MINISTERUL EDUCAIEI AL REPUBLICII MOLDOVA

UNIVERSITATEA TEHNIC A MOLDOVEI

Catedra Microelectronic i Inginerie Biomedicale
Bazele Tehnologice ale Microelecronicii
Lucrarea de laborator Nr: 3
Te!a" Fabricarea jonciunilor pn prin metoda di!u"iei#
A efectuat: st.gr.MN-121
Reu Constantin

A verificat: Prof.Univ.,Dr.Hab.
Viore !rofi"




Chiinu 2014
Scopul lucrrii: $e a l%a c%no&in'( $e !eo$a $i)%ziei* )olo+in$ i!,%ri('i $in +area
+oli$(* ,enr% o-'inerea .onc'i%nilor ,/n &i $e cercea ,ara!erii +ra%rilor $i)%zionale &i ai
.onc'i%nilor ,/n#
Date teoretice
La e!,era%ri !ari ao!ii re'elei cri+aline 0i-reaz( 1n .%r%l no$%rilor re'elei# Ao!ii care
ca,(( energie +%)icien( ,enr% a ,(r(+i no$%rile re'elei $e0in iner+i'iali &i la+( 1n %r!( c2e o
0acan'(# C2n$ %n ao! $e i!,%riae !igreaz( +,re loc%l 0acan'ei* !ecani+!%l ,oar( n%!ele $e
$i)%zie ,rin 0acan'e +a% +%-+i%'ional(# C2n$ %n ao! $e i!,%riae +e $e,la+eaz( 1nre ao!ii
3no$%rile4 re'elei* )(r( +( oc%,e loc 1n no$* !ecani+!%l +e n%!e&e $i)%zie iner+i'ial(# 5n caz%l
+ilici%l%i ele!enele %z%ale $e $onare $in gr%,ele 6 &i 7 $i)%zeaz( +%-+i%'ional#
Dac( N38*4 e+e concenra'ia local( $e i!,%ri('i ,re+%,%+e a $i)%za e8cl%+i0 1n $irec'ia 9
)l%8%l $e i!,%ri('i :3ao!i ,e %niaea $e arie 1n %niaea $e i!,4 e+e ,ro,or'ional c% gra$ien%l
concenra'iei $e i!,%ri('i* a$ic("
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rela'ie care $e)ine&e con+ana $e ,ro,or'ionaliae D $re, coe)icien%l $e $i)%zie al i!,%ri('ii
re+,eci0e3e8,ri!a 1n c!
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a )l%8%l%i $e $i)%zie* a$ic("
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S%-+i%in$ 3l4 1n acea+( ec%a'ie $e conin%iae +e o-'ine cea $e $o%a lege a l%i :ic> +a%
ec%a'ia $i)%ziei +%- )or!( %ni$i!en+ional("
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@ con+an( egal( n%!eric c% coe)icien%l $e $i)%zie la e!,era%ri in)ini $e !ari3c!
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E @ energia $e aci0are* care +e $eer!in( ca o oarecare energie* nece+ar( ,enr% a ,(r%n$e
i!,%riaea 1n +e!icon$%cor3eV4A T @ e!,era%ra a-+ol%(A > @ con+ana l%i Bolz!ann#
De,en$en'a coe)icien%l%i $e $i)%zie al i!,%ri('ilor 1n Si &i BaA+ 1n )%nc'ie $e e!,era%r(
e+e ,rezena( 1n )ig# l# Energia $e aci0are ,enr% i!,%ri('ile $e $o,are %z%ale 1n Si are 0alori
1nre 6#7 &i C eV#
Ec%a'ia 3<4 ,oae )i rezol0a( ,enr% $i)erie +e%ri $e con$i'ii ini'iale &i li!i( +i!,le* care
core+,%n$ 1n+( $e+%l $e -ine %nor +i%a'ii ,racice i!,orane#
Un inere+ $e !are i!,oran( ,racic( o a% $o%( caz%ri $e e)ec%are a ,roce+elor $e $i)%zie"
;# $i)%zia $inr/o +%r+( +e!i/in)ini(3con+an(4 $e i!,%ri('iA
<# $i)%zia $inr/o +%r+( li!ia( $e i!,%ri('i#
Di)%zia $inr/o +%r+( +e!i/in)ini( +e )olo+e&e !ai $e+ la )a-ricarea C#I# ca ,ri!a ea,( a
$i)%ziei* care are +co,%l $e a inro$%ce 1n +e!icon$%cor o an%!i( caniae $e i!,%ri('i la o
a$2nci!e !ic(# Acea+( ea,( +e n%!e&e $e+ ,re$i)%zie +a% $e,%nere $e i!,%ri('i#
Dac( 1n i!,%l ,roce+%l%i $e $e,%nere concenra'ia la +%,ra)a'( N
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e+e !en'iona( con+an(*
con$i'iile $e li!i( ,enr% ec%a'ia 3<4 +%n"
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iar con$i'ia ini'ial( e+e"
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la o e!,era%r( $a( ,oae )i egal( c% +ol%-iliaea +oli$(
a ace+ei i!,%ri('i 1n +e!icon$%cor%l $a#
Sol%'ia ec%a'iei 3<4 c% con$i'iile 3C4 e+e"

