, C.P. Lutz, D.M. Eigler, Science 262, 218-220 (1993).
M.F. Crommie, C.P. Lutz, D.M. Eigler, Nature 363, 524-527 (1993).4
AFM manipulation of carbon nanotube
IBM nanotube
manipulation for position
nanotube on transistors.
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Scanning probe microscopy (SPM) and lithography
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AFM oxidation (STM also works)
This is an electrochemical process, even though it is not done in bulk liquid (but
actually there is always liquid when operated in air).
The high field desorbs the hydrogen on the silicon surface and enables exposed
silicon to oxidize in air.
Since the oxidation process requires an electrical current, both the tip and
substrate must have some conductivity.
Fig. 4.12 AFM images of oxide lines produced at (left) 61% of humidity
(line 91nm wide); and (right) 14% humidity (22nm wide). 8
De-passivation of Si:H by STM
H- terminated Si resulted from HF etch of Si whose top surface
(2nm) is usually oxidized in air.
However, such high aspect ratio anisotropic vertical etching can only
be achieved along certain directions ((111) plane) on (110) Si wafer. 11
Scanning probe microscopy (SPM) and lithography
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Dip pen nanolithography (DPN)
Revolutionary science developed at Northwestern University.
Allows for deposition of inks, including DNA and other biomaterials, at nm resolution.
For ultra-high-density gene chips with direct write of DNA onto substrate.
It resembles micro-contact printing, yet it creates pattern (rather than duplicating
pattern), and is very slow.
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Bio-matter patterning by DPN
Virus nano-arrays 16
Science, Vol 295, Issue 5560, 1702-1705, 1 March 2002
Nanoscale dispensing
Pattern liquids, e.g. biomolecules, suspensions,
by surface chemistry.
Parallel probes for multi-material deposition.
Antibody/antigen array
that binds specifically to
tumor marker
antigen/antibody.
Tumor marker:
Found in the blood, other body fluids, or tissues.
High level of tumor marker may mean that a certain type of cancer is in the body.
Currently, the main use of tumor markers is to assess a cancer's response to
treatment and to check for recurrence.
Scientists continue to study these uses of tumor markers as well as their potential
role in the early detection and diagnosis of cancer.
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Mirkin, Multiplexed Detection of Protein Cancer Markers with Biobarcoded Nanoparticle Probes, JACS, 2006.
Parallel dip-pen nanolithography
The background shows some of the 55,000 miniature images of a 2005 US nickel
made with dip-pen lithography. Each nickel image with Thomas Jefferson's
profile (in red) is made of a series of 80nm dots. The inset (right) is a SEM image
of a portion of the 55,000-pen array.
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Mirkin, Massively parallel dip-pen nanolithography with 55 000-pen two-dimensional arrays, Angewandte Chemie International Edition, 2006
Scanning probe microscopy (SPM) and lithography
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AFM-based nanofabrication: nanoindentation
Popular early examples of nanofabrication using an
AFM probe, since it is so simple.
This approach allows site-specific nanoindentation,
and straightforward imaging of the resulting
indents immediately after indentation.
Nano-indentations made
with an AFM on a diamond-
like carbon thin film.
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AFM lithography: scratching
Material is removed by AFM tip scratching.
SAM (self-assembled mono-layer) can also be removed by tip scratching,
which is the inverse process of dip-pen nanolithography.
As a nanofabrication method this is fairly limited due to the tip wear and
debris produced on the surface.
It can also be used to characterize micro-wear process of materials.
Polymer (?)
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Kramer, Scanning probe lithography using self-assembled monolayers, Chem. Rev. 103, 4367-4418 (2003). (good review paper, 52 pages)
Millipede: thermal-mechanical data storage on a polymer
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IBM Millipede write and read
Resistance change:
R/R 10-4/nm
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D. Wouters, U. S. Schubert, Angew. Chem. Int. Ed. 2004, 43, 2480-2495.
Thermal bimetallic actuation
expand
tip
Bi-metal means two metal films one on top of another, here with different thermal expansion.
Go to http://en.wikipedia.org/wiki/Bi-metallic_strip for a nice video.
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The Millipede data storage
Read/write tip, radius at tip apex a
few nm, tip-height 500 - 700 nm
700 nm
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Near field scanning optical microscope (NSOM)
or Scanning near field optical microscope (SNOM)
NSOM is a scanning optical microscopy technique that
enables users to work with standard optical tools beyond
the diffraction limit.
It works by exciting the sample with light passing through
an aperture formed at the end of a single-mode drawn Far field
optical fiber, whose diameter is only tens of nanometers.
Broadly speaking, if the aperture-specimen separation is
kept roughly less than half the diameter of the aperture,
the source does not have the opportunity to diffract before
it interacts with the sample, and the resolution of the
system is determined by the aperture diameter as oppose
to the wavelength of light used.
An image is built up by raster-scanning the aperture across
the sample (or fix the aperture while scanning the sample)
and recording the optical response of the specimen through
a conventional far-field microscope objective.
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Melt-drawn straight NSOM tip
DNA
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Near field illumination, far field detection
Scanning probe microscopy (SPM) and lithography
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Near-field lithography: direct serial writing
Serial writing/exposure of
a photo-resist using fiber
tip, like photolithography,
but with high resolution
and is very slow.
1m
Apertured Apertureless
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Two photon near-field optical lithography
790nm cannot expose SU-8, but 790/2=395nm can.