Cercetri privind realizarea i caracterizarea straturilor subiri (nanometrice)

cu aplicaii n tehnologia materialelor avansate

Researches for achievement and characterization of (nanometric) thin films

with application in advanced materials technology

Conductor tiinific Doctorand,

Prof. univ. dr. ing. Cornel SAMOIL Ing. Alice-Ortansa MATEESCU

Rezumatul tezei

Lucrarea are ca scop realizarea de straturi subiri tribologice cu structur nanometric i

compoziie complex (ternar: W-C-N, W-C-Ti; cuaternar: W-C-Ti-N, W-C-Ti-B; pentanar:
W-C-Ti-B-N, W-C-Ti-B-S i sixnar: W-C-Ti-B-S-N), utiliznd pulverizarea magnetron de tip
standard sau reactiv n CC i RF, precum i caracterizarea morfologic, structural,
compozitional i funcional (mecanic, tribologic i anticoroziv) a probelor realizate pe
siliciu (lefuit pe o fa) i pe oel inox 304 (lefuit pe ambel fee), folosind: Microscopia de
For Atomic, Spectrometria de Retrompratiere Rutherford i metodele: amprentrii/
indentrii, zgrierii i tribometrului (folosind tribometrul Bila/ Pin pe disc).
Alegerea materialelor de depunere s-a realizat n acord cu cerinele celor 5 brevete de
invenie ale autoarei tezei, acordate de OSIM (n 2013 - 2014). Astfel, pentru realizarea
acoperirilor monostrat i multistrat s-au utilizat inte de pulverizare din Ti, WC, TiB 2 (folosind
pulverizarea magnetron n CC) i WS2 (depus prin pulverizare magnetron n RF).
Rezultatele obinute (susinute de 7 articole publicate n reviste cotate ISI i 8 lucrri
prezentate la conferine internaionale) confirm alegerea corect a metodei de depunere,
precum i a combinaiei de materiale utilizate i deschid calea unei noi direcii de C-D-I n
domeniul acoperirilor tribologice
Abstract

The work has as goal the achievement of tribological thin films with nanometric
structure and complex composition (ternary: W-C-N, W-C-Ti; cuaternary: W-C-Ti-N, W-C-Ti-
B; pentnary: W-C-Ti-B-N, W-C-Ti-B-S and sixnary: W-C-Ti-B-S-N composition), using
standard and reactive magnetron sputtering in DC and RF, as also morphological, structural,
compositional and functional (mechanical, tribological and anticorrosion) characterization of
the samples deposited on (one side polished) silica and (both sides polished) 304 stainless steel,
by: Atomic Force Microscopy (AFM), Rutherford Backscattering Spectrometry, Hardness
Indentation Test, Scratch Test and Ball/Pin on disk tribometer method.
Selection of the deposition materials was made in accordance with the 5 patents
awarded to the author of the thesis by the Romanian State Office for Inventions and
Trademarks - OSIM (in 2013 - 2014). In this idea, sputtering targets of Ti, WC, TiB2 (deposited
by DC magnetron sputtering) and WS2 (deposited by RF magnetron sputtering) were used for
single and multilayer deposition.
The results (sustained by 7 ISI publications and 8 presentations at international
conferences) confirm the proper selection of the deposition method as also of the materials
combination and open the path of a new R&D&I direction in the field of tribological coatings