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%n$e er)c e+e )%nc'ia co!,le!enar( $e eroare# Para!er%l cheie al ,roce+%l%i e+e $t * care
,oar( n%!ele $e l%ngi!e $e $i)%zie#
Caniaea oal( $e ao!i a i!,%ri('ii ,e o %niae $e arie* inro$%+( 1n +e!icon$%cor $%,(
%n ,roce+ $e $e,%nere D3a=c!4* rez%l( $in inegrarea rela'iei 374"

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$inr/o +%r+( li!ia( $e i!,%ri('i +e realizeaz( 1n acel caz* c2n$ ,e +%,ra)a'a +e!icon$%cor%l%i
la a$2nci!e !ic( e+e )or!a( o regi%ne* care con'ine i!,%ri('i D3,e o %niae $e +%,ra)a'(4#
Caniaea acea+a $e ao!i n% +e e0a,or( $e ,e +%,ra)a'a +e!icon$%cor%l%i &i are loc ,roce+%l
$i)%ziei n%!ai 1n inerior%l cri+al%l%i#

Con$i'iile $e li!i( &i ini'iale 1n ace+ caz ,o )i +cri+e"
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Sol%'ia legii a $o%a a l%i :ic>* care +ai+)ace con$i'iile $e !ai +%+* e+e o c%r-( Ba%++*
e8,ri!aa $e"

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Di)%zia ,ro,ri%/zi+( +e )ace 1nr/o a!o+)er( $e o8igen# O8i$%l )or!a 3SiBa4 1nl(%r(
0a,orizarea i!,%ri('ilor $e ,e +%,ra)a'a +ilici%l%i#
La )or!area .onc'i%nilor ,/n concenra'ia acce,orilor3$onorilor4 ,e +%,ra)a'a
+e!icon$%cor%l%i re-%ie +( )ie !ai !are $ec2 concenra'ia $onorilor3acce,orilor4 !aerial%l%i
ini'ial#
Honc'i%nea ,/n +e )or!eaz( la a$2nci!ea 8
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j a / concenra'ia i!,%ri('ilor $e i, / ,* care rece ,rin $i)%zie 1n !aerial%l ini'ial
c% concenra'ia $onorilor N
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Pro-le!ele $e -az( 1n ehnologia )or!(rii .onc'i%nilor ,/n +%n" calc%l%l a$2nci!ii .onc'i%nii
,/n 38
.
4 1n $e,en$en'( $e i!,%l ,roce+%l%i $e $i)%zie &i e!,era%r(A calc%l%l i!,%l%i nece+ar
,enr% o-'inerea an%!ielor a$2nci!i ale .onc'i%nii ,/n 1n $e,en$en'( $e e!,era%ra ,roce+%l%i#
Toae ace+e calc%le ,o )i )(c%e )olo+in$ ec%a'iile 374 &i 3G4#
Construcia instalaiei:
:ig# ;# Sche!a ,rinci,ial( a in+ala'iei ,enr% realizarea $i)%ziei
$in +%r+a +oli$( $e i!,%ri('i"
; @ c%,or%l elecricA < @ reacor $e c%ar'A 6 @ %- ,enr% inro$# gaz%l%i 1n reacorA C @ +%,or%l
,enr% ,lacheeA 7 @ ,lacheeleA E @ -aro!er%A F @ -ar-oerA G @ ,o!,a !ecanicaA I @
!ano!er%A ;? @ -%elie $e azoA J;*J<*J6 @ 0enile#
#i$a te%noogic&:
;#P%ri)ica! c% ol%en ,lac%a #
<#A&eza! ,lacheele o8i$ae ,e +%,or &i inro$%ce! +%,or%l 1n reacor%l ,e 6? !in la G7? $e
gra$e#
6#P%ne! ,laca in H: ,e C !in#
C#S,(l(! ,laca in a,a $i+ilaa#
7#Coro$o! .%!ae $e ,lachea < !in%e#A,oi +,(l(! ,lachea#
E#La o+cilo+co, o-+er0a! regi%nile n* , +i n,#
Mersu ucrarii:
D%,( ce a! %r!a ,a&ii ehnologici# Veri)ica! caraceri+icile ,lacheei#
Caraceri+ica I)!*+,
pn .onc'i%ne"
Concu'i: La e)ec%area ace+ei l%cr(ri $e la-oraor a! +%$ia +i a! in$e,lini !eo$a $i)%ziei*
,enr% o-'inerea .onc'i%nilor ,/n # Pri0in$ gra)icele caraceri+icelor 0ol/a!,erice a .onc'i%nii
,ri!ie o-+er0(! o !ic( $e0iere $e caraceri+ica real(* $in ca%za con$i'iilor $e la-oraor#
Caraceri+ica I)!*+,
Honc'i%ne nn 3con# chi!ic4
Caraceri+ica I)!*+,
pp .onc'i%ne